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    • 1. 发明授权
    • Method for producing super clean air
    • 超洁净空气的生产方法
    • US06221323B1
    • 2001-04-24
    • US09027486
    • 1998-02-20
    • Masashi MizunoMasuo TadaNorio YamazakiTakaaki Fukumoto
    • Masashi MizunoMasuo TadaNorio YamazakiTakaaki Fukumoto
    • B01D5300
    • F24F3/16F24F2003/1621
    • Super clean air having therein chemical components—such as hydrocarbons, organic halogens, acidic gases, basic gases, aldehydes, nitrogen oxides, and H2O (that is, all components other than oxygen, nitrogen, and noble gases—the types of chemical components differ depending on the source of the air)—in concentrations no more than 1 ppb and a dew point lower than −40° C., is obtained from the atmosphere by low-temperature adsorption treatment in stages at temperatures ranging from −40° C. to −180° C. Material air collected from the atmosphere is pretreated in a room-temperature adsorption step to remove moisture and carbon dioxide. The pretreated air is then low-temperature adsorption treated by absorbents in a plurality of steps to adsorb the gaseous chemical components, the treatment temperature being lower in each succeeding step. Treatment at −40° C. may remove, for example, HF, SO2, and/or NH3. Treatment at −100° C. may remove, for example, SF6, C2F6, H2S, and/or N2O. Treatment at −150° C. may remove, for example, CF4, NO, CH4, and/or CO. The last treatment step produces super clean air suitable for use in processing semiconductor wafers.
    • 其中具有化学成分的超净空气,如碳氢化合物,有机卤素,酸性气体,碱性气体,醛类,氮氧化物和H2O(即除氧气,氮气和稀有气体之外的所有组分) - 化学成分的类型不同 取决于空气源) - 浓度不超过1ppb,露点低于-40℃,通过在-40℃的温度下分级进行低温吸附处理从大气中获得。 至-180℃。从大气中收集的物料空气在室温吸附步骤中预处理以除去水分和二氧化碳。 然后将经预处理的空气以多个步骤对吸收剂进行低温吸附处理,以吸附气态化学成分,后续处理温度较低。 在-40℃下的处理可以除去例如HF,SO 2和/或NH 3。 在-100℃下的处理可以除去例如SF 6,C 2 F 6,H 2 S和/或N 2 O。 在-150℃下的处理可以除去例如CF 4,NO,CH 4和/或CO。最后的处理步骤产生适合用于处理半导体晶片的超净空气。
    • 2. 发明授权
    • Method and apparatus for producing super clean air
    • 生产超洁净空气的方法和设备
    • US6151914A
    • 2000-11-28
    • US152688
    • 1998-09-14
    • Masashi MizunoMasuo TadaNorio YamazakiToshiaki Ohmori
    • Masashi MizunoMasuo TadaNorio YamazakiToshiaki Ohmori
    • B01D53/04B01D53/00B01D53/02F04B27/10F25J3/04F25J1/00
    • F25J3/044B01D53/002B01D53/02F25J3/04284F25J3/04527F25J3/04563F25J3/04612F25J3/04636F25J2205/60F25J2215/40F25J2215/42Y10S62/909
    • Super clean air suitable for use in a tunnel-type wafer transport system, etc., is produced efficiently with the specific energy consumption reduced and the yield improved by making good use of part of cooling energy and gas produced in a low temperature separation type nitrogen producing apparatus. Material air 1a collected from the atmosphere is pretreated in a room temperature adsorption tower 7, this pretreated air is adsorption treated at -60.degree. C. in a first low temperature adsorption tower 9, and the treated air 1c is further adsorption treated at -150.degree. C. in a second low temperature adsorption tower 10, thereby producing super clean air 1e containing not higher than 1 ppb of the chemical components other than nitrogen, oxygen and noble gases and having a dew point of not higher than -100.degree. C. The airs 1b and 1c are cooled in heat exchangers 12, 13 and 14 by utilizing cooling energy produced in the low temperature separation type nitrogen producing apparatus, that is, the low temperature gas 3f passed through an expansion turbine 38 from a rectifying tower 37.
    • 适用于隧道式晶片输送系统等的超洁净空气通过降低比能量消耗而有效地生产,并且通过充分利用部分冷却能量和在低温分离型氮气中产生的气体而提高产率 生产设备。 从大气中收集的原料空气1a在室温吸附塔7中进行预处理,该预处理空气在-60℃下在第一低温吸附塔9中进行吸附处理,经处理的空气1c进一步在-150处进行吸附处理 在第二低温吸附塔10中,由此产生除了氮气,氧气和惰性气体以外并且露点不高于-100℃的不超过1ppb的化学成分的超洁净空气1e。 空气1b和1c通过利用低温分离式氮气生成装置中产生的冷却能量,即从精馏塔37通过膨胀涡轮机38的低温气体3f而在热交换器12,13和14中冷却。
    • 8. 发明授权
    • Vehicle steering system
    • 车辆转向系统
    • US08267219B2
    • 2012-09-18
    • US12755898
    • 2010-04-07
    • Norio Yamazaki
    • Norio Yamazaki
    • B62D5/04
    • B62D5/0463B60K1/02B60K7/0007B62D11/24
    • In a steering system for a vehicle incorporated with a rear drive electric motor (5) for driving a pair of rear wheels (3rl, 3rr) that can function as a regenerative brake for the rear wheels, a steering torque control unit (38) reduces a steering assist torque provided by the power steering assist unit (21) when the rear drive electric motor is providing a regenerative braking. When the rear wheels are braked by a regenerative braking action without substantially applying a brake to the front wheel, the vehicle may acquire a temporal oversteer tendency. However, by increasing the effort required to steer the front wheels, such a tendency can be canceled or compensated, and the vehicle operator is enabled to control the vehicle without experiencing any unfamiliar feeling or discomfort. The effort required to steer the front wheels can be increased by decreasing the assist steering torque or providing a reactive steering torque at such a time.
    • 在具有用于驱动能够用作后轮的再生制动的一对后轮(3rl,3rr)的后驱动电动机(5)的车辆用转向系统中,转向转矩控制部(38)减少 当后驱动电动机提供再生制动时由动力转向辅助单元(21)提供的转向辅助转矩。 当后轮通过再生制动作用而制动而基本上不对前轮施加制动时,车辆可能获得暂时的过度转向倾向。 然而,通过增加转向前轮所需的努力,可以取消或补偿这种趋势,并且能够使车辆操作者能够控制车辆而不会感到任何不熟悉的感觉或不适。 通过减小辅助转向转矩或在这样的时间提供无效的转向转矩,可以增加转向前轮所需的努力。