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    • 1. 发明授权
    • Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
    • 微机电可调谐,共聚焦,垂直腔表面发射激光和fabry-perot滤光片
    • US06645784B2
    • 2003-11-11
    • US10136057
    • 2002-04-29
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • H01L2100
    • H01S5/18388G01J3/26G02B6/4203G02B26/001G02B26/0816G02B2006/12104G02B2006/12121H01S5/02284H01S5/0614H01S5/18366H01S5/3201
    • A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and microelectromechanically tunable Fabry-Perot filters with precise lateral and vertical dimensional control. Strained reflective dielectric film(s) are applied to a multiple quantum well structure to electronically band-gap-engineer the quantum wells. Appropriate strain in the reflective dielectric film layers is also used to create appropriate curvature in one of the reflective dielectric film stacks so as to form a confocal cavity between a planar reflective dielectric film layer and the curved reflective dielectric film layer in the vertical cavity surface emitting laser or filter. Microelectromechanical tunable vertical cavity surface emitting lasers and filter structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a micro-machined sacrificial polyimide or aluminum disk. Further, tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field.
    • 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器和微机电可调法布里 - 珀罗滤波器的方法。 将应变反射介电膜应用于多量子阱结构,以电子带隙工程化量子阱。 反射介电膜层中的适当应变也用于在反射介电膜堆叠之一中产生适当的曲率,以便在平面反射介电膜层和在垂直腔表面中的弯曲反射介电膜层之间形成共聚焦腔 激光或过滤器。 还提供了微电子机械可调谐垂直腔表面发射激光器和滤波器结构,其包括由电介质/金属膜或金属膜制成的悬浮膜结构,其在通过金属支撑柱锚固在周边的同时支撑腔调谐反射介电膜堆叠( s)。 通过使用微加工的牺牲聚酰亚胺或铝盘的微压铸来实现精确的空腔长度和横向尺寸。 此外,调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。
    • 2. 发明授权
    • Microelectromechanically tunable, confocal, vertical cavity surface emitting laser and fabry-perot filter
    • 微机电可调谐,共聚焦,垂直腔表面发射激光和fabry-perot滤光片
    • US06438149B1
    • 2002-08-20
    • US09105399
    • 1998-06-26
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • Parviz TayebatiMasud AzimiPeidong WangDaryoosh Vakhshoori
    • H01S500
    • H01S5/18366G01J3/26G02B6/4203G02B26/001G02B26/0816G02B2006/12104G02B2006/12121H01S5/02284H01S5/041H01S5/0614H01S5/18369H01S5/18388H01S5/3201
    • A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers and microelectromechanically tunable Fabry-Perot filters with precise lateral and vertical dimensional control. Strained reflective dielectric film(s) are applied to a multiple quantum well structure to electronically band-gap-engineer the quantum wells. Appropriate strain in the reflective dielectric film layers is also used to create appropriate curvature in one of the reflective dielectric film stacks so as to form a confocal cavity between a planar reflective dielectric film layer and the curved reflective dielectric film layer in the vertical cavity surface emitting laser or filter. Laser and filter structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Precise air-cavity length and lateral dimensions are achieved by micro-die-casting using a micro-machined sacrificial polyimide or aluminum disk. Further, tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field.
    • 提供了一种用于制造具有精确横向和垂直尺寸控制的微机电可调垂直腔表面发射激光器和微机电可调法布里 - 珀罗滤波器的方法。 将应变反射介电膜应用于多量子阱结构,以电子带隙工程化量子阱。 在反射电介质膜层中的适当应变也用于在反射介电膜堆叠之一中产生适当的曲率,以便在平面反射介电膜层和垂直腔表面中的弯曲反射介电膜层之间形成共聚焦腔 激光或过滤器。 还提供了激光和滤波器结构,其包括由电介质/金属膜或金属膜制成的悬浮膜结构,其在通过金属支撑柱锚定在周边的同时支撑腔调谐反射介电膜堆叠。 通过使用微加工的牺牲聚酰亚胺或铝盘的微压铸来实现精确的空腔长度和横向尺寸。 此外,调谐是通过腔调谐反射介电膜堆叠在受控静电场中的平移运动来实现的。
    • 5. 发明授权
    • High spectral fidelity laser source with low FM-to-AM conversion and narrowband tunability
    • 具有低FM到AM转换和窄带可调性的高光谱保真度激光源
    • US07180653B2
    • 2007-02-20
    • US10799304
    • 2004-03-12
    • Kevin J. KnoppDaryoosh VakhshooriMasud AzimiPeidong Wang
    • Kevin J. KnoppDaryoosh VakhshooriMasud AzimiPeidong Wang
    • H01S3/00
    • H01S5/02284H01S5/0064H01S5/0078H01S5/02216H01S5/02248H01S5/024H01S5/0683H01S5/183H01S5/4006H01S5/50H01S2301/02H01S2301/163
    • A laser source for generating amplified and filtered optical output, comprising a VCSEL, a power optical amplifier, and a filter. A laser source for generating amplified and filtered optical output, comprising a first mirror and a second mirror forming a cavity, an optical amplifier disposed in the cavity, and filter means for filtering ASE generated and amplified by the optical amplifier. A system for generating amplified and filtered optical output, comprising an optical platform having electrical connections and a fiber optic connection, a VCSEL configured to generate seed light, an optical amplifier configured to receive and amplify seed light to generate power boosted ASE and a filter configured to reduce background noise from the power boosted ASE. A method of generating optical output having high optical power with high spectral fidelity, comprising generating seed light, amplifying seed light, and filtering the amplified optical output to reduce background noise.
    • 一种用于产生放大和滤波的光输出的激光源,包括VCSEL,功率光放大器和滤波器。 一种用于产生放大和滤波的光输出的激光源,包括第一反射镜和形成空腔的第二反射镜,设置在空腔中的光放大器和用于滤光由光放大器生成和放大的ASE的滤波器装置。 一种用于产生放大和滤波的光输出的系统,包括具有电连接和光纤连接的光学平台,被配置为产生种子光的VCSEL,配置成接收和放大种子光以产生增强功率的ASE的光放大器和配置的滤波器 以降低功率提升的ASE背景噪声。 一种产生具有高光谱保真度的高光功率的光输出的方法,包括产生种子光,放大种子光,并对放大的光输出进行滤波以降低背景噪声。
    • 6. 发明申请
    • Method and apparatus for conducting Raman spectroscopy
    • US20070002319A1
    • 2007-01-04
    • US11475582
    • 2006-06-27
    • Kevin KnoppPeidong WangMasud AzimiDaryoosh Vakhshoori
    • Kevin KnoppPeidong WangMasud AzimiDaryoosh Vakhshoori
    • G01J3/44G01N21/65
    • G01J3/02G01J3/0208G01J3/0218G01J3/0227G01J3/0232G01J3/0272G01J3/0291G01J3/44G01J2003/1213G01N21/65G01N2021/656
    • A Raman probe assembly for analyzing a specimen, comprising: a light source for generating laser excitation light; a camera for capturing an image; a light analyzer for analyzing a Raman signature; and a light path for (i) delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen, (ii) capturing an image of the specimen and directing that image to the camera, and (iii) directing the Raman signature of the specimen to the light analyzer. A Raman probe assembly for analyzing a specimen, comprising: a light source for generating laser excitation light; a camera for capturing an image; a light analyzer for analyzing a Raman signature; a first light path for delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen; a second light path for capturing an image of the specimen and directing that image to the camera; a third light path for directing the Raman signature of the specimen to the light analyzer; wherein the a least a portion of the first light path, the second light path and the third light path are coaxial with one another. A Raman probe assembly for analyzing a specimen, comprising: a light source for generating laser excitation light; a light analyzer for analyzing a Raman signature; a light path for (i) delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen, and (ii) directing the Raman signature of the specimen to the light analyzer; wherein the assembly further comprises a probe body for housing the at least a portion of the light path, and a window, with the light path extending through the window; and further wherein the probe body further comprises a shutter/wiper disposed adjacent to the window. A Raman probe assembly for analyzing a specimen, comprising: a light source for generating laser excitation light; a light analyzer for analyzing a Raman signature; a light path for (i) delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen, and (ii) directing the Raman signature of the specimen to the light analyzer; and wherein the light analyzer comprises a transmitter for transmitting information using an Internet Web protocol. A method for identifying the nature of a specimen, the method comprising: providing a Raman probe assembly comprising: a light source for generating laser excitation light; a camera for capturing an image; a light analyzer for analyzing a Raman signature; a light path for (i) delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen, (ii) capturing an image of the specimen and directing that image to the camera, and (iii) directing the Raman signature of the specimen to the light analyzer wherein the assembly further comprises a probe body for housing the at least a portion of the light path, and a window, with the light path extending through the window; wherein the probe body further comprises a shutter/wiper disposed adjacent to the window; wherein the assembly is carried by a remote controlled robot; providing a base station for receiving the image, and for remotely controlling the robot, and for receiving information from the light analyzer; navigating the remote control robot from the base station to a position adjacent to the specimen; opening the shutter/wiper; using the camera to aim the probe body at the specimen; energizing the light source so that the laser excitation light is directed at the specimen; and analyzing the return light passed to the light analyzer so as to determine of the nature of the specimen.
    • 10. 发明授权
    • Method and apparatus for conducting Raman spectroscopy
    • 用于进行拉曼光谱的方法和装置
    • US07420672B2
    • 2008-09-02
    • US11820706
    • 2007-06-20
    • Peidong WangDaryoosh VakhshooriYu ShenKevin J. KnoppMasud Azimi
    • Peidong WangDaryoosh VakhshooriYu ShenKevin J. KnoppMasud Azimi
    • G01J3/44
    • G01N21/65G01J3/02G01J3/0218G01J3/0272G01J3/0291G01J3/44G01J2003/1213G01N2021/656
    • Disclosed herein are Raman probes that include: (a) a first optical fiber for receiving laser excitation light from a light source and transmitting the same; (b) a first filter for receiving light from the first optical fiber and adapted to pass the laser excitation light and to block spurious signals associated with the light; (c) a second filter for receiving light from the first filter and adapted to direct the light toward a specimen; and (d) focusing apparatus for receiving the light from the second filter, focusing the light on the specimen so as to generate the Raman signal, and returning the Raman signal to the second filter. The second filter is further configured so that when the second filter receives the Raman signal from the focusing apparatus, the second filter filters out unwanted laser excitation light before directing the Raman signal to a second optical fiber.
    • 本文公开了拉曼探针,其包括:(a)第一光纤,用于从光源接收激发激发光并将其传输; (b)第一滤光器,用于接收来自第一光纤的光,并适于通过激光激发光并阻止与光相关联的寄生信号; (c)第二过滤器,用于接收来自第一过滤器的光,并适于将光引向样本; 和(d)用于接收来自第二滤光器的光的聚焦装置,将光聚焦在样本上以产生拉曼信号,并将拉曼信号返回到第二滤光器。 第二滤波器进一步配置成使得当第二滤波器从聚焦装置接收拉曼信号时,第二滤波器在将拉曼信号引导到第二光纤之前滤除不期望的激光激发光。