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    • 1. 发明申请
    • Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement
    • 用于制造传感器或致动器装置的方法以及相应的传感器或致动器装置
    • US20050155411A1
    • 2005-07-21
    • US10504738
    • 2003-02-07
    • Markus RogallaIngo FreundMirko Lehmann
    • Markus RogallaIngo FreundMirko Lehmann
    • G12B9/04B81B7/00G01N35/00H05K5/00H05K7/14G01N27/414
    • B81B7/0061
    • In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provided between the chip and the protective cover, the adhesive layer alone or together with the protective cover being an interface between the sensor and the environment. The protective cover and/or the adhesive layer may have a channel formed therein, the channel functioning as the reception channel for a sensor. In an alternative embodiment, the protective cover placed on a wafer with several chips, and the wafer is cut up to produce the individual chips with the protective cover. Thus, a sensor arrangement may have the protective cover applied to the individual chip after the chip is cut from the wafer, or the protective cover may be applied to the wafer, and the wafer and cover are then cut up into the individual chips and corresponding covers. The channel leading from one side of the arrangement to the sensor may be taken through the adhesive layer, through the protective cover, or through both. A hole may be formed in the protective cover above the sensor, with the sensor lying loosely in the hole. The reaction volume may be determined by the dimensions of the hole.
    • 在用于制造传感器装置和所得到的传感器装置的方法中,传感器设置在芯片上或芯片中,并且芯片被保护盖覆盖,盖是传感器和环境之间的接口。 粘合剂层设置在芯片和保护盖之间,粘合剂层单独或与保护罩一起作为传感器和环境之间的界面。 保护盖和/或粘合剂层可以具有形成在其中的通道,该通道用作传感器的接收通道。 在替代实施例中,将保护盖放置在具有几个芯片的晶片上,并且切割晶片以用保护盖产生单独的芯片。 因此,在从晶片切割芯片之后,传感器装置可以具有施加到单个芯片的保护盖,或者可以将保护盖施加到晶片,然后将晶片和盖切割成各个芯片,并且对应于 盖子。 从布置的一侧引导到传感器的通道可以穿过粘合剂层,通过保护盖,或者通过两者。 可以在传感器上方的保护罩中形成孔,传感器松动地位于孔中。 反应体积可以由孔的尺寸确定。
    • 2. 发明授权
    • Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement
    • 用于制造传感器或致动器装置的方法以及相应的传感器或致动器装置
    • US07592195B2
    • 2009-09-22
    • US10504738
    • 2003-02-07
    • Markus RogallaIngo FreundMirko Lehmann
    • Markus RogallaIngo FreundMirko Lehmann
    • H01L21/00
    • B81B7/0061
    • In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provided between the chip and the protective cover, the adhesive layer alone or together with the protective cover being an interface between the sensor and the environment. The protective cover and/or the adhesive layer may have a channel formed therein, the channel functioning as the reception channel for a sensor. In an alternative embodiment, the protective cover placed on a wafer with several chips, and the wafer is cut up to produce the individual chips with the protective cover. Thus, a sensor arrangement may have the protective cover applied to the individual chip after the chip is cut from the wafer, or the protective cover may be applied to the wafer, and the wafer and cover are then cut up into the individual chips and corresponding covers. The channel leading from one side of the arrangement to the sensor may be taken through the adhesive layer, through the protective cover, or through both. A hole may be formed in the protective cover above the sensor, with the sensor lying loosely in the hole. The reaction volume may be determined by the dimensions of the hole.
    • 在用于制造传感器装置和所得到的传感器装置的方法中,传感器设置在芯片上或芯片中,并且芯片被保护盖覆盖,盖是传感器和环境之间的接口。 粘合剂层设置在芯片和保护盖之间,粘合剂层单独或与保护罩一起作为传感器和环境之间的界面。 保护盖和/或粘合剂层可以具有形成在其中的通道,该通道用作传感器的接收通道。 在替代实施例中,将保护盖放置在具有几个芯片的晶片上,并且切割晶片以用保护盖产生单独的芯片。 因此,在从晶片切割芯片之后,传感器装置可以具有施加到单个芯片的保护盖,或者可以将保护盖施加到晶片,然后将晶片和盖切割成各个芯片,并且对应于 盖子。 从布置的一侧引导到传感器的通道可以穿过粘合剂层,通过保护盖,或者通过两者。 可以在传感器上方的保护罩中形成孔,传感器松动地位于孔中。 反应体积可以由孔的尺寸确定。
    • 6. 发明授权
    • Integrated circuit with offset pins
    • 带偏置引脚的集成电路
    • US07053480B2
    • 2006-05-30
    • US10485139
    • 2002-07-26
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • H01L23/48
    • H01L23/49555H01L2924/0002H05K13/0439Y10T29/49139Y10T29/4914Y10T29/49204Y10T29/49218Y10T29/49222H01L2924/00
    • The invention relates to the fabrication and testing of a chip with a package (2) having connecting pins (1) as well as to mounting the package (2) on a board (5), whereby in order to combine the advantages of a package (2) with inline connecting pins (1) with the advantages of a package (2) with offset connecting pins (11, 12), the package (2) is fabricated with inline connecting pins (1) and inserted into a test socket (3) for testing. Immediately before mounting on the board (5), at least one connecting pin, preferably every second connecting pin (12), of the package (2) is bent inward by a bending tool (6) so as to achieve an offset arrangement of the connecting pins (11, 12). The package (2) is preferably mounted on the board (5) using the bending tool (6). A simple, inexpensively produced test socket (3) is sufficient for the purpose of testing the chip. An inexpensively produced guide brace (4), for example, is suitable as a packaging means. Since every second connecting pin (12) is not bent inward immediately before insertion of the connecting pins (11,12), no subsequent corrective alignment of the offset connecting pins (11, 12) is required.
    • 本发明涉及具有连接销(1)的封装(2)以及将封装(2)安装在板(5)上的芯片的制造和测试,从而为了将封装 (2)具有带有偏置连接销(11,12)的封装(2)的优点的带有内联连接引脚(1)的封装(2)由线内连接引脚(1)制成并插入测试插座 3)进行测试。 在安装在板(5)上之前,封装(2)的至少一个连接销(优选地每个第二连接销(12))由弯曲工具(6)向内弯曲,以实现 连接销(11,12)。 包装(2)优选使用弯曲工具(6)安装在板(5)上。 一个简单,廉价的测试插座(3)足以用于测试芯片。 廉价生产的引导支架(4)例如适合作为包装装置。 由于每个第二连接销(12)在插入连接销(11,12)之前不向内弯曲,所以不需要随后的偏置连接销(11,12)的校正对准。
    • 7. 发明申请
    • Method for testing a chip with a package and for mounting the package on a board
    • 用封装测试芯片并将封装安装在电路板上的方法
    • US20050258849A1
    • 2005-11-24
    • US11130709
    • 2005-05-17
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • H05K13/04G01R31/02
    • H01L23/49555H01L2924/0002H05K13/0439Y10T29/49139Y10T29/4914Y10T29/49204Y10T29/49218Y10T29/49222H01L2924/00
    • The invention relates to the fabrication and testing of a chip with a package (2) having connecting pins (1) as well as to mounting the package (2) on a board (5), whereby in order to combine the advantages of a package (2) with inline connecting pins (1) with the advantages of a package (2) with offset connecting pins (11, 12), the package (2) is fabricated with inline connecting pins (1) and inserted into a test socket (3) for testing. Immediately before mounting on the board (5), at least one connecting pin, preferably every second connecting pin (12), of the package (2) is bent inward by a bending tool (6) so as to achieve an offset arrangement of the connecting pins (11, 12). The package (2) is preferably mounted on the board (5) using the bending tool (6). A simple, inexpensively produced test socket (3) is sufficient for the purpose of testing the chip. An inexpensively produced guide brace (4), for example, is suitable as a packaging means. Since every second connecting pin (12) is not bent inward immediately before insertion of the connecting pins (11, 12), no subsequent corrective alignment of the offset connecting pins (11, 12) is required.
    • 本发明涉及具有连接销(1)的封装(2)以及将封装(2)安装在板(5)上的芯片的制造和测试,从而为了将封装 (2)具有带有偏置连接销(11,12)的封装(2)的优点的带有内联连接引脚(1)的封装(2)由线内连接引脚(1)制成并插入测试插座 3)进行测试。 在安装在板(5)上之前,封装(2)的至少一个连接销(优选地每个第二连接销(12))由弯曲工具(6)向内弯曲,以实现 连接销(11,12)。 包装(2)优选使用弯曲工具(6)安装在板(5)上。 一个简单,廉价的测试插座(3)足以用于测试芯片。 廉价生产的引导支架(4)例如适合作为包装装置。 由于每个第二连接销(12)在插入连接销(11,12)之前不向内弯曲,所以不需要随后的偏移连接销(11,12)的校正对准。
    • 8. 发明授权
    • Method and production of a sensor
    • 传感器的方法和生产
    • US06964927B2
    • 2005-11-15
    • US10149560
    • 2001-12-07
    • Günter IgelMarkus Rogalla
    • Günter IgelMarkus Rogalla
    • H01L21/56H01L31/0203H01L31/0232H01L21/302
    • H01L31/0203H01L21/565H01L2924/0002H01L2924/00
    • The invention relates to a method for producing a sensor (1), wherein a carrier chip (2) is produced. Said chip is provided with a sensor structure (3) comprising an active sensor surface (4). A material (9) capable of flowing is applied onto carrier chips (2) in such a way that the sensor structure (3) has a thinner layer thickness on said active sensor surface (4) than on the area of the carrier chip (2) which borders on the active sensor surface (4). The material (9) which is capable of flowing is hardened thereafter. The hardened material (9) is subsequently removed by chemical means from the surface which faces said carrier chip (2) until the active sensor surface of the sensor structure is layed bare.
    • 本发明涉及一种制造传感器(1)的方法,其中制造了载体芯片(2)。 所述芯片设置有包括有源传感器表面(4)的传感器结构(3)。 将能够流动的材料(9)施加到载体芯片(2)上,使得传感器结构(3)在所述主动传感器表面(4)上具有比载体芯片(2)的区域更薄的层厚度 ),其接合在主动传感器表面(4)上。 能够流动的材料(9)之后被硬化。 随后通过化学方法从面向所述载体芯片(2)的表面去除硬化材料(9),直到传感器结构的有源传感器表面裸露。
    • 10. 发明申请
    • Method for testing a chip with a package and for mounting the package on a board
    • 用封装测试芯片并将封装安装在电路板上的方法
    • US20060108679A1
    • 2006-05-25
    • US11297047
    • 2005-12-07
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • Wolfgang HauserHeiko DreherChristian KimstedtMarkus Rogalla
    • H01L23/48
    • H01L23/49555H01L2924/0002H05K13/0439Y10T29/49139Y10T29/4914Y10T29/49204Y10T29/49218Y10T29/49222H01L2924/00
    • The invention relates to the fabrication and testing of a chip with a package (2) having connecting pins (1) as well as to mounting the package (2) on a board (5), whereby in order to combine the advantages of a package (2) with inline connecting pins (1) with the advantages of a package (2) with offset connecting pins (11, 12), the package (2) is fabricated with inline connecting pins (1) and inserted into a test socket (3) for testing. Immediately before mounting on the board (5), at least one connecting pin, preferably every second connecting pin (12), of the package (2) is bent inward by a bending tool (6) so as to achieve an offset arrangement of the connecting pins (11, 12). The package (2) is preferably mounted on the board (5) using the bending tool (6). A simple, inexpensively produced test socket (3) is sufficient for the purpose of testing the chip. An inexpensively produced guide brace (4), for example, is suitable as a packaging means. Since every second connecting pin (12) is not bent inward immediately before insertion of the connecting pins (11, 12), no subsequent corrective alignment of the offset connecting pins (11, 12) is required.
    • 本发明涉及具有连接销(1)的封装(2)以及将封装(2)安装在板(5)上的芯片的制造和测试,从而为了将封装 (2)具有带有偏置连接销(11,12)的封装(2)的优点的带有内联连接引脚(1)的封装(2)由线内连接引脚(1)制成并插入测试插座 3)进行测试。 在安装在板(5)上之前,封装(2)的至少一个连接销(优选地每个第二连接销(12))由弯曲工具(6)向内弯曲,以实现 连接销(11,12)。 包装(2)优选使用弯曲工具(6)安装在板(5)上。 一个简单,廉价的测试插座(3)足以用于测试芯片。 廉价生产的引导支架(4)例如适合作为包装装置。 由于每个第二连接销(12)在插入连接销(11,12)之前不向内弯曲,所以不需要随后的偏移连接销(11,12)的校正对准。