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    • 5. 发明授权
    • Vertical cavity surface emitting lasers, optical modules and systems
    • 垂直腔表面发射激光器,光学模块和系统
    • US06697405B2
    • 2004-02-24
    • US09785480
    • 2001-02-20
    • Takeshi KitataniMasahiko KondowToshiaki Tanaka
    • Takeshi KitataniMasahiko KondowToshiaki Tanaka
    • H01S310
    • H01S5/18341H01S5/02284H01S5/06226H01S5/18311H01S5/18361H01S5/18369H01S5/3054
    • A surface emitting laser device comprising, on a semiconductor substrate, an active region for generating light, a current confinement region disposed on the side opposite to the semiconductor substrate relative to the active region, an optical cavity comprising reflectors putting the active region and the current confinement region vertically therebetween in the direction of layering the semiconductor layer, a first electrode disposed on the side of the semiconductor substrate relative to the current confinement region and a second electrode disposed on the side opposite to the semiconductor layer relative to the current confinement region, and having a layered structure capable of forming 2-dimensional carriers between the current confinement region and the second electrode, in which a current flowing from the electrode to the current confinement region has a component in the horizontal direction relative to the surface of the substrate and is conducted mainly by way of the channel for the 2-dimensional carrier gas, whereby the device resistance can be reduced greatly to provide high speed optical module using the surface emitting laser improved in the performance operating at a high speed of 10 Gb/s or more.
    • 一种表面发射激光器件,在半导体衬底上包括用于产生光的有源区,相对于有源区设置在与半导体衬底相对的一侧上的电流限制区,包含放置有源区和反射电流的反射器的光腔 在层叠半导体层的方向上垂直于其间的约束区域,相对于电流限制区域设置在半导体衬底侧的第一电极和相对于电流限制区域设置在与半导体层相对的一侧的第二电极, 并且具有能够在电流限制区域和第二电极之间形成2维载流子的分层结构,其中从电极流向电流限制区域的电流相对于基板的表面在水平方向上具有分量;以及 主要通过频道f进行 或二维载气,从而可以大大降低器件电阻,以提供使用在以10Gb / s以上的高速运行的性能方面得到改进的表面发射激光器的高速光学模块。