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    • 8. 发明授权
    • Surface mount and flip chip technology for total integrated circuit
isolation
    • 表面贴装和倒装芯片技术,用于全集成电路隔离
    • US5757081A
    • 1998-05-26
    • US603512
    • 1996-02-20
    • Mike F. ChangKing OwyangFwu-Iuan HshiehYueh-Se HoJowei Dun
    • Mike F. ChangKing OwyangFwu-Iuan HshiehYueh-Se HoJowei Dun
    • H01L23/367H01L23/373H01L23/48
    • H01L23/3672H01L23/3738H01L2224/16H01L2224/73253H01L2924/01078H01L2924/01079H01L2924/1305H01L2924/13055H01L2924/14Y10S148/135Y10S438/928Y10S438/977
    • An integrated circuit chip has full trench dielectric isolation of each portion of the chip. Initially the chip substrate is of conventional thickness and has semiconductor devices formed in it. After etching trenches in the substrate and filling them with dielectric material, a heat sink cap is attached to the passivation layer on the substrate front side surface. The substrate backside surface is removed (by grinding or CMP) to expose the bottom portion of the trenches. This fully isolates each portion of the die and eliminates mechanical stresses at the trench bottoms. Thereafter drain or collector electrical contacts are provided on the substrate backside surface. In a flip chip version, frontside electrical contacts extend through the frontside passivation layer to the heat sink cap. In a surface mount version, vias are etched through the substrate, with surface mount posts formed on the vias, to contact the frontside electrical contacts and provide all electrical contacts on the substrate backside surface. The wafer is then scribed into die in both versions without need for further packaging.
    • 集成电路芯片具有芯片每个部分的全沟槽绝缘隔离。 最初,芯片基板具有常规的厚度并且在其中形成半导体器件。 在蚀刻衬底中的沟槽并用电介质材料填充沟槽之后,将散热器盖附着到衬底前侧表面上的钝化层。 通过研磨或CMP去除衬底背面以露出沟槽的底部。 这完全隔离了模具的每个部分,并消除了沟槽底部的机械应力。 此后,漏极或集电极电触点设置在基板背面上。 在倒装芯片版本中,前端电触点延伸穿过前侧钝化层到散热器盖。 在表面安装型式中,通孔穿过衬底被蚀刻,表面安装柱形成在通孔上,以接触前侧电触点并提供衬底背面上的所有电触头。 然后将晶片刻成两个版本的模具,无需进一步包装。