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    • 1. 发明授权
    • Package with optical waveguide module mounted therein
    • 其中安装有光波导模块的封装
    • US5673345A
    • 1997-09-30
    • US634257
    • 1996-04-18
    • Masahide SaitoShigeru SemuraShinji IshikawaDai YuiHiroo Kanamori
    • Masahide SaitoShigeru SemuraShinji IshikawaDai YuiHiroo Kanamori
    • G02B6/30G02B6/42
    • G02B6/4248G02B6/30
    • The present invention relates to a package in which an optical waveguide module is mounted, at least having such structure as to reduce influence of expansion or contraction (thermal stress) of a metal housing, caused with a temperature change of the external environment and applied on junction parts between an optical waveguide substrate and members for fixedly supporting tip portions of input and output optical fibers. This package comprises a cavity for housing the whole of the optical waveguide module as covered with a buffer protection material, and a metal housing having through holes for leading the above optical fibers to the outside. Particularly, the optical fibers and the through holes are bonded and secured with a filler having higher airtightness than the buffer protection material and having a lower tensile modulus than a metal material forming the housing.
    • 本发明涉及一种其中安装光波导模块的封装,其至少具有减少金属外壳的膨胀或收缩(热应力)对外部环境的温度变化引起的影响的结构,并应用于 光波导基板与用于固定地支撑输入和输出光纤的尖端部分的部件之间的接合部分。 该封装包括一个用缓冲保护材料覆盖的整个光波导模块的空腔,以及具有用于将上述光纤引导到外部的通孔的金属外壳。 特别地,光纤和通孔用比缓冲保护材料高的气密性的填料粘结固定,并且具有比形成外壳的金属材料低的拉伸模量。
    • 4. 发明授权
    • Optical waveguide and method of fabricating the same
    • 光波导及其制造方法
    • US5551966A
    • 1996-09-03
    • US181126
    • 1994-01-13
    • Chisai HiroseHiroo KanamoriAkira UranoShinji IshikawaHaruhiko AikawaMasahide Saito
    • Chisai HiroseHiroo KanamoriAkira UranoShinji IshikawaHaruhiko AikawaMasahide Saito
    • C03B8/04C03C13/04G02B6/132G02B6/136
    • G02B6/136C03C13/045G02B6/132
    • In the method for forming an optical waveguide according to this invention, an optical waveguide comprising a core of quartz as a main component, and a cladding layers surrounding the core is formed by deposition of glass fine particles by flame hydrolysis deposition and vitrifying the glass fine particle layers. This method includes a step of transiently increasing a feed amount of phosphorus to a flame burner in forming glass fine particle layers to be the cladding layers. Feeding phosphorus in this step for the first time after a glass fine particle layer is deposited without feeding phosphorus to the flame burner, whereby generation of foreign objects near the core dan be suppressed. The method for fabricating an optical waveguide according to this invention is for fabricating a core 132a or cladding layers 122 142 surrounding the core 132a by flame hydrolysis deposition and is characterized in that the glass fine particle layers are vitrified after the deposition of the phosphorus-content glass fine particle layer, whereby glass films 122a, 122b with a thickness of below 10 .mu.m are formed. This glass film forming step is repeated twice or more times to form the core or the glass layers to be the cladding layers surrounding the core. This invention can suppress inhomogeneous vitrified films and especially can make phosphorus concentrations in the cladding layers uniform. As a result, prapagation losses can be made small.
    • 在本发明的光波导形成方法中,以石英为核心的光波导和围绕芯的包层形成,通过火焰水解沉积玻璃微粒并使玻璃微细化 颗粒层。 该方法包括在形成作为包覆层的玻璃微粒子层时,向火焰燃烧器短暂地增加磷的供给量的步骤。 在玻璃微粒层沉积后,在该步骤中首先进料磷,而不向磷火焰炉供给磷,从而抑制在核心附近产生异物。 根据本发明的制造光波导的方法是通过火焰水解沉积来制造围绕芯132a的芯132a或包层122 142,其特征在于在沉积磷含量之后玻璃微粒层被玻璃化 玻璃微粒层,由此形成厚度低于10μm的玻璃膜122a,122b。 将该玻璃成膜工序重复两次以上,形成作为芯周围的包层的芯或玻璃层。 本发明可以抑制不均匀的玻璃化膜,特别是可以使包层中的磷浓度均匀。 因此,可以减少预算损失。
    • 7. 发明授权
    • Method for producing glass thin film
    • 制造玻璃薄膜的方法
    • US5660611A
    • 1997-08-26
    • US463866
    • 1995-06-05
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • C03B19/14C03C17/00C03C17/02C23C14/10C23C16/44C23C16/453C03B37/07C03C25/02
    • C03B19/1453C03B19/14C03B19/1415C03C17/001C03C17/02C23C14/10C23C16/44C23C16/453C03B2207/90
    • A method for producing an oxide glass thin film is provided, in which volatilization of additives in a porous film from which the thin film is formed is effectively suppressed, and which the oxide glass film has a desired arrangement of refractive index with a low optical loss. According to this method, glass fine particles mainly containing SiO.sub.2 with a first additive are deposited on a substrate to form a porous thin film. A gas containing a second additive is supplied to a first chamber and heated to a first predetermined temperature profile to provide a heated gas containing an oxide. After disposing the substrate in a second chamber communicated with the first chamber, the substrate is heated to make the deposited porous glass into transparent glass while controlling a temperature in the second chamber according to a second temperature profile. A carrier gas is flowed from the first chamber to the second chamber to transfer the heated gas and oxide from the first chamber to the second chamber during heating. The temperature of the first predetermined temperature profile is maintained higher than the temperature of the second predetermined temperature profile at the same time. In addition, the heated gas contains a component that is also present in the first additive.
    • 提供了一种制造氧化物玻璃薄膜的方法,其中有效地抑制了形成薄膜的多孔膜中的添加剂的挥发,并且氧化物玻璃薄膜具有期望的折射率排列,光损耗低 。 根据该方法,将主要含有SiO 2的第一添加剂的玻璃微粒子沉积在基板上,形成多孔薄膜。 将含有第二添加剂的气体供应到第一室并加热至第一预定温度分布,以提供含有氧化物的加热气体。 在将基板设置在与第一室连通的第二室中之后,基板被加热以使沉积的多孔玻璃成为透明玻璃,同时根据第二温度曲线控制第二室中的温度。 载气从第一室流到第二室,以在加热期间将加热的气体和氧化物从第一室转移到第二室。 第一预定温度曲线的温度同时保持高于第二预定温度曲线的温度。 此外,加热气体含有也存在于第一添加剂中的成分。
    • 10. 发明授权
    • Method for producing a glass thin film with controlloing an oxide vapor
of an additive
    • 用添加剂的氧化物蒸气调制玻璃薄膜的方法
    • US5503650A
    • 1996-04-02
    • US330602
    • 1994-10-28
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • C03B19/14C03C17/00C03C17/02C23C14/10C23C16/44C23C16/453C03B37/018
    • C03B19/1453C03B19/14C03B19/1415C03C17/001C03C17/02C23C14/10C23C16/44C23C16/453C03B2207/90
    • A method of producing an oxide glass thin film includes a process to obtain a transparent glass film, in which volatilization of additives in a porous film deposited is effectively suppressed and which can provide an oxide glass thin film having a desired arrangement of refractive index with a low optical loss. The method is for producing an oxide glass thin film, in which glass fine particles mainly containing SiO.sub.2 with additives are deposited on a substrate to form a porous thin film and then heated to form a transparent glass film. In the method, vapor of oxides of additive components is mixed in an atmosphere in which the porous thin film is heated to form the transparent glass film, whereby stopping the volatilization of the additives in the porous film deposited, preventing diffusion of the additives added to a core layer, and preventing the volatilization of glass transition temperature lowering components of additives (P.sub.2 O.sub.5, B.sub.2 O.sub.3, GeO.sub.2, etc.). By these, a desired arrangement of refractive index may be obtained, and an oxide glass thin film may be obtained while lowering the optical loss such as the optical scattering, which could be caused by bubbles in an unsintered portion.
    • 制造氧化物玻璃薄膜的方法包括获得透明玻璃膜的方法,其中有效地抑制了沉积的多孔膜中的添加剂的挥发,并且可以提供具有期望的折射率布置的氧化物玻璃薄膜 光损耗低。 该方法用于生产氧化物玻璃薄膜,其中主要含有SiO 2的玻璃微粒子添加剂沉积在基底上以形成多孔薄膜,然后加热形成透明玻璃膜。 在该方法中,添加成分的氧化物蒸气在多孔薄膜被加热的气氛中混合,形成透明玻璃膜,由此停止多孔膜中的添加剂的挥发,防止添加添加剂的扩散 核心层,并且防止添加剂(P 2 O 5,B 2 O 3,GeO 2等)的玻璃化转变温度降低成分的挥发。 通过这些,可以获得期望的折射率布置,并且可以在降低可能由未烧结部分中的气泡引起的光学散射等光损耗的同时获得氧化物玻璃薄膜。