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1. 发明授权

US07450862B2 Stray light insensitive detector system and amplifier 有权
标题翻译：杂散光不敏感探测器系统和放大器
公开(公告)号：US07450862B2
公开(公告)日：2008-11-11
申请号：US10392353
申请日：2003-03-19
申请人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
发明人： Dale C. Flanders , Walid Atia , Eric E. Fitch , Minh Van Le , Randal A. Murdza , Robert L. Payer , Jeffrey A. Korn , Xiaomei Wang , Walter R. Buchwald , L. James Newman, III
IPC分类号： H04B10/06
CPC分类号： H01S5/02216 , H01S5/02248 , H01S5/02284 , H01S5/0683
摘要： A detector system for a fiber optic component is insensitive to stray light. Specifically, the invention comprises a detector chip, which converts received light into an electric signal. A baffle substrate is positioned over the detector chip. This baffle substrate has a transmission port through which an optical signal is transmitted to the detector chip. As a result, light that is not directed to be transmitted through the port is blocked by the baffle substrate. In this way, it rejects stray light that may be present in the hermetic package. A detector substrate is provided on which the detector chip is mounted. This detector substrate preferably comprises electrical traces to which the detector chip is electrically connected. The detector substrate can further comprise bond pads for wire bonding to make electrical connections to the electrical traces.
摘要翻译：用于光纤部件的检测器系统对杂散光不敏感。具体地，本发明包括将接收的光转换成电信号的检测器芯片。挡板基板位于检测器芯片上。该挡板基板具有传输端口，通过该传输端口将光信号传输到检测器芯片。结果，不被透射通过端口的光被挡板衬底阻挡。以这种方式，它拒绝可能存在于密封包装中的杂散光。设置有检测器芯片安装在其上的检测器基板。该检测器基板优选地包括检测器芯片电连接到的电迹线。检测器基板还可以包括用于引线键合的接合焊盘以与电迹线进行电连接。

2. 发明授权

US09046337B2 Integrated OCT detector system with transimpedance amplifier 有权
标题翻译：具有跨阻放大器的集成OCT检测器系统
公开(公告)号：US09046337B2
公开(公告)日：2015-06-02
申请号：US12981770
申请日：2010-12-30
申请人： Dale C. Flanders , Randal A. Murdza
发明人： Dale C. Flanders , Randal A. Murdza
IPC分类号： G01B9/10 , G01B9/02
CPC分类号： G01B9/0203 , G01B9/02004 , G01B9/02051 , G01B9/02069 , G01B9/02091 , G01B2290/70
摘要： An optical detector system comprises a hermetic optoelectronic package, an optical bench installed within the optoelectronic package, a balanced detector system installed on the optical bench. The balanced detector system includes at least two optical detectors that receive interference signals. An electronic amplifier system installed within the optoelectronic package amplifies an output of at least two optical detectors. Also disclosed is an integrated optical coherence tomography system. Embodiments are provided in which the amplifiers, typically transimpedance amplifiers, are closely integrated with the optical detectors that detect the interference signals from the interferometer. Further embodiments are provided in which the interferometer but also preferably its detectors are integrated together on a common optical bench. Systems that have little or no optical fiber can thus be implemented.
摘要翻译：光学检测器系统包括密封光电子封装，安装在光电封装内的光学平台，安装在光学平台上的平衡检测器系统。平衡检测器系统包括至少两个接收干扰信号的光学检测器。安装在光电封装内的电子放大器系统放大至少两个光学检测器的输出。还公开了一种集成的光学相干断层摄影系统。提供了实施例，其中放大器，通常是跨阻放大器，与检测来自干涉仪的干扰信号的光学检测器紧密集成。提供了其它实施例，其中干涉仪还优选地其检测器在公共光学台上集成在一起。因此可以实现具有很少或不具有光纤的系统。

3. 发明申请

US20120168650A1 Integrated OCT Detector System with Transimpedance Amplifier 有权
标题翻译：具有跨阻放大器的集成OCT检测器系统
公开(公告)号：US20120168650A1
公开(公告)日：2012-07-05
申请号：US12981770
申请日：2010-12-30
申请人： Dale C. Flanders , Randal A. Murdza
发明人： Dale C. Flanders , Randal A. Murdza
IPC分类号： G02B27/42
CPC分类号： G01B9/0203 , G01B9/02004 , G01B9/02051 , G01B9/02069 , G01B9/02091 , G01B2290/70
摘要： An optical detector system comprises a hermetic optoelectronic package, an optical bench installed within the optoelectronic package, a balanced detector system installed on the optical bench. The balanced detector system includes at least two optical detectors that receive interference signals. An electronic amplifier system installed within the optoelectronic package amplifies an output of at least two optical detectors. Also disclosed is an integrated optical coherence tomography system. Embodiments are provided in which the amplifiers, typically transimpedance amplifiers, are closely integrated with the optical detectors that detect the interference signals from the interferometer. Further embodiments are provided in which the interferometer but also preferably its detectors are integrated together on a common optical bench. Systems that have little or no optical fiber can thus be implemented.
摘要翻译：光学检测器系统包括密封光电子封装，安装在光电封装内的光学平台，安装在光学平台上的平衡检测器系统。平衡检测器系统包括至少两个接收干扰信号的光学检测器。安装在光电封装内的电子放大器系统放大至少两个光学检测器的输出。还公开了一种集成的光学相干断层摄影系统。提供了实施例，其中放大器，通常是跨阻放大器，与检测来自干涉仪的干扰信号的光学检测器紧密集成。提供了其它实施例，其中干涉仪还优选地其检测器在公共光学台上集成在一起。因此可以实现具有很少或不具有光纤的系统。

4. 发明授权

US09337619B2 Swept frequency laser for FD OCT with intracavity element and method of operation 有权
标题翻译：扫频激光器用于具有腔内元件的FD OCT和操作方法
公开(公告)号：US09337619B2
公开(公告)日：2016-05-10
申请号：US13271388
申请日：2011-10-12
申请人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
发明人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
IPC分类号： G01N21/47 , H01S5/14 , H01S5/022 , H01S5/0683 , H01S5/0687
CPC分类号： H01S5/141 , G01N21/4795 , H01S5/02284 , H01S5/0683 , H01S5/0687
摘要： A frequency swept laser source that generates an optical signal that is tuned over a spectral scan band at single discrete wavelengths associated with longitudinal modes of the swept laser source. Laser hopping over discrete single cavity modes allows long laser coherence length even under dynamic very high speed tuning conditions. A ramp drive to the laser is used to linearize laser frequency tuning. A beam splitter is used to divide the optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample. A detector system detects the optical signal from the reference arm and the sample arm for generating depth profiles and images of the sample.
摘要翻译：频率扫描激光源，其产生在与扫描的激光源的纵向模式相关联的单独离散波长下在光谱扫描带上调谐的光信号。在离散单腔模式下的激光跳跃即使在动态非常高速的调谐条件下也能实现长激光相干长度。激光器的斜坡驱动用于线性化激光频率调谐。分束器用于将通向参考反射器的参考臂和通向样品的样品臂之间的光信号分开。检测器系统检测来自参考臂和样品臂的光信号，用于产生样品的深度分布和图像。

5. 发明授权

US06790698B2 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译：公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。在一个实例中，使用掩模层作为保护层来蚀刻涂层。在另一示例中，示出了剥离过程。光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。

6. 发明授权

US06271052B1 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译：从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。凹陷蚀刻到牺牲层中。然后在牺牲层上形成多晶硅膜层。随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。最后，去除牺牲层以释放膜。牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。

7. 发明授权

US06836366B1 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

8. 发明授权

US06525880B2 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
申请人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
发明人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

9. 发明授权

US06704150B2 Bonder chuck and optical component mounting structure interface 有权
标题翻译： Bonder卡盘和光学元件安装结构接口
公开(公告)号：US06704150B2
公开(公告)日：2004-03-09
申请号：US10064081
申请日：2002-06-10
申请人： Mona Masghati , Livia M. Racz , Robert L. Payer , Dale C. Flanders
发明人： Mona Masghati , Livia M. Racz , Robert L. Payer , Dale C. Flanders
IPC分类号： G02B702
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： 12 of 12 An optical component is adapted for pick-and-place-style installation on an optical submount or bench and compatible with a chuck of a bonder that picks-up the optical component, places it on the optical bench, and then typically solder bonds the optical component to the bench. In the current implementation, this optical component comprises an optical element, such as an optical fiber, lens, or MOEMS device, that is attached to a plastically deformable mounting structure. The optical component has a bench-attach surface that is used to bond the optical component to an optical bench. Further, the optical component has a bonder chuck engagement surface to which a bonder chuck attaches to manipulate the optical component, such as install it, on the optical bench.
摘要翻译： 12 of 12一个光学部件适用于光学底座或工作台上的拾放式安装，并与拾取光学部件的接合器卡盘兼容，将其放置在光学台上，然后通常焊接将光学部件连接到工作台上。在当前的实施方案中，该光学部件包括附接到可塑性变形的安装结构的光学元件，例如光纤，透镜或MOEMS装置。光学部件具有用于将光学部件粘合到光学台上的台面附接表面。此外，光学部件具有接合卡盘接合表面，接合卡盘附接到该接合卡盘接合表面以将光学部件（例如安装）光学部件操纵在光学台上。

10. 发明授权

US06404567B2 Bonder chuck and optical component mounting structure interface 有权
标题翻译： Bonder卡盘和光学元件安装结构接口
公开(公告)号：US06404567B2
公开(公告)日：2002-06-11
申请号：US09797530
申请日：2001-03-01
申请人： Mona Masghati , Livia M. Racz , Robert L. Payer , Dale C. Flanders
发明人： Mona Masghati , Livia M. Racz , Robert L. Payer , Dale C. Flanders
IPC分类号： G02B702
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： An optical component is adapted for pick-and-place-style installation on an optical submount or bench and compatible with a chuck of a bonder that picks-up the optical component, places it on the optical bench, and then typically solder bonds the optical component to the bench. In the current implementation, this optical component comprises an optical element, such as an optical fiber, lens, or MOEMS device, that is attached to a plastically deformable mounting structure. The optical component has a bench-attach surface that is used to bond the optical component to an optical bench. Further, the optical component has a bonder chuck engagement surface to which a bonder chuck attaches to manipulate the optical component, such as install it, on the optical bench.
摘要翻译：光学元件适用于拾光放置式安装在光学底座或台架上，并与拾取光学元件的接合器卡盘兼容，将其放置在光学平台上，然后通常焊接光学组件到板凳。在当前的实施方案中，该光学部件包括附接到可塑性变形的安装结构的光学元件，例如光纤，透镜或MOEMS装置。光学部件具有用于将光学部件粘合到光学台上的台面附接表面。此外，光学部件具有接合卡盘接合表面，接合卡盘附接到该接合卡盘接合表面以将光学部件（例如安装）光学部件操纵在光学台上。

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