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1. 发明授权

US06368977B1 Semiconductor device manufacturing method 有权
标题翻译：半导体器件制造方法
公开(公告)号：US06368977B1
公开(公告)日：2002-04-09
申请号：US09605436
申请日：2000-06-29
申请人： Masaki Narita , Yukimasa Yoshida , Katsuaki Aoki , Hiroshi Fujita , Takashi O , Toshimitsu Omine , Isao Matsui , Osamu Yamazaki , Naruhiko Kaji
发明人： Masaki Narita , Yukimasa Yoshida , Katsuaki Aoki , Hiroshi Fujita , Takashi O , Toshimitsu Omine , Isao Matsui , Osamu Yamazaki , Naruhiko Kaji
IPC分类号： H01L2100
CPC分类号： H01L21/67069 , H01J37/32082
摘要： There is provided a semiconductor device manufacturing method that comprises a first step of loading a processed substrate in a reaction chamber, a second step of introducing a reaction gas into the reaction chamber at a predetermined flow rate, a third step of maintaining an interior of the reaction chamber at a predetermined pressure, a fourth step of starting generation of plasma by supplying a high frequency power to an electrode arranged in the reaction chamber, a fifth step of applying a predetermined process to the processed substrate, and a sixth step of stopping generation of the plasma by stopping supply of the high frequency power after the predetermined process is completed, wherein the reaction gas is introduced continuously when the generation of the plasma is stopped.
摘要翻译：提供了一种半导体器件制造方法，其包括将处理过的衬底装载在反应室中的第一步骤，以预定流量将反应气体引入反应室的第二步骤，保持反应室内部的第三步骤在预定压力下的反应室，通过向布置在反应室中的电极提供高频功率而开始产生等离子体的第四步骤，向经处理的基板施加预定处理的第五步骤，以及停止发生的第六步骤的等离子体通过在预定处理完成之后停止供给高频功率，其中当等离子体的产生停止时反应气体被连续地引入。

2. 发明授权

US06333246B1 Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system 有权
标题翻译：使用静电卡盘和半导体器件制造系统的半导体器件制造方法
公开(公告)号：US06333246B1
公开(公告)日：2001-12-25
申请号：US09604722
申请日：2000-06-28
申请人： Masaki Narita , Yukimasa Yoshida , Katsuaki Aoki , Hiroshi Fujita , Osamu Yamazaki , Toshimitsu Omine , Isao Matsui , Takashi O
发明人： Masaki Narita , Yukimasa Yoshida , Katsuaki Aoki , Hiroshi Fujita , Osamu Yamazaki , Toshimitsu Omine , Isao Matsui , Takashi O
IPC分类号： H01L2120
CPC分类号： H01J37/321 , C23C16/4401 , C23C16/50 , H01L21/31116
摘要： A semiconductor device manufacturing method comprises the steps of placing a substrate to be processed on an electrostatic chuck on a substrate stand in a process chamber, and applying a negative voltage to the electrostatic chuck. After applying the negative voltage, the substrate is stuck onto the electrostatic chuck, a process gas is introduced into the process chamber, discharge plasma is generated, and the substrate is processed as predetermined.
摘要翻译：半导体器件制造方法包括以下步骤：将处理的基板放置在处理室中的基板支架上的静电卡盘上，并向静电卡盘施加负电压。在施加负电压之后，将基板粘贴到静电卡盘上，将处理气体引入到处理室中，产生放电等离子体，并且如预定的那样处理基板。

3. 发明授权

US06274507B1 Plasma processing apparatus and method 失效
标题翻译：等离子体处理装置及方法
公开(公告)号：US06274507B1
公开(公告)日：2001-08-14
申请号：US09226723
申请日：1999-01-07
申请人： Masaki Narita , Yukimasa Yoshida , Kei Hattori , Katsuya Okumura
发明人： Masaki Narita , Yukimasa Yoshida , Kei Hattori , Katsuya Okumura
IPC分类号： H01L2131
CPC分类号： H01L21/67017 , C23C14/564 , C23C16/4401 , C23C16/54 , H01J37/32743 , H01J37/32834 , Y10S438/907 , Y10S438/908 , Y10S438/909
摘要： A semiconductor processing apparatus includes a load chamber, an unload chamber, a common transfer chamber, a first process chamber, and a second process chamber, which are connected via gate valves. The load and unload chambers are connected to a first vacuum-exhaust mechanism including a common dry pump. The common transfer chamber is connected to a second vacuum-exhaust mechanism including a dry pump. The first and second processes chambers are connected to a third vacuum-exhaust mechanism including a common dry pump, and first and second turbo molecular pumps. The processing apparatus includes a controller which can drive and stop the dry pumps independently of each other in coordination with open/closed switching of the gate valves, while keeping the turbo molecular pumps driven.
摘要翻译：半导体处理装置包括通过闸阀连接的装载室，卸载室，公共传送室，第一处理室和第二处理室。装载和卸载室连接到包括普通干式泵的第一真空排气机构。公共传送室连接到包括干式泵的第二真空排气机构。第一和第二处理室连接到包括普通干式泵以及第一和第二涡轮分子泵的第三真空排气机构。处理装置包括控制器，其可以在保持涡轮分子泵被驱动的同时，与闸阀的打开/关闭切换协调地彼此独立地驱动和停止干式泵。

4. 发明授权

US07937003B2 Image forming apparatus and method of determining degradation of charging property of developer 有权
标题翻译：确定显影剂带电性能劣化的成像装置及方法
公开(公告)号：US07937003B2
公开(公告)日：2011-05-03
申请号：US11519096
申请日：2006-09-12
申请人： Yukimasa Yoshida
发明人： Yukimasa Yoshida
IPC分类号： G03G15/08
CPC分类号： G03G15/065 , G03G2215/0602 , G03G2215/0634
摘要： A photosensitive layer of a photosensitive drum is charged and a surface of the photosensitive layer is exposed at a specified density and then a development bias is applied to a development roller. An absolute value of a detection voltage is obtained from a development current sensor. It is determined whether the obtained absolute value of the detection voltage is less than a threshold which is set in advance, whereby a determination is made as to whether the charging property of toner is degraded.
摘要翻译：对感光鼓的感光层进行充电，并将感光层的表面以规定的密度曝光，然后对显影辊施加显影偏压。从显影电流传感器获得检测电压的绝对值。确定所获得的检测电压的绝对值是否小于预先设定的阈值，由此确定调色剂的充电特性是否劣化。

5. 发明授权

US5717294A Plasma process apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US5717294A
公开(公告)日：1998-02-10
申请号：US395503
申请日：1995-02-27
申请人： Itsuko Sakai , Makoto Sekine , Keiji Horioka , Yukimasa Yoshida , Koichiro Inazawa , Masahiro Ogasawara , Yoshio Ishikawa , Kazuo Eguchi
发明人： Itsuko Sakai , Makoto Sekine , Keiji Horioka , Yukimasa Yoshida , Koichiro Inazawa , Masahiro Ogasawara , Yoshio Ishikawa , Kazuo Eguchi
IPC分类号： H05H1/46 , C23C16/50 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , B23K10/00 , H05H1/16
CPC分类号： H01J37/32623 , H01J37/3266
摘要： A vacuum chamber contains a first electrode for supporting a wafer, and a second electrode opposing the first electrode. A supply system and an exhaustion system are connected to the vacuum chamber. The system supplies a reactive gas into the chamber, and the system exhaust the used gas from the chamber. A radio-frequency power supply is connected to the first electrode, for supplying power between the electrodes to generate an electric field E. An annular magnet assembly is provided around the chamber, for generating a magnetic field B which has a central plane intersecting with the electric field E. The magnet assembly has a plurality of magnet elements which have different magnetization axes in the central plane of the magnetic field. Electrons drift due to a force resulting from an outer product (E.times.B) of the electric field E and the magnetic field B. The central plane of the magnetic field B is shifted upwards from the target surface of the wafer, such that the magnetic force lines of the magnetic field intersect with the target surface of the substrate.
摘要翻译：真空室包含用于支撑晶片的第一电极和与第一电极相对的第二电极。供应系统和耗尽系统连接到真空室。该系统将反应性气体供应到室中，并且系统从室中排出废气。射频电源连接到第一电极，用于在电极之间提供电力以产生电场E.环形磁体组件设置在室周围，用于产生磁场B，磁场B具有与中心平面相交的中心平面电场E.磁体组件具有在磁场的中心平面中具有不同磁化轴的多个磁体元件。电子由于电场E的外部产物（ExB）和磁场B产生的力而漂移。磁场B的中心平面从晶片的目标表面向上移动，使得磁力线的磁场与基板的目标表面相交。

6. 发明授权

US08126345B2 Image forming device 有权
标题翻译：图像形成装置
公开(公告)号：US08126345B2
公开(公告)日：2012-02-28
申请号：US12971516
申请日：2010-12-17
申请人： Hiroshi Handa , Hiroki Mori , Masatoshi Shiraki , Yukimasa Yoshida
发明人： Hiroshi Handa , Hiroki Mori , Masatoshi Shiraki , Yukimasa Yoshida
IPC分类号： G03G15/06 , G03G15/08
CPC分类号： G03G15/0806 , G03G15/065 , G03G2215/0634
摘要： An image-forming device can include an image acquiring unit that acquires image data, an image forming unit that forms an image based on the image data, a determining unit that determines whether the image data includes a part having density greater than or equal to a prescribed density, and a controller. The image forming unit can include a developing roller, a supply roller for supplying developer to the developing roller, and a bias applying unit that applies first and second voltages between the developing roller and the supply roller in first and second modes, respectively. The controller can control the bias applying unit to apply one of the first and second voltages when the determining unit determines whether the image data includes the part having density greater than or equal to a prescribed density.
摘要翻译：图像形成装置可以包括获取图像数据的图像获取单元，基于图像数据形成图像的图像形成单元，确定单元，确定图像数据是否包括密度大于或等于规定密度和控制器。图像形成单元可以包括显影辊，用于向显影辊供应显影剂的供应辊以及分别在第一和第二模式下在显影辊和供给辊之间施加第一和第二电压的偏压施加单元。当确定单元确定图像数据是否包括具有大于或等于规定浓度的密度的部分时，控制器可以控制偏置施加单元施加第一和第二电压中的一个。

7. 发明授权

US07257338B2 Image forming apparatus 有权
标题翻译：图像形成装置
公开(公告)号：US07257338B2
公开(公告)日：2007-08-14
申请号：US11032108
申请日：2005-01-11
申请人： Yukimasa Yoshida
发明人： Yukimasa Yoshida
IPC分类号： G03G15/00
CPC分类号： G03G15/06
摘要： An image forming apparatus that forms an image having proper density regardless of changes in a charged amount of developer per unit mass is provided. When image data is received in a laser printer, a main motor is driven to rotate a photosensitive drum, etc., and charging bias is applied to a charger to charge the photosensitive drum. Then, paper is fed. Predetermined current detection developing bias is applied to a developing roller for a predetermined period of time. A current value of a developing current during the application is detected. Developing bias applied to the developing roller is calculated so as to keep constant density in the printed image. Particularly, a charged amount of toner per unit mass (Q/M) is calculated from the detected current value. Based on the Q/M, the developing bias is calculated. A print process is performed by applying the developing bias to the developing roller.
摘要翻译：提供了形成具有适当密度的图像的图像形成装置，而与每单位质量的显影剂的带电量的变化无关。当在激光打印机中接收到图像数据时，驱动主电机旋转感光鼓等，并将充电偏压施加到充电器以对感光鼓充电。然后，进纸。将预定电流检测显影偏压施加到显影辊上预定的时间段。检测应用期间显影电流的当前值。计算施加到显影辊上的显影偏压，以便在印刷图像中保持恒定的浓度。特别地，根据检测到的电流值计算每单位质量的调色剂的充电量（Q / M）。基于Q / M，计算出发展中的偏差。通过将显影偏压施加到显影辊来进行打印处理。

8. 发明申请

US20070077076A1 Image forming apparatus and method of determining degradation of charging property of developer 有权
标题翻译：确定显影剂带电性能劣化的成像装置及方法
公开(公告)号：US20070077076A1
公开(公告)日：2007-04-05
申请号：US11519096
申请日：2006-09-12
申请人： Yukimasa Yoshida
发明人： Yukimasa Yoshida
IPC分类号： G03G15/08
CPC分类号： G03G15/065 , G03G2215/0602 , G03G2215/0634
摘要： A photosensitive layer of a photosensitive drum is charged and a surface of the photosensitive layer is exposed at a specified density and then a development bias is applied to a development roller. An absolute value of a detection voltage is obtained from a development current sensor. It is determined whether the obtained absolute value of the detection voltage is less than a threshold which is set in advance, whereby a determination is made as to whether the charging property of toner is degraded.
摘要翻译：对感光鼓的感光层进行充电，并将感光层的表面以规定的密度曝光，然后对显影辊施加显影偏压。从显影电流传感器获得检测电压的绝对值。确定所获得的检测电压的绝对值是否小于预先设定的阈值，由此确定调色剂的充电特性是否劣化。

9. 发明授权

US5178638A Pressure-reduced chamber system having a filter means 失效
标题翻译：具有过滤装置的减压室系统
公开(公告)号：US5178638A
公开(公告)日：1993-01-12
申请号：US732911
申请日：1991-07-19
申请人： Satoshi Kaneko , Taichi Fugita , Yukimasa Yoshida , Katsuya Okumura
发明人： Satoshi Kaneko , Taichi Fugita , Yukimasa Yoshida , Katsuya Okumura
IPC分类号： B25J19/00 , B25J9/06 , H01L21/00 , H01L21/02 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/677
CPC分类号： H01L21/67161 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67742 , Y10T29/41
摘要： The pressure-reduced chamber system of the invention includes a handling mechanism for loading and/or unloading a semiconductor wafer between a process chamber in which a plasma etching is carried out on a semiconductor wafer under a reduced pressure, and a pressure-reduced chamber. Further, the system includes an outer cover for covering the driving force transmitting section of the handling mechanism, a filter mounted to the outer cover such that it defines the inside and outside of the outer cover, and an exhaustion pump for evacuating the space region formed between the outer cover and the pressure-reduced chamber. Thus, when the space region is evacuated by the exhaustion pump, the dust generated from the driving force transmitting section of the handling mechanism is caught by the filter.
摘要翻译：本发明的减压室系统包括用于在半导体晶片上减压等离子体蚀刻的处理室和减压室之间装载和/或卸载半导体晶片的处理机构。此外，该系统包括用于覆盖处理机构的驱动力传递部分的外盖，安装到外盖上以使其限定外盖的内部和外部的过滤器以及用于抽空形成的空间区域的排出泵在外盖和减压室之间。因此，当通过排气泵抽空空间区域时，由处理机构的驱动力传递部产生的灰尘被过滤器捕获。

10. 发明授权

US08683338B2 Information processing device 有权
标题翻译：信息处理装置
公开(公告)号：US08683338B2
公开(公告)日：2014-03-25
申请号：US12076480
申请日：2008-03-19
申请人： Masashi Suzuki , Yukimasa Yoshida , Kiyotaka Ohara , Hidenori Hisada , Shougo Sato , Ryota Kato
发明人： Masashi Suzuki , Yukimasa Yoshida , Kiyotaka Ohara , Hidenori Hisada , Shougo Sato , Ryota Kato
IPC分类号： G06F15/16 , G06F3/00
CPC分类号： G06F3/0481
摘要： There is provided an information processing device, comprising: a display unit configured to display at least one of a plurality of data files; an information providing unit configured to transmit, to a host computer, first information enabling a client device accessing the host computer to display information contained in the first information; a display switch unit configured to switch onscreen representation on the display unit between images corresponding to the plurality of data files; and a data changing unit configured to transmit, to the host computer, second information concerning an image corresponding to one of the plurality of data files currently displayed on the display unit in response to a fact that the onscreen representation on the display unit is switched.
摘要翻译：提供了一种信息处理设备，包括：显示单元，被配置为显示多个数据文件中的至少一个; 信息提供单元，被配置为向主计算机发送使客户端设备访问主计算机以显示包含在第一信息中的信息的第一信息; 显示开关单元，被配置为在对应于所述多个数据文件的图像之间切换所述显示单元上的屏幕显示; 以及数据改变单元，被配置为响应于切换显示单元上的屏幕表示的事实，向主计算机发送与当前显示在显示单元上的多个数据文件中的一个数据文件相对应的图像的第二信息。

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