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1. 发明授权

US5659420A Confocal optical apparatus 失效
标题翻译：共焦光学仪器
公开(公告)号：US5659420A
公开(公告)日：1997-08-19
申请号：US436469
申请日：1995-05-26
申请人： Hideyuki Wakai , Kiyokazu Mizoguchi , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando , Koji Shio
发明人： Hideyuki Wakai , Kiyokazu Mizoguchi , Toru Suzuki , Keiji Terada , Masato Moriya , Manabu Ando , Koji Shio
IPC分类号： G01B11/02 , G01B11/24 , G02B5/32 , G02B21/00 , G02B21/22 , G02B21/36 , G03H1/00
CPC分类号： G01B11/24 , G01B11/026 , G02B5/32
摘要： A confocal optical apparatus comprising a light source, a first aperture portion for passing light emitted from the light source and obtaining a point source, an objective lens for causing the light that has passed through the first aperture portion to converge on a measurement object, a second aperture portion located on a plane conjugate with the convergence surface on the measurement object, and light detectors for detecting light that has passed through the second aperture portion, wherein placing the first and second aperture portions in the same position and using them as the same aperture portion, as well as positioning the detection surfaces of the light detectors substantially on the same surfaces as the conjointly used identical aperture portions make it possible to reduce the size and weight of the apparatus, to perform three-dimensional shape measurements rapidly and accurately, and to facilitate the alignment of each portion.
摘要翻译： PCT No.PCT / JP94 / 01633 Sec。 371日期：1995年5月26日 102（e）日期1995年5月26日PCT 1994年9月30日PCT公布。第WO95 / 09346号公报日期1995年04月6日一种共焦光学装置，包括光源，第一孔径部分，用于使从光源发射的光通过并获得点光源，用于使已经穿过第一孔部分的光聚集在一起的物镜测量对象，位于与测量对象上的会聚表面共轭的平面上的第二孔径部分，以及用于检测穿过第二孔径部分的光的光检测器，其中将第一和第二孔径部分放置在相同的位置，以及使用它们作为相同的孔径部分，以及将光检测器的检测表面基本上定位在与所使用的相同孔径部分相同的表面上，使得可以减小装置的尺寸和重量，从而执行三维形状测量快速而准确，并且便于每个部分的对准。

2. 发明授权

US5506703A Three-dimensional image display device 失效
标题翻译：三维图像显示装置
公开(公告)号：US5506703A
公开(公告)日：1996-04-09
申请号：US197305
申请日：1994-02-16
申请人： Toru Suzuki , Hideyuki Wakai , Manabu Ando , Kiyokazu Mizoguchi , Keiji Terada , Masato Moriya , Koji Shio
发明人： Toru Suzuki , Hideyuki Wakai , Manabu Ando , Kiyokazu Mizoguchi , Keiji Terada , Masato Moriya , Koji Shio
IPC分类号： G03H1/24 , G03H1/22 , G02B5/32 , G02B26/10 , G02B27/22
CPC分类号： G03H1/22
摘要： A three-dimensional image display device which comprises a holographic plate having a plurality of holograms divided in correspondence with rotational angles, the holographic plate being exposed so that when light is irradiated, each of the holograms forms a point image at a different position in a depth direction of the holographic plate; a drive unit for rotating the holographic plate; a light irradiating unit including a plurality of light sources arranged substantially in a straight line so that the light sources are kept at substantially equal distances from the holographic plate, for irradiating the holographic plate with light from the light sources; and a controller for controlling the drive unit and lighting operations of the plurality of light sources of the light irradiating unit in accordance with a signal indicative of a three-dimensional image to be displayed so as to control lighting of a plurality of point images formed in a three-dimensional space, whereby a three-dimensional image can be obtained with a simple configuration.
摘要翻译：一种三维图像显示装置，包括具有与旋转角度相对应的多个全息图的全息板，所述全息板被曝光，使得当照射光时，每个全息图在图像中的不同位置形成点图像全息板的深度方向; 用于旋转全息板的驱动单元; 光照射单元，其包括基本上以直线布置的多个光源，使得光源保持与全息板基本相等的距离，用于从光源照射全息板; 以及控制器，用于根据指示要显示的三维图像的信号来控制所述光照射单元的所述多个光源的驱动单元和点亮操作，以便控制形成在所述多个点图像中的多个点图像的点亮三维空间，由此能够以简单的结构获得三维图像。

3. 发明申请

US20070009010A1 Wafer temperature measuring method and apparatus 审中-公开
标题翻译：晶圆温度测量方法和装置
公开(公告)号：US20070009010A1
公开(公告)日：2007-01-11
申请号：US11472463
申请日：2006-06-22
申请人： Koji Shio , Hideyuki Wakai , Akihiro Ohsawa , Hironori Akiba
发明人： Koji Shio , Hideyuki Wakai , Akihiro Ohsawa , Hironori Akiba
IPC分类号： G01K11/00
CPC分类号： G01K11/125
摘要： A non-contact wafer temperature measuring apparatus by which a wafer temperature can be measured with accuracy in situ even in a low temperature process. The wafer temperature measuring apparatus for measuring a wafer temperature based on reflected light of light applied to a wafer as a target of temperature measurement includes: a light source unit for generating light containing a P-polarized component having a wavelength not larger than 400 nm and applying the light to the wafer; a light receiving unit for receiving the light reflected by the wafer and detecting at least intensity of the P-polarized component having the wavelength not larger than 400 nm; and a signal processing unit for calculating a temperature of the target of temperature measurement at least based on the intensity of the P-polarized component having the wavelength not larger than 400 nm detected by the light receiving unit.
摘要翻译：非接触式晶片温度测量装置，即使在低温工艺中也可以准确地测量晶片温度。用于测量基于作为温度测量对象的晶片的光的反射光的晶片温度测量装置包括：用于产生包含波长不大于400nm的P偏振分量的光的光源单元和将光施加到晶片; 光接收单元，用于接收由晶片反射的光并至少检测波长不大于400nm的P偏振分量的至少强度; 以及信号处理单元，用于至少基于由光接收单元检测到的具有不大于400nm的波长的P偏振分量的强度来计算温度测量目标温度。

4. 发明授权

US06553042B2 Laser apparatus for generating vacuum ultraviolet narrow-band laser beams 有权
标题翻译：用于产生真空紫外窄带激光束的激光装置
公开(公告)号：US06553042B2
公开(公告)日：2003-04-22
申请号：US09727510
申请日：2000-12-04
申请人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
发明人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
IPC分类号： H01S310
CPC分类号： H01S3/13 , H01S3/1305 , H01S3/131 , H01S3/137 , H01S3/139 , H01S3/2258
摘要： In a laser apparatus, a central wavelength of vacuum ultraviolet laser beams whose bandwidth is narrowed can be maintained at a target wavelength in high precision. This laser apparatus includes a laser oscillator for generating a vacuum ultraviolet laser beam whose bandwidth is narrowed and a reference beam having a spectral distribution of a vacuum ultraviolet band to output both the vacuum ultraviolet laser beam and the reference beam; a wavelength meter for measuring a central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed by using at least one emission light contained in the reference beam as a reference; and a controller for controlling the laser oscillator based upon the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed, which is measured by the wavelength meter, so as to thereby adjust the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed to a target wavelength. As a result, this laser apparatus can output the vacuum ultraviolet laser beams whose bandwidth is narrowed and whose central wavelength is maintained at the target wavelength in high precision.
摘要翻译：在激光装置中，能够将带宽变窄的真空紫外线激光束的中心波长高精度地维持在目标波长。该激光装置包括用于产生带宽变窄的真空紫外激光束的激光振荡器和具有真空紫外线带的光谱分布的参考光束，以输出真空紫外激光束和参考光束; 用于通过使用包含在参考光束中的至少一个发射光作为参考来测量其带宽变窄的真空紫外激光束的中心波长的波长计; 以及控制器，用于基于由波长计测量的带宽变窄的真空紫外激光束的中心波长来控制激光振荡器，从而调节带宽变窄的真空紫外激光束的中心波长到目标波长。结果，该激光装置可以高精度地输出带宽变窄，中心波长保持在目标波长的真空紫外激光束。

5. 发明授权

US06539037B1 Laser apparatus 有权
标题翻译：激光设备
公开(公告)号：US06539037B1
公开(公告)日：2003-03-25
申请号：US09630366
申请日：2000-08-01
申请人： Koji Shio , Osamu Wakabayashi , Toru Suzuki
发明人： Koji Shio , Osamu Wakabayashi , Toru Suzuki
IPC分类号： H01S313
CPC分类号： H01S3/1304
摘要： A laser apparatus has a function to easily select a component having a wavelength near to an oscillated wavelength of a laser beam from among components of a reference beam having a spectral distribution, which is already known, as a reference in measurement of the oscillated wavelength of the laser beam. The laser apparatus has a laser oscillator for outputting a laser beam, a reference light source for outputting a reference beam having a spectral distribution which is already known, two spectrum separation units having different resolving power, a detecting device for detecting a part of the laser beam and a part of the reference beam separated by the two spectrum separation units, and a control unit for measuring an oscillated wavelength of the detected laser beam by using as a reference a component selected from among components of the detected reference beam and having a wavelength near to the oscillated wavelength of the detected laser beam. According to the laser apparatus, the component having the wavelength near to the oscillated wavelength of the laser beam can be easily selected from among the components of the reference beam as a reference in measurement of the wavelength of the laser beam.
摘要翻译：激光装置具有以下功能：从具有频谱分布的参考光束的分量中可以容易地选择波长接近于激光束的振荡波长的分量，已知的光谱分布作为测量波长的振荡波长的参考激光束。激光装置具有用于输出激光束的激光振荡器，用于输出具有已知的光谱分布的参考光的参考光源，具有不同分辨能力的两个光谱分离单元，用于检测激光的一部分的检测装置光束和由两个光谱分离单元分离的参考光束的一部分，以及控制单元，用于通过使用从检测到的参考光束的分量中选择的具有波长的分量作为参考来测量检测到的激光束的振荡波长接近检测到的激光束的振荡波长。根据激光装置，在激光束的波长的测量中，可以从参考光束的分量中容易地选择具有接近激光束的振荡波长的波长的分量作为参考。

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