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1. 发明授权

US06510697B2 System and method for recovering from a power failure in a cryopump 有权
标题翻译：用于从低温泵中的电源故障中恢复的系统和方法
公开(公告)号：US06510697B2
公开(公告)日：2003-01-28
申请号：US09878160
申请日：2001-06-07
申请人： Maureen C. Buonpane , Philip D. Acomb , Brian D. Foley , Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Robert M. Patterson
发明人： Maureen C. Buonpane , Philip D. Acomb , Brian D. Foley , Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Robert M. Patterson
IPC分类号： B01D800
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during recovery to condense gases in the cryopump. A startup process is initiated where the cryopump was in a startup process before the power failure and present conditions of the cryopump indicate that the cryopump is sufficiently empty or clean. If the operating state and present conditions indicate that a corrosive or hazardous liquid remains in the cryopump, a regeneration process is initiated. If the cryopump was in a shutdown process before the power failure, the cryopanel of the cryopump is refrigerated to a temperature at which gases sublimate from the cryopanel. The temperature of the cryopanel is then maintained until the gases are removed. A refrigerator having a displacer with variable speed and heaters may be used to control the temperature of the cryopanel. When the cryopump is sufficiently empty, the cryopump is turned off.
摘要翻译：在电源故障恢复中，确定电源故障之前的操作状态和低温泵的当前状况以启动再生或启动过程。在电源故障前冰箱运行的地方，在回收期间打开冷凝器中的气体。开始启动过程，在停电之前，低温泵处于起动过程中，低温泵的现状表明低温泵足够空或干净。如果操作状态和现状表明低温泵中存在腐蚀性或危险性的液体，则会启动再生过程。如果低温泵在电源故障之前处于关闭过程中，则将低温泵的冷冻板冷藏至气体从冷冻板升华的温度。然后保持冷冻板的温度，直到气体被去除。具有可变速度的置换器和加热器的冰箱可用于控制冷冻板的温度。当低温泵足够空时，关闭低温泵。

2. 发明授权

US5862671A Purge and rough cryopump regeneration process, cryopump and controller 失效
标题翻译：吹扫和粗略的低温泵再生过程，低温泵和控制器
公开(公告)号：US5862671A
公开(公告)日：1999-01-26
申请号：US848973
申请日：1997-05-02
申请人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
发明人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
IPC分类号： F04B37/16 , F04B37/08 , B01D8/00
CPC分类号： F04B37/085 , Y10S417/901
摘要： A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
摘要翻译：在清洗过程中，通过对低温泵进行粗加工来再生低温泵。首先在高温模式下进行吹扫和粗加工，然后在较低的环境温度模式下进行。在较低温度模式下，低温冰箱打开。如果系统在较低温度下进行粗加工后未能进行粗糙试验，则会在粗阀打开时重新进行。

3. 发明授权

US5775109A Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor 失效
标题翻译：多个低温冰箱由普通压缩机提供冷却时间的增强
公开(公告)号：US5775109A
公开(公告)日：1998-07-07
申请号：US778035
申请日：1997-01-02
申请人： Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Martin L. Stein , Robert E. Khederian
发明人： Michael J. Eacobacci, Jr. , Stephen J. Yamartino , Martin L. Stein , Robert E. Khederian
IPC分类号： B01D8/00 , F25B9/10 , F25B9/14 , F25B9/00
CPC分类号： B01D8/00 , F25B9/10 , F25B9/14
摘要： A method for regulating the cooldown of multiple cryogenic refrigerators supplied with compressed refrigerant from a common compressor includes the following steps. The cooldown of the refrigerators is monitored. The cooldown of at least one refrigerator is then governed to regulate the gas flow distributed from the compressor to each of the refrigerators to enhance the cooldown of an individual refrigerator. Governing a refrigerator to achieve the objectives of this method can be achieved by various processes. These processes include supplying heat to the refrigerator, slowing the speed of the displacer in the refrigerator, halting the motion of the displacer, and profiling the speed of the displacer as a function of the first and second-stage temperatures. A system for performing the above-described method includes a compressor; a plurality of refrigerators, each receiving compressed gas from the compressor; and a network terminal programmed to govern the cooldown of at least one refrigerator to accelerate the cooldown of another refrigerator.
摘要翻译：用于调节从普通压缩机供应压缩制冷剂的多个低温冰箱的冷却时间的方法包括以下步骤。监视冰箱的冷却时间。然后控制至少一个冰箱的冷却时间以调节从压缩机分配到每个冰箱的气体流量，以增强单个冰箱的冷却时间。管理冰箱实现这一方法的目标可以通过各种工艺实现。这些过程包括向冰箱提供热量，减慢冰箱中的置换器的速度，停止置换器的运动，以及根据第一和第二阶段温度来调整置换器的速度。用于执行上述方法的系统包括压缩机; 多个冰箱，各自从压缩机接收压缩气体; 以及被编程为控制至少一个冰箱的冷却时间以加速另一个冰箱的冷却时间的网络终端。

4. 发明授权

US5156007A Cryopump with improved second stage passageway 失效
标题翻译：具有改进的第二阶段通行证的CRYOPUMP
公开(公告)号：US5156007A
公开(公告)日：1992-10-20
申请号：US647848
申请日：1991-01-30
申请人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
发明人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
IPC分类号： F04B37/08 , F25D19/00
CPC分类号： F04B37/08 , F25D19/006 , Y10S417/901
摘要： Condensation on a cryopump second stage refrigerator cylinder is prevented by arranging a passageway between a colder second stage cylinder shield in thermal contact with the coldest section of the second stage and a warmer radiation shield in thermal contact with the warmer first stage. This arrangement produces a uniform and significant temperature differential in the passageway. The passageway is arranged so that the ratio of its length, L, to its width, W, is ideally greater than five. This ensures molecular collisions with the cold surface of the cylinder shield so that gas molecules are tightly bound to the cylinder shield. As a result, condensation on the refrigerator cylinder and resultant pressure variations are prevented.
摘要翻译：通过在与第二级的最冷部分热接触的较冷的第二级气缸罩与在较暖的第一级热接触的较暖的辐射屏蔽之间设置通道来防止在低温泵第二级冷藏箱上的冷凝。这种布置在通道中产生均匀且显着的温差。该通道被布置成使得其长度L与其宽度W之比理想地大于5。这确保了与气缸屏蔽件的冷表面的分子碰撞，使得气体分子紧密地结合到气缸罩。结果，可以防止冰箱圆筒上的冷凝和合成的压力变化。

5. 发明授权

US5375424A Cryopump with electronically controlled regeneration 失效
标题翻译：低温电子控制再生
公开(公告)号：US5375424A
公开(公告)日：1994-12-27
申请号：US23697
申请日：1993-02-26
申请人： Allen J. Bartlett , Stephen J. Yamartino
发明人： Allen J. Bartlett , Stephen J. Yamartino
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a fast partial regeneration process, the second stage of a cryopump is heated as purge gas is applied to the cryopump. In a test loop, the purge gas is turned off and the roughing valve is opened. If the cryopump is judged to be sufficiently empty of gases from the second stage by being roughed to a sufficiently low pressure in a short period of time the system proceeds to a reconditioning phase. If the system fails the test, however, it is repurged with a burst of warm purge gas and then retested. After passing the emptiness test, the pressure is further reduced by the roughing pump as heat is applied to the second stage. The heat is then turned off for cool down as the system continues to be rough pumped to a base pressure. At about the base pressure, the roughing valve is cycled to maintain the cryopump pressure at a level near to the base pressure. Where multiple cryopumps are coupled to a common roughing pump manifold, they are processed through a partial regeneration sequence in lock step to avoid cross contamination.
摘要翻译：在快速部分再生过程中，当吹扫气被施加到低温泵时，加热低温泵的第二阶段。在测试循环中，关闭吹扫气体，打开粗压阀。如果通过在短时间内将低温泵粗糙化到足够低的压力，则系统进入修复阶段，从而将低温泵判断为足够空的第二级的气体。然而，如果系统测试失败，则会用一阵温和的吹扫气体重新测试，然后重新测试。在通过空白试验之后，当加热到第二阶段时，由粗加工泵进一步降低压力。然后，随着系统继续粗略地泵送到基础压力，然后将热量关闭以冷却。在大约基本压力下，粗循环阀循环，以将低温泵压力保持在接近基本压力的水平。当多个低温泵连接到普通的粗加工泵歧管时，它们通过锁定步骤中的部分再生序列进行加工，以避免交叉污染。

6. 发明授权

US06327863B1 Cryopump with gate valve control 有权
标题翻译：冷冻泵与闸阀控制
公开(公告)号：US06327863B1
公开(公告)日：2001-12-11
申请号：US09627579
申请日：2000-07-28
申请人： Stephen J. Yamartino , Brett W. Allen , Carl H. Geden
发明人： Stephen J. Yamartino , Brett W. Allen , Carl H. Geden
IPC分类号： B01D800
CPC分类号： F04B37/085 , Y10S417/901
摘要： The present invention provides a cryopump coupled to a gate valve in which the gate valve is automatically prevented from being opened during unsafe conditions, for example, when combustible gases such as hydrogen may be present in the cryopump, but may be operated during safe conditions. A method of controlling the gate valve includes automatically determining with a controller whether the cryopump is operating in one of safe and unsafe conditions. The unsafe conditions are situations where combustible gas may be present in the cryopump and may be correlated to parameters of the cryopump including operational modes of the cryopump, and sensed parameters. The gate valve is automatically controlled with the controller based on the determination of safe and unsafe conditions. The gate valve is automatically locked closed during unsafe conditions and remains locked until the unsafe conditions are removed. The gate valve is automatically unlocked after the unsafe conditions change to safe conditions where the gate valve is freely operable.
摘要翻译：本发明提供了一种联接到闸阀的低温泵，其中在不安全的条件下，例如当低温泵中可能存在可燃气体（例如氢气）时可自动防止闸阀被打开，但可在安全条件下操作。控制闸阀的方法包括用控制器自动确定低温泵是否在安全和不安全的条件之一中运行。不安全的条件是可燃气体可能存在于低温泵中的情况，并且可能与低温泵的参数相关，包括低温泵的操作模式和感测参数。基于安全和不安全条件的确定，控制器自动控制闸阀。闸阀在不安全的条件下自动锁定，并保持锁定状态，直到不安全的状况被去除。在不安全的条件改变为闸阀自由操作的安全条件后，闸阀自动解锁。

7. 发明授权

US5137050A Pressure relief valve and cryopump utilizing the same 失效
标题翻译：压力减压阀和使用它的CRYOPUMP
公开(公告)号：US5137050A
公开(公告)日：1992-08-11
申请号：US800759
申请日：1991-12-02
申请人： Hans T. Clarke , Stephen J. Yamartino , Thomas J. Dunn
发明人： Hans T. Clarke , Stephen J. Yamartino , Thomas J. Dunn
IPC分类号： F04B37/16 , F16K1/36 , F16K1/46 , F16K17/04 , F16K25/00
CPC分类号： F16K17/0466 , F16K1/465 , F16K25/00 , Y10S251/90 , Y10T137/7931 , Y10T137/7932
摘要： A self-cleaning pressure relief valve has a spring-biased valve closure with an annular contact edge which makes contact with an o-ring to seal the valve. The annular contact edge is slightly larger in radius than the central radius of the o-ring so that changing pressure on the closure causes the contact edge to slide along the surface of the o-ring.
摘要翻译：自清洁压力释放阀具有弹簧偏压阀关闭，环形接触边缘与O形环接触以密封阀。环形接触边缘的半径比O形环的中心半径略大，因此封闭件上的变化压力使得接触边缘沿着O形环的表面滑动。

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