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1. 发明授权

US06763311B2 Shaking test apparatus and method for structures 失效
标题翻译：振动试验装置及结构方法
公开(公告)号：US06763311B2
公开(公告)日：2004-07-13
申请号：US10034306
申请日：2002-01-03
申请人： Masahiko Inoue , Toshihiko Horiuchi , Yasuyuki Momoi , Takao Konno , Wataru Yamagishi
发明人： Masahiko Inoue , Toshihiko Horiuchi , Yasuyuki Momoi , Takao Konno , Wataru Yamagishi
IPC分类号： G01F1700
CPC分类号： G01M7/025 , G01M7/022
摘要： A calculating device and method provided for a shaking test apparatus for carrying out a shaking test on a structure by using a partial structure and a numerical model which is virtually connected to the partial structure. The calculating device includes a calculation part which identifies a vibration model corresponding to the partial structure on the basis of displacement and reaction force detected in response to shaking and which combines the vibration model and the numerical model with each other to construct a model of the overall system corresponding to the structure and calculates the shaking response of the overall system model.
摘要翻译：一种用于振动测试装置的计算装置和方法，用于通过使用虚拟连接到部分结构的部分结构和数值模型对结构进行振动测试。计算装置包括：计算部，其基于响应于振动检测到的位移和反作用力来识别对应于部分结构的振动模型，并且将振动模型和数值模型相互组合以构成整体的模型系统对应的结构，并计算整个系统模型的振动响应。

2. 发明授权

US06341258B1 Shaking test apparatus and method for structures 失效
标题翻译：振动试验装置及结构方法
公开(公告)号：US06341258B1
公开(公告)日：2002-01-22
申请号：US09526207
申请日：2000-03-15
申请人： Masahiko Inoue , Toshihiko Horiuchi , Yasuyuki Momoi , Takao Konno , Wataru Yamagishi
发明人： Masahiko Inoue , Toshihiko Horiuchi , Yasuyuki Momoi , Takao Konno , Wataru Yamagishi
IPC分类号： G01M702
CPC分类号： G01M7/025 , G01M7/022
摘要： A shaking response is estimated with high precision by performing a shaking test f or combining and estimating a shaking characteristic of a partial structure of an object under test obtained through a shaking test and a shaking response of the whole structure which is numerically modeled. In a shaking test apparatus and method, a structure under test comprises a partial structure and a numerical model which is virtually connected to the partial structure. First, a vibration model corresponding to the partial structure is assumed, the numerical model and the vibration model are combined to construct an overall-system model, and then the vibration response of the overall-system model is calculated. On the basis of the calculation result and the signal input from a waveform oscillator, the partial structure is shaken by using a shaker. The displacement and reaction force of the partial structure are measured by a displacement gauge and a load cell, the vibration model is corrected on the basis of the measurement value and the overall-system model is reconstructed. This procedure is repeated to construct the overall-system model with high precision.
摘要翻译：通过进行振动试验f或者通过振动试验获得的被测试物体的部分结构的振动特性和数值模拟的整个结构的振动响应进行振动试验f估计振动响应。在振动测试装置和方法中，被测结构包括虚拟连接到部分结构的部分结构和数值模型。首先，假设与部分结构相对应的振动模型，数值模型和振动模型结合起来构建一个整体系统模型，然后计算整个系统模型的振动响应。根据计算结果和从波形振荡器输入的信号，通过振荡器使部分结构振动。部分结构的位移和反作用力由位移计和称重传感器测量，振动模型根据测量值进行校正，并重建整个系统模型。重复此过程，以高精度构建整体系统模型。

3. 发明授权

US06629042B2 Testing system and testing method for structure 失效
公开(公告)号：US06629042B2
公开(公告)日：2003-09-30
申请号：US10106537
申请日：2002-03-27
申请人： Wataru Yamagishi , Toshihiko Horiuchi , Masahiko Inoue , Kazuhiro Umekita , Yasuyuki Momoi
发明人： Wataru Yamagishi , Toshihiko Horiuchi , Masahiko Inoue , Kazuhiro Umekita , Yasuyuki Momoi
IPC分类号： G01M1000
CPC分类号： G01M7/022 , G01M7/06 , G01V1/008
摘要： The present invention discloses a testing system and a testing method for a structure which tests a structure made of a test piece structure and a numerical model virtually connected to the structure. A simulated structure including a frame, an actuator and a reaction force measuring device is mounted on a foundation on which a shaking table is also mounted. Only the test piece structure is mounted on the shaking table. The motion of the shaking table 5 which is generated at the time of shaking the test piece structure using the shaking table and the actuator is measured by a shaking table motion measuring device, while the reaction force generated by the test piece structure is measured by a reaction force measuring device. Using these measured values and the numerical model stored in a digital computer, the motion of the test piece structure after a predetermined period for the motion of the simulated structure is calculated. The actuator and the shaking table are driven so as to make this calculated motion.

4. 发明授权

US06397153B1 Testing system and testing method for structure 失效
标题翻译：结构测试系统和测试方法
公开(公告)号：US06397153B1
公开(公告)日：2002-05-28
申请号：US09339874
申请日：1999-06-25
申请人： Wataru Yamagishi , Toshihiko Horiuchi , Masahiko Inoue , Kazuhiro Umekita , Yasuyuki Momoi
发明人： Wataru Yamagishi , Toshihiko Horiuchi , Masahiko Inoue , Kazuhiro Umekita , Yasuyuki Momoi
IPC分类号： G01M1000
CPC分类号： G01M7/022 , G01M7/06 , G01V1/008
摘要： The present invention discloses a testing system and a testing method for a structure which tests a structure made of a test piece structure and a numerical model virtually connected to the structure. A simulated structure including a frame, an actuator and a reaction force measuring device is mounted on a foundation on which a shaking table is also mounted. Only the test piece structure is mounted on the shaking table. The motion of the shaking table 5 which is generated at the time of shaking the test piece structure using the shaking table and the actuator is measured by a shaking table motion measuring device, while the reaction force generated by the test piece structure is measured by a reaction force measuring device. Using these measured values and the numerical model stored in a digital computer, the motion of the test piece structure after a predetermined period for the motion of the simulated structure is calculated. The actuator and the shaking table are driven so as to make this calculated motion.
摘要翻译：本发明公开了一种测试系统和测试方法，该测试系统和测试方法用于测试由测试片结构构成的结构和与该结构实际连接的数值模型。包括框架，致动器和反力测量装置的模拟结构安装在也安装有振动台的基础上。只有试件结构安装在摇台上。使用振动台和致动器在振动试验片结构时产生的振动台5的运动由振动台运动测量装置测量，同时由试片结构产生的反作用力由反作用力测量装置。使用这些测量值和存储在数字计算机中的数值模型，计算在模拟结构的运动的预定时间段之后的测试片结构的运动。致动器和振动台被驱动以便进行该计算的运动。

5. 发明授权

US06721668B1 Vibration exciting apparatus and vibration testing apparatus for structure using same 有权
标题翻译：振动激振装置及其结构振动试验装置
公开(公告)号：US06721668B1
公开(公告)日：2004-04-13
申请号：US09381037
申请日：1999-12-02
申请人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
发明人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
IPC分类号： G01F1700
CPC分类号： G01M7/06 , G01M7/022
摘要： The testing performs a vibration excitation testing of a part of the structure, performs a numerical calculus of vibration response of the other parts of the structure, and calculates the vibration response of a whole of the structure by combining these two methods. Testing includes calculating a position of a point of exciting force on the basis of vibration exciting, and calculating a reaction force on the basis of a load detected and the position of the point of exciting force. Then, a displacement of a numerical model is computed by using the reaction force calculated and a known external force, and calculating a vibration exciting machine displacement command value on the basis of the displacement. A drive drives the vibration exciting on the basis of an output thereof. Vibration excitation is performed in the translational direction as well as the rotational direction.
摘要翻译：该测试对结构的一部分进行振动激励测试，对结构的其他部分进行振动响应的数值计算，并通过组合这两种方法来计算整个结构的振动响应。测试包括基于振动激励来计算激励力点的位置，并且基于检测到的负载和激励力点的位置来计算反作用力。然后，通过使用计算的反作用力和已知的外力来计算数值模型的位移，并且基于位移计算振动激振机械位移指令值。驱动器基于其输出驱动振动激励。在平移方向以及旋转方向进行振动激励。

6. 发明授权

US06575037B2 Multiple degree of freedom vibration exciting apparatus and system 有权
标题翻译：多重自由度振动激振装置和系统
公开(公告)号：US06575037B2
公开(公告)日：2003-06-10
申请号：US09911477
申请日：2001-07-25
申请人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
发明人： Yasuyuki Momoi , Toshihiko Horiuchi , Kazuhiro Umekita , Masahiko Inoue , Takao Konno , Masaharu Sugano , Yuuji Tadano
IPC分类号： G01M702
CPC分类号： G01M7/06 , G01M7/025
摘要： The testing performs a vibration excitation testing of a part of the structure, performs a numerical calculus of vibration response of the other parts of the structure, and calculates the vibration response of a whole of the structure by combining these two methods. Testing includes calculating a position of a point of exciting force on the basis of vibration exciting, and calculating a reaction force on the basis of a load detected and the position of the point of exciting force. Then, a displacement of a numerical model is computed by using the reaction force calculated and a known external force, and calculating a vibration exciting machine displacement command value on the basis of the displacement. A drive drives the vibration exciting on the basis of an output thereof. Vibration excitation is performed in the translational direction as well as the rotational direction.
摘要翻译：该测试对结构的一部分进行振动激励测试，对结构的其他部分进行振动响应的数值计算，并通过组合这两种方法来计算整个结构的振动响应。测试包括基于振动激励来计算激励力点的位置，并且基于检测到的负载和激励力点的位置来计算反作用力。然后，通过使用计算的反作用力和已知的外力来计算数值模型的位移，并且基于位移计算振动激振机械位移指令值。驱动器基于其输出驱动振动激励。在平移方向以及旋转方向进行振动激励。

7. 发明申请

US20140082906A1 WELDED BELLOWS FOR SEMICONDUCTOR MANUFACTURING DEVICE 有权
标题翻译：用于半导体制造设备的焊接式电池
公开(公告)号：US20140082906A1
公开(公告)日：2014-03-27
申请号：US14110651
申请日：2012-03-09
申请人： Hidekazu Takahashi , Masahiko Inoue , Hiroyuki Ochiai
发明人： Hidekazu Takahashi , Masahiko Inoue , Hiroyuki Ochiai
IPC分类号： H01L21/00
CPC分类号： H01L21/00 , F16J3/047 , Y10T29/41
摘要： An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
摘要翻译：用于半导体制造装置的手风琴结构化的波纹管的特征在于，具有径向弯曲表面的多个环形波纹管板以交替的方式连接在外径侧和内径侧上，其中，环形波纹管板具有处理侧波纹管板和非加工侧波纹管板，气体层插入在两个波纹管板之间，处理侧波纹管板构造为厚板，侧面波纹管板被配置为薄板。焊接的波纹管不太可能被异物损坏，并且能够使用非加工侧波纹管板来补偿对加工侧波纹管板的任何损坏。

8. 发明授权

US07335315B2 Method and device for measuring wafer potential or temperature 有权
标题翻译：用于测量晶片电位或温度的方法和装置
公开(公告)号：US07335315B2
公开(公告)日：2008-02-26
申请号：US10513396
申请日：2003-06-17
申请人： Ryuichi Matsuda , Yuichi Kawano , Masahiko Inoue
发明人： Ryuichi Matsuda , Yuichi Kawano , Masahiko Inoue
IPC分类号： G01L21/30
CPC分类号： H01L21/67253 , H01L21/67248 , H01L21/6831
摘要： The present invention attracts a wafer 6, placed on a susceptor 5, toward the susceptor 5 by the electrostatic attractive power of an electrostatic chuck electrode 7, varies the output voltage of a variable direct current power source 23 for the electrostatic chuck electrode 7 while measuring the temperature of the wafer 6 by a temperature detection sensor 21; and detects the potential of the wafer 6 based on the output voltage of the variable direct current power source 23 at a time when the temperature of the wafer 6 peaks.
摘要翻译：本发明通过静电卡盘电极7的静电吸引力吸引放置在基座5上的晶片6，从而使静电卡盘电极7的可变直流电源23的输出电压变化，同时测量温度检测传感器21的晶片6的温度; 并且在晶片6的温度高峰时基于可变直流电源23的输出电压来检测晶片6的电位。

9. 发明授权

US06608921B1 Inspection of solder bump lighted with rays of light intersecting at predetermined angle 失效
标题翻译：检查以与预定角度相交的光线点亮的焊料凸点
公开(公告)号：US06608921B1
公开(公告)日：2003-08-19
申请号：US09378035
申请日：1999-08-20
申请人： Masahiko Inoue , Hiroshi Ikeda
发明人： Masahiko Inoue , Hiroshi Ikeda
IPC分类号： G06K900
CPC分类号： G06T7/0006 , G01N21/95684 , G01N2021/8822 , G01N2021/95646 , G01N2201/0626 , G01R31/048 , G01R31/309 , G06T2207/30152
摘要： A bump inspecting apparatus lights a spherical solder bump mounted on the surface of a circuit board and has a reinforcing resin applied to the lower half thereof from all circumferential directions with rays of light which intersect at a predetermined angle. An image of the lighted solder bump is captured while the amount of light irradiated upon the central portion of a solder bump is reduced. An object is extracted from image data obtained by the image capture and the area and/or the aspect ratio of the object are confirmed. The quality of the state of the reinforcing resin applied to the solder bump can be inspected.
摘要翻译：凸块检查装置点亮安装在电路板表面上的球形焊料凸块，并且具有从所有圆周方向向其下半部分施加与预定角度相交的光线的增强树脂。捕获点燃的焊料凸块的图像，同时照射到焊料凸块的中心部分的光量减少。从通过图像捕获获得的图像数据中提取对象，并确认对象的面积和/或纵横比。可以检查施加到焊料凸块的增强树脂的状态的质量。

10. 发明授权

US5993144A Complex-type article conveying apparatus 失效
标题翻译：复合型物品输送装置
公开(公告)号：US5993144A
公开(公告)日：1999-11-30
申请号：US999226
申请日：1997-12-29
申请人： Masahiko Inoue
发明人： Masahiko Inoue
IPC分类号： B25J15/00 , B21D43/18 , B23Q7/04 , B65G47/91 , B65G65/08
CPC分类号： B65G47/918 , B21D43/18 , B23Q7/04
摘要： In a conveying apparatus for conveying works between a first lower die and a second lower die in a press machine, a distal end portion of a multi-joint robot is connected to a linear shaft body, and the linear shaft body carries a linearly reciprocating body movable in the directions of the length of the linear shaft body. The linearly reciprocating body is connected to a first detachable holding device that holds a first work. The linear shaft body is connected to a second detachable holding device that holds a second work. The first work is transferred by motion of the linear shaft body and the motion of the linearly reciprocating body carrying the first holding device, and the second work is transferred by motion of the linear shaft body alone. The holding of the first work and the holding of second work are started approximately at the same timing, but the releasing of the first work and the releasing of the second work are performed at different timings in accordance with the positions at which their conveyances are completed.
摘要翻译：在用于在冲压机中在第一下模和第二下模之间输送工件的输送装置中，多关节机器人的远端部连接到直线轴体，直线轴体承载线性往复运动体可沿直线轴体的长度方向移动。线性往复体连接到保持第一工件的第一可拆卸保持装置。直线轴体连接到保持第二工件的第二可拆卸保持装置。第一工作通过直线轴体的运动和承载第一保持装置的线性往复体的运动而传递，第二工作通过单独的直线轴体的运动传递。第一项工作的召开和第二次工作的召开大概是在同一时间开始的，但是第一次工作的释放和第二次工作的释放是按照他们的交通工具完成的位置在不同的时间进行的。

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