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    • 3. 发明申请
    • Pellicle and novel fluoropolymer
    • 薄膜和新型含氟聚合物
    • US20060240222A1
    • 2006-10-26
    • US11446242
    • 2006-06-05
    • Ikuo MatsukuraHiromasa YamamotoYuichiro IshibashiShinji OkadaNaoko Shirota
    • Ikuo MatsukuraHiromasa YamamotoYuichiro IshibashiShinji OkadaNaoko Shirota
    • B32B3/10
    • G03F1/62C08G65/007C08G65/226G03F7/0046Y10T428/24331Y10T428/3154
    • It is to provide a useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material. A pellicle wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following unit (1). The unit (1) is a unit containing a fluorine atom, wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group. For example, a unit represented by the following formula (A1) (wherein n is 1 or 2, RF1 is —F or —CF3, and RF2 is —F or a C1-5 perfluoroalkyl group):
    • 本发明提供一种对短波长光(具有193nm的照射波长的ArF准分子激光和157nm的照射波长的F2准分子激光)的透明性和耐久性优异的氟系聚合物, 防护薄膜材料。 防护薄膜组件,其中用于防护薄膜和/或粘合剂的聚合物(I)是基本上包含以下单元(1)的聚合物。 单元(1)是包含氟原子的单元,其中形成聚合物主链的链包含碳原子和醚氧原子,形成主链的至少一个碳原子是形成环状基团的碳原子,并且 形成主链的至少一个醚性氧原子是不形成环状基团的氧原子。 例如,由下式(A1)(其中n为1或2,R F1)表示的单元为-F或-CF 3 3,R“ F 2是-F或C 1-5〜5全氟烷基):
    • 4. 发明授权
    • Process for preparing alkyladamantyl esters and compositions
    • 烷基金刚烷酯和组合物的制备方法
    • US07026504B2
    • 2006-04-11
    • US10470126
    • 2001-01-26
    • Masao YamaguchiHiromasa YamamotoHideki KikuchiYoshihiro Hirota
    • Masao YamaguchiHiromasa YamamotoHideki KikuchiYoshihiro Hirota
    • C07C69/52
    • C07C67/60C07C2603/74G03F7/0397C07C69/54C07C69/013
    • There is provided a method for obtaining a high-purity alkyladamantyl ester from an alkyladamantyl ester composition containing a large quantity of alkyladamantyl halide obtained by, for example, alkylating raw material 2-adamantanone obtained through oxidation of adamantane by use of an organic metal reagent and then causing an acid halide to react with the resulting product, efficiently by a simple process. To an alkyladamantyl ester composition containing an alkyladamantyl halide such as 2-chloro-2-methyladamantane in an amount of larger than 0.5 parts by weight based on 100 parts by weight of alkyladamantyl ester such as 2-methyl-2-adamantyl methacrylate, a mixed solution of, for example, methanol and a sodium hydroxide aqueous solution is added. By bringing the alkali compound into contact with the alkyladamantyl halide in a homogeneous system so as to convert the halide into a compound which produces no acid when heated, the amount of the alkyladamantyl halide in the composition is reduced to 0.5 parts by weight or less based on 100 parts by weight of the alkyladamantyl ester, after which distillation is carried out.
    • 提供了一种从含有大量烷基金刚烷基卤化物的烷基金刚烷基酯组合物中获得高纯度烷基金刚烷基酯的方法,所述烷基金刚烷基酯通过使用有机金属试剂将金刚烷氧化而得到的原料2-金刚烷烷化, 然后通过简单的方法使酰基卤与所得产物反应。 对于基于100重量份的烷基金刚烷基酯如甲基丙烯酸2-甲基-2-金刚烷基酯,含有烷基金刚烷基卤化物如2-氯-2-甲基金刚烷的量大于0.5重量份的烷基金刚烷基酯组合物,混合 加入例如甲醇和氢氧化钠水溶液的溶液。 通过使碱性化合物与均匀体系中的烷基金刚烷基卤化物接触,以便将卤化物转化为加热时不产生酸的化合物,组合物中烷基金刚烷基卤化物的量降低至基于0.5重量份或更少 在100重量份的烷基金刚烷基酯上进行蒸馏。