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1. 发明申请

US20080185044A1 SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
标题翻译：化学沉淀和溶解的系统与方法
公开(公告)号：US20080185044A1
公开(公告)日：2008-08-07
申请号：US12024689
申请日：2008-02-01
申请人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
发明人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
IPC分类号： B67D5/56 , G05D11/13 , B01F15/04
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译：本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。第一阀打开到第一化学源。活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。第一阀关闭，第二阀打开到第二化学源。活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。关闭第二个阀门并移动活塞以通过分配口分配流体。

2. 发明授权

US07726876B2 System and method for non-intrusive thermal monitor 失效
标题翻译：非侵入式热监测系统和方法
公开(公告)号：US07726876B2
公开(公告)日：2010-06-01
申请号：US12048881
申请日：2008-03-14
申请人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
发明人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
IPC分类号： G01J5/00 , G01K1/00
CPC分类号： G01J5/02 , G01J5/0037 , G01J5/0255 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
摘要翻译：本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

3. 发明授权

US07443483B2 Systems and methods for fluid flow control in an immersion lithography system 失效
标题翻译：浸没光刻系统中流体流量控制的系统和方法
公开(公告)号：US07443483B2
公开(公告)日：2008-10-28
申请号：US11502729
申请日：2006-08-11
申请人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
发明人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
IPC分类号： G03B27/52 , G03B27/42
CPC分类号： G03B27/42 , G03F7/70341
摘要： Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.
摘要翻译：用于控制浸没光刻系统中的流体流动的系统和方法。该系统包括允许流体从源流过流体保持罩然后流体控制阀的流体流动路径。该系统包括用于确定穿过流体保持罩的压降的压力感测系统。流体保持罩上的压降随流体流速而变化。控制系统接收指示流体保持罩上的压降的信号，并产生流体控制阀的控制信号。控制信号调节通过流体控制阀的流体流速，以将流速驱动到期望的速率，从而将感测到的压力降跨越流体保持罩驱动到期望的压降。

4. 发明申请

US20080225925A1 System and Method for Non-Intrusive Thermal Monitor 失效
标题翻译：非侵入式热监测系统和方法
公开(公告)号：US20080225925A1
公开(公告)日：2008-09-18
申请号：US12048881
申请日：2008-03-14
申请人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
发明人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
IPC分类号： G01J5/08
CPC分类号： G01J5/02 , G01J5/0037 , G01J5/0255 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
摘要翻译：本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

5. 发明申请

US20080036985A1 Systems and methods for fluid flow control in an immersion lithography system 失效
公开(公告)号：US20080036985A1
公开(公告)日：2008-02-14
申请号：US11502729
申请日：2006-08-11
申请人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
发明人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
IPC分类号： G03B27/42
CPC分类号： G03B27/42 , G03F7/70341
摘要： Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.

6. 发明申请

US20120090704A1 Liquid Flow Controller And Precision Dispense Apparatus And System 失效
标题翻译：液体流量控制器和精密分配装置及系统
公开(公告)号：US20120090704A1
公开(公告)日：2012-04-19
申请号：US13300772
申请日：2011-11-21
申请人： Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
发明人： Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
IPC分类号： F16K31/12
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
摘要翻译：装置和控制系统，用于监控（优选数字化）和/或控制诸如比例流体控制阀的气动负载的压力，并使用来自响应于流量的流体测量装置的测量输入，所使用的液体测量输入以控制气动负载的压力，使得可以增加或减少气动负载（以比例地打开或关闭气动阀），以将流体的流速改变到期望的速率。也可以调节气动负载（按比例打开或关闭气动阀），以适应流体温度和粘度的变化。

7. 发明授权

US07317971B2 System for controlling fluid flow based on a valve break point 有权
标题翻译：基于阀断点控制流体流动的系统
公开(公告)号：US07317971B2
公开(公告)日：2008-01-08
申请号：US11502048
申请日：2006-08-10
申请人： Marc Laverdiere , Robert F. McLoughlin
发明人： Marc Laverdiere , Robert F. McLoughlin
IPC分类号： G05D7/00 , G05D7/06
CPC分类号： G05D7/0635 , H01L21/6715 , Y10T137/0989
摘要： Embodiments of the present invention provide systems and methods of controlling fluid dispense to ensure clean break off of fluid at the end of a dispense process and to reduce crystallization of fluid in the dispense nozzle. One embodiment of the present invention can include a controller that can, generate a flow control signal to cause a control valve to close according to a first close rate parameter for a first segment of the close range and to generate the flow control signal to cause the control valve to close according to a second close rate parameter for a second segment of the close range.
摘要翻译：本发明的实施例提供了控制流体分配的系统和方法，以确保在分配过程结束时清洁液体的分离并减少分配喷嘴中的流体结晶。本发明的一个实施例可以包括一个控制器，该控制器可以产生一个流量控制信号，以使控制阀根据第一关闭速率参数的关闭速率参数关闭，并产生流量控制信号，控制阀根据第二关闭速率参数关闭近距离的第二段。

8. 发明申请

US20070290382A1 Systems and methods for managing heat transfer in a fluid handling device 审中-公开
标题翻译：用于管理流体处理装置中的热传递的系统和方法
公开(公告)号：US20070290382A1
公开(公告)日：2007-12-20
申请号：US11452754
申请日：2006-06-14
申请人： Marc Laverdiere , Iraj Gashgaee , Craig L. Brodeur , Robert F. McLoughlin
发明人： Marc Laverdiere , Iraj Gashgaee , Craig L. Brodeur , Robert F. McLoughlin
IPC分类号： F28F1/00
CPC分类号： F28F27/00 , F28F2270/00 , G05D7/0635
摘要： Systems and methods for reducing temperature variations induced by fluid handling equipment in process fluids by separating heat-producing portions of the control equipment from portions of the equipment which handle or are in close proximity to a fluid flow path. In one embodiment, the fluid handling components are contained in a first enclosure, while the heat-generating components are contained in a second enclosure. An air gap is maintained between the two enclosures to provide thermal isolation of the fluid handling components from the heat-generating components. In one embodiment, the air gap is maintained by connecting the two enclosures using insulating spacers. Interconnects between components in the two enclosures may be routed through an insulating tube that is sealed at each end to prevent heat transfer through the tube.
摘要翻译：用于通过将控制设备的发热部分与处理或紧邻流体流动路径的设备的部分分离来减少流体处理设备在过程流体中引起的温度变化的系统和方法。在一个实施例中，流体处理部件容纳在第一外壳中，而发热部件容纳在第二外壳中。在两个外壳之间保持气隙，以提供流体处理部件与发热部件的热隔离。在一个实施例中，通过使用绝缘间隔件连接两个外壳来保持气隙。两个外壳中的组件之间的互连可以通过绝缘管路，绝缘管在每一端密封，以防止通过管的热传递。

9. 发明授权

US07610117B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US07610117B2
公开(公告)日：2009-10-27
申请号：US11229912
申请日：2005-09-19
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。操作模式可以自动切换。

10. 发明授权

US08082946B2 Liquid flow controller and precision dispense apparatus and system 有权
标题翻译：液体流量控制器和精密分配装置及系统
公开(公告)号：US08082946B2
公开(公告)日：2011-12-27
申请号：US12454611
申请日：2009-05-20
申请人： Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
发明人： Marc Laverdiere , Robert F. McLoughlin , George Gonnella , Iraj Gashgaee , Jennifer Marrs
IPC分类号： G05D7/06
CPC分类号： G05D7/0617 , G05D16/2013 , Y10T137/0396 , Y10T137/7758 , Y10T137/776 , Y10T137/7761
摘要： Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.
摘要翻译：流体控制装置包括具有流体入口和流体出口的比例流量阀; 与比例流量阀连通的气动比例控制阀，用于调节比例流量阀; 摩擦流动元件，其具有与比例流量阀的流体出口流体连通的摩擦流体元件流体入口，并具有与摩擦流体元件流体入口间隔开的摩擦流体元件流体出口，上游压力传感器; 下游压力传感器; 以及与上游压力传感器，下游压力传感器和气动比例控制阀连通的控制器。

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