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    • 1. 发明授权
    • Photodetector having first and second antenna areas with patterns having different cycle intervals
    • 光检测器具有第一和第二天线区域,其图案具有不同的周期间隔
    • US07557336B2
    • 2009-07-07
    • US11798040
    • 2007-05-09
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • H01L31/00
    • H01L31/02162
    • When light is made incident into antenna layers 11a, 11b, and 11c of a photodetector 1, specific wavelength components of light contained in the incident light combine with surface plasmons of the antenna layers 11a, 11b, and 11c, and surface plasmon resonance occurs. Thereby, near-field lights are outputted from through-holes 13 of the antenna layers 11a, 11b, and 11c. The near-field light outputted from each through-hole 13 reaches a light absorbing layer 4 via light receiving surfaces 4a, 4b, and 4c. The light absorbing layer 4 generates a charge of an amount according to the amount of received light. Since cycle intervals Λa, Λb, and Λc of convex portions 12 in the antenna layers 11a, 11b, and 11c are different from each other, the wavelength component of light that combines with a surface plasmon differs in each of the antenna layers 11a, 11b, and 11c. Consequently, a plurality of wavelength components of light can be detected.
    • 当光入射到光电检测器1的天线层11a,11b和11c中时,入射光中包含的光的特定波长分量与天线层11a,11b和11c的表面等离子体相结合,并发生表面等离子体共振。 由此,从天线层11a,11b,11c的通孔13输出近场光。 从每个通孔13输出的近场光通过光接收表面4a,4b和4c到达光吸收层4。 光吸收层4产生与接收光量相关的量的电荷。 由于天线层11a,11b和11c中的凸部12的周期间隔Lambda,Lambdab和Lambdac彼此不同,所以在每个天线层11a,11b中与表面等离子体的组合的光的波长成分不同 ,和11c。 因此,可以检测多个波长分量的光。
    • 2. 发明申请
    • Photodetector
    • 光电检测器
    • US20070262239A1
    • 2007-11-15
    • US11798040
    • 2007-05-09
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • Minoru NiigakiToru HirohataHiroyasu FujiwaraAkira Higuchi
    • H01L27/00
    • H01L31/02162
    • When light is made incident into antenna layers 11a, 11b, and 11c of a photodetector 1, specific wavelength components of light contained in the incident light combine with surface plasmons of the antenna layers 11a, 11b, and 11c, and surface plasmon resonance occurs. Thereby, near-field lights are outputted from through-holes 13 of the antenna layers 11a, 11b, and 11c. The near-field light outputted from each through-hole 13 reaches a light absorbing layer 4 via light receiving surfaces 4a, 4b, and 4c. The light absorbing layer 4 generates a charge of an amount according to the amount of received light. Since cycle intervals Λa, Λb, and Λc of convex portions 12 in the antenna layers 11a, 11b, and 11c are different from each other, the wavelength component of light that combines with a surface plasmon differs in each of the antenna layers 11a, 11b, and 11c. Consequently, a plurality of wavelength components of light can be detected.
    • 当光入射到光电检测器1的天线层11a,11b和11c中时,入射光中包含的光的特定波长成分与天线层11a,11b和11c的表面等离子体相结合, 并发生表面等离子体共振。 从而,从天线层11a,11b和11c的通孔13输出近场光。 从每个通孔13输出的近场光通过光接收表面4a,4b和4c到达光吸收层4。 光吸收层4产生与接收光量相关的量的电荷。 由于天线层11a,11b和11c中的凸部12的周期间隔Lambda,Lambdab和Lambdac彼此不同,所以与各表面等离子体的组合的光的波长分量在每个天线层中不同 11 a,11 b,11 c。 因此,可以检测多个波长分量的光。
    • 4. 发明授权
    • Photoemitter electron tube and photodetector
    • Photoemitter电子管和光电探测器
    • US5591986A
    • 1997-01-07
    • US299664
    • 1994-09-02
    • Minoru NiigakiToru HirohataTuneo IharaMasami Yamada
    • Minoru NiigakiToru HirohataTuneo IharaMasami Yamada
    • H01J1/34H01L27/14H01J31/00H01L29/49
    • H01J1/34H01J2201/3423
    • The present invention provides a photoemission device excellent in quantum efficiency of photoelectric conversion, a high-sensitive electron tube employing it, and a high-sensitive photodetecting apparatus. A photoemission device of the present invention is arranged to have a photon absorbing layer for absorbing incident photons to excite photoelectrons, an insulator layer layered on one surface of the photon absorbing layer, a lead electrode layered on the insulator layer, and a contact formed on the other surface of the photon absorbing layer to apply a predetermined polarity voltage between the lead electrode and the other surface of the photon absorbing layer, whereby the photoelectrons excited by the incident photons entering the photon absorbing layer and moving toward the one side are made to be emitted by an electric field formed between the lead electrode and the one surface by the predetermined polarity voltage.
    • 本发明提供了一种光电转换量子效率优异的使用它的高灵敏度电子管和高灵敏度光电检测装置的光电发射装置。 本发明的发光装置被配置为具有用于吸收入射光子以激发光电子的光子吸收层,层叠在光子吸收层的一个表面上的绝缘体层,层叠在绝缘体层上的引线电极和形成在 光子吸收层的另一个表面,以在引线电极和光子吸收层的另一个表面之间施加预定的极性电压,由此进入光子吸收层并朝向一侧移动的入射光子激发的光电子被制成 由形成在引线电极和一个表面之间的电场发射预定的极性电压。
    • 6. 发明授权
    • Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
    • 发光体,电子束检测器,扫描电子显微镜和质量分析装置
    • US07910895B2
    • 2011-03-22
    • US11547807
    • 2005-04-07
    • Shoichi UchiyamaYasufumi TakagiMinoru NiigakiMinoru KondoItaru Mizuno
    • Shoichi UchiyamaYasufumi TakagiMinoru NiigakiMinoru KondoItaru Mizuno
    • H01J49/02
    • H01J37/244H01J49/025H01J2237/2443H01L33/502
    • A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body 10 according to the present invention, when fluorescence is emitted by a nitride semiconductor layer 14 formed on one face 12a of a substrate 12 in response to incidence of electrons, at least some of this fluorescence is transmitted through this substrate 12, whereby that fluorescence is emitted from the other face 12b of the substrate. The response speed of this fluorescence is not more than μsec order. Also, the intensity of emission of this fluorescence is almost identical to that of a conventional P47 phosphor. Specifically, with this light-emitting body 10, a response speed and light emission intensity are obtained that are fully satisfactory for application to a scanning electron microscope or mass spectroscope. In addition, a cap layer 16 contributes to improvement in the persistence rate of light emission in the nitride semiconductor layer 14, so, with this light-emitting body 10, not only high-speed response and high light emission intensity are obtained, but also an excellent persistence rate.
    • 提供了快速响应和高发光强度的发光体,以及使用该发光体的电子束检测器,扫描电子显微镜和质谱仪。 在根据本发明的发光体10中,当响应于电子的入射而形成在衬底12的一个面12a上的氮化物半导体层14发射荧光时,该荧光中的至少一部分透过该衬底 从而从基板的另一面12b发射荧光。 该荧光的响应速度不超过μsec次。 此外,该荧光的发射强度与常规P47荧光体的发射强度几乎相同。 具体地说,利用该发光体10,可以获得对扫描型电子显微镜或质谱仪应用完全满意的响应速度和发光强度。 此外,盖层16有助于提高氮化物半导体层14中的发光持续率,所以利用该发光体10,不仅获得高速响应和高发光强度,而且 持久性很好。
    • 8. 发明申请
    • PHOTOCATHODE
    • 光刻胶
    • US20090032797A1
    • 2009-02-05
    • US12177914
    • 2008-07-23
    • Toru HirohataMinoru Niigaki
    • Toru HirohataMinoru Niigaki
    • H01L29/06
    • H01J1/34H01J40/06
    • When to-be-detected light is made incident from a support substrate 2 side of a photocathode E1, a light absorbing layer 3 absorbs this to-be-detected light and produces photoelectrons. However, depending on the thickness and the like of the light absorbing layer 3, the to-be-detected light can be transmitted through the light absorbing layer 3 without being sufficiently absorbed by the light absorbing layer 3. The to-be-detected light transmitted through the light absorbing layer 3 reaches an electron emitting layer 4. A part of the to-be-detected light that has reached the electron emitting layer 4 proceeds toward a through-hole 5a of a contact layer 5. Since the length d1 of a diagonal line of the through-hole 5a is shorter than the wavelength of the to-be-detected light, the to-be-detected light can be suppressed from passing through the through-hole 5a and being emitted to the exterior. The to-be-detected light suppressed from being externally emitted is reflected on the exposed surface of the electron emitting layer 4 and is again made incident into the light absorbing layer 3 to be absorbed. Thereby, a photocathode excellent in light detection sensitivity is realized.
    • 当从光电阴极E1的支撑基板2侧入射待检测的光时,光吸收层3吸收该被检测光并产生光电子。 然而,根据光吸收层3的厚度等,待检测光可以透过光吸收层3而不被光吸收层3充分吸收。待检测的光 通过光吸收层3透射的光到达电子发射层4.到达电子发射层4的被检测光的一部分朝向接触层5的通孔5a前进。由于长度d1 通孔5a的对角线比待检测光的波长短,可以抑制被检测光穿过通孔5a并被发射到外部。 被外部发射抑制的被检测光被反射在电子发射层4的暴露表面上,并再次入射到光吸收层3中以被吸收。 由此,实现了光检测灵敏度优异的光电阴极。
    • 9. 发明申请
    • Luminous Body, Electron Beam Detector Using the Same, Scanning Electron Microscope, and Mass Analysis Device
    • 发光体,使用其的电子束检测器,扫描电子显微镜和质量分析装置
    • US20080116368A1
    • 2008-05-22
    • US11547807
    • 2005-04-07
    • Shoichi UchiyamaYasufumi TakagiMinoru NiigakiMinoru KondoItaru Mizuno
    • Shoichi UchiyamaYasufumi TakagiMinoru NiigakiMinoru KondoItaru Mizuno
    • B01D59/44G01N23/225H01L29/12
    • H01J37/244H01J49/025H01J2237/2443H01L33/502
    • A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting body 10 according to the present invention, when fluorescence is emitted by a nitride semiconductor layer 14 formed on one face 12a of a substrate 12 in response to incidence of electrons, at least some of this fluorescence is transmitted through this substrate 12, whereby that fluorescence is emitted from the other face 12b of the substrate. The response speed of this fluorescence is not more than μsec order. Also, the intensity of emission of this fluorescence is almost identical to that of a conventional P47 phosphor. Specifically, with this light-emitting body 10, a response speed and light emission intensity are obtained that are fully satisfactory for application to a scanning electron microscope or mass spectroscope. In addition, a cap layer 16 contributes to improvement in the persistence rate of light emission in the nitride semiconductor layer 14, so, with this light-emitting body 10, not only high-speed response and high light emission intensity are obtained, but also an excellent persistence rate.
    • 提供了快速响应和高发光强度的发光体,以及使用该发光体的电子束检测器,扫描电子显微镜和质谱仪。 在根据本发明的发光体10中,当响应于电子的入射而形成在衬底12的一个面12a上的氮化物半导体层14发射荧光时,通过该荧光透射中的至少一些荧光 衬底12,从而荧光从衬底的另一个面12bb发射。 该荧光的响应速度不超过音乐顺序。 此外,该荧光的发射强度与常规P47荧光体的发射强度几乎相同。 具体地说,利用该发光体10,可以获得对扫描型电子显微镜或质谱仪应用完全满意的响应速度和发光强度。 此外,盖层16有助于提高氮化物半导体层14中的发光持续率,所以利用该发光体10,不仅获得高速响应和高发光强度,而且 持久性很好。