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1. 发明授权

US06790698B2 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06790698B2
公开(公告)日：2004-09-14
申请号：US09954861
申请日：2001-09-18
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders , Steven F. Nagle
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81B2201/047 , B81C1/0038 , B81C2201/0159 , B81C2201/053 , B81C2201/056 , G02B26/001
摘要： A process for patterning dielectric layers of the type typically found in optical coatings in the context of MEMS manufacturing is disclosed. A dielectric coating is deposited over a device layer, which has or will be released, and patterned using a mask layer. In one example, the coating is etched using the mask layer as a protection layer. In another example, a lift-off process is shown. The primary advantage of photolithographic patterning of the dielectric layers in optical MEMS devices is that higher levels of consistency can be achieved in fabrication, such as size, location, and residual material stress. Competing techniques such as shadow masking yield lower quality features and are difficult to align. Further, the minimum feature size that can be obtained with shadow masks is limited to ˜100 &mgr;m, depending on the coating system geometry, and they require hard contact with the surface of the wafer, which can lead to damage and/or particulate contamination.
摘要翻译：公开了一种用于在MEMS制造的上下文中通常在光学涂层中发现的类型的介电层图案的工艺。电介质涂层沉积在器件层上，器件层已经或将被释放，并使用掩模层进行图案化。在一个实例中，使用掩模层作为保护层来蚀刻涂层。在另一示例中，示出了剥离过程。光学MEMS器件中电介质层的光刻图案的主要优点是可以在诸如尺寸，位置和残余材料应力的制造中实现更高水平的稠度。诸如阴影掩蔽的竞争技术产生较低的质量特征并且难以对准。此外，根据涂层系统的几何形状，使用荫罩可获得的最小特征尺寸限制在〜100μm，并且它们需要与晶片的表面硬接触，这可能导致损坏和/或微粒污染。

2. 发明授权

US06271052B1 Process for integrating dielectric optical coatings into micro-electromechanical devices 有权
标题翻译：将介电光学涂层集成到微机电装置中的工艺
公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
申请人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
发明人： Michael F. Miller , Minh Van Le , Christopher C. Cook , Dale C. Flanders
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译：从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。凹陷蚀刻到牺牲层中。然后在牺牲层上形成多晶硅膜层。随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。最后，去除牺牲层以释放膜。牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。

3. 发明授权

US06525880B2 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06525880B2
公开(公告)日：2003-02-25
申请号：US09797529
申请日：2001-03-01
申请人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
发明人： Dale C. Flanders , Peter S. Whitney , Minh Van Le , Michael F. Miller , Stanley R. Shanfield
IPC分类号： G02B2700
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

4. 发明授权

US06836366B1 Integrated tunable fabry-perot filter and method of making same 有权
标题翻译：集成可调式fabry-perot滤波器及其制作方法
公开(公告)号：US06836366B1
公开(公告)日：2004-12-28
申请号：US09645200
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller , Stanley R. Shanfield , David B. West , Minh Van Le
IPC分类号： G02B528
CPC分类号： G02B26/001 , G01J3/26 , G02B26/00 , G02B26/02 , Y10S359/90
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

5. 发明授权

US06765710B2 Interference tabs for avoiding snapdown of optical membrane and fabrication process 有权
标题翻译：用于避免光学膜的拆卸和制造过程的干涉片
公开(公告)号：US06765710B2
公开(公告)日：2004-07-20
申请号：US10016797
申请日：2001-12-10
申请人： Michael F. Miller , Dale C. Flanders
发明人： Michael F. Miller , Dale C. Flanders
IPC分类号： G02B2600
CPC分类号： B81B3/001 , G02B26/001 , G02B26/02
摘要： Tabs or stops are integrated into a membrane structure to prevent its snapdown. Features comprising two surfaces separated by a distance equal to the maximum desired range of movement are produced. When the two surfaces contact, the motion of the structure is arrested or greatly diminished by increasing its rigidity. For an electrostatically actuated MEMS structure, these features can be used to limit the range of motion such that pull-in or snapdown is avoided, greatly enhancing the reliability of the device. One key design feature is that the two contacting surfaces are maintained at the same electrical potential avoiding problems associated with electrostatic cavity discharge.
摘要翻译：标签或止动件集成到膜结构中以防止其卡扣。产生包括两个表面分开等于最大期望运动范围的距离的特征。当两个表面接触时，结构的运动通过增加其刚度而被阻止或大大减小。对于静电驱动的MEMS结构，这些特征可用于限制运动范围，从而避免拉入或跳跃，大大提高了设备的可靠性。一个关键设计特征是两个接触表面保持在相同的电位，避免与静电腔排放相关的问题。

6. 发明授权

US06341039B1 Flexible membrane for tunable fabry-perot filter 有权
标题翻译：柔性膜可调式fabry-perot过滤器
公开(公告)号：US06341039B1
公开(公告)日：2002-01-22
申请号：US09648060
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller
IPC分类号： G02B2700
CPC分类号： G02B26/02 , G01J3/26 , G02B7/188 , G02B26/00 , G02B26/001
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译：可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

7. 发明授权

US06608711B2 Silicon on insulator optical membrane structure for fabry-perot MOEMS filter 有权
公开(公告)号：US06608711B2
公开(公告)日：2003-08-19
申请号：US09734420
申请日：2000-12-11
申请人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller
发明人： Dale C. Flanders , Peter S. Whitney , Michael F. Miller
IPC分类号： G02B2600
CPC分类号： G01J3/26 , G02B26/00 , G02B26/001 , G02B26/02
摘要： A process for fabricating an optical membrane device comprises providing a handle wafer and then oxidizing a surface of the handle wafer to form an insulating layer. A device wafer is then bonded to the handle wafer. An optical membrane structure is formed in this device wafer. The insulating layer is selectively removed to release the membrane structure. This device wafer can be manufactured from silicon wafer material. Such material typically has a low number of dislocations yielding a stable mechanical membrane structure. The insulating layer defines the electrical cavity across which electrical fields are established that are used to electrostatically deflect the membrane structure. The insulating layer is between 3 and 6 micrometers (&mgr;m) in thickness.

8. 发明授权

US08961902B2 Method and apparatus for analyte processing 有权
标题翻译：用于分析物处理的方法和装置
公开(公告)号：US08961902B2
公开(公告)日：2015-02-24
申请号：US12175037
申请日：2008-07-17
申请人： Peter W. Falb , David Brancazio , Eric France , Brett P. Masters , Michael F. Miller , Joshua R. Ormsby , Walker Sloan
发明人： Peter W. Falb , David Brancazio , Eric France , Brett P. Masters , Michael F. Miller , Joshua R. Ormsby , Walker Sloan
IPC分类号： B01L3/00 , G01N35/00
CPC分类号： G01N35/00029 , B01L3/5025 , B01L3/502715 , B01L3/502738 , B01L2200/025 , B01L2200/16 , B01L2300/0654 , B01L2300/0816 , B01L2400/0487 , B01L2400/0655 , G01N2035/00148 , Y10T29/49
摘要： A system for processing analytes in samples includes an instrument and a cartridge. The cartridge includes fluid inputs, input and output valve assemblies, processing devices, fluid reservoirs, and channels for carrying samples from the fluid inputs to the fluid reservoirs. The valve assemblies include valves adapted to form a sealed fluid chamber in response to force applied by a movable head assembly of the instrument. Each fluid reservoir is adapted to mate and align with an air displacement pump interface member. A valve assembly includes a recess wall surrounding a recess and a valve assembly wall surrounding both the recess and the recess wall. The recess wall and the valve assembly walls are adapted to mate with and seal against a flexible sheet covering the recess, the recess wall, and the valve assembly wall. The cartridge and instrument include complementary features for finely and coarsely aligning instrument assemblies with portions of the cartridge.
摘要翻译：用于处理样品中分析物的系统包括仪器和墨盒。墨盒包括流体输入，输入和输出阀组件，处理装置，流体储存器和用于将样品从流体输入传送到流体储存器的通道。阀组件包括适于响应由仪器的可移动头组件施加的力而形成密封流体室的阀。每个流体储存器适于与排气泵接口构件配合和对准。阀组件包括围绕凹部的凹陷壁和围绕凹部和凹陷壁的阀组件壁。凹陷壁和阀组件壁适于与覆盖凹部，凹陷壁和阀组件壁的柔性薄片配合并密封。墨盒和仪器包括用于精细和粗略地对准具有部分墨盒的仪器组件的互补特征。

9. 发明授权

US07300631B2 Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles 有权
标题翻译：使用弯曲板波装置和磁性颗粒检测分析物的方法和装置
公开(公告)号：US07300631B2
公开(公告)日：2007-11-27
申请号：US11183484
申请日：2005-07-18
申请人： Michael F. Miller , Brett P. Masters , Mark E. Lundstrom
发明人： Michael F. Miller , Brett P. Masters , Mark E. Lundstrom
IPC分类号： G01N15/06 , B32B27/00 , B32B27/12 , G01N33/553
CPC分类号： G01N33/54313 , B01L3/502761 , B01L2200/0647 , B01L2300/0681 , B01L2300/1822 , B01L2400/043 , B01L2400/0487 , B82Y15/00 , B82Y30/00 , G01N29/022 , G01N29/036 , G01N29/4418 , G01N33/56911 , G01N2291/0256 , G01N2291/02836 , G01N2291/0422 , G01N2291/0423 , G01N2291/0426 , G01N2291/0427 , G01N2800/324 , Y02A50/52 , Y02A50/57
摘要： A system for detecting an analyte in a sample includes a resonant sensor that has a sensor surface coated with the capture agent. A plurality of magnetic particles, each of which is coated with a capture agent having an affinity for the analyte, is combined with the sample to form a plurality of analyte-particle complexes. The system also includes a transport arrangement for transporting the sample to the sensor surface, and a magnetic field inducing structure constructed and arranged to establish a magnetic field at and adjacent to the sensor surface. The resonant sensor produces a signal corresponding to an amount of analyte-particle complexes that are bound to the sensor surface.
摘要翻译：用于检测样品中的分析物的系统包括具有涂覆有捕获剂的传感器表面的共振传感器。将多个磁性颗粒（其中每一个都涂覆有对分析物具有亲和力的捕获剂）与样品组合以形成多个分析物 - 颗粒复合物。该系统还包括用于将样品传送到传感器表面的传送装置，以及构造和布置成在传感器表面处和邻近传感器表面建立磁场的磁场诱导结构。谐振传感器产生对应于结合到传感器表面的分析物 - 颗粒复合物的量的信号。

10. 发明授权

US06247115B1 Non-stalling circular counterflow pipeline processor with reorder buffer 有权
标题翻译：具有重排序缓冲器的非停滞循环逆流管线处理器
公开(公告)号：US06247115B1
公开(公告)日：2001-06-12
申请号：US09638974
申请日：2000-08-15
申请人： Kenneth J. Janik , Shih-Lien L. Lu , Michael F. Miller
发明人： Kenneth J. Janik , Shih-Lien L. Lu , Michael F. Miller
IPC分类号： G06F1500
CPC分类号： G06F9/3865 , G06F9/3836 , G06F9/3838 , G06F9/384 , G06F9/3842 , G06F9/3851 , G06F9/3855 , G06F9/3857 , G06F9/3867
摘要： A system and method of executing instructions within a counterflow pipeline processor. The counterflow pipeline processor includes an instruction pipeline, a data pipeline, a reorder buffer and a plurality of execution units. An instruction and one or more operands issue into the instruction pipeline and a determination is made at one of the execution units whether the instruction is ready for execution. If so, the operands are loaded into the execution unit and the instruction executes. The execution unit is monitored for a result and, when the result arrives, it is stored into the result pipeline. If the instruction reaches the end of the pipeline without executing it wraps around and is sent down the instruction pipeline again.
摘要翻译：在逆流管线处理器内执行指令的系统和方法。逆流管线处理器包括指令流水线，数据流水线，重排序缓冲器和多个执行单元。指令和一个或多个操作数发出到指令流水线中，并且在执行单元之一确定指令是否准备好执行。如果是这样，操作数被加载到执行单元中，并执行指令。监视执行单元的结果，当结果到达时，将其存储到结果流水线中。如果指令到达流水线的末端，而不执行它，并重新发送指令管道。

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