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    • 1. 发明申请
    • Perfluoropolyethers
    • 全氟聚醚
    • US20050074686A1
    • 2005-04-07
    • US10953768
    • 2004-09-30
    • Mattia BassiPier Guarda
    • Mattia BassiPier Guarda
    • G03F7/20C07C43/12C08G65/00C08G65/04C08G65/30C08G65/32G02B1/04G02B5/00G03C3/00G03F7/004H01L21/027
    • C08G65/32C08G65/007C08G65/30G02B1/04G03F7/2041C08L71/00
    • Use in optical systems as liquids to transmit light at wave lengths lower than 250 nm, in particular at 157 nm, of perfluoropolyethers having the following formula: X1—O(CF2O)n(CF2CF2O)m(CF2CF2CF2O)p (CF2CF2CF2CF2O)q—X2  (I) wherein: the repeating units —CF2O—, —CF2CF2O—, —CF2CF2CF2O—, —CF2CF2CF2CF2O— are statistically distributed along the chain; —X1 and —X2 are perfluoroalkyl chain end groups equal to or different from each other, having formula —(CF2)zCF3 wherein z is 0 or an integer from 1 to 3; n, m, p, q are 0 or integers comprised between 1 and 100, with the proviso that: at least one among n, m, p and q is different from zero; the ratio between the oxygen atoms and the carbon atoms (O/C) is higher than 0.33; wherein the chlorine atoms, determined by 19F-NMR are substantially absent.
    • 在光学系统中作为液体使用波长低于250nm(特别是157nm)的具有下式的全氟聚醚的光:X1-O(CF2O)n(CF2CF2O)m(CF2CF2CF2O)p(CF2CF2CF2CF2O)q- X2(I)其中:重复单元-CF2O-,-CF2CF2O-,-CF2CF2CF2O-,-CF2CF2CF2CF2O-沿着链统计分布; -X1和-X2是彼此等于或不同的全氟烷基链端基,其具有式 - (CF 2)z CF 3,其中z为0或1至3的整数; n,m,p,q是0或包含在1和100之间的整数,条件是:n,m,p和q中的至少一个不同于零; 氧原子和碳原子之间的比例(O / C)高于0.33; 其中通过19 F-NMR确定的氯原子基本上不存在。
    • 6. 发明授权
    • Perfluoropolyethers
    • 全氟聚醚
    • US07388646B2
    • 2008-06-17
    • US10953768
    • 2004-09-30
    • Mattia BassiPier Antonio Guarda
    • Mattia BassiPier Antonio Guarda
    • G03B27/42
    • C08G65/32C08G65/007C08G65/30G02B1/04G03F7/2041C08L71/00
    • Use in optical systems as liquids to transmit light at wave lengths lower than 250 nm, in particular at 157 nm, of perfluoropolyethers having the following formula: X1—O(CF2O)n(CF2CF2O)m(CF2CF2CF2O)p(CF2CF2CF2CF2O)q—X2  (I) wherein: the repeating units —CF2O—, —CF2CF2O—, —CF2CF2CF2O—, —CF2CF2CF2CF2O— are statistically distributed along the chain; —X1 and —X2 are perfluoroalkyl chain end groups equal to or different from each other, having formula —(CF2)zCF3 wherein z is 0 or an integer from 1 to 3; n, m, p, q are 0 or integers comprised between 1 and 100, with the proviso that: at least one among n, m, p and q is different from zero; the ratio between the oxygen atoms and the carbon atoms (O/C) is higher than 0.33; wherein the chlorine atoms, determined by 19F-NMR are substantially absent.
    • 在光学系统中作为液体使用波长低于250nm,特别是157nm的具有下式的全氟聚醚的光:<?in-line-formula description =“In-line formula”end =“lead” (CF 2 O 2)n(CF 2)2 O 2(CF 2 O 2) (CF 2)2 CF 2 O 2)(C 1 -C 4) (CF 2 CF 2)2 CF 2 C 2 O 2)q - (CH 2) (I)<?in-line-formula description =“In-line Formulas”end =“tail”?>其中:重复单元-CF < -CF 2,CF 2,O,-CF 2,CF 2,CF 2, O-,-CF 2 CF 2 O 2是沿着链统计分布的; -X 1和-X 2是相同或不同的全氟烷基链端基,其具有式 - (CF 2 N 2)