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    • 1. 发明授权
    • Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
    • 微机电可调谐,共聚焦,垂直腔表面发射激光和fabry-perot滤光片
    • US06645784B2
    • 2003-11-11
    • US10136057
    • 2002-04-29
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • H01L2100
    • H01S5/18388G01J3/26G02B6/4203G02B26/001G02B26/0816G02B2006/12104G02B2006/12121H01S5/02284H01S5/0614H01S5/18366H01S5/3201
    • A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and microelectromechanically tunable Fabry-Perot filters with precise lateral and vertical dimensional control. Strained reflective dielectric film(s) are applied to a multiple quantum well structure to electronically band-gap-engineer the quantum wells. Appropriate strain in the reflective dielectric film layers is also used to create appropriate curvature in one of the reflective dielectric film stacks so as to form a confocal cavity between a planar reflective dielectric film layer and the curved reflective dielectric film layer in the vertical cavity surface emitting laser or filter. Microelectromechanical tunable vertical cavity surface emitting lasers and filter structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a micro-machined sacrificial polyimide or aluminum disk. Further, tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field.
    • 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器和微机电可调法布里 - 珀罗滤波器的方法。 将应变反射介电膜应用于多量子阱结构,以电子带隙工程化量子阱。 反射介电膜层中的适当应变也用于在反射介电膜堆叠之一中产生适当的曲率,以便在平面反射介电膜层和在垂直腔表面中的弯曲反射介电膜层之间形成共聚焦腔 激光或过滤器。 还提供了微电子机械可调谐垂直腔表面发射激光器和滤波器结构,其包括由电介质/金属膜或金属膜制成的悬浮膜结构,其在通过金属支撑柱锚固在周边的同时支撑腔调谐反射介电膜堆叠( s)。 通过使用微加工的牺牲聚酰亚胺或铝盘的微压铸来实现精确的空腔长度和横向尺寸。 此外,调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。
    • 2. 发明授权
    • In-line optoelectronic device packaging
    • 在线光电器件封装
    • US06874949B2
    • 2005-04-05
    • US10153171
    • 2002-05-21
    • Masud AzimiParviz TayebatiDaryoosh Vakhshoori
    • Masud AzimiParviz TayebatiDaryoosh Vakhshoori
    • G02B6/26G02B6/34G02B6/35G02B6/38G02B6/42G02B6/36
    • G02B6/421G02B6/264G02B6/266G02B6/29358G02B6/29361G02B6/29395G02B6/3512G02B6/353G02B6/3552G02B6/3594G02B6/3817G02B6/3845G02B6/3895G02B6/4202G02B6/4292
    • A fiber connector that facilitates alignment of and electrical communication with electrooptical devices on an optical fiber or interposed between optical fibers. An embodiment of in-line optoelectronic device packaging constructed according to principles of the invention includes a ferrule configured to receive an optical fiber with an optoelectronic device mounted on one end of the ferrule, for alignment with the fiber. Electrically-conductive deposits along the side of the ferrule supply electrical energy to or conduct electrical signals from the optoelectronic device. The optoelectronic device-carrying ferrule is inserted in a ceramic sleeve. Another ferrule, maintaining another optical fiber, also is inserted in the ceramic sleeve. Another embodiment constructed according to principles of the invention includes a second optoelectronic device mounted on the second ferrule. The electrically-conductive deposits permit ready serial deployment of optoelectronic devices between the optical fibers maintained by the ferrules in the sleeve.
    • 一种光纤连接器,其有助于与光纤上的电光器件对准并且与光纤之间的电光通信。 根据本发明的原理构造的在线光电子器件封装的实施例包括套圈,其被配置为接收具有安装在套圈的一端上的光电子器件的光纤,用于与光纤对准。 沿着套圈侧面的导电沉积物向光电器件提供电能或传导来自光电器件的电信号。 光电器件承载套圈插入陶瓷套筒中。 保持另一光纤的另一个套圈也插入陶瓷套筒中。 根据本发明的原理构造的另一实施例包括安装在第二套圈上的第二光电子器件。 导电沉积物允许在由套筒中的套圈保持的光纤之间准备好部署光电子器件。
    • 4. 发明授权
    • Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
    • 微机电可调谐,共聚焦,垂直腔表面发射激光和fabry-perot滤光片
    • US06438149B1
    • 2002-08-20
    • US09105399
    • 1998-06-26
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • H01S500
    • H01S5/18366G01J3/26G02B6/4203G02B26/001G02B26/0816G02B2006/12104G02B2006/12121H01S5/02284H01S5/041H01S5/0614H01S5/18369H01S5/18388H01S5/3201
    • A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and microelectromechanically tunable Fabry-Perot filters with precise lateral and vertical dimensional control. Strained reflective dielectric film(s) are applied to a multiple quantum well structure to electronically band-gap-engineer the quantum wells. Appropriate strain in the reflective dielectric film layers is also used to create appropriate curvature in one of the reflective dielectric film stacks so as to form a confocal cavity between a planar reflective dielectric film layer and the curved reflective dielectric film layer in the vertical cavity surface emitting laser or filter. Laser and filter structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a micro-machined sacrificial polyimide or aluminum disk. Further, tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field.
    • 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器和微机电可调法布里 - 珀罗滤波器的方法。 将应变反射介电膜应用于多量子阱结构,以电子带隙工程化量子阱。 在反射电介质膜层中的适当应变也用于在反射介电膜堆叠之一中产生适当的曲率,以便在平面反射介电膜层和垂直腔表面中的弯曲反射介电膜层之间形成共聚焦腔 激光或过滤器。 还提供了激光和滤波器结构,其包括由电介质/金属膜或金属膜制成的悬浮膜结构,其在通过金属支撑柱锚定在周边的同时支撑腔调谐反射介电膜堆叠。 通过使用微加工的牺牲聚酰亚胺或铝盘的微压铸来实现精确的空腔长度和横向尺寸。 此外,调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。
    • 6. 发明授权
    • In-line optoelectronic device packaging
    • 在线光电器件封装
    • US06390689B1
    • 2002-05-21
    • US09425253
    • 1999-10-22
    • Masud AzimiParviz TayebatiDaryoosh Vakhshoori
    • Masud AzimiParviz TayebatiDaryoosh Vakhshoori
    • G02B636
    • G02B6/421G02B6/264G02B6/266G02B6/29358G02B6/29361G02B6/29395G02B6/3512G02B6/353G02B6/3552G02B6/3594G02B6/3817G02B6/3845G02B6/3895G02B6/4202G02B6/4292
    • A fiber connector that facilitates alignment of and electrical communication with electrooptical devices on an optical fiber or interposed between optical fibers. An embodiment of in-line optoelectronic device packaging constructed according to principles of the invention includes a ferrule configured to receive an optical fiber with an optoelectronic device mounted on one end of the ferrule, for alignment with the fiber. Electrically-conductive deposits along the side of the ferrule supply electrical energy to or conduct electrical signals from the optoelectronic device. The optoelectronic device-carrying ferrule is inserted in a ceramic sleeve. Another ferrule, maintaining another optical fiber, also is inserted in the ceramic sleeve. Another embodiment constructed according to principles of the invention includes a second optoelectronic device mounted on the second ferrule. The electrically-conductive deposits permit ready serial deployment of optoelectronic devices, such as a variable attenuator or VCSEL laser emitter, between the optical fibers maintained by the ferrules in the sleeve.
    • 一种光纤连接器,其有助于与光纤上的电光器件对准并且与光纤之间的电光通信。 根据本发明的原理构造的在线光电子器件封装的实施例包括套圈,其被配置为接收具有安装在套圈的一端上的光电子器件的光纤,用于与光纤对准。 沿着套圈侧面的导电沉积物向光电器件提供电能或传导来自光电器件的电信号。 光电器件承载套圈插入陶瓷套筒中。 保持另一光纤的另一个套圈也插入陶瓷套筒中。 根据本发明的原理构造的另一实施例包括安装在第二套圈上的第二光电子器件。 导电沉积物允许在由套管中的套圈保持的光纤之间准备好将诸如可变衰减器或VCSEL激光发射器之类的光电器件串联布置。