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1. 发明授权

US5503650A Method for producing a glass thin film with controlloing an oxide vapor of an additive 失效
标题翻译：用添加剂的氧化物蒸气调制玻璃薄膜的方法
公开(公告)号：US5503650A
公开(公告)日：1996-04-02
申请号：US330602
申请日：1994-10-28
申请人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
发明人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
IPC分类号： C03B19/14 , C03C17/00 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B37/018
CPC分类号： C03B19/1453 , C03B19/14 , C03B19/1415 , C03C17/001 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B2207/90
摘要： A method of producing an oxide glass thin film includes a process to obtain a transparent glass film, in which volatilization of additives in a porous film deposited is effectively suppressed and which can provide an oxide glass thin film having a desired arrangement of refractive index with a low optical loss. The method is for producing an oxide glass thin film, in which glass fine particles mainly containing SiO.sub.2 with additives are deposited on a substrate to form a porous thin film and then heated to form a transparent glass film. In the method, vapor of oxides of additive components is mixed in an atmosphere in which the porous thin film is heated to form the transparent glass film, whereby stopping the volatilization of the additives in the porous film deposited, preventing diffusion of the additives added to a core layer, and preventing the volatilization of glass transition temperature lowering components of additives (P.sub.2 O.sub.5, B.sub.2 O.sub.3, GeO.sub.2, etc.). By these, a desired arrangement of refractive index may be obtained, and an oxide glass thin film may be obtained while lowering the optical loss such as the optical scattering, which could be caused by bubbles in an unsintered portion.
摘要翻译：制造氧化物玻璃薄膜的方法包括获得透明玻璃膜的方法，其中有效地抑制了沉积的多孔膜中的添加剂的挥发，并且可以提供具有期望的折射率布置的氧化物玻璃薄膜光损耗低。该方法用于生产氧化物玻璃薄膜，其中主要含有SiO 2的玻璃微粒子添加剂沉积在基底上以形成多孔薄膜，然后加热形成透明玻璃膜。在该方法中，添加成分的氧化物蒸气在多孔薄膜被加热的气氛中混合，形成透明玻璃膜，由此停止多孔膜中的添加剂的挥发，防止添加添加剂的扩散核心层，并且防止添加剂（P 2 O 5，B 2 O 3，GeO 2等）的玻璃化转变温度降低成分的挥发。通过这些，可以获得期望的折射率布置，并且可以在降低可能由未烧结部分中的气泡引起的光学散射等光损耗的同时获得氧化物玻璃薄膜。

2. 发明授权

US5660611A Method for producing glass thin film 失效
标题翻译：制造玻璃薄膜的方法
公开(公告)号：US5660611A
公开(公告)日：1997-08-26
申请号：US463866
申请日：1995-06-05
申请人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
发明人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
IPC分类号： C03B19/14 , C03C17/00 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B37/07 , C03C25/02
CPC分类号： C03B19/1453 , C03B19/14 , C03B19/1415 , C03C17/001 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B2207/90
摘要： A method for producing an oxide glass thin film is provided, in which volatilization of additives in a porous film from which the thin film is formed is effectively suppressed, and which the oxide glass film has a desired arrangement of refractive index with a low optical loss. According to this method, glass fine particles mainly containing SiO.sub.2 with a first additive are deposited on a substrate to form a porous thin film. A gas containing a second additive is supplied to a first chamber and heated to a first predetermined temperature profile to provide a heated gas containing an oxide. After disposing the substrate in a second chamber communicated with the first chamber, the substrate is heated to make the deposited porous glass into transparent glass while controlling a temperature in the second chamber according to a second temperature profile. A carrier gas is flowed from the first chamber to the second chamber to transfer the heated gas and oxide from the first chamber to the second chamber during heating. The temperature of the first predetermined temperature profile is maintained higher than the temperature of the second predetermined temperature profile at the same time. In addition, the heated gas contains a component that is also present in the first additive.
摘要翻译：提供了一种制造氧化物玻璃薄膜的方法，其中有效地抑制了形成薄膜的多孔膜中的添加剂的挥发，并且氧化物玻璃薄膜具有期望的折射率排列，光损耗低。根据该方法，将主要含有SiO 2的第一添加剂的玻璃微粒子沉积在基板上，形成多孔薄膜。将含有第二添加剂的气体供应到第一室并加热至第一预定温度分布，以提供含有氧化物的加热气体。在将基板设置在与第一室连通的第二室中之后，基板被加热以使沉积的多孔玻璃成为透明玻璃，同时根据第二温度曲线控制第二室中的温度。载气从第一室流到第二室，以在加热期间将加热的气体和氧化物从第一室转移到第二室。第一预定温度曲线的温度同时保持高于第二预定温度曲线的温度。此外，加热气体含有也存在于第一添加剂中的成分。

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