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    • 1. 发明授权
    • Welded bellows for semiconductor manufacturing device
    • 焊接波纹管用于半导体制造装置
    • US09147571B2
    • 2015-09-29
    • US14110651
    • 2012-03-09
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • F16J15/00H01L21/00F16J3/04
    • H01L21/00F16J3/047Y10T29/41
    • An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
    • 用于半导体制造装置的手风琴结构化的波纹管的特征在于,具有径向弯曲表面的多个环形波纹管板以交替的方式连接在外径侧和内径侧上,其中, 环形波纹管板具有处理侧波纹管板和非加工侧波纹管板,气体层插入在两个波纹管板之间,处理侧波纹管板构造为厚板, 侧面波纹管板被配置为薄板。 焊接的波纹管不太可能被异物损坏,并且能够使用非加工侧波纹管板来补偿对加工侧波纹管板的任何损坏。
    • 2. 发明授权
    • Semiconductor fabrication device welded bellows
    • 半导体制造装置焊接波纹管
    • US08727355B2
    • 2014-05-20
    • US14110641
    • 2012-03-09
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • F16J15/52F16J3/04
    • F16J15/52F16J3/04F16J3/047
    • A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.
    • 一种手风琴式结构的半导体制造装置的波纹管,其特征在于,具有径向弯曲面的多个环状波纹管板在外径侧和内径侧交替地连接,其中,所述环形波纹管板设置有处理 侧面波纹管板和非处理侧波纹管板,设置在两个波纹管板之间的气体层,处理侧波纹管板的厚度较小,非处理侧波纹管板的厚度更大。 波纹管高度抵抗异物造成的损坏; 或者在不可能的情况下,处理侧波纹管板损坏,则可以通过非处理侧波纹管板补偿损坏。
    • 3. 发明申请
    • SEMICONDUCTOR FABRICATION DEVICE WELDED BELLOWS
    • 半导体制造设备焊接的BELLOWS
    • US20140035236A1
    • 2014-02-06
    • US14110641
    • 2012-03-09
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • F16J15/52F16J3/04
    • F16J15/52F16J3/04F16J3/047
    • A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.
    • 一种手风琴式结构的半导体制造装置的波纹管,其特征在于,具有径向弯曲面的多个环状波纹管板在外径侧和内径侧交替地连接,其中,所述环形波纹管板设置有处理 侧面波纹管板和非处理侧波纹管板,设置在两个波纹管板之间的气体层,处理侧波纹管板的厚度较小,非处理侧波纹管板的厚度更大。 波纹管高度抵抗异物造成的损坏; 或者在不可能的情况下,处理侧波纹管板损坏,则可以通过非处理侧波纹管板补偿损坏。
    • 4. 发明申请
    • WELDED BELLOWS FOR SEMICONDUCTOR MANUFACTURING DEVICE
    • 用于半导体制造设备的焊接式电池
    • US20140082906A1
    • 2014-03-27
    • US14110651
    • 2012-03-09
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • Hidekazu TakahashiMasahiko InoueHiroyuki Ochiai
    • H01L21/00
    • H01L21/00F16J3/047Y10T29/41
    • An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.
    • 用于半导体制造装置的手风琴结构化的波纹管的特征在于,具有径向弯曲表面的多个环形波纹管板以交替的方式连接在外径侧和内径侧上,其中, 环形波纹管板具有处理侧波纹管板和非加工侧波纹管板,气体层插入在两个波纹管板之间,处理侧波纹管板构造为厚板, 侧面波纹管板被配置为薄板。 焊接的波纹管不太可能被异物损坏,并且能够使用非加工侧波纹管板来补偿对加工侧波纹管板的任何损坏。
    • 5. 发明授权
    • Tubular body soundproof cover and covered tubular body
    • 管体隔音罩和覆盖的管状体
    • US08434587B2
    • 2013-05-07
    • US13359084
    • 2012-01-26
    • Kazuki EraHiroyuki Ochiai
    • Kazuki EraHiroyuki Ochiai
    • G10K11/00B65C3/26B29C65/00B28B7/32
    • F02M35/1272F02B29/0406F02B77/13F02M35/1277F16L55/0336
    • A purpose is to provide a tubular body soundproof cover and a covered tubular body, for which elastic deformation of the tubular body is unlikely to be inhibited. The tubular body soundproof cover includes a sound absorbing layer arranged on outside in an axially perpendicular direction of a tubular body having tubular body side curved sections; a skin layer arranged on outside in the axially perpendicular direction of the sound absorbing layer; and cover side curved sections arranged on outside in the axially perpendicular direction of the tubular body side curved sections, including at least a portion of the sound absorbing layer and at least a portion of the skin layer. The cover side curved sections have non-adherent sections in which the sound absorbing layer and the skin layer are not bonded over the entire circumferential length.
    • 目的是提供一种管状体隔音盖和一个覆盖的管状体,由此不可能抑制管状体的弹性变形。 管体隔音罩包括:吸声层,其设置在具有筒状体侧弯曲部的管状体的轴向垂直方向的外侧; 在吸声层的轴向垂直方向上配置在外侧的皮肤层; 以及在管状体侧弯曲部分的轴向垂直方向上布置在外侧的覆盖侧弯曲部分,包括至少一部分吸音层和至少一部分皮肤层。 盖侧弯曲部分具有不粘附部分,其中吸声层和表皮层在整个圆周长度上不粘合。