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    • 1. 发明授权
    • Latch construction
    • 锁结构
    • US5192098A
    • 1993-03-09
    • US751312
    • 1991-08-28
    • Michael BarnesJoseph Koskelowsky
    • Michael BarnesJoseph Koskelowsky
    • E05B17/20E05B35/00E05C3/04
    • E05C3/042E05B35/008E05B17/2038Y10T292/1089
    • A releasable latch construction having a body member attachable to a panel, a latching member turnable on the body member for arcuate movement between a latching position and a releasing position, a locking mechanism movably carried by the body member and operable to lock the latching member in either its latching position or else in its releasing position, and an actuator movably carried in the body member and engageable with the locking mechanism, for effecting the locking or releasing movement of the latching member. The actuator is directly engageable by a latch key and is shiftable thereby in order to effect such movements.
    • 一种可释放的闩锁构造,其具有可附接到面板的主体构件,可在主体构件上转动的闩锁构件,用于在闩锁位置和释放位置之间弓形运动;锁定机构,可由主体构件可移动地承载并可操作以将闩锁构件锁定 或者其闩锁位置,或者处于其释放位置,以及可移动地承载在本体构件中并与锁定机构接合的致动器,用于实现闩锁构件的锁定或释放运动。 致动器可通过闩锁键直接接合,并且可由此移动以便实现这种运动。
    • 2. 发明授权
    • Latch construction
    • 锁结构
    • US5044679A
    • 1991-09-03
    • US484799
    • 1990-02-26
    • Michael BarnesJoseph Koskelowsky
    • Michael BarnesJoseph Koskelowsky
    • E05B35/00
    • E05B35/008Y10T292/1041Y10T292/1089
    • A releasable latch construction having a body member attachable to a panel, a latching member turnable on the body member for arcuate movement between a latching position and a releasing position, a locking mechanism movably carried by the body member and operable to lock the latching member in either its latching position or else in its releasing position, and an actuator movably carried in the body member and engageable with the locking mechanism, for effecting the locking or releasing movement of the latching member. The actuator is directly engageable by a latch key and is shiftable thereby in order to effect such movements.
    • 一种可释放的闩锁构造,其具有可附接到面板的主体构件,可在主体构件上转动的闩锁构件,用于在闩锁位置和释放位置之间弓形运动;锁定机构,可由主体构件可移动地承载并可操作以将闩锁构件锁定 或者其闩锁位置,或者处于其释放位置,以及可移动地承载在本体构件中并与锁定机构接合的致动器,用于实现闩锁构件的锁定或释放运动。 致动器可通过闩锁键直接接合,并且可由此移动以便实现这种运动。
    • 5. 发明申请
    • CAPACITIVELY COUPLED PLASMA REACTOR WITH MAGNETIC PLASMA CONTROL
    • 具有磁性等离子体控制的电容耦合等离子体反应器
    • US20110201134A1
    • 2011-08-18
    • US13081005
    • 2011-04-06
    • Daniel J. HoffmanMatthew L. MillerJang Gyoo YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • Daniel J. HoffmanMatthew L. MillerJang Gyoo YangHeeyeop ChaeMichael BarnesTetsuya IshikawaYan Ye
    • H01L21/66H01L21/3065
    • H01J37/32091H01J37/3244H01J37/32623H01J37/3266
    • A plasma reactor includes a vacuum enclosure including a side wall and a ceiling defining a vacuum chamber, and a workpiece support within the chamber and facing the ceiling for supporting a planar workpiece, the workpiece support and the ceiling together defining a processing region between the workpiece support and the ceiling. Process gas inlets furnish a process gas into the chamber. A plasma source power electrode is connected to an RF power generator for capacitively coupling plasma source power into the chamber for maintaining a plasma within the chamber. The reactor further includes at least a first overhead solenoidal electromagnet adjacent the ceiling, the overhead solenoidal electromagnet, the ceiling, the side wall and the workpiece support being located along a common axis of symmetry. A current source is connected to the first solenoidal electromagnet and furnishes a first electric current in the first solenoidal electromagnet whereby to generate within the chamber a magnetic field which is a function of the first electric current, the first electric current having a value such that the magnetic field increases uniformity of plasma ion density radial distribution about the axis of symmetry near a surface of the workpiece support.
    • 等离子体反应器包括真空外壳,其包括限定真空室的侧壁和顶板,以及腔室内的工件支撑件,并面向天花板以支撑平面工件,工件支撑件和天花板一起限定了工件之间的加工区域 支持和天花板。 工艺气体入口将工艺气体提供到腔室中。 等离子体源功率电极连接到RF功率发生器,用于将等离子体源功率电容耦合到腔室中,以在腔室内维持等离子体。 反应器还包括至少第一架空螺线管电磁体,靠近天花板,架空螺线管电磁体,天花板,侧壁和工件支撑件沿着共同的对称轴线定位。 电流源连接到第一螺线管电磁体并且在第一螺线管电磁体中提供第一电流,从而在腔室内产生与第一电流有关的磁场,第一电流具有使得 磁场增加等离子体离子密度在工件支撑表面附近的对称轴的径向分布的均匀性。
    • 10. 发明授权
    • Plasma reactor having a symmetric parallel conductor coil antenna
    • 具有对称并联导体线圈天线的等离子体反应器
    • US06893533B2
    • 2005-05-17
    • US10697893
    • 2003-10-29
    • John HollandValentin N. TodorowMichael Barnes
    • John HollandValentin N. TodorowMichael Barnes
    • H01J37/32H05H1/00C23C16/00H01J21/00
    • H01J37/321
    • The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.
    • 在一个实施例中的本发明在用于处理半导体工件的等离子体反应器中实现。 反应器包括具有侧壁和天花板的真空室,腔室内的工件支撑基座,并且大致面对天花板,能够将工艺气体供应到室中的气体入口和覆盖在天花板上的螺线管交错的并行导体线圈天线 并且包括缠绕在大致垂直于天花板的相应同心螺旋螺线管中的对称轴线的第一多个导体,其具有来自对称轴线的至少几乎均匀的横向位移,每个螺旋螺线管在与另一个螺旋螺线管平行的方向上偏离 对称轴。 RF等离子体源电源连接在多个导体中的每一个上。