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1. 发明授权

US10760562B2 Pressure burst free high capacity cryopump 有权
公开(公告)号：US10760562B2
公开(公告)日：2020-09-01
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci, Jr. , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： F04B37/08 , B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.

2. 发明申请

US20080168778A1 Pressure burst free high capacity cryopump 审中-公开
标题翻译：无爆破高容量低压泵
公开(公告)号：US20080168778A1
公开(公告)日：2008-07-17
申请号：US12008985
申请日：2008-01-15
申请人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
发明人： Allen J. Bartlett , Michael A. Driscoll , Michael J. Eacobacci , William L. Johnson , Robert P. Sullivan , Sergei Syssoev , Mark A. Stira , John J. Casello
IPC分类号： B01D8/00
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译：低温泵包括至少具有第一和第二阶段的冰箱。辐射屏蔽围绕第二级并与第一级热接触。辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。挡板设置在排水孔的上方。挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。挡板引导气体冷凝在主冷凝表面上。

3. 发明授权

US07194867B2 Integrated rough/purge/vent (RPV) valve 有权
标题翻译：集成粗/净化/排气（RPV）阀
公开(公告)号：US07194867B2
公开(公告)日：2007-03-27
申请号：US10804842
申请日：2004-03-19
申请人： Allen J. Bartlett , Gary S. Ash , Brian Thompson , Mark A. Stira
发明人： Allen J. Bartlett , Gary S. Ash , Brian Thompson , Mark A. Stira
IPC分类号： B01D8/00
CPC分类号： F04B37/08
摘要： A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.
摘要翻译：单个管道阀组件提供集成的低温泵，其具有将组件连接到具有内部管道和外部管道的同轴连接的低温泵的净化阀口。加压气体界面通过内部管道将加压气体源连接到低温泵。一个粗糙的阀口可以将组件的外部管道连接到一个粗糙的真空泵上; 并且安全阀口可以将组件的外部管道连接到排气叠层。

4. 发明授权

US5862671A Purge and rough cryopump regeneration process, cryopump and controller 失效
标题翻译：吹扫和粗略的低温泵再生过程，低温泵和控制器
公开(公告)号：US5862671A
公开(公告)日：1999-01-26
申请号：US848973
申请日：1997-05-02
申请人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
发明人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
IPC分类号： F04B37/16 , F04B37/08 , B01D8/00
CPC分类号： F04B37/085 , Y10S417/901
摘要： A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
摘要翻译：在清洗过程中，通过对低温泵进行粗加工来再生低温泵。首先在高温模式下进行吹扫和粗加工，然后在较低的环境温度模式下进行。在较低温度模式下，低温冰箱打开。如果系统在较低温度下进行粗加工后未能进行粗糙试验，则会在粗阀打开时重新进行。

5. 发明授权

US4884410A Purge/charge manifold and method for cryogenic systems 失效
标题翻译：吹扫/电荷歧管和低温系统的方法
公开(公告)号：US4884410A
公开(公告)日：1989-12-05
申请号：US234913
申请日：1988-08-22
申请人： Steven H. Bell , Mark A. Stira , James Blotzer
发明人： Steven H. Bell , Mark A. Stira , James Blotzer
IPC分类号： F25B45/00
CPC分类号： F25B45/00 , F25B2345/001 , F25B2345/002
摘要： A T-shaped manifold employs a single multiway control valve for purging and charging a cryogenic system of interest. The single multiway control valve is positioned at the intersection of a crossbar and perpendicular elongate member. One end of the crossbar is associated with a source of working gas. the opposite end of the crossbar provides a purge or check valve outlet. One end of the elongate member is connected to the multiway control valve and an opposite end is coupled by a VCO fitting to the cryogenic system of interest. At one setting, the single multiway control valve provides working gas to the system through the one end of the crossbar and elongate member. At a second setting, the multiway control valve allows gas to be vented from the system to ambient through the elongate member and the purge valve outlet. An in-line pressure gauge connected to the elongate member provides an indication of ingoing flow as well as outgoing flow of gas during respective charging and purging of the system. An in-line filter of the elongate member prevents particulate contamination of the flowing gases.
摘要翻译： T形歧管采用单一的多路控制阀来净化和充电一个感兴趣的低温系统。单个多路控制阀位于横杆和垂直细长构件的相交处。横梁的一端与工作气体源相关联。横杆的另一端提供吹扫或止回阀出口。细长构件的一端连接到多路控制阀，另一端通过VCO接头耦合到感兴趣的低温系统。在一个设置中，单个多路控制阀通过横杆和细长构件的一端向系统提供工作气体。在第二设置中，多路控制阀允许气体通过细长构件和净化阀出口从系统排出到环境。连接到细长构件的在线压力表在系统的相应的充电和吹扫期间提供进入流动以及气体的流出的指示。细长构件的在线过滤器防止流动气体的颗粒污染。

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