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1. 发明授权

US07062838B2 Method of forming an embedded read element 失效
标题翻译：形成嵌入式读取元素的方法
公开(公告)号：US07062838B2
公开(公告)日：2006-06-20
申请号：US10666679
申请日：2003-09-19
申请人： Meng Ding , Kuok San Ho , Tsann Lin , Huey-Ming Tzeng
发明人： Meng Ding , Kuok San Ho , Tsann Lin , Huey-Ming Tzeng
IPC分类号： G11B5/187 , H01F7/06
CPC分类号： B24B37/013 , B24B49/10 , G11B5/39 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： A method of forming an embedded read element is used in the fabrication process of a magnetic head assembly including write and read heads. In this method, three photolithographic patterning steps are applied for defining the designed height of the embedded read element, defining its designed width, and connecting it with conducting layers, respectively. An in-line lapping guide is also formed with a spacing in front of the embedded read element. In this method, two mechanical lapping steps are applied, one monitored by measuring the resistance of a parallel circuit of the embedded read element and the in-line lapping guide, and the other monitored by measuring the GMR response of the embedded read element.
摘要翻译：在包括写入和读取头的磁头组件的制造过程中使用形成嵌入式读取元件的方法。在该方法中，应用三个光刻图案步骤来定义嵌入式读取元件的设计高度，限定其设计宽度，并将其与导电层连接。在嵌入式读取元件的前面还形成有间距的在线研磨引导件。在这种方法中，应用了两个机械研磨步骤，一个通过测量嵌入式读取元件的并联电路的电阻和在线研磨导轨进行监测，另一个通过测量嵌入式读取元件的GMR响应进行监测。

2. 发明授权

US07469465B2 Method of providing a low-stress sensor configuration for a lithography-defined read sensor 失效
标题翻译：为光刻定义的读取传感器提供低应力传感器配置的方法
公开(公告)号：US07469465B2
公开(公告)日：2008-12-30
申请号：US10881581
申请日：2004-06-30
申请人： Meng Ding , Kuok San Ho , Tsann Lin , Huey-Ming Tzeng
发明人： Meng Ding , Kuok San Ho , Tsann Lin , Huey-Ming Tzeng
IPC分类号： G11B5/187
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： One illustrative method of fabricating a read sensor of a magnetic head includes the steps of forming a plurality of read sensor layers on a wafer; etching the read sensor layers to form a read sensor structure with a trench in front of the read sensor structure; forming a highly porous material within the trench; and slicing the wafer and lapping the sliced wafer through the highly porous material until an air bearing surface (ABS) of the magnetic head is reached. Advantageously, the highly porous material in front of the read sensor structure reduces mechanical stress on the read sensor during the lapping process. This reduces the likelihood that the amplitude of the read sensor will be degraded or set in a “flipped” or reversed orientation, as well as reduces the likelihood that electrostatic discharge (ESD) damage to the read sensor will occur.
摘要翻译：一种制造磁头的读取传感器的说明性方法包括以下步骤：在晶片上形成多个读取传感器层; 蚀刻读取的传感器层以形成读取的传感器结构，其中在传感器结构的前面具有沟槽; 在沟槽内形成高度多孔的材料; 并切片晶片并通过高度多孔材料研磨切片的晶片，直到达到磁头的空气轴承表面（ABS）。有利地，在读取传感器结构前面的高度多孔材料在研磨过程中减小了读取传感器上的机械应力。这降低了读取传感器的幅度将被降级或设置为“翻转”或反向取向的可能性，并且降低了对读取传感器的静电放电（ESD）损坏将发生的可能性。

3. 发明申请

US20060068685A1 In-line contiguous resistive lapping guide for magnetic sensors 失效
标题翻译：用于磁传感器的在线连续电阻研磨导轨
公开(公告)号：US20060068685A1
公开(公告)日：2006-03-30
申请号：US10954868
申请日：2004-09-30
申请人： Marie-Claire Cyrille , Kuok San Ho , Tsann Lin , Scott MacDonald , Huey-Ming Tzeng
发明人： Marie-Claire Cyrille , Kuok San Ho , Tsann Lin , Scott MacDonald , Huey-Ming Tzeng
IPC分类号： B24B49/00
CPC分类号： B24B37/00 , B24B37/013 , B24B41/06 , B24B49/10 , Y10T29/49036 , Y10T29/49048
摘要： An in-line lapping guide uses a contiguous resistor in a cavity to separate a lithographically-defined sensor from the in-line lapping guide. As lapping proceeds through the cavity toward the sensor, the resistance across the sensor leads increases to a specific target, thereby indicating proximity to the sensor itself. The contiguous resistor is fabricated electrically in parallel to the sensor and the in-line lapping guide. The total resistance across the sensor leads show resistance change even when lapping through the cavity portion. One method to produce the contiguous resistor is to partial mill the cavity between the sensor and the in-line lapping guide so that a film of metal is left. Total resistance across leads is the parallel resistance of the sensor, the contiguous resistor, and the in-line lapping guide.
摘要翻译：在线研磨引导件使用空腔中的连续电阻器将光刻定影传感器与在线研磨导轨分离。当研磨通过腔朝向传感器进行时，传感器引线上的电阻增加到特定目标，从而指示传感器本身的接近度。连续的电阻器与传感器和在线研磨导轨平行地制造。传感器引线上的总电阻即使在通过空腔部分研磨时也会显示电阻变化。产生连续电阻器的一种方法是将传感器和在线研磨引导件之间的空腔部分研磨以留下金属膜。引线之间的总电阻是传感器，相邻电阻器和在线研磨导轨的并联电阻。

4. 发明授权

US07244169B2 In-line contiguous resistive lapping guide for magnetic sensors 失效
标题翻译：用于磁传感器的在线连续电阻研磨导轨
公开(公告)号：US07244169B2
公开(公告)日：2007-07-17
申请号：US10954868
申请日：2004-09-30
申请人： Marie-Claire Cyrille , Kuok San Ho , Tsann Lin , Scott Arthur MacDonald , Huey-Ming Tzeng
发明人： Marie-Claire Cyrille , Kuok San Ho , Tsann Lin , Scott Arthur MacDonald , Huey-Ming Tzeng
IPC分类号： B24B49/00 , B24B51/00 , G11B5/42
CPC分类号： B24B37/00 , B24B37/013 , B24B41/06 , B24B49/10 , Y10T29/49036 , Y10T29/49048
摘要： An in-line lapping guide uses a contiguous resistor in a cavity to separate a lithographically-defined sensor from the in-line lapping guide. As lapping proceeds through the cavity toward the sensor, the resistance across the sensor leads increases to a specific target, thereby indicating proximity to the sensor itself. The contiguous resistor is fabricated electrically in parallel to the sensor and the in-line lapping guide. The total resistance across the sensor leads show resistance change even when lapping through the cavity portion. One method to produce the contiguous resistor is to partial mill the cavity between the sensor and the in-line lapping guide so that a film of metal is left. Total resistance across leads is the parallel resistance of the sensor, the contiguous resistor, and the in-line lapping guide.
摘要翻译：在线研磨引导件使用空腔中的连续电阻器将光刻定影传感器与在线研磨导轨分离。当研磨通过腔朝向传感器进行时，传感器引线上的电阻增加到特定目标，从而指示传感器本身的接近度。连续的电阻器与传感器和在线研磨导轨平行地制造。传感器引线上的总电阻即使在通过空腔部分研磨时也会显示电阻变化。产生连续电阻器的一种方法是将传感器和在线研磨引导件之间的空腔部分研磨，使得留下金属膜。引线之间的总电阻是传感器，相邻电阻器和在线研磨导轨的并联电阻。

5. 发明授权

US07291279B2 Method of making a read sensor while protecting it from electrostatic discharge (ESD) damage 失效
标题翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法
公开(公告)号：US07291279B2
公开(公告)日：2007-11-06
申请号：US10835807
申请日：2004-04-30
申请人： Frederick Hayes Dill , Meng Ding , Kuok San Ho , Jordan Asher Katine , Scott Arthur MacDonald , Huey-Ming Tzeng
发明人： Frederick Hayes Dill , Meng Ding , Kuok San Ho , Jordan Asher Katine , Scott Arthur MacDonald , Huey-Ming Tzeng
IPC分类号： B44C1/22 , H01L21/00 , G11B5/33 , G11B5/127
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/40 , Y10T29/49021 , Y10T29/49043 , Y10T29/49048
摘要： A method of making a read sensor while protecting it from electrostatic discharge (ESD) damage involves forming a severable shunt during the formation of the read sensor. The method may include forming a resist layer over a plurality of read sensor layers; performing lithography with use of a mask to form the resist layer into a patterned resist which exposes left and right side regions over the read sensor layers as well as a shunt region; etching, with the patterned resist in place, to remove materials in the left and right side regions and in the shunt region; and depositing, with the patterned resist in place, left and right hard bias and lead layers in the left and right side regions, respectively, and in the shunt region for forming a severable shunt which electrically couples the left and right hard bias and lead layers together for ESD protection.
摘要翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法包括在形成读取的传感器期间形成可分离的分流。该方法可以包括在多个读取传感器层上形成抗蚀剂层; 使用掩模执行光刻以将抗蚀剂层形成图案化的抗蚀剂，其在读取的传感器层以及分流区域上暴露左侧区域和右侧区域; 蚀刻，图案化抗蚀剂就位，以去除左右侧区域和分流区域中的材料; 并且分别在左侧区域和右侧区域以及分流区域中分别将图案化的抗蚀剂沉积在左侧和右侧的硬偏压和引线层，以形成可分离的分流器，其将左右硬偏压和引线层电耦合一起为ESD保护。

6. 发明申请

US20060000079A1 Method of providing a low-stress sensor configuration for a lithographically-defined read sensor 失效
标题翻译：为光刻定义的读取传感器提供低应力传感器配置的方法
公开(公告)号：US20060000079A1
公开(公告)日：2006-01-05
申请号：US10881581
申请日：2004-06-30
申请人： Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
发明人： Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/3173 , G11B5/3903 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： One illustrative method of fabricating a read sensor of a magnetic head includes the steps of forming a plurality of read sensor layers on a wafer; etching the read sensor layers to form a read sensor structure with a trench in front of the read sensor structure; forming a highly porous material within the trench; and slicing the wafer and lapping the sliced wafer through the highly porous material until an air bearing surface (ABS) of the magnetic head is reached. Advantageously, the highly porous material in front of the read sensor structure reduces mechanical stress on the read sensor during the lapping process. This reduces the likelihood that the amplitude of the read sensor will be degraded or set in a “flipped” or reversed orientation, as well as reduces the likelihood that electrostatic discharge (ESD) damage to the read sensor will occur.
摘要翻译：一种制造磁头的读取传感器的说明性方法包括以下步骤：在晶片上形成多个读取传感器层; 蚀刻读取的传感器层以形成读取的传感器结构，其中在传感器结构的前面具有沟槽; 在沟槽内形成高度多孔的材料; 并切片晶片并通过高度多孔材料研磨切片的晶片，直到达到磁头的空气轴承表面（ABS）。有利地，在读取传感器结构前面的高度多孔材料在研磨过程中减小了读取传感器上的机械应力。这降低了读取传感器的幅度将被降级或设置为“翻转”或反向取向的可能性，并且降低了对读取传感器的静电放电（ESD）损坏将发生的可能性。

7. 发明申请

US20050063103A1 Method of forming an embedded read element 失效
标题翻译：形成嵌入式读取元素的方法
公开(公告)号：US20050063103A1
公开(公告)日：2005-03-24
申请号：US10666679
申请日：2003-09-19
申请人： Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
发明人： Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
IPC分类号： B24B37/04 , B24B49/10 , G11B5/39 , G11B5/33 , B24B49/00 , B24B51/00 , G11B5/127
CPC分类号： B24B37/013 , B24B49/10 , G11B5/39 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： A method of forming an embedded read element is used in the fabrication process of a magnetic head assembly including write and read heads. In this method, three photolithographic patterning steps are applied for defining the designed height of the embedded read element, defining its designed width, and connecting it with conducting layers, respectively. An in-line lapping guide is also formed with a spacing in front of the embedded read element. In this method, two mechanical lapping steps are applied, one monitored by measuring the resistance of a parallel circuit of the embedded read element and the in-line lapping guide, and the other monitored by measuring the GMR response of the embedded read element.
摘要翻译：在包括写入和读取头的磁头组件的制造过程中使用形成嵌入式读取元件的方法。在该方法中，应用三个光刻图案步骤来定义嵌入式读取元件的设计高度，限定其设计宽度，并将其与导电层连接。在嵌入式读取元件的前面还形成有间距的在线研磨引导件。在这种方法中，应用了两个机械研磨步骤，一个通过测量嵌入式读取元件的并联电路的电阻和在线研磨导轨进行监测，另一个通过测量嵌入式读取元件的GMR响应进行监测。

8. 发明申请

US20050185345A1 Electrical lapping guide embedded in a shield of a magnetic head 有权
标题翻译：嵌入磁头屏蔽的电气研磨导轨
公开(公告)号：US20050185345A1
公开(公告)日：2005-08-25
申请号：US10783290
申请日：2004-02-20
申请人： Meng Ding , Huey-Ming Tzeng
发明人： Meng Ding , Huey-Ming Tzeng
IPC分类号： G11B5/127 , G11B5/187 , G11B5/33 , G11B5/39
CPC分类号： G11B5/3912 , Y10T29/49036
摘要： An electrical lapping guide (ELG) incorporated into a shield of a magnetic head for measuring lapping process during construction of the magnetic head.
摘要翻译：电磁研磨引导件（ELG），其结合到磁头的屏蔽件中，用于在磁头的构造期间测量研磨过程。

9. 发明申请

US20050241138A1 Method of making a read sensor while protecting it from electrostatic discharge (ESD) damage 失效
标题翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法
公开(公告)号：US20050241138A1
公开(公告)日：2005-11-03
申请号：US10835807
申请日：2004-04-30
申请人： Frederick Dill , Meng Ding , Kuok Ho , Jordan Katine , Scott MacDonald , Huey-Ming Tzeng
发明人： Frederick Dill , Meng Ding , Kuok Ho , Jordan Katine , Scott MacDonald , Huey-Ming Tzeng
IPC分类号： G11B5/187 , G11B5/31 , G11B5/39 , G11B5/40
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/40 , Y10T29/49021 , Y10T29/49043 , Y10T29/49048
摘要： A method of making a read sensor while protecting it from electrostatic discharge (ESD) damage involves forming a severable shunt during the formation of the read sensor. The method may include forming a resist layer over a plurality of read sensor layers; performing lithography with use of a mask to form the resist layer into a patterned resist which exposes left and right side regions over the read sensor layers as well as a shunt region; etching, with the patterned resist in place, to remove materials in the left and right side regions and in the shunt region; and depositing, with the patterned resist in place, left and right hard bias and lead layers in the left and right side regions, respectively, and in the shunt region for forming a severable shunt which electrically couples the left and right hard bias and lead layers together for ESD protection.
摘要翻译：制造读取传感器同时防止静电放电（ESD）损坏的方法包括在形成读取的传感器期间形成可分离的分流。该方法可以包括在多个读取传感器层上形成抗蚀剂层; 使用掩模执行光刻以将抗蚀剂层形成图案化的抗蚀剂，其在读取的传感器层以及分流区域上暴露左侧区域和右侧区域; 蚀刻，图案化抗蚀剂就位，以去除左右侧区域和分流区域中的材料; 并且分别在左侧区域和右侧区域以及分流区域中分别将图案化的抗蚀剂沉积在左侧和右侧的硬偏压和引线层，以形成可分离的分流器，其将左右硬偏压和引线层电耦合一起为ESD保护。

10. 发明授权

US07206172B2 Electrical lapping guide embedded in a shield of a magnetic head 有权
标题翻译：嵌入磁头屏蔽的电气研磨导轨
公开(公告)号：US07206172B2
公开(公告)日：2007-04-17
申请号：US10783290
申请日：2004-02-20
申请人： Meng Ding , Huey-Ming Tzeng
发明人： Meng Ding , Huey-Ming Tzeng
IPC分类号： G11B5/39 , B24B49/00 , B24B51/00
CPC分类号： G11B5/3912 , Y10T29/49036
摘要： An electrical lapping guide (ELG) incorporated into a shield of a magnetic head for measuring lapping process during construction of the magnetic head.
摘要翻译：电磁研磨引导件（ELG），其结合到磁头的屏蔽件中，用于在磁头的构造期间测量研磨过程。

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