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1. 发明授权

US07196796B2 Wavelength detecting apparatus, laser apparatus, and wavelength detecting method 有权
标题翻译：波长检测装置，激光装置和波长检测方法
公开(公告)号：US07196796B2
公开(公告)日：2007-03-27
申请号：US10341364
申请日：2003-01-14
申请人： Masato Moriya , Tatsuo Enami , Hirokazu Kubo , Masashi Shinbori , Toru Suzuki
发明人： Masato Moriya , Tatsuo Enami , Hirokazu Kubo , Masashi Shinbori , Toru Suzuki
IPC分类号： G01B9/02
CPC分类号： G01J9/0246 , H01S5/0687
摘要： In a wavelength detecting apparatus using an etalon, a drift in wavelength measurement by the etalon is stabilized and an adverse influence of out gas is eliminated, so that correct wavelength measurement is realized. The wavelength detecting apparatus includes a housing equipped with a port for use of introducing replacement gas, an etalon set inside the housing, and a moisture-absorbing unit for absorbing at least moisture released inside the housing.
摘要翻译：在使用标准具的波长检测装置中，标准具的波长测量的漂移被稳定，并且消除了气体的不良影响，从而实现了正确的波长测量。波长检测装置包括：壳体，其具有用于引入替代气体的端口，在壳体内部设置的标准具;以及用于吸收至少吸收在壳体内部释放的水分的吸湿单元。

2. 发明授权

US5559603A three-dimensional image measuring device 失效
标题翻译：三维图像测量装置
公开(公告)号：US5559603A
公开(公告)日：1996-09-24
申请号：US483899
申请日：1995-06-07
申请人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
发明人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
IPC分类号： G01B11/00 , G01B11/02 , G01B11/24 , G01C3/06 , G02B5/32 , G03H1/26
CPC分类号： G01B11/24 , G01B11/026 , G01B11/2441 , G03H2001/0038
摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring the strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.
摘要翻译：一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成单元形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元，用于当移动和扫描平面图像时，测量在物体的表面上散射的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

3. 发明授权

US5430560A Three-dimensional image display device 失效
标题翻译：三维图像显示装置
公开(公告)号：US5430560A
公开(公告)日：1995-07-04
申请号：US165325
申请日：1993-12-13
申请人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
发明人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
IPC分类号： G02B27/01 , G03H1/22 , G03H1/30
CPC分类号： G02B27/2242 , G02B27/0103 , G02B5/1876 , G02B5/32 , G03H1/22 , G03H1/30 , G03H2001/2297 , G03H2210/45
摘要： A three-dimensional image display device which comprises a light source; a hologram divided into a plurality of divided areas and exposed so that point images are formed at different positions in a three-dimensional space in the respective divided areas when the light from the light source is irradiated; a hologram driver unit for driving the hologram such that light from the light source is selectively entered into one of the plurality of divided areas and; a control unit for controlling the lighting up of the point images formed in the three-dimensional space in correspondence to a three-dimensional image signal by controlling the hologram and the light source in accordance with the three-dimensional image signal to be displayed, whereby a three-dimensional image is obtained by the hologram with the simple-configured device.
摘要翻译：一种三维图像显示装置，包括光源; 分割成多个分割区域的全息图，曝光，当来自光源的光被照射时，在各分割区域的三维空间中的不同位置形成点图像; 全息图驱动器单元，用于驱动全息图，使得来自光源的光选择性地进入多个分割区域中的一个; 控制单元，用于通过根据要显示的三维图像信号控制全息图和光源来控制对应于三维图像信号在三维空间中形成的点图像的点亮，由此通过具有简单配置的装置的全息图获得三维图像。

4. 发明授权

US5629773A Three-dimensional image measuring device 失效
标题翻译：三维图像测量装置
公开(公告)号：US5629773A
公开(公告)日：1997-05-13
申请号：US492146
申请日：1995-06-07
申请人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
发明人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
IPC分类号： G01B11/00 , G01B11/02 , G01B11/24 , G01C3/06 , G02B5/32 , G03H1/26
CPC分类号： G01B11/24 , G01B11/026 , G01B11/2441 , G03H2001/0038
摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring the strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.
摘要翻译：一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成单元形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元，用于当移动和扫描平面图像时，测量在物体的表面上散射的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

5. 发明授权

US5448360A Three-dimensional image measuring device 失效
标题翻译：三维图像测量装置
公开(公告)号：US5448360A
公开(公告)日：1995-09-05
申请号：US165418
申请日：1993-12-13
申请人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
发明人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
IPC分类号： G01B11/00 , G01B11/02 , G01B11/24 , G01C3/06 , G02B5/32 , G03H1/26
CPC分类号： G01B11/24 , G01B11/026 , G01B11/2441 , G03H2001/0038
摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction .on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming means in its depth direction; an object to be measured disposed in the space where the plane image is formed; a light receiving unit for measuring a strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.
摘要翻译：一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成装置形成的平面图像; 要被测量的物体设置在形成平面图像的空间中; 光接收单元，用于当平面图像被移动和扫描时，测量在物体的表面上散射的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小降低的不可见区域的三维图像。

6. 发明授权

US5659420A Confocal optical apparatus 失效
标题翻译：共焦光学仪器
公开(公告)号：US5659420A
公开(公告)日：1997-08-19
申请号：US436469
申请日：1995-05-26
申请人： Hideyuki Wakai , Kiyokazu Mizoguchi , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando , Koji Shio
发明人： Hideyuki Wakai , Kiyokazu Mizoguchi , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando , Koji Shio
IPC分类号： G01B11/02 , G01B11/24 , G02B5/32 , G02B21/00 , G02B21/22 , G02B21/36 , G03H1/00
CPC分类号： G01B11/24 , G01B11/026 , G02B5/32
摘要： A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aperture portion located on a plane conjugate with the convergence surface on the measurement object, and light detectors for detecting light that has passed through the second aperture portion, wherein placing the first and second aperture portions in the same position and using them as the same aperture portion, as well as positioning the detection surfaces of the light detectors substantially on the same surfaces as the conjointly used identical aperture portions make it possible to reduce the size and weight of the apparatus, to perform three-dimensional shape measurements rapidly and accurately, and to facilitate the alignment of each portion.
摘要翻译： PCT No.PCT / JP94 / 01633 Sec。 371日期：1995年5月26日 102（e）日期1995年5月26日PCT 1994年9月30日PCT公布。第WO95 / 09346号公报日期1995年04月6日一种共焦光学装置，包括光源，第一孔径部分，用于使从光源发射的光通过并获得点光源，用于使已经穿过第一孔部分的光聚集在一起的物镜测量对象，位于与测量对象上的会聚表面共轭的平面上的第二孔径部分，以及用于检测穿过第二孔径部分的光的光检测器，其中将第一和第二孔径部分放置在相同的位置，以及使用它们作为相同的孔径部分，以及将光检测器的检测表面基本上定位在与所使用的相同孔径部分相同的表面上，使得可以减小装置的尺寸和重量，从而执行三维形状测量快速而准确，并且便于每个部分的对准。

7. 发明授权

US5506703A Three-dimensional image display device 失效
标题翻译：三维图像显示装置
公开(公告)号：US5506703A
公开(公告)日：1996-04-09
申请号：US197305
申请日：1994-02-16
申请人： Toru Suzuki , Hideyuki Wakai , Manabu Ando , Kiyokazu Mizoguchi , Keiji Terada , Masato Moriya , Koji Shio
发明人： Toru Suzuki , Hideyuki Wakai , Manabu Ando , Kiyokazu Mizoguchi , Keiji Terada , Masato Moriya , Koji Shio
IPC分类号： G03H1/24 , G03H1/22 , G02B5/32 , G02B26/10 , G02B27/22
CPC分类号： G03H1/22
摘要： A three-dimensional image display device which comprises a holographic plate having a plurality of holograms divided in correspondence with rotational angles, the holographic plate being exposed so that when light is irradiated, each of the holograms forms a point image at a different position in a depth direction of the holographic plate; a drive unit for rotating the holographic plate; a light irradiating unit including a plurality of light sources arranged substantially in a straight line so that the light sources are kept at substantially equal distances from the holographic plate, for irradiating the holographic plate with light from the light sources; and a controller for controlling the drive unit and lighting operations of the plurality of light sources of the light irradiating unit in accordance with a signal indicative of a three-dimensional image to be displayed so as to control lighting of a plurality of point images formed in a three-dimensional space, whereby a three-dimensional image can be obtained with a simple configuration.
摘要翻译：一种三维图像显示装置，包括具有与旋转角度相对应的多个全息图的全息板，所述全息板被曝光，使得当照射光时，每个全息图在图像中的不同位置形成点图像全息板的深度方向; 用于旋转全息板的驱动单元; 光照射单元，其包括基本上以直线布置的多个光源，使得光源保持与全息板基本相等的距离，用于从光源照射全息板; 以及控制器，用于根据指示要显示的三维图像的信号来控制所述光照射单元的所述多个光源的驱动单元和点亮操作，以便控制形成在所述多个点图像中的多个点图像的点亮三维空间，由此能够以简单的结构获得三维图像。

8. 发明授权

US5568261A Three-dimensional image measuring device 失效
标题翻译：三维图像测量装置
公开(公告)号：US5568261A
公开(公告)日：1996-10-22
申请号：US475312
申请日：1995-06-07
申请人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
发明人： Hideyuki Wakai , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando
IPC分类号： G01B11/00 , G01B11/02 , G01B11/24 , G01C3/06 , G02B5/32 , G03H1/26
CPC分类号： G01B11/24 , G01B11/026 , G01B11/2441 , G03H2001/0038
摘要： A three-dimensional image measuring device which comprises a light source; a plane image forming unit for forming a plane image in a space in its depth direction on the basis of light emitted from the light source; a scanning unit for moving and scanning the plane image formed by the plane image forming unit in its depth direction; an object to be measured disposed in the space,where the plane image is formed; a light receiving unit for measuring strength of light scattered on a surface of the object as the plane image is moved and scanned and; a distance measuring unit for measuring the distance to the Object on the basis of the output of the light receiving unit, whereby a three-dimensional image with least reduced invisible area is easily and accurately measured in a short time without using the principle of triangulation.
摘要翻译：一种三维图像测量装置，包括光源; 平面图像形成单元，用于基于从光源发射的光在其深度方向上的空间中形成平面图像; 扫描单元，用于在其深度方向上移动和扫描由平面图像形成单元形成的平面图像; 待测量的物体设置在形成平面图像的空间中; 光接收单元，用于当平面图像被移动和扫描时测量散射在物体表面上的光的强度; 距离测量单元，用于基于光接收单元的输出来测量到物体的距离，由此在不使用三角测量原理的情况下，在短时间内容易且精确地测量具有最小减小的不可见区域的三维图像。

9. 发明授权

US09325150B2 Alignment system and extreme ultraviolet light generation system 有权
标题翻译：对准系统和极紫外光发生系统
公开(公告)号：US09325150B2
公开(公告)日：2016-04-26
申请号：US14238405
申请日：2012-09-05
申请人： Masato Moriya , Osamu Wakabayashi
发明人： Masato Moriya , Osamu Wakabayashi
IPC分类号： H05G2/00 , H01S3/101 , H01S3/23 , H01S3/00
CPC分类号： H01S3/101 , H01S3/005 , H01S3/0078 , H01S3/2391 , H05G2/008
摘要： An alignment system for a laser apparatus includes a guide laser device outputting a guide laser beam, an adjusting mechanism adjusting travel directions of the guide laser beam and a laser beam from the laser apparatus, a beam path combiner controlling travel directions of the laser beam and the guide laser beam to substantially coincide with each other, a first optical detection unit provided from the beam path combiner detecting the laser and guide laser beams, a first controller controlling the adjusting mechanism based on a first optical detection unit detection result, a beam steering unit downstream from the beam path combiner controlling travel directions of the laser and guide laser beams, a second optical detection unit downstream from the beam steering unit detecting the guide laser beam, and a second controller controlling the beam steering unit based on a second optical detection unit detection result.
摘要翻译：用于激光装置的对准系统包括：输出导向激光束的导向激光装置，调整引导激光束的行进方向的调节机构和来自激光装置的激光束;光束组合器，控制激光束的行进方向; 所述引导激光束彼此基本一致，从所述光束组合器提供的检测所述激光和引导激光束的第一光学检测单元，基于第一光学检测单元检测结果控制所述调节机构的第一控制器，控制光束路径组合器的下游，控制激光束和引导激光束的行进方向，第二光学检测单元，在检测引导激光束的光束转向单元的下游;以及第二控制器，其基于第二光学检测器控制光束转向单元单位检测结果。

10. 发明授权

US08559099B2 Laser beam amplifier and laser apparatus using the same 有权
公开(公告)号：US08559099B2
公开(公告)日：2013-10-15
申请号：US12685246
申请日：2010-01-11
申请人： Krzysztof Nowak , Masato Moriya , Osamu Wakabayashi
发明人： Krzysztof Nowak , Masato Moriya , Osamu Wakabayashi
IPC分类号： H01S3/082 , H01S3/22
CPC分类号： H01S3/06758 , G03F7/70025 , G03F7/70033 , H01S3/005 , H01S3/0064 , H01S3/032 , H01S3/036 , H01S3/0387 , H01S3/041 , H01S3/0971 , H01S3/2232 , H01S3/2308 , H01S3/2325 , H01S3/2341
摘要： A laser beam amplifier with high optical axis stability is provided. The laser beam amplifier includes: a container for accommodating a laser medium; a pair of electrodes for performing discharge in the laser medium to form an amplification region for a laser beam in the laser medium; and an optical system for forming an optical path between a first point, upon which the laser beam is incident, and a second point, from which the laser beam is outputted, such that the amplification region is located in the optical path between the first point and the second point, wherein the first point and the second point are conjugate to each other, and the laser beam incident upon the first point is amplified while passing through the amplification region at least twice and then transferred to the second point.

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