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1. 发明授权

US08082741B2 Integral facet cryopump, water vapor pump, or high vacuum pump 有权
标题翻译：积分小面积低温泵，水蒸气泵或高真空泵
公开(公告)号：US08082741B2
公开(公告)日：2011-12-27
申请号：US11803420
申请日：2007-05-15
申请人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
发明人： Allen J. Bartlett , Joseph A. Kraus , Michael J. Eacobacci, Jr.
IPC分类号： F17C13/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

2. 发明授权

US10760562B2 Pressure burst free high capacity cryopump 有权
公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

3. 发明授权

US09266038B2 Cryopump 有权
公开(公告)号：US09266038B2
公开(公告)日：2016-02-23
申请号：US13983973
申请日：2012-02-08
申请人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
发明人： Sergei Syssoev , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells , Michael J. Eacobacci, Jr.
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.

4. 发明授权

US09266039B2 Cryopump with controlled hydrogen gas release 有权
标题翻译：冷冻水控制氢气释放
公开(公告)号：US09266039B2
公开(公告)日：2016-02-23
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, Jr. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B60H1/00 , B01D8/00 , F04B37/08 , F04B37/14
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

5. 发明授权

US5906102A Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve 失效
标题翻译：带燃气加热排气阀的冷冻库和排气阀表面加热方法
公开(公告)号：US5906102A
公开(公告)日：1999-05-25
申请号：US631532
申请日：1996-04-12
申请人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
发明人： Allen J. Bartlett , Michael J. Eacobacci, Jr. , Joseph P. Johnson
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08
摘要： A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing pump enabling the cryopump chamber to be roughed. An exhaust valve is coupled to the cryopump chamber for exhausting gases from the cryopump chamber during purge. A delivery valve is coupled to the exhaust valve for delivering a second quantity of warm gas directly onto surfaces of the exhaust valve for warming the surfaces of the exhaust valve.
摘要翻译：具有低温泵室的低温泵包括连接到低温泵室的吹扫气阀，用于向低温泵室提供第一量的暖气，以便在再生期间吹扫低温泵室。粗抽阀将低温泵室耦合到粗抽泵，使得低温泵室能够被粗糙化。排气阀连接到低温泵室，以在吹扫期间从低温泵室排出气体。输送阀联接到排气阀，用于将第二数量的暖气直接输送到排气门的表面上，以加热排气阀的表面。

6. 发明授权

US5819545A Cryopump with selective condensation and defrost 失效
标题翻译：冷冻和选择性冷凝和除霜
公开(公告)号：US5819545A
公开(公告)日：1998-10-13
申请号：US978463
申请日：1997-11-25
申请人： Michael J. Eacobacci, Jr. , Stephen R. Matte
发明人： Michael J. Eacobacci, Jr. , Stephen R. Matte
IPC分类号： F04B37/08 , F04B37/16 , B01D8/00
CPC分类号： F04B37/085 , Y10S62/921
摘要： The cryopanel of a cryopump can be preferentially defrosted to remove an acid-forming or toxic gas while leaving a second gas substantially condensed upon the cryopanel thereby limiting interaction between the vapor phases of the two gases. The cryopanel is warmed to a temperature within a selective defrost range at which the first gas selectively sublimates from the cryopanel. The temperature of the cryopanel is then maintained at a temperature within this range until the cryopanel is substantially cleared of the first gas leaving the second gas substantially undisturbed as a condensate upon the cryopanel. In a preferred embodiment, the cryopanel is maintained at about 50 to 85K during standard operation before being defrosted.
摘要翻译：低温泵的低温板可以优先除霜以除去酸形成或有毒气体，同时留下基本上冷凝在低温板上的第二气体，从而限制两种气体的气相之间的相互作用。冷冻板被加热到选择性除霜范围内的温度，在该选择性除霜范围内第一气体选择性地从冷冻板升华。然后将冷冻板的温度保持在该范围内的温度，直到冷冻板基本上被第一气体排出，离开第二气体基本上不受干扰，作为冷冻板上的冷凝物。在优选的实施方案中，在除霜之前的标准操作期间，冷冻板保持在约50至85K。

7. 发明授权

US06510697B2 System and method for recovering from a power failure in a cryopump 有权
标题翻译：用于从低温泵中的电源故障中恢复的系统和方法
公开(公告)号：US06510697B2
公开(公告)日：2003-01-28
申请号：US09878160
申请日：2001-06-07
申请人： Maureen C. Buonpane , Philip D. Acomb , Brian D. Foley , Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Robert M. Patterson
发明人： Maureen C. Buonpane , Philip D. Acomb , Brian D. Foley , Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Robert M. Patterson
IPC分类号： B01D800
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during recovery to condense gases in the cryopump. A startup process is initiated where the cryopump was in a startup process before the power failure and present conditions of the cryopump indicate that the cryopump is sufficiently empty or clean. If the operating state and present conditions indicate that a corrosive or hazardous liquid remains in the cryopump, a regeneration process is initiated. If the cryopump was in a shutdown process before the power failure, the cryopanel of the cryopump is refrigerated to a temperature at which gases sublimate from the cryopanel. The temperature of the cryopanel is then maintained until the gases are removed. A refrigerator having a displacer with variable speed and heaters may be used to control the temperature of the cryopanel. When the cryopump is sufficiently empty, the cryopump is turned off.
摘要翻译：在电源故障恢复中，确定电源故障之前的操作状态和低温泵的当前状况以启动再生或启动过程。在电源故障前冰箱运行的地方，在回收期间打开冷凝器中的气体。开始启动过程，在停电之前，低温泵处于起动过程中，低温泵的现状表明低温泵足够空或干净。如果操作状态和现状表明低温泵中存在腐蚀性或危险性的液体，则会启动再生过程。如果低温泵在电源故障之前处于关闭过程中，则将低温泵的冷冻板冷藏至气体从冷冻板升华的温度。然后保持冷冻板的温度，直到气体被去除。具有可变速度的置换器和加热器的冰箱可用于控制冷冻板的温度。当低温泵足够空时，关闭低温泵。

8. 发明授权

US5775109A Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor 失效
标题翻译：多个低温冰箱由普通压缩机提供冷却时间的增强
公开(公告)号：US5775109A
公开(公告)日：1998-07-07
申请号：US778035
申请日：1997-01-02
申请人： Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Martin L. Stein , Robert E. Khederian
发明人： Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Martin L. Stein , Robert E. Khederian
IPC分类号： B01D8/00 , F25B9/10 , F25B9/14 , F25B9/00
CPC分类号： B01D8/00 , F25B9/10 , F25B9/14
摘要： A method for regulating the cooldown of multiple cryogenic refrigerators supplied with compressed refrigerant from a common compressor includes the following steps. The cooldown of the refrigerators is monitored. The cooldown of at least one refrigerator is then governed to regulate the gas flow distributed from the compressor to each of the refrigerators to enhance the cooldown of an individual refrigerator. Governing a refrigerator to achieve the objectives of this method can be achieved by various processes. These processes include supplying heat to the refrigerator, slowing the speed of the displacer in the refrigerator, halting the motion of the displacer, and profiling the speed of the displacer as a function of the first and second-stage temperatures. A system for performing the above-described method includes a compressor; a plurality of refrigerators, each receiving compressed gas from the compressor; and a network terminal programmed to govern the cooldown of at least one refrigerator to accelerate the cooldown of another refrigerator.
摘要翻译：用于调节从普通压缩机供应压缩制冷剂的多个低温冰箱的冷却时间的方法包括以下步骤。监视冰箱的冷却时间。然后控制至少一个冰箱的冷却时间以调节从压缩机分配到每个冰箱的气体流量，以增强单个冰箱的冷却时间。管理冰箱实现这一方法的目标可以通过各种工艺实现。这些过程包括向冰箱提供热量，减慢冰箱中的置换器的速度，停止置换器的运动，以及根据第一和第二阶段温度来调整置换器的速度。用于执行上述方法的系统包括压缩机; 多个冰箱，各自从压缩机接收压缩气体; 以及被编程为控制至少一个冰箱的冷却时间以加速另一个冰箱的冷却时间的网络终端。

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