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1. 再颁专利

USRE42887E1 Silicon carbide and other films and method of deposition 有权
标题翻译：碳化硅等薄膜及沉积方法
公开(公告)号：USRE42887E1
公开(公告)日：2011-11-01
申请号：US12548363
申请日：2009-08-26
申请人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy Dunning
发明人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy Dunning
IPC分类号： C23C16/00
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

2. 发明授权

US08153280B2 Composition comprising silicon carbide 有权
标题翻译：包含碳化硅的组合物
公开(公告)号：US08153280B2
公开(公告)日：2012-04-10
申请号：US11736964
申请日：2007-04-18
申请人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
发明人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
IPC分类号： B32B9/00
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

3. 发明授权

US07261919B2 Silicon carbide and other films and method of deposition 有权
标题翻译：碳化硅等薄膜及沉积方法
公开(公告)号：US07261919B2
公开(公告)日：2007-08-28
申请号：US10716006
申请日：2003-11-18
申请人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
发明人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
IPC分类号： C23C16/00
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

4. 发明申请

US20110001143A1 Composition Comprising Silicon Carbide 有权
标题翻译：包含碳化硅的组合物
公开(公告)号：US20110001143A1
公开(公告)日：2011-01-06
申请号：US11736964
申请日：2007-04-18
申请人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
发明人： Mehran Mehregany , Christian A. Zorman , Xiao-An Fu , Jeremy L. Dunning
IPC分类号： H01L29/24 , H01L29/84
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

5. 发明申请

US20050106320A1 Silicon carbide and other films and method of deposition 有权
标题翻译：碳化硅等薄膜及沉积方法
公开(公告)号：US20050106320A1
公开(公告)日：2005-05-19
申请号：US10716006
申请日：2003-11-18
申请人： Mehran Mehregany , Christian Zorman , Xiao-An Fu , Jeremy Dunning
发明人： Mehran Mehregany , Christian Zorman , Xiao-An Fu , Jeremy Dunning
IPC分类号： B81B3/00 , C23C16/32 , C23C16/52 , G02B26/08 , H01L21/04 , B32B9/00 , C23C16/24
CPC分类号： C23C16/325
摘要： A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particularly MEMS and NEMS devices, having substrates with films having these properties.
摘要翻译：公开了一种在衬底上沉积陶瓷膜，特别是碳化硅膜的方法，其中控制残余应力，残余应力梯度和电阻率。还公开了具有具有这些受控特性的沉积膜和具有这些性质的器件的衬底，特别是MEMS和NEMS器件，具有具有这些性质的膜的衬底。

6. 发明授权

US6136243A Method for molding high precision components 失效
标题翻译：高精度零件成型方法
公开(公告)号：US6136243A
公开(公告)日：2000-10-24
申请号：US90526
申请日：1998-06-04
申请人： Mehran Mehregany , Narayanan Rajan , Christian A. Zorman
发明人： Mehran Mehregany , Narayanan Rajan , Christian A. Zorman
IPC分类号： B29C33/42 , B81C1/00 , B81C99/00 , B29C41/08 , B29C33/52 , C23F1/02 , C23F1/04 , C25F3/02
CPC分类号： B81C99/009 , B81C99/0085 , B81C2201/0132 , B81C2201/034
摘要： A method for molding high precision components is provided that allows inexpensive, rapid fabrication of components using a process involving a silicon substrate, in which the mold pattern is created using multiple mask layers, a deep reactive ion etch process and photolithographic patterning techniques.
摘要翻译：提供了一种用于模制高精度部件的方法，其允许使用涉及硅衬底的工艺来廉价，快速地制造部件，其中使用多个掩模层制造模具图案，深反应离子蚀刻工艺和光刻图案化技术。

7. 发明申请

US20120232398A1 WIRELESS FETAL MONITORING SYSTEM 有权
标题翻译：无线FET监控系统
公开(公告)号：US20120232398A1
公开(公告)日：2012-09-13
申请号：US13290002
申请日：2011-11-04
申请人： Masoud Roham , Enrique Saldivar , Srinivas Raghavan , Mehran Mehregany , Mitul Shah
发明人： Masoud Roham , Enrique Saldivar , Srinivas Raghavan , Mehran Mehregany , Mitul Shah
IPC分类号： A61B5/024 , A61B5/0444 , A61B7/00 , A61B8/00 , A61B8/02
CPC分类号： A61B5/0011 , A61B5/0022 , A61B5/02411 , A61B5/02438 , A61B5/02444 , A61B5/0245 , A61B5/033 , A61B5/04882 , A61B5/4356 , A61B5/6832 , A61B8/0866 , A61B8/4227 , A61B8/4472 , A61B8/488 , A61B8/565
摘要： A wireless fetal and maternal monitoring system includes a fetal sensor unit adapted to receive signals indicative of a fetal heartbeat, the sensor optionally utilizing a Doppler ultrasound sensor. A short-range transmission unit sends the signals indicative of fetal heartbeat to a gateway unit, either directly or via an auxiliary communications unit, in which case the electrical coupling between the short-range transmission unit and the auxiliary communications unit is via a wired connection. The system includes a contraction actuator actuatable upon a maternal uterine contraction, which optionally is a EMG sensor. A gateway device provides for data visualization and data securitization. The gateway device provides for remote transmission of information through a data communication network. A server adapted to receive the information from the gateway device serves to store and process the data, and an interface system to permits remote patient monitoring.
摘要翻译：无线胎儿和母亲监测系统包括适于接收指示胎儿心跳的信号的胎儿传感器单元，所述传感器可选地使用多普勒超声传感器。短距离传输单元直接地或经由辅助通信单元将指示胎心跳信号的信号发送到网关单元，在这种情况下，短程传输单元和辅助通信单元之间的电耦合经由有线连接。该系统包括可在母体子宫收缩时致动的收缩致动器，其可选地是EMG传感器。网关设备提供数据可视化和数据证券化。网关设备通过数据通信网络提供信息的远程传输。适于从网关设备接收信息的服务器用于存储和处理数据，以及允许远程病人监视的接口系统。

8. 发明申请

US20110306859A1 MULTIPURPOSE, MODULAR PLATFORM FOR MOBILE MEDICAL INSTRUMENTATION 审中-公开
标题翻译：多用途移动医疗仪器的模块化平台
公开(公告)号：US20110306859A1
公开(公告)日：2011-12-15
申请号：US13102817
申请日：2011-05-06
申请人： Enrique SALDIVAR , Mehran Mehregany
发明人： Enrique SALDIVAR , Mehran Mehregany
IPC分类号： A61B5/145 , A61B5/01 , A61N5/06 , A61B5/0488 , A61M5/142 , A61B5/0402 , A61B5/08 , G08B1/08 , A61N1/362
CPC分类号： A61B5/6898 , A61B5/0404 , A61B5/08 , A61B5/082 , A61B5/0836 , A61B5/14551 , A61B5/6823
摘要： A system provides for mobile medical instrumentation for use with a body. The system includes a primary wireless communication device, such as a cell phone or tablet computer, and one or more cradles. The cradles provide an interface to the body which provides for input of signals from the body, and optionally, therapeutic outputs to the body. The cradle and the primary wireless communication device may be releasably joined together so as to form a unitary structure when contacting the body. Alternately, the cradle may interface with the body, and communicate wirelessly to the primary wireless communication device. A cradle adapted to provide for a portable electrocardiogram includes a plurality of electrodes adapted for contact or non-contact sensing of the body. In the preferred embodiment, three electrodes are arranged in a triangular arrangement, most preferably a Einthoven triangular arrangement, with the distance between electrodes being 4 centimeters or less.
摘要翻译：系统提供与身体一起使用的移动医疗仪器。该系统包括诸如手机或平板计算机的主要无线通信设备以及一个或多个托架。支架为身体提供了一个接口，该接口提供了来自身体的信号输入，以及可选地对身体的治疗输出。支架和主无线通信设备可以可释放地连接在一起，以便当接触身体时形成整体结构。或者，托架可以与身体接口，并且与主无线通信设备无线通信。适于提供便携式心电图的支架包括适于接触或非接触感测身体的多个电极。在优选实施例中，三个电极以三角形布置，最优选地是Einthoven三角形布置，电极之间的距离为4厘米或更小。

9. 发明授权

US07892876B2 Three-axis accelerometers and fabrication methods 有权
标题翻译：三轴加速度计和制造方法
公开(公告)号：US07892876B2
公开(公告)日：2011-02-22
申请号：US12503382
申请日：2009-07-15
申请人： Mehran Mehregany
发明人： Mehran Mehregany
IPC分类号： H01L21/00 , H01L21/56
CPC分类号： G01P15/18 , B81B2201/0235 , B81C1/00182 , B81C2201/0111 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/084 , Y10T29/49156
摘要： Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.
摘要翻译：公开了MEMS加速度计及其制造方法。示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且其与通过间隙围绕其的基板分离。导电锚固体耦合到检测质量块，并且与防护物质分离的多个导电悬浮肛门从锚固体延伸并且耦合到围绕证明物质的基底。多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

10. 发明申请

US20100078753A1 Flow Sensor and Method of Fabrication 审中-公开
标题翻译：流量传感器及其制作方法
公开(公告)号：US20100078753A1
公开(公告)日：2010-04-01
申请号：US12243941
申请日：2008-10-01
申请人： Mehran Mehregany , Nelsimar Moura Vandelli, JR.
发明人： Mehran Mehregany , Nelsimar Moura Vandelli, JR.
IPC分类号： H01L21/28 , H01L29/66
CPC分类号： G01F1/6888 , G01F1/6845
摘要： A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.
摘要翻译：公开了一种用于形成具有自支承热承载元件的流量传感器的方法。由于缺乏对支撑膜的热损失，自支撑的承载元件能够以更高的热效率运行，从而能够实现更低的功率消耗和更高的灵敏度。自支撑的承载元件有助于更宽的工作温度范围和与苛刻介质的兼容性。

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