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    • 1. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US08254175B2
    • 2012-08-28
    • US12638836
    • 2009-12-15
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • G11C11/34
    • H01L21/28282
    • A semiconductor device includes a semiconductor region, a tunnel insulating film formed on the semiconductor region, a charge-storage insulating film formed on the tunnel insulating film, a block insulating film formed on the charge-storage insulating film, and a control gate electrode formed on the block insulating film, wherein the tunnel insulating film comprises a first region which is formed on a surface of the semiconductor region and contains silicon and oxygen, a second region which contains silicon and nitrogen, a third region which is formed on a back surface of the charge-storage insulating film and contains silicon and oxygen, and an insulating region which is formed at least between the first region and the second region or between the second region and the third region, and contains silicon and nitrogen and oxygen and the second region is formed between the first region and the third region.
    • 半导体器件包括半导体区域,形成在半导体区域上的隧道绝缘膜,形成在隧道绝缘膜上的电荷存储绝缘膜,形成在电荷存储绝缘膜上的块绝缘膜和形成的控制栅电极 在所述块绝缘膜上,其中所述隧道绝缘膜包括形成在所述半导体区域的表面上并且包含硅和氧的第一区域,包含硅和氮的第二区域,形成在所述第二区域的背面 的电荷存储绝缘膜并且包含硅和氧,以及至少形成在第一区域和第二区域之间或者在第二区域和第三区域之间形成的绝缘区域,并且包含硅和氮和氧,并且第二 区域形成在第一区域和第三区域之间。
    • 2. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20100157680A1
    • 2010-06-24
    • US12638836
    • 2009-12-15
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • Masaaki HiguchiHiroshi MatsubaYoshio OzawaTetsuya Kai
    • G11C16/04H01L29/792H01L21/28G11C11/34
    • H01L21/28282
    • A semiconductor device includes a semiconductor region, a tunnel insulating film formed on the semiconductor region, a charge-storage insulating film formed on the tunnel insulating film, a block insulating film formed on the charge-storage insulating film, and a control gate electrode formed on the block insulating film, wherein the tunnel insulating film comprises a first region which is formed on a surface of the semiconductor region and contains silicon and oxygen, a second region which contains silicon and nitrogen, a third region which is formed on a back surface of the charge-storage insulating film and contains silicon and oxygen, and an insulating region which is formed at least between the first region and the second region or between the second region and the third region, and contains silicon and nitrogen and oxygen and the second region is formed between the first region and the third region.
    • 半导体器件包括半导体区域,形成在半导体区域上的隧道绝缘膜,形成在隧道绝缘膜上的电荷存储绝缘膜,形成在电荷存储绝缘膜上的块绝缘膜和形成的控制栅电极 在所述块绝缘膜上,其中所述隧道绝缘膜包括形成在所述半导体区域的表面上并且包含硅和氧的第一区域,包含硅和氮的第二区域,形成在所述第二区域的背面 的电荷存储绝缘膜并且包含硅和氧,以及至少形成在第一区域和第二区域之间或者在第二区域和第三区域之间形成的绝缘区域,并且包含硅和氮和氧,并且第二 区域形成在第一区域和第三区域之间。
    • 5. 发明授权
    • Nonvolatile semiconductor memory device
    • 非易失性半导体存储器件
    • US08674426B2
    • 2014-03-18
    • US13023025
    • 2011-02-08
    • Masaaki HiguchiYoshio Ozawa
    • Masaaki HiguchiYoshio Ozawa
    • H01L29/788
    • H01L29/7926H01L27/11578H01L27/11582H01L29/66833
    • According to one embodiment, a nonvolatile semiconductor memory device includes a stacked body, a semiconductor pillar and a charge storage layer. The stacked body includes a plurality of insulating films alternately stacked with a plurality of electrode films. The semiconductor pillar is buried in the stacked body, and extends in a stacking direction of the insulating films and the electrode films. The charge storage layer is provided between the electrode films and the semiconductor pillar. The electrode films are divided into a plurality of control gate electrodes. Each of the plurality of control gate electrodes faces the semiconductor pillar and sandwiches the charge storage layer with the semiconductor pillar.
    • 根据一个实施例,非易失性半导体存储器件包括堆叠体,半导体柱和电荷存储层。 层叠体包括交替层叠有多个电极膜的多个绝缘膜。 半导体柱被埋置在层叠体中,并且在绝缘膜和电极膜的层叠方向上延伸。 电荷存储层设置在电极膜和半导体柱之间。 电极膜被分成多个控制栅电极。 多个控制栅极电极中的每一个面对半导体柱并且用半导体柱夹着电荷存储层。