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1. 发明申请

US20080185044A1 SYSTEM AND METHOD OF CHEMICAL DILUTION AND DISPENSE 审中-公开
标题翻译：化学沉淀和溶解的系统与方法
公开(公告)号：US20080185044A1
公开(公告)日：2008-08-07
申请号：US12024689
申请日：2008-02-01
申请人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
发明人： Michael Clarke , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Joseph E. Smith , Rosario Mollica
IPC分类号： B67D5/56 , G05D11/13 , B01F15/04
CPC分类号： B01F5/0685 , B01F3/088 , G05D11/132 , Y10T137/0329
摘要： Embodiments disclosed herein provide a pump or a multiple-pump system that can mix chemicals without dilution tanks and can dispense the mixture of chemicals in a precise and highly controllable manner, particularly useful in semiconductor manufacturing processes. In some embodiments, one or more piston pumps of similar displacement are used to mix and dispense the chemical directly. A first valve is opened to a first chemical source. A piston is moved in a first direction to a selected position in a chamber to draw the first chemical into the chamber. The first valve is closed and a second valve is opened to a second chemical source. The piston is moved in the first direction to a second position in the chamber to draw in the second chemical and mix the chemicals. The second valve is closed and the piston is moved to dispense the fluids through a dispense port.
摘要翻译：本文公开的实施例提供了一种泵或多泵系统，其可以混合没有稀释罐的化学品，并且可以精确和高度可控的方式分配化学品的混合物，特别适用于半导体制造过程。在一些实施例中，使用类似位移的一个或多个活塞泵来直接混合和分配化学品。第一阀打开到第一化学源。活塞在第一方向上移动到室中的选定位置以将第一化学品吸入室中。第一阀关闭，第二阀打开到第二化学源。活塞沿第一方向移动到腔室中的第二位置以吸入第二化学品并混合化学品。关闭第二个阀门并移动活塞以通过分配口分配流体。

2. 发明授权

US07610117B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US07610117B2
公开(公告)日：2009-10-27
申请号：US11229912
申请日：2005-09-19
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，出口，在入口和出口之间的压力损失元件，位于收缩部上游的压力传感器，其被配置成测量流过流动的流体的第一压力控制装置，位于收缩部下游的压力传感器，被配置为测量流过所述流量控制装置的流体的第二压力; 以及耦合到第一压力传感器和第二压力传感器以产生阀驱动信号的控制器。控制器可以在第一操作模式期间基于第一压力和第二压力之间的差值产生阀控制信号。控制器还可以在第二操作模式期间基于特定压力传感器处的测量压力产生阀门控制信号。操作模式可以自动切换。

3. 发明授权

US08015995B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US08015995B2
公开(公告)日：2011-09-13
申请号：US12777019
申请日：2010-05-10
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及控制器到压力传感器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

4. 发明授权

US07740024B2 System and method for flow monitoring and control 有权
标题翻译：流量监控系统及方法
公开(公告)号：US07740024B2
公开(公告)日：2010-06-22
申请号：US11054467
申请日：2005-02-09
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及耦合到所述压力传感器的控制器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

5. 发明申请

US20080221822A1 System and Method for Calibration of a Flow Device 审中-公开
标题翻译：用于校准流量装置的系统和方法
公开(公告)号：US20080221822A1
公开(公告)日：2008-09-11
申请号：US11659710
申请日：2005-08-12
申请人： Marc Laverdiere , Robert F. Mcloughlin , J. Karl Niermeyer
发明人： Marc Laverdiere , Robert F. Mcloughlin , J. Karl Niermeyer
IPC分类号： G01F25/00
CPC分类号： G01F25/0007 , G01F1/34 , G05B13/024
摘要： Embodiments of the present invention provide a system and method for rapid calibration of a flow device. A flow device can be provided with a calibration flow curve (e.g., represented by an nth degree polynomial) by the manufacturer or a third party. The calibration curve can be adjusted for a process fluid and the system for which the flow device is actually installed using one or more correction factors. The correction factors can be determined for the flow curve based on a simple empirical test or fluid properties of the process fluid. The corrected flow curve is then saved at the flow device so that it can be used for future flow control.
摘要翻译：本发明的实施例提供了一种用于流量装置的快速校准的系统和方法。流量装置可以由制造商或第三方提供校准流量曲线（例如，由第n个/次多项式表示）。可以使用一个或多个校正因子对过程流体和实际安装流量装置的系统调整校准曲线。可以基于简单的经验测试或过程流体的流体性质来确定流量曲线的校正因子。然后将校正的流量曲线保存在流量装置中，使其可用于将来的流量控制。

6. 发明申请

US20100236643A1 System and Method for Flow Monitoring and Control 有权
标题翻译：流量监控系统与方法
公开(公告)号：US20100236643A1
公开(公告)日：2010-09-23
申请号：US12777019
申请日：2010-05-10
申请人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： F16K31/12
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/0379 , Y10T137/7761 , Y10T137/8326
摘要： One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor.
摘要翻译：本发明的一个实施例可以包括流量控制装置，其包括入口，与入口流体连通的出口，压力传感器，其可以是或可以不是流体控制装置的唯一压力传感器，以及控制器到压力传感器。控制器可以被配置为基于在单个压力传感器处的测量压力产生阀控制信号。

7. 发明授权

US06973375B2 System and method for flow monitoring and control 有权
公开(公告)号：US06973375B2
公开(公告)日：2005-12-06
申请号：US10777300
申请日：2004-02-12
申请人： Craig L.. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
发明人： Craig L.. Brodeur , Marc Laverdiere , Robert F. McLoughlin , J. Karl Niermeyer , Jieh-Hwa Shyu
IPC分类号： G05D7/06 , G06F19/00
CPC分类号： G01F1/363 , G05D7/0635 , Y10T137/7761
摘要： One embodiment of the present invention can include a flow control device comprising an inlet, an outlet, a pressure loss element between the inlet and outlet, a pressure sensor located upstream from the constriction configured to measure a first pressure of a fluid flowing through the flow control device, a pressure sensor located downstream from the constriction, configured to measure a second pressure of the fluid flowing through the flow control device; and a controller coupled to the first pressure sensor and the second pressure sensor to generate a valve drive signal. The controller can generate a valve control signal based on a differential between the first pressure and the second pressure during a first mode of operation. The controller can also generate a valve control signal based on a measured pressure at a particular pressure sensor during a second mode of operation. The mode of operation can automatically switch.

8. 发明授权

US07726876B2 System and method for non-intrusive thermal monitor 失效
标题翻译：非侵入式热监测系统和方法
公开(公告)号：US07726876B2
公开(公告)日：2010-06-01
申请号：US12048881
申请日：2008-03-14
申请人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
发明人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
IPC分类号： G01J5/00 , G01K1/00
CPC分类号： G01J5/02 , G01J5/0037 , G01J5/0255 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
摘要翻译：本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

9. 发明授权

US07443483B2 Systems and methods for fluid flow control in an immersion lithography system 失效
标题翻译：浸没光刻系统中流体流量控制的系统和方法
公开(公告)号：US07443483B2
公开(公告)日：2008-10-28
申请号：US11502729
申请日：2006-08-11
申请人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
发明人： Michael Clarke , Robert F. McLoughlin , Marc Laverdiere
IPC分类号： G03B27/52 , G03B27/42
CPC分类号： G03B27/42 , G03F7/70341
摘要： Systems and methods for controlling fluid flow in an immersion lithography system. The system includes a fluid flow path that allows fluid to flow from a source through a fluid retention hood and then a fluid control valve. The system includes a pressure sensing system for determining a pressure drop across the fluid retention hood. The pressure drop across the fluid retention hood changes with the fluid flow rate. A control system receives signals indicating the pressure drop across the fluid retention hood and produces control signals for the fluid control valve. The control signals adjust the fluid flow rate through the fluid control valve to drive the flow rate to a desired rate, thereby driving the sensed pressure drop across the fluid retention hood to a desired pressure drop.
摘要翻译：用于控制浸没光刻系统中的流体流动的系统和方法。该系统包括允许流体从源流过流体保持罩然后流体控制阀的流体流动路径。该系统包括用于确定穿过流体保持罩的压降的压力感测系统。流体保持罩上的压降随流体流速而变化。控制系统接收指示流体保持罩上的压降的信号，并产生流体控制阀的控制信号。控制信号调节通过流体控制阀的流体流速，以将流速驱动到期望的速率，从而将感测到的压力降跨越流体保持罩驱动到期望的压降。

10. 发明申请

US20080225925A1 System and Method for Non-Intrusive Thermal Monitor 失效
标题翻译：非侵入式热监测系统和方法
公开(公告)号：US20080225925A1
公开(公告)日：2008-09-18
申请号：US12048881
申请日：2008-03-14
申请人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
发明人： Marc Laverdiere , Robert F. McLoughlin , Michael Clarke , Dale Maenke , Wiley James Wilkinson
IPC分类号： G01J5/08
CPC分类号： G01J5/02 , G01J5/0037 , G01J5/0255 , G01J5/08 , G01J5/0893 , G01J5/12
摘要： Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location.
摘要翻译：本文公开的实施例提供用于感测对于半导体制造应用有用的温度的非侵入式热（NIT）监视器。在一些实施例中，NIT监视器包括热电堆，具有流体窗口的流体壳体和位于热电堆和流体窗口之间的细长构件，用于传输或反射对应于流体壳体中的流体温度的红外信号。流体壳体可以具有横截面轮廓，以使得能够操纵流体窗下方的流体流动，从而提高温度采样的速度和精度。可以是中空的并且涂有金的细长构件可以是流体壳体的延伸件或光学外壳的一部分。在一些实施例中，NIT监视器经由电缆连接到主调节电路板，用于在远程位置处理温度测量。

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