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1. 发明申请

US20060002022A1 Magnetic head for hard disk drive having improved magnetic shield for MR sensor 失效
标题翻译：用于硬盘驱动器的磁头具有改进的MR传感器磁屏蔽
公开(公告)号：US20060002022A1
公开(公告)日：2006-01-05
申请号：US10883141
申请日：2004-06-30
申请人： Michael Feldbaum , John Kim , Murali Ramasubramanian , Howard Zolla
发明人： Michael Feldbaum , John Kim , Murali Ramasubramanian , Howard Zolla
IPC分类号： G11B5/17 , G11B5/147 , G11B5/127 , G11B5/33 , H04R31/00
CPC分类号： G11B5/127 , G11B5/3163 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A first magnetic shield layer of the read head sensor is deposited upon a slider substrate surface. A patterned photoresist is then photolithographically fabricated upon the first magnetic shield layer with openings that are formed alongside the location at which the read sensor will be fabricated. An ion milling step is performed to create pockets within the surface of the magnetic shield layer at the location of the openings in the photoresist layer. The photoresist layer is then removed, and a fill layer is deposited across the surface of the magnetic shield layer in a depth greater than the depth of the pocket. Thereafter, a polishing step is conducted to remove portions of the fill layer down to the surface of the magnetic shield layer. A G1 insulation layer is deposited and a magnetic head sensor element is then fabricated upon the insulation layer.
摘要翻译：读头传感器的第一磁屏蔽层沉积在滑块基板表面上。然后将图案化的光致抗蚀剂光刻地制造在具有开口的第一磁屏蔽层上，该开口沿着读取传感器将被制造的位置形成。执行离子铣削步骤以在光致抗蚀剂层中的开口的位置处在磁屏蔽层的表面内产生凹坑。然后去除光致抗蚀剂层，并且以大于凹穴深度的深度横跨磁屏蔽层的表面沉积填充层。此后，进行抛光步骤以将填充层的部分向下移动到磁屏蔽层的表面。沉积G1绝缘层，然后在绝缘层上制造磁头传感器元件。

2. 发明申请

US20120234314A1 ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
标题翻译：用于加工柔性连续工件的辊对辊反应器
公开(公告)号：US20120234314A1
公开(公告)日：2012-09-20
申请号：US13100201
申请日：2011-05-03
申请人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
发明人： Howard Zolla , Jorge Vasquez , James Freitag , Mustafa Pinarbasi , Robert J. Bailey
IPC分类号： F24C3/00
CPC分类号： H01L31/0322 , H01L31/0749 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.
摘要翻译：本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。反应器包括具有底表面的室，其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起，以提供衬底的均匀加热和冷却。腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。

3. 发明申请

US20100226629A1 ROLL-TO-ROLL PROCESSING AND TOOLS FOR THIN FILM SOLAR CELL MANUFACTURING 审中-公开
标题翻译：薄膜太阳能电池制造的滚动到滚动加工和工具
公开(公告)号：US20100226629A1
公开(公告)日：2010-09-09
申请号：US12721446
申请日：2010-03-10
申请人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
发明人： Bulent M. Basol , Howard Zolla , Mustafa Pinarbasi , Gregory Norsworthy
IPC分类号： F26B3/28 , F24F7/00 , F26B3/34
CPC分类号： F27B9/045 , C23C14/5866 , F27B9/063 , F27B9/20 , F27B9/28 , F27B9/36 , H01L21/67109 , H01L21/67126 , H01L21/6776 , H01L31/0322 , Y02E10/541
摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.
摘要翻译：描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

4. 发明申请

US20060207966A1 Method to improve ability to perform CMP-assisted liftoff for trackwidth definition 失效
标题翻译：提高执行CMP辅助提升能力的方法，用于跟踪宽度定义
公开(公告)号：US20060207966A1
公开(公告)日：2006-09-21
申请号：US11081222
申请日：2005-03-15
申请人： Shawn Hernandez , Wipul Jayasekara , Timothy Minvielle , Benjamin Wang , Howard Zolla
发明人： Shawn Hernandez , Wipul Jayasekara , Timothy Minvielle , Benjamin Wang , Howard Zolla
IPC分类号： B44C1/22
CPC分类号： G11B5/3932 , B82Y10/00 , B82Y25/00 , G11B5/3163 , G11B2005/3996 , Y10T29/26 , Y10T29/49028 , Y10T29/49044 , Y10T29/49052
摘要： A method is presented for fabricating a read head having a read head sensor and a hard bias/lead layer which includes depositing a strip of sensor material in a sensor material region, and depositing strips of fast-milling dielectric material in first and second fast-milling dielectric material regions adjacent to the sensor material region. A protective layer and a layer of masking material is deposited on the strip of sensor material and the strips of fast-milling dielectric material to provide masked areas and exposed areas. A shaping source, such as an ion milling source, is provided which shapes the exposed areas. Hard bias/lead material is then deposited on the regions of sensor material and fast-milling dielectric material to form first and second leads and a cap on each of these regions. The cap of hard bias/lead material and the masking material is then removed from each of these regions.
摘要翻译：提出了一种用于制造具有读取头传感器和硬偏压/引线层的读取头的方法，该读取头传感器和硬偏置/引线层包括在传感器材料区域中沉积传感器材料条，以及在第一和第二快速接头中沉积快速铣削介电材料的条带，研磨与传感器材料区域相邻的介电材料区域。保护层和掩蔽材料层沉积在传感器材料条和快速铣削电介质材料条上，以提供掩蔽区域和暴露区域。提供成形源，例如离子铣削源，其形成暴露的区域。然后将硬偏置/引线材料沉积在传感器材料和快速研磨电介质材料的区域上，以在这些区域中的每一个上形成第一和第二引线和盖。然后从这些区域中的每一个去除硬偏压/铅材料的盖和掩模材料。

5. 发明申请

US20060000795A1 Method for fabricating a pole tip in a magnetic transducer 有权
标题翻译：用于在磁换能器中制造极尖的方法
公开(公告)号：US20060000795A1
公开(公告)日：2006-01-05
申请号：US10882883
申请日：2004-06-30
申请人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
发明人： Tsung Chen , David Druist , Quang Le , Kim Lee , Chun-Ming Wang , Howard Zolla
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49032
摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.
摘要翻译：描述了制造具有梯形极片尖端的磁头的方法。沉积主极片的主体，然后沉积用于极片尖端的一个或多个层。床材料沉积在极片末端材料上。在用于极片尖端的区域上的床材料中形成空隙。空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。除去过量的抗离子碾磨材料和床料。结果是在极片尖端的区域上形成离子铣削掩模。然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。

6. 发明申请

US20050274998A1 Method and apparatus for oxidizing conductive redeposition in TMR sensors 有权
标题翻译：在TMR传感器中氧化导电再沉积的方法和装置
公开(公告)号：US20050274998A1
公开(公告)日：2005-12-15
申请号：US10857364
申请日：2004-05-28
申请人： Robert Fontana , Howard Zolla
发明人： Robert Fontana , Howard Zolla
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39 , G11B5/40 , H01F10/32 , H01F41/30 , H01L31/113 , H01L43/12
CPC分类号： H01F10/3254 , B82Y10/00 , B82Y25/00 , B82Y40/00 , G11B5/012 , G11B5/3133 , G11B5/3163 , G11B5/3903 , G11B5/3906 , G11B5/3909 , G11B5/3967 , G11B5/40 , G11B2005/3996 , H01F41/308 , H01L43/12
摘要： A method and apparatus for oxidizing conductive redeposition in TMR sensors is disclosed. A TMR barrier layer is etched. Redeposition material is oxidized and the barrier is healed using an oxidizing agent selected from the group consisting of ozone and water vapor.
摘要翻译：公开了用于氧化TMR传感器中的导电再沉积的方法和装置。蚀刻TMR阻挡层。再沉积材料被氧化，并且使用选自臭氧和水蒸气的氧化剂使屏障愈合。

7. 发明授权

US07565732B2 Method of manufacturing a write pole 失效
标题翻译：制造磁极的方法
公开(公告)号：US07565732B2
公开(公告)日：2009-07-28
申请号：US10931649
申请日：2004-08-31
申请人： Quang Le , Howard Zolla , Nian-Xiang Sun
发明人： Quang Le , Howard Zolla , Nian-Xiang Sun
IPC分类号： G11B5/187 , G11B5/23
CPC分类号： G11B5/1475 , G11B5/1278 , G11B5/315 , G11B5/3163 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046
摘要： A method of fabricating a magnetic write head, in accordance with one embodiment, includes forming a beveled write pole. A conformal spacer may be formed upon a portion of a flare length proximate a tip of the write pole. A shield layer may also be formed upon the conformal spacer adjacent the flare length proximate the tip of the write pole.
摘要翻译：根据一个实施例的制造磁性写入头的方法包括形成斜面的写入极。可以在靠近写入极的尖端的喇叭长度的一部分上形成共形间隔物。屏蔽层也可以形成在邻近写极的尖端的火炬长度附近的保形间隔物上。

8. 发明申请

US20060256482A1 Method to fabricate side shields for a magnetic sensor 失效
公开(公告)号：US20060256482A1
公开(公告)日：2006-11-16
申请号：US11126508
申请日：2005-05-10
申请人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
发明人： Satoru Araki , Robert Beach , Marie-Claire Cyrille , Wipul Jayasekara , Quang Le , Jui-Lung Li , David Seagle , Howard Zolla
IPC分类号： G11B5/33
CPC分类号： G11B5/3909 , B82Y10/00 , G11B5/112 , G11B5/3169 , G11B5/3906 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046
摘要： A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.

9. 发明申请

US20050147793A1 Method of fabricating a narrow projection such as a write pole extending from a substrate 失效
公开(公告)号：US20050147793A1
公开(公告)日：2005-07-07
申请号：US11053632
申请日：2005-02-08
申请人： James Kruger , Benjamin Wang , Patrick Webb , Howard Zolla
发明人： James Kruger , Benjamin Wang , Patrick Webb , Howard Zolla
IPC分类号： G11B5/187 , G11B5/31 , G11B5/147 , B32B3/00 , B32B7/00
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10S29/016 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052 , Y10T428/1186 , Y10T428/24174 , Y10T428/24479 , Y10T428/2462
摘要： An article is formed as a substrate having a projection extending outwardly therefrom. The article may be a magnetic recording head and the projection a write pole. The projection has a width in a thinnest dimension measured parallel to a substrate surface of no more than about 0.3 micrometers and a height measured perpendicular to the substrate of not less than about 5 times the width. The article is fabricated by forming an overlying structure on the substrate with an edge thereon, depositing a replication layer lying on the edge, depositing a filler onto the edge and the substrate, so that the filler, the replication layer, and the overlying structure in combination comprise a continuous layer on the substrate, selectively removing at least a portion of the replication layer from a free surface of the continuous layer inwardly toward the substrate, to form a defined cavity, and depositing a projection material into the defined cavity to form the projection.

10. 发明申请

US20050068696A1 Apparatus having improved hard bias properties of layers in a magnetoresistive sensor 失效
标题翻译：具有改进的磁阻传感器中的层的硬偏置特性的装置
公开(公告)号：US20050068696A1
公开(公告)日：2005-03-31
申请号：US10674831
申请日：2003-09-30
申请人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
发明人： Phong Chau , James Freitag , Mustafa Pinarbasi , Hua Zeng , Howard Zolla
IPC分类号： G11B5/127 , G11B5/33 , G11B5/39
CPC分类号： G11B5/3932
摘要： An apparatus having improved hard bias properties of layers of a magnetoresistance sensor is disclosed. Properties of the hard bias layer are improved using a seedlayer structure that includes at least a layer of silicon and a layer comprising chromium or chromium molybdenum. Further, benefits are achieved when the seedlayer structure includes a layer of tantalum.
摘要翻译：公开了一种具有改进的磁阻传感器层的硬偏置特性的装置。使用包括至少一层硅层和包含铬或铬钼的层的种子层结构来改善硬偏置层的性质。此外，当种子层结构包括一层钽时，实现了益处。

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