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1. 发明授权

US08610354B2 Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge 有权
标题翻译：通过基于气体放电的高频高电流放电产生短波长辐射的方法和装置
公开(公告)号：US08610354B2
公开(公告)日：2013-12-17
申请号：US13311023
申请日：2011-12-05
申请人： Max Christian Schuermann , Lutz Dippmann , Juergen Kleinschmidt , Guido Schriever
发明人： Max Christian Schuermann , Lutz Dippmann , Juergen Kleinschmidt , Guido Schriever
IPC分类号： H01J7/24
CPC分类号： H05H1/46 , H05G2/003 , H05H2001/4682
摘要： The invention is related to a gas discharge-based radiation source which emits short-wavelength radiation, wherein an emitter is ionized and compressed by pulse-shaped currents between two electrodes arranged in a vacuum chamber and is excited to form an emitting plasma. According to the invention, the plasma is preserved by means of a high-frequency sequence of pulse-shaped currents the pulse repetition period of which is adjusted so as to be shorter than a lifetime of the plasma so that the plasma is kept periodically alternating between a high-energy state of an emitting compressed plasma and a low-energy state of a relaxing plasma. For exciting the relaxing plasma to the compressed plasma, excitation energy is coupled into the relaxing plasma by making use of pulse-shaped currents with repetition frequencies between 50 kHz and 4 MHz and pulse widths equal to the pulse repetition period.
摘要翻译：本发明涉及一种发射短波长辐射的基于气体放电的辐射源，其中发射体被排列在真空室中的两个电极之间的脉冲电流电离和压缩，并被激发以形成发射等离子体。根据本发明，通过脉冲重复周期被调整成比等离子体的寿命更短的脉冲形电流的高频序列来保持等离子体，使得等离子体周期性地在发射压缩等离子体的高能态和松弛等离子体的低能态。为了激发压缩等离子体的松弛等离子体，通过利用重复频率在50kHz和4MHz之间的脉冲形电流并且脉冲宽度等于脉冲重复周期，激发能量耦合到松弛等离子体中。

2. 发明授权

US08410422B2 Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma 有权
标题翻译：用于调整从等离子体发射的高能辐射束束的特性的方法和装置
公开(公告)号：US08410422B2
公开(公告)日：2013-04-02
申请号：US13436923
申请日：2012-03-31
申请人： Denis Bolshukhin , Alexander Christian Keller , Max Christian Schuermann , Guido Schriever , Imtiaz Ahmad , Juergen Kleinschmidt
发明人： Denis Bolshukhin , Alexander Christian Keller , Max Christian Schuermann , Guido Schriever , Imtiaz Ahmad , Juergen Kleinschmidt
IPC分类号： G12B13/00 , G01D18/00
CPC分类号： G03F7/70133 , G01J1/4257 , G01J1/429 , G03F7/70141 , G03F7/70166 , G03F7/7085 , H05G2/001
摘要： The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.
摘要翻译：本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是由不同扇区的强度值的比较确定，用于对准收集器光学器件。

3. 发明申请

US20120248327A1 Method and Arrangement for the Adjustment of Characteristics of a Beam Bundle of High-Energy Radiation Emitted from a Plasma 有权
标题翻译：用于调整等离子体发射的高能量辐射束束特性的方法和装置
公开(公告)号：US20120248327A1
公开(公告)日：2012-10-04
申请号：US13436923
申请日：2012-03-31
申请人： Denis Bolshukhin , Alexander Christian Keller , Max Christian Schuermann , Guido Schriever , Imtiaz Ahmad , Juergen Kleinschmidt
发明人： Denis Bolshukhin , Alexander Christian Keller , Max Christian Schuermann , Guido Schriever , Imtiaz Ahmad , Juergen Kleinschmidt
IPC分类号： H01J3/14
CPC分类号： G03F7/70133 , G01J1/4257 , G01J1/429 , G03F7/70141 , G03F7/70166 , G03F7/7085 , H05G2/001
摘要： The invention is related to the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma, particularly for applications in semiconductor lithography. For acquiring and adjusting characteristics of a beam bundle of high-energy radiation emitted from a plasma and focused by means of collector optics, an intensity distribution of the radiation is acquired over the cross section of a convergent beam bundle in a measuring plane perpendicular to the optical axis in front of an intermediate focus of the collector optics, and intensity values are recorded in defined sectors for a quantity of reception regions of a measuring device which are aligned with different radii concentric to the optical axis, and measured quantities and control variables are determined from a comparison of the intensity values of different sectors for aligning the collector optics.
摘要翻译：本发明涉及从等离子体发射的高能辐射的束束的特性的调整，特别是在半导体光刻中的应用。为了获取和调整从等离子体发射并通过集光器光学聚焦的高能辐射束束的特性，在与垂直于等离子体的测量平面中的会聚束束的横截面上获取辐射的强度分布光轴在收集器光学器件的中间焦点前方，并且强度值被记录在与光轴同心的不同半径对准的测量装置的接收区域的数量的限定扇区中，并且测量的量和控制变量是由不同扇区的强度值的比较确定，用于对准收集器光学器件。

4. 发明申请

US20100078578A1 METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVELENGTH RADIATION SOURCES 审中-公开
标题翻译：基于等离子体的短波辐射源的运行方法和布置
公开(公告)号：US20100078578A1
公开(公告)日：2010-04-01
申请号：US12563305
申请日：2009-09-21
申请人： Max Christian Schuermann , Boris Tkachenko , Denis Bolshukhin , Juergen Kleinschmidt , Guido Schriever
发明人： Max Christian Schuermann , Boris Tkachenko , Denis Bolshukhin , Juergen Kleinschmidt , Guido Schriever
IPC分类号： G21K5/00
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70841 , G03F7/70916
摘要： The invention is directed to a method for operating plasma-based short-wavelength radiation sources, particularly EUV radiation sources, having a long lifetime and to an arrangement for generating plasma-based short-wavelength radiation. It is the object of the invention to find a novel possibility for operating plasma-based short-wavelength radiation sources with a long lifetime which permits extensive debris mitigation without the main process of radiation generation being severely impaired through the use of buffer gas and without the need for substantial additional expenditure for generating partial pressure in a spatially narrowly limited manner. According to the invention, this object is met in that hydrogen gas as buffer gas (41) is introduced into the vacuum chamber (1) under a pressure such that a pressure-distance product in the range of 1 to 100 Pa·m is realized while taking into account the geometric radiation paths of the radiation emitted by the emitter plasma (21) within the buffer gas (41; 44), and the vacuum chamber (1) is continuously evacuated for adjusting a quasistatic pressure (42; 47) and for removing residual emitter material and buffer gas (41).
摘要翻译：本发明涉及一种用于操作具有长寿命的基于等离子体的短波长辐射源，特别是EUV辐射源的方法和用于产生基于等离子体的短波长辐射的装置。本发明的目的是找到一种具有长寿命的基于等离子体的短波长辐射源的新型可能性，其允许广泛的碎片减轻，而不会通过使用缓冲气体严重损害主要的辐射发生过程，而不需要需要在空间狭窄限制的方式产生分压的大量额外支出。根据本发明，通过将氢气作为缓冲气体（41）在压力范围为1〜100Pa·m的压力下被引入真空室（1）中，同时考虑由缓冲气体（41; 44）内的发射体等离子体（21）发射的辐射的几何辐射路径，并且真空室（1）被连续抽真空以调节准静压（42; 47）和用于去除残留的发射体材料和缓冲气体（41）。

5. 发明授权

US07072370B2 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources 有权
标题翻译：用于产生脉冲电流的布置，具有高重复率和高电流强度，用于气体放电泵浦辐射源
公开(公告)号：US07072370B2
公开(公告)日：2006-07-04
申请号：US11020749
申请日：2004-12-22
申请人： Vladimir Korobochko , Denis Bolshukhin , Lutz Dippmann , Spencer Merz , Hubertus Von Bergmann , Juergen Kleinschmidt
发明人： Vladimir Korobochko , Denis Bolshukhin , Lutz Dippmann , Spencer Merz , Hubertus Von Bergmann , Juergen Kleinschmidt
IPC分类号： H01S3/00
CPC分类号： H05G2/003 , H03K3/57 , H05B41/34
摘要： The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation. The object of the invention, to find a novel possibility for generating pulsed high-energy currents for a gas discharge pumped radiation source which permits a stable generation of high voltage and a reliable resetting of voltage using simple circuitry, is met according to the invention in that the charging circuit is an LC inversion charging circuit which communicates with a DC voltage source that provides only one half of the high voltage required for the gas discharge, wherein the inversion charging circuit has a capacitor bank with a first capacitor arranged directly parallel to the DC voltage source and a second capacitor which contributes after simultaneous charging to the recharging of the first capacitor by a triggered switch by a saturable recharging inductor for recharging the first capacitor, as a result of which the full high voltage required for discharging is provided in the capacitor bank.
摘要翻译：本发明涉及一种用于产生气体放电泵浦辐射源的脉冲电流的装置，特别是具有高重复率和高电流强度用于产生等离子体发射EUV辐射。本发明的目的是为了找到用于产生气体放电泵浦辐射源的脉冲高能电流的新型可能性，其允许使用简单电路稳定地产生高电压和可靠的电压复位，根据本发明，所述充电电路是与仅提供气体放电所需的高电压的一半的直流电压源进行通信的LC反相充电电路，其中所述反相充电电路具有电容器组，所述电容器组具有直接平行于所述第一电容器直流电压源和第二电容器，其在通过用于再充电第一电容器的可饱和充电电感器的触发开关同时充电到第一电容器的充电之后起作用，从而在第一电容器中提供放电所需的全部高电压电容器组。

6. 发明申请

US20050200304A1 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources 有权
标题翻译：用于产生脉冲电流的布置，具有高重复率和高电流强度，用于气体放电泵浦辐射源
公开(公告)号：US20050200304A1
公开(公告)日：2005-09-15
申请号：US11020749
申请日：2004-12-22
申请人： Vladimir Korobochko , Denis Bolshukhin , Lutz Dippmann , Spencer Merz , Hubertus Bergmann , Juergen Kleinschmidt
发明人： Vladimir Korobochko , Denis Bolshukhin , Lutz Dippmann , Spencer Merz , Hubertus Bergmann , Juergen Kleinschmidt
IPC分类号： H05H1/24 , H01L21/027 , H02M9/04 , H03K3/57 , H05B41/34 , H05G2/00 , H05H1/46 , H02M5/45
CPC分类号： H05G2/003 , H03K3/57 , H05B41/34
摘要： The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation. The object of the invention, to find a novel possibility for generating pulsed high-energy currents for a gas discharge pumped radiation source which permits a stable generation of high voltage and a reliable resetting of voltage using simple circuitry, is met according to the invention in that the charging circuit is an LC inversion charging circuit which communicates with a DC voltage source that provides only one half of the high voltage required for the gas discharge, wherein the inversion charging circuit has a capacitor bank with a first capacitor arranged directly parallel to the DC voltage source and a second capacitor which contributes after simultaneous charging to the recharging of the first capacitor by a triggered switch by a saturable recharging inductor for recharging the first capacitor, as a result of which the full high voltage required for discharging is provided in the capacitor bank.
摘要翻译：本发明涉及一种用于产生气体放电泵浦辐射源的脉冲电流的装置，特别是具有高重复率和高电流强度用于产生等离子体发射EUV辐射。本发明的目的是为了找到用于产生气体放电泵浦辐射源的脉冲高能电流的新型可能性，其允许使用简单电路稳定地产生高电压和可靠的电压复位，根据本发明，所述充电电路是与仅提供气体放电所需的高电压的一半的直流电压源进行通信的LC反相充电电路，其中所述反相充电电路具有电容器组，所述电容器组具有直接平行于所述第一电容器直流电压源和第二电容器，其在通过用于再充电第一电容器的可饱和充电电感器的触发开关同时充电到第一电容器的充电之后起作用，从而在第一电容器中提供放电所需的全部高电压电容器组。

7. 发明授权

US06815900B2 Radiation source with high average EUV radiation output 有权
标题翻译：具有高平均EUV辐射输出的辐射源
公开(公告)号：US06815900B2
公开(公告)日：2004-11-09
申请号：US10741882
申请日：2003-12-19
申请人： Imtiaz Ahmad , Juergen Kleinschmidt , Guido Schriever , Uwe Stamm , Sven Goetze
发明人： Imtiaz Ahmad , Juergen Kleinschmidt , Guido Schriever , Uwe Stamm , Sven Goetze
IPC分类号： H05H100
CPC分类号： H05G2/003
摘要： The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge. The object of the invention, to find a novel possibility for the realization of an EUV radiation source which achieves a high average radiation output in the EUV region and sufficiently long life and long-term stability, is met according to the invention in that a first electrode housing and a second electrode housing which are electrically separated from one another so as to be resistant to breakdown form parts of a vacuum chamber for a gas discharge for plasma generation, and the second electrode housing has an electrode collar which is enclosed concentrically by the first electrode housing so that the gas discharge is oriented substantially only parallel to the axis of symmetry of the electrode housings, and the electrode collar is stepped radially relative to the concentric insulator layer in such a way that at least one end region of the electrode collar is at a distance from the concentric insulator layer such that a concentric gap is formed. A substantially longer operating duration is achieved by the optimized electrode geometry in conjunction with material selection and effective heat dissipation.
摘要翻译：本发明涉及一种用于基于由气体放电产生的热的致密等离子体产生极紫外（EUV）辐射的辐射源。本发明的目的是为了发现实现EUV辐射源的新型可能性，其实现了EUV区域中的高平均辐射输出并且具有足够长的寿命和长期稳定性，根据本发明，满足第一电极壳体和第二电极壳体，其彼此电分离，以便抵抗用于等离子体产生的气体放电的真空室的部件的分解，并且第二电极壳体具有电极套环，该电极套筒同心地包围第一电极壳体，使得气体放电基本上仅平行于电极壳体的对称轴线定向，并且电极套环相对于同心绝缘体层级径向地延伸，使得电极套环的至少一个端部区域距离同心绝缘体层一定距离，从而形成同心间隙。通过优化的电极几何结构与材料选择和有效散热来实现更长的操作持续时间。

8. 发明授权

US06894298B2 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge 有权
标题翻译：基于气体放电产生极紫外（EUV）辐射的装置
公开(公告)号：US06894298B2
公开(公告)日：2005-05-17
申请号：US10267373
申请日：2002-10-09
申请人： Imtiaz Ahmad , Guido Schriever , Juergen Kleinschmidt
发明人： Imtiaz Ahmad , Guido Schriever , Juergen Kleinschmidt
IPC分类号： G21K5/00 , G03F7/20 , G21K5/02 , H01L21/027 , H05G2/00 , H05H1/24 , B23K10/00
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/005
摘要： The invention is directed to a method and an arrangement for generating extreme ultraviolet (EUV) radiation, i.e., radiation of high-energy photons in the wavelength range from 11 to 14 nm, based on a gas discharge. The object of the invention, to find a novel possibility for generating EUV radiation in which an extended life of the system is achieved with stable generation of a dense, hot plasma column, is met according to the invention in that a preionization discharge is ignited between two parallel disk-shaped flat electrodes prior to the main discharge by a surface discharge along the superficies surface of a cylindrical insulator with a plasma column generated through the gas discharge with pulsed direct voltage, which preionization discharge carries out an ionization of the working gas in the discharge chamber by means of fast charged particles. The preionization discharge is triggered within a first electrode housing and the main discharge takes place between a narrowed output of the first electrode housing and a part of the second electrode housing close to the outlet opening of the discharge chamber. The plasma develops in a part of the second electrode housing covered by a tubular insulator and, as a result of the current-induced magnetic field, contracts to form a dense, hot plasma column, one end of which is located in the vicinity of the outlet opening of the second electrode housing.
摘要翻译：本发明涉及一种基于气体放电产生极紫外（EUV）辐射，即在11至14nm波长范围内的高能量光子辐射的方法和装置。本发明的目的是为了发现产生EUV辐射的新型可能性，其中通过稳定产生致密的热等离子体柱来实现系统的延长的使用寿命，根据本发明，可以在两个平行的圆盘形扁平电极在主要放电之前，沿着具有脉冲直流电压通过气体放电产生的等离子体柱的圆柱形绝缘子的表面放电表面放电，该前置放电执行工作气体的离子化放电室通过快速带电粒子。预除电放电在第一电极壳体内触发，并且主放电发生在第一电极壳体的变窄的输出端和靠近放电室的出口的第二电极壳体的一部分之间。等离子体在由管状绝缘体覆盖的第二电极壳体的一部分中产生，并且由于电流感应磁场的结果而收缩以形成致密的热等离子体柱，其一端位于第二电极壳体的出口开口。

9. 发明授权

US06855932B2 Detector arrangement for energy measurement of pulsed x-ray radiation 有权
标题翻译：用于脉冲X射线辐射能量测量的检测器布置
公开(公告)号：US06855932B2
公开(公告)日：2005-02-15
申请号：US10393930
申请日：2003-03-20
申请人： Guido Schriever , Juergen Kleinschmidt
发明人： Guido Schriever , Juergen Kleinschmidt
IPC分类号： G01J5/00 , G01T1/00 , G01T1/185 , G01T1/29 , G01T1/36
CPC分类号： G01T1/185 , G01T1/29
摘要： The invention is directed to a detector arrangement for energy measurement of pulsed x-ray radiation, particularly for monitoring the energy emitted by pulsed EUV radiation sources. The object of the invention, to find a novel possibility for energy measurement of high-energy x-ray radiation or EUV radiation which permits an accurate monitoring of the radiation dose over the entire life of the radiation source without continual calibration of the radiation detectors, is met according to the invention in that a closed vessel is provided which has an inlet opening for the radiation to be detected, is filled with a suitable gas under defined pressure for absorbing the radiation and has a linear extension, at least in the direction of incidence of the radiation, which is adapted to the absorption behavior of the gas so that the radiation to be detected is absorbed before it can reach a wall of the vessel, and at least one pressure sensor is arranged in the vessel for measuring a pressure wave generated due to the local temperature change occurring as a result of temporary intensive radiation absorption.
摘要翻译：本发明涉及用于脉冲X射线辐射能量测量的检测器装置，特别是用于监测由脉冲EUV辐射源发射的能量。本发明的目的是为了找到能量测量高能X射线辐射或EUV辐射的新颖可能性，其允许在辐射源的整个寿命期内对辐射剂量的精确监测，而不必对辐射探测器进行持续校准，根据本发明满足的是，提供了一个封闭的容器，其具有用于待检测的辐射的入口，在限定的压力下填充合适的气体以吸收辐射并具有线性延伸，至少在辐射的入射率适合于气体的吸收行为，使得待检测的辐射在其可以到达容器的壁之前被吸收，并且至少一个压力传感器布置在容器中用于测量压力波由于临时强烈的辐射吸收而导致局部温度变化而产生。

10. 发明授权

US07974321B2 Method and arrangement for stabilizing the average emitted radiation output of a pulsed radiation source 有权
标题翻译：用于稳定脉冲辐射源的平均发射辐射输出的方法和装置
公开(公告)号：US07974321B2
公开(公告)日：2011-07-05
申请号：US11949924
申请日：2007-12-04
申请人： Jesko Brudermann , Juergen Kleinschmidt
发明人： Jesko Brudermann , Juergen Kleinschmidt
IPC分类号： H01S3/10
CPC分类号： G03B27/72 , G01J1/18 , G01J1/4257 , G01J11/00 , G03F7/70041 , G03F7/70558
摘要： The invention is directed to a method and an arrangement for stabilizing the average emitted radiation output of a pulsed radiation source. It is the object of the invention to find a novel possibility for stabilizing the average emitted radiation output of a pulsed radiation source which enables a reliable regulation even when there is no sufficiently reliable manipulated variable for influencing the emitted pulse energy (Ei). According to the invention, this object is met in that the individual pulse energy (Ei) of the current radiation pulse is measured, the deviation of the current individual pulse energy (Ei) from a previously determined target value (E0) is determined, and the pulse interval (Δti+1) preceding the triggering of the next radiation pulse is controlled depending on the magnitude of the deviation between the current individual pulse energy (Ei) and the target value (E0) of the pulse energy.
摘要翻译：本发明涉及用于稳定脉冲辐射源的平均发射辐射输出的方法和装置。本发明的目的是找到一种用于稳定脉冲辐射源的平均发射辐射输出的新颖可能性，即使当没有足够可靠的操纵变量来影响发射的脉冲能量（Ei）时，也能够进行可靠的调节。根据本发明，满足目的在于测量当前辐射脉冲的单个脉冲能量（Ei）的目的，确定当前独立脉冲能量（Ei）与先前确定的目标值（E0）的偏差，以及根据当前个体脉冲能量（Ei）与脉冲能量的目标值（E0）之间的偏差大小来控制触发下一个辐射脉冲之前的脉冲间隔（＆Dgr; ti + 1）。

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