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1. 发明授权

US06366340B1 Electron exposure apparatus 失效
标题翻译：电子曝光装置
公开(公告)号：US06366340B1
公开(公告)日：2002-04-02
申请号：US09090942
申请日：1998-06-05
申请人： Masayoshi Ishibashi , Seiji Heike , Tomihiro Hashizume , Yasuo Wada , Hiroshi Kajiyama
发明人： Masayoshi Ishibashi , Seiji Heike , Tomihiro Hashizume , Yasuo Wada , Hiroshi Kajiyama
IPC分类号： G03B2772
CPC分类号： G11B9/14 , G01Q80/00 , G11B9/1409 , G11B9/1418 , H02N1/006 , H02N1/008 , Y10S977/855 , Y10S977/864
摘要： To provide an electron exposure apparatus capable of providing high resolution and performing electron exposure at high speed, integrated tips are used. Only the tips provided at ends control distances between the tips and the surface of a wafer, and the tips used for electron exposure follow the wafer according to deformations of cantilevers, which occur due to the Coulomb force resultant from a voltage applied to each tip.
摘要翻译：为了提供能够以高速度提供高分辨率和执行电子曝光的电子曝光装置，使用集成尖端。只有端部提供的尖端才能控制晶片的尖端和表面之间的距离，并且用于电子曝光的尖端根据由于施加到每个尖端的电压产生的库仑力而产生的悬臂梁的变形而跟随晶片。

2. 发明授权

US07799701B2 Method of coating substrate 有权
标题翻译：涂层方法
公开(公告)号：US07799701B2
公开(公告)日：2010-09-21
申请号：US12153995
申请日：2008-05-28
申请人： Seiji Heike , Tomihiro Hashizume , Masayoshi Ishibashi
发明人： Seiji Heike , Tomihiro Hashizume , Masayoshi Ishibashi
IPC分类号： H01L21/31
CPC分类号： B05C5/00 , B05B13/0221 , B05B13/04 , B05C5/0225 , B05C5/0291 , B05C11/1018 , H01L51/0005 , H01L51/0036 , H01L51/0541
摘要： A method of coating by supplying a liquid material from a nozzle tip to form a film on a substrate surface facing to the nozzle, having the steps of: preparing a translation mechanism, which is capable of moving the nozzle in an in-plane direction and in a thickness direction of the substrate; making the nozzle to come gradually closer to the substrate, after positioning of the nozzle on the in-plane of the substrate, by using the translation mechanism; detecting electric current flowing through the nozzle from the substrate surface, when a semiconductor droplet supplied from the nozzle tip contacts with an electrode installed at the substrate surface; stopping accession of the nozzle to the substrate, when the electric current exceeds threshold value set in advance; and making the nozzle tip apart from the substrate farther than in the stopping, so as to coat the substrate with the liquid material.
摘要翻译：一种通过从喷嘴头提供液体材料以在面向喷嘴的基板表面上形成膜的涂覆方法，其具有以下步骤：准备能够在平面内方向上移动喷嘴的平移机构，以及在基板的厚度方向上; 通过使用平移机构将喷嘴定位在基板的平面上，使喷嘴逐渐靠近基板; 当从喷嘴头供给的半导体液滴与安装在基板表面的电极接触时，检测从基板表面流过喷嘴的电流; 当电流超过预先设定的阈值时，将喷嘴停留在基板上; 并且使喷嘴头远离基板远离停止，以便用液体材料涂覆基板。

3. 发明授权

US06670622B2 Electron exposure device and method and electronic characteristics evaluation device using scanning probe 失效
公开(公告)号：US06670622B2
公开(公告)日：2003-12-30
申请号：US10082341
申请日：2002-02-26
申请人： Seiji Heike , Masayoshi Ishibashi , Tomihiro Hashizume
发明人： Seiji Heike , Masayoshi Ishibashi , Tomihiro Hashizume
IPC分类号： A61N500
CPC分类号： H01J37/3174 , H01J2237/31752
摘要： Current passed through a resist layer or insulating layer is controlled by changing the amplitude of an AC voltage to provide an electron exposure device or electric characteristics evaluation device using a scanning probe.

4. 发明申请

US20080299292A1 Method of coating substrate 有权
标题翻译：涂层方法
公开(公告)号：US20080299292A1
公开(公告)日：2008-12-04
申请号：US12153995
申请日：2008-05-28
申请人： Seiji Heike , Tomihiro Hashizume , Masayoshi Ishibashi
发明人： Seiji Heike , Tomihiro Hashizume , Masayoshi Ishibashi
IPC分类号： C23C16/52
CPC分类号： B05C5/00 , B05B13/0221 , B05B13/04 , B05C5/0225 , B05C5/0291 , B05C11/1018 , H01L51/0005 , H01L51/0036 , H01L51/0541
摘要： A method of coating by supplying a liquid material from a nozzle tip to form a film on a substrate surface facing to the nozzle, having the steps of: preparing a translation mechanism, which is capable of moving the nozzle in an in-plane direction and in a thickness direction of the substrate; making the nozzle to come gradually closer to the substrate, after positioning of the nozzle on the in-plane of the substrate, by using the translation mechanism; detecting electric current flowing through the nozzle from the substrate surface, when a semiconductor droplet supplied from the nozzle tip contacts with an electrode installed at the substrate surface; stopping accession of the nozzle to the substrate, when the electric current exceeds threshold value set in advance; and making the nozzle tip apart from the substrate farther than in the stopping, so as to coat the substrate with the liquid material.
摘要翻译：一种通过从喷嘴头提供液体材料以在面向喷嘴的基板表面上形成膜的涂覆方法，其具有以下步骤：准备能够在平面内方向上移动喷嘴的平移机构，以及在基板的厚度方向上; 通过使用平移机构将喷嘴定位在基板的平面上，使喷嘴逐渐靠近基板; 当从喷嘴头供给的半导体液滴与安装在基板表面的电极接触时，检测从基板表面流过喷嘴的电流; 当电流超过预先设定的阈值时，将喷嘴停留在基板上; 并且使喷嘴头远离基板远离停止，以便用液体材料涂覆基板。

5. 发明授权

US5801472A Micro-fabricated device with integrated electrostatic actuator 失效
标题翻译：具有集成静电执行器的微型器件
公开(公告)号：US5801472A
公开(公告)日：1998-09-01
申请号：US696089
申请日：1996-08-13
申请人： Yasuo Wada , Munehisa Mitsuya , Tsuneo Ichiguchi , Tomihiro Hashizume , Seiji Heike , Mark Lutwyche , Satoshi Watanabe
发明人： Yasuo Wada , Munehisa Mitsuya , Tsuneo Ichiguchi , Tomihiro Hashizume , Seiji Heike , Mark Lutwyche , Satoshi Watanabe
IPC分类号： G01Q70/02 , G01Q70/08 , G11B9/00 , H02N1/00 , G01N23/00
CPC分类号： H02N1/008 , G01Q10/045 , G01Q60/16 , G11B9/14 , G11B9/1418 , G01Q70/06 , G11B9/1409 , Y10S977/872
摘要： A device according to the present invention is a miniaturized efficient device wherein electromechanical transduction is enabled and which is provided with at least an integrated electrostatic actuator provide with an actuator in which a fixed portion and a movable portion are opposite, a plurality of which are arranged and the relative amount of movement of which is controlled by controlling electrostatic force operating between both, the movable portion moved by the integrated electrostatic actuator and a portion connected to the movable portion which can be operated mechanically. The probe of a scanning probe microscope is provided to the movable portion of the above actuator. The above transducer is provided with the structure in which a large number of such actuators are arranged two- or one-dimensionally.
摘要翻译：根据本发明的装置是一种小型化的有效装置，其中机电转换是可以实现的，并且至少设置有一个集成的静电致动器，该静电致动器具有固定部分和可动部分相对的致动器，其中多个布置并且通过控制两者之间的静电力操作，由一体式静电致动器移动的可动部分和连接到可机械操作的可动部分的部分来控制其相对移动量。扫描探针显微镜的探针设置在上述致动器的可动部。上述传感器具有其中大量这样的致动器被二维或一维布置的结构。

6. 发明授权

US09423416B2 Scanning probe microscope and measuring method using same 有权
标题翻译：扫描探针显微镜及其测量方法
公开(公告)号：US09423416B2
公开(公告)日：2016-08-23
申请号：US14416968
申请日：2012-08-28
申请人： Akira Nambu , Tsuyoshi Yamamoto , Hideaki Koizumi , Tomihiro Hashizume , Seiji Heike
发明人： Akira Nambu , Tsuyoshi Yamamoto , Hideaki Koizumi , Tomihiro Hashizume , Seiji Heike
IPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/14 , G01Q60/22
CPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/14 , G01Q60/22
摘要： Provided is a scanning probe microscope that takes measurements at high spatial resolution on physical information such as array structure of water molecules at a specimen-culture fluid interface in a culture fluid as well as irregularities of the surface of a specimen and composition distribution and array structure of molecules, proteins, etc. even in the atmosphere, an ambient air, vacuum, among others. The scanning probe microscope includes: a probing needle (1); a specimen holder (11) in which a specimen (3) is mounted; an oscillator (2) that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source (27, 28) that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector (25) that measures intensity of output light which is output from the specimen by energy spectroscopy; and a control device (26). The control device decreases amplitude of the periodic oscillation to change the probing needle position by the oscillator, shortens a relative distance between the probing needle and the specimen, and synchronizes shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, thus optimizing efficiency of tip-enhanced detection.
摘要翻译：提供了一种扫描探针显微镜，其以高空间分辨率对物理信息进行测量，例如在培养液中的标本培养液界面处的水分子的阵列结构以及样品表面的不规则性以及组成分布和阵列结构的分子，蛋白质等，甚至在大气中，环境空气，真空等。扫描探针显微镜包括：探针（1）; 其中安装有试样（3）的试样保持器（11）振荡器（2），其产生周期性振荡以改变探针位置; 对被检测体进行测量的点发光的脉冲振荡型激光光源（27,28）; 检测器（25），其通过能量谱测量从所述样本输出的输出光的强度; 和控制装置（26）。控制装置减小周期性振荡的振幅，通过振荡器改变探针位置，缩短探针与试样之间的相对距离，同步缩短探针与试样之间的距离，并发出脉冲振荡激光轻，从而优化提示增强检测的效率。

7. 发明申请

US20150177275A1 SCANNING PROBE MICROSCOPE AND MEASURING METHOD USING SAME 有权
标题翻译：扫描探针显微镜和使用它的测量方法
公开(公告)号：US20150177275A1
公开(公告)日：2015-06-25
申请号：US14416968
申请日：2012-08-28
申请人： Akira Nambu , Tsuyoshi Yamamoto , Hideaki Koizumi , Tomihiro Hashizume , Seiji Heike
发明人： Akira Nambu , Tsuyoshi Yamamoto , Hideaki Koizumi , Tomihiro Hashizume , Seiji Heike
IPC分类号： G01Q10/04
CPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/14 , G01Q60/22
摘要： Provided is a scanning probe microscope that takes measurements at high spatial resolution on physical information such as array structure of water molecules at a specimen-culture fluid interface in a culture fluid as well as irregularities of the surface of a specimen and composition distribution and array structure of molecules, proteins, etc. even in the atmosphere, an ambient air, vacuum, among others. The scanning probe microscope includes: a probing needle (1); a specimen holder (11) in which a specimen (3) is mounted; an oscillator (2) that produces a periodic oscillation to change the probing needle position; a pulse oscillation type laser light source (27, 28) that emits light toward a spot, which is put under measurement by the probing needle, on the specimen; a detector (25) that measures intensity of output light which is output from the specimen by energy spectroscopy; and a control device (26). The control device decreases amplitude of the periodic oscillation to change the probing needle position by the oscillator, shortens a relative distance between the probing needle and the specimen, and synchronizes shortening of the distance between the probing needle and the specimen and emission of pulse oscillation laser light, thus optimizing efficiency of tip-enhanced detection.
摘要翻译：提供了一种扫描探针显微镜，其以高空间分辨率对物理信息进行测量，例如在培养液中的标本培养液界面处的水分子的阵列结构以及样品表面的不规则性以及组成分布和阵列结构的分子，蛋白质等，甚至在大气中，环境空气，真空等。扫描探针显微镜包括：探针（1）; 其中安装有试样（3）的试样保持器（11）振荡器（2），其产生周期性振荡以改变探针位置; 对被检测体进行测量的点发光的脉冲振荡型激光光源（27,28）; 检测器（25），其通过能量谱测量从所述样本输出的输出光的强度; 和控制装置（26）。控制装置减小周期性振荡的振幅，通过振荡器改变探针位置，缩短探针与试样之间的相对距离，同步缩短探针与试样之间的距离，并发出脉冲振荡激光轻，从而优化提示增强检测的效率。

8. 发明申请

US20080084248A1 Oscillator and frequency detector 有权
标题翻译：振荡器和频率检测器
公开(公告)号：US20080084248A1
公开(公告)日：2008-04-10
申请号：US11905815
申请日：2007-10-04
申请人： Seiji Heike , Tomihiro Hashizume
发明人： Seiji Heike , Tomihiro Hashizume
IPC分类号： H03L7/099 , H03B21/00
CPC分类号： H03L7/18 , H03L7/1806
摘要： In an oscillating apparatus or a frequency detecting apparatus in which a center frequency and a variable frequency range are freely or optionally established with a high stability and a high accuracy, a first frequency component of a signal from a first crystal oscillator and a second frequency component of another signal from a second crystal oscillator are subjected to a synthesizing operation in a synthesizer and to other operations to obtain a desired center frequency and a desired variable frequency range.
摘要翻译：在以高稳定性和高精度自由地或可选地建立中心频率和可变频率范围的振荡装置或频率检测装置中，来自第一晶体振荡器和第二频率分量的信号的第一频率分量来自第二晶体振荡器的另一信号经过合成器中的合成操作和其他操作以获得期望的中心频率和期望的可变频率范围。

9. 发明授权

US07557662B2 Oscillator and frequency detector 有权
标题翻译：振荡器和频率检测器
公开(公告)号：US07557662B2
公开(公告)日：2009-07-07
申请号：US11905815
申请日：2007-10-04
申请人： Seiji Heike , Tomihiro Hashizume
发明人： Seiji Heike , Tomihiro Hashizume
IPC分类号： H03L7/00
CPC分类号： H03L7/18 , H03L7/1806
摘要： In an oscillating apparatus or a frequency detecting apparatus in which a center frequency and a variable frequency range are freely or optionally established with a high stability and a high accuracy, a first frequency component of a signal from a first crystal oscillator and a second frequency component of another signal from a second crystal oscillator are subjected to a synthesizing operation in a synthesizer and to other operations to obtain a desired center frequency and a desired variable frequency range.
摘要翻译：在以高稳定性和高精度自由地或可选地建立中心频率和可变频率范围的振荡装置或频率检测装置中，来自第一晶体振荡器和第二频率分量的信号的第一频率分量来自第二晶体振荡器的另一信号经过合成器中的合成操作和其他操作以获得期望的中心频率和期望的可变频率范围。

10. 发明申请

US20150192604A1 HOLDER FOR PROBE MICROSCOPE, PROBE MICROSCOPE AND SPECIMEN MEASUREMENT METHOD 审中-公开
标题翻译：探针显微镜，探针显微镜和样本测量方法
公开(公告)号：US20150192604A1
公开(公告)日：2015-07-09
申请号：US14417407
申请日：2012-07-27
申请人： Tsuyoshi Yamamoto , Seiji Heike , Akira Nambu , Tomihiro Hashizume , Hideaki Koizumi
发明人： Tsuyoshi Yamamoto , Seiji Heike , Akira Nambu , Tomihiro Hashizume , Hideaki Koizumi
IPC分类号： G01Q30/20 , G01Q60/24
CPC分类号： G01Q30/20 , G01Q30/02 , G01Q30/10 , G01Q30/14 , G01Q60/24
摘要： At the time of carrying out measurement of a biological tissue with a probe microscope, measurement is to be realized while maintain survival conditions for a cell.As a holder for the probe microscope, a measurement holder including: a container in which a measurement object is housed; a first cover section which covers at least a part of the measurement object and has an aperture for inserting a measurement probe; and a second cover section which is connected to the first cover section, covers the container, and has an aperture for inserting the measurement probe, is used.
摘要翻译：在用探针显微镜进行生物体组织的测定时，要保持细胞的生存条件，进行测定。作为探针显微镜的保持器，测量保持器包括：容纳测量对象的容器; 第一覆盖部分，其覆盖所述测量对象的至少一部分并且具有用于插入测量探针的孔; 并且连接到第一盖部分的第二盖部分覆盖容器，并且具有用于插入测量探针的孔。

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