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1. 发明授权

US06790698B2 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译：公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。在一个实例中，使用掩模层作为保护层来蚀刻涂层。在另一示例中，示出了剥离过程。光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。

2. 发明授权

US06271052B1 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译：从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。凹陷蚀刻到牺牲层中。然后在牺牲层上形成多晶硅膜层。随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。最后，去除牺牲层以释放膜。牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。

3. 发明授权

US06836366B1 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

4. 发明授权

US06525880B2 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
申请人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
发明人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

5. 发明授权

US07450862B2 Stray light insensitive detector system and amplifier 有权
标题翻译：杂散光不敏感探测器系统和放大器
公开(公告)号：US07450862B2
公开(公告)日：2008-11-11
申请号：US10392353
申请日：2003-03-19
申请人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
发明人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
IPC分类号： H04B10/06
CPC分类号： H01S5/02216 , H01S5/02248 , H01S5/02284 , H01S5/0683
摘要： A detector system for a fiber optic component is insensitive to stray light. Specifically, the invention comprises a detector chip, which converts received light into an electric signal. A baffle substrate is positioned over the detector chip. This baffle substrate has a transmission port through which an optical signal is transmitted to the detector chip. As a result, light that is not directed to be transmitted through the port is blocked by the baffle substrate. In this way, it rejects stray light that may be present in the hermetic package. A detector substrate is provided on which the detector chip is mounted. This detector substrate preferably comprises electrical traces to which the detector chip is electrically connected. The detector substrate can further comprise bond pads for wire bonding to make electrical connections to the electrical traces.
摘要翻译：用于光纤部件的检测器系统对杂散光不敏感。具体地，本发明包括将接收的光转换成电信号的检测器芯片。挡板基板位于检测器芯片上。该挡板基板具有传输端口，通过该传输端口将光信号传输到检测器芯片。结果，不被透射通过端口的光被挡板衬底阻挡。以这种方式，它拒绝可能存在于密封包装中的杂散光。设置有检测器芯片安装在其上的检测器基板。该检测器基板优选地包括检测器芯片电连接到的电迹线。检测器基板还可以包括用于引线键合的接合焊盘以与电迹线进行电连接。

6. 发明授权

US07177407B2 System and method for integration of softkeys with voice mail 失效
标题翻译：软键与语音邮件集成的系统和方法
公开(公告)号：US07177407B2
公开(公告)日：2007-02-13
申请号：US10006399
申请日：2001-11-30
申请人： Jeffrey Wayne Pence , Minh Van Le
发明人： Jeffrey Wayne Pence , Minh Van Le
IPC分类号： H04M11/00
CPC分类号： H04M1/247
摘要： A mechanism is disclosed for displaying, on a telephone display, actions that are appropriate for a particular context when accessing a voice mail system (VMS). These actions may vary depending on the context of a user's access to the VMS. The actions are identified by text adjacent to buttons (softkeys) on the user's telephone, and are initiated when the user pushes the softkey associated with a particular action. The softkey text corresponding to a particular state of the user's access to the VMS is identified herein as a VMS softkey template. When the VMS and a telephone switch are first initialized, template information is downloaded from the VMS to the switch, and thereafter, when the VMS is accessed by a user via a telephone, runtime instructions passed between the VMS and the switch will direct the switch to display softkey templates corresponding to a particular context within the VMS.
摘要翻译：公开了用于在电话显示器上显示当访问语音邮件系统（VMS）时适合于特定上下文的动作的机制。这些操作可能会根据用户对VMS的访问情况而有所不同。动作由与用户电话上的按钮（软键）相邻的文本标识，并且当用户按下与特定动作相关联的软键时启动。对应于用户对VMS的访问的特定状态的软键文本在此被标识为VMS软键模板。当VMS和电话交换机首次初始化时，模板信息从VMS下载到交换机，之后当用户通过电话访问VMS时，在VMS和交换机之间通过的运行时指令将指示交换机以显示与VMS内的特定上下文相对应的软键模板。

7. 发明授权

US06420206B1 Optical membrane singulation process utilizing backside and frontside protective coating during die saw 有权
标题翻译：在模锯期间利用背面和前侧保护涂层的光学膜分离方法
公开(公告)号：US06420206B1
公开(公告)日：2002-07-16
申请号：US09774216
申请日：2001-01-30
申请人： Minh Van Le , Jo-Ey Wong
发明人： Minh Van Le , Jo-Ey Wong
IPC分类号： H01L2100
CPC分类号： H01L21/67132 , B81C1/00896 , G02B26/0841 , H01L21/67092
摘要： A process for singulating MOEMS optical devices from a precursor structure, in which the precursor structure comprises device material, having movable optical structures, and handle material, through which optical ports are formed to provide for optical access to the movable optical structures. The process comprises coating a frontside and a backside of the precursor structure with protection material. The precursor structure is then attached to a substrate such as dicing tape and the precursor structure separated into individual optical devices by a process, including die sawing. Thereafter, the optical devices are removed from the tape and the protection material removed from the optical devices.
摘要翻译：一种用于从前体结构中分离MOEMS光学器件的方法，其中前体结构包括具有可移动光学结构的器件材料和手柄材料，通过该器件材料形成光学端口以提供对可移动光学结构的光学访问。该方法包括用保护材料涂覆前体和前体结构的背面。然后将前体结构连接到诸如切割带的基底上，并且前体结构通过包括模切法的方法分离成各个光学装置。此后，将光学装置从胶带上取出，并将保护材料从光学装置中取出。

8. 发明授权

US06808276B2 Suspended high reflectivity coating on release structure and fabrication process therefor 有权
标题翻译：悬浮高反射率涂层在释放结构及其制造工艺上
公开(公告)号：US06808276B2
公开(公告)日：2004-10-26
申请号：US09851510
申请日：2001-05-08
申请人： Walid A. Atia , Minh Van Le
发明人： Walid A. Atia , Minh Van Le
IPC分类号： G02B7182
CPC分类号： G02B6/29358 , G02B6/12007 , G02B6/122 , G02B6/29395 , G02B6/3516 , G02B6/3518 , G02B26/001 , G02B26/02 , G02B2006/12104 , G02B2006/12109
摘要： In a MOEMS device and corresponding fabrication process, absorbing material along the optical axis of the device is removed. The result is a suspended optical coating, such as a dielectric thin film mirror stack. Such optical coatings can have very low absorption. Thus, the invention can materially lower the net absorption in the device, and thereby improve performance, by degrading power related dependencies.
摘要翻译：在MOEMS装置和相应的制造工艺中，沿着装置的光轴吸收材料被去除。结果是悬浮的光学涂层，例如电介质薄膜反射镜叠层。这种光学涂层可以具有非常低的吸收。因此，通过降低与电力相关的依赖性，本发明可以实质上降低装置中的净吸收，从而提高性能。

9. 发明授权

US06707593B2 System and process for actuation voltage discharge to prevent stiction attachment in MEMS device 有权
标题翻译：用于激活电压放电的系统和过程，以防止MEMS器件中的静电附着
公开(公告)号：US06707593B2
公开(公告)日：2004-03-16
申请号：US09850720
申请日：2001-05-08
申请人： Minh Van Le , Jo-Ey Wong
发明人： Minh Van Le , Jo-Ey Wong
IPC分类号： G02B2600
CPC分类号： G02B26/02 , G02B26/001
摘要： An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.
摘要翻译：静电操作的微机电系统包括可移动和静止结构，其中放电系统在可移动结构的拉入时被激活，以将静电空腔上的电压放电，从而防止可移动结构到固定结构的粘结。具体地，膜释放结构包括镜面光学元件。膜通过静电腔与固定支架分离。放电开关包括膜上的膜导体焊盘和支撑体上的支撑导体焊盘，其在激活放电开关时传导电流以释放静电电压。优选地，这些垫是金属的。

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