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1. 发明申请

US20060175616A1 Pre-oxidized protective layer for lithography 审中-公开
标题翻译：用于光刻的预氧化保护层
公开(公告)号：US20060175616A1
公开(公告)日：2006-08-10
申请号：US11052966
申请日：2005-02-07
申请人： Manish Chandhok , Ming Fang , Robert Bristol
发明人： Manish Chandhok , Ming Fang , Robert Bristol
IPC分类号： H01L21/00 , H01L33/00 , H01L31/12
CPC分类号： G02B1/14 , G02B1/105 , G02B5/0891 , G03F7/70916 , G03F7/70958
摘要： An optical component for use in, e.g., an extreme ultraviolet (EUV) lithography system, may include a pre-oxidized protective layer. The protective layer may be photocatalytic, and may be substantially amorphous to provide a diffusion barrier. The protective layer may be, e.g., a metal oxide such as titanium dioxide or molybdenum oxide.
摘要翻译：用于例如极紫外（EUV）光刻系统的光学部件可以包括预氧化保护层。保护层可以是光催化的，并且可以是基本无定形的以提供扩散阻挡层。保护层可以是例如金属氧化物如二氧化钛或氧化钼。

2. 发明申请

US20060127780A1 Forming a capping layer for a EUV mask and structures formed thereby 审中-公开
标题翻译：形成用于EUV掩模的覆盖层和由此形成的结构
公开(公告)号：US20060127780A1
公开(公告)日：2006-06-15
申请号：US11014542
申请日：2004-12-15
申请人： Manish Chandhok , Ming Fang
发明人： Manish Chandhok , Ming Fang
IPC分类号： G03C5/00 , G21K5/00 , G03F1/00
CPC分类号： G21K1/062 , B82Y10/00 , B82Y40/00 , G03F1/24 , G21K2201/067
摘要： Methods of forming a microelectronic structure are described. Embodiments of those methods include providing a substrate comprising a first reflective layer disposed on a second reflective layer, wherein the thickness of the first reflective layer and the thickness of the second reflective layer are less than about 100 angstroms, and forming a ruthenium oxide layer on the substrate, wherein the ruthenium oxide layer is about 50 angstroms or less.
摘要翻译：描述形成微电子结构的方法。这些方法的实施例包括提供包括设置在第二反射层上的第一反射层的衬底，其中第一反射层的厚度和第二反射层的厚度小于约100埃，并且在所述基板，其中所述氧化钌层为约50埃或更小。

3. 发明授权

US07567379B2 Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system 有权
标题翻译：防止EUV光刻系统中反射镜和电极的锡污染的技术
公开(公告)号：US07567379B2
公开(公告)日：2009-07-28
申请号：US10835867
申请日：2004-04-29
申请人： Robert Bristol , Bryan J. Rice , Ming Fang , John P. Barnak , Melissa Shell
发明人： Robert Bristol , Bryan J. Rice , Ming Fang , John P. Barnak , Melissa Shell
IPC分类号： F21V9/04
CPC分类号： G03F7/70958 , C23C14/083 , C23C14/165 , G03F7/70175 , G03F7/70916 , G21K1/06 , G21K2201/067
摘要： Passivation coatings and gettering agents may be used in an Extreme Ultraviolet (EUV) source which uses tin (Sn) vapor as a plasma “fuel” to prevent contamination and corresponding loss of reflectivity due to tin contamination. The passivation coating may be a material to which tin does not adhere, and may be placed on reflective surfaces in the source chamber. The gettering agent may be a material that reacts strongly with tin, and may be placed outside of the collector mirrors and/or on non-reflective surfaces. A passivation coating may also be provided on the insulator between the anode and cathode of the source electrodes to prevent shorting due to tin coating the insulator surface.
摘要翻译：钝化涂层和吸气剂可以用于使用锡（Sn）蒸气作为等离子体“燃料”的极紫外（EUV）源，以防止污染和相应的锡污染引起的反射率的损失。钝化涂层可以是锡不粘附的材料，并且可以放置在源室中的反射表面上。吸气剂可以是与锡强烈反应的材料，并且可以放置在集电镜和/或非反射表面之外。也可以在源电极的阳极和阴极之间的绝缘体上提供钝化涂层，以防止由于涂覆绝缘体表面的锡而导致短路。

4. 发明申请

US20050244572A1 Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system 有权
标题翻译：防止EUV光刻系统中反射镜和电极的锡污染的技术
公开(公告)号：US20050244572A1
公开(公告)日：2005-11-03
申请号：US10835867
申请日：2004-04-29
申请人： Robert Bristol , Bryan Rice , Ming Fang , John Barnak , Melissa Shell
发明人： Robert Bristol , Bryan Rice , Ming Fang , John Barnak , Melissa Shell
IPC分类号： B32B15/04 , C23C14/08 , C23C14/16 , G03F7/20 , G21K1/06 , H05H1/00
CPC分类号： G03F7/70958 , C23C14/083 , C23C14/165 , G03F7/70175 , G03F7/70916 , G21K1/06 , G21K2201/067
摘要： Passivation coatings and gettering agents may be used in an Extreme Ultraviolet (EUV) source which uses tin (Sn) vapor as a plasma “fuel” to prevent contamination and corresponding loss of reflectivity due to tin contamination. The passivation coating may be a material to which tin does not adhere, and may be placed on reflective surfaces in the source chamber. The gettering agent may be a material that reacts strongly with tin, and may be placed outside of the collector mirrors and/or on non-reflective surfaces. A passivation coating may also be provided on the insulator between the anode and cathode of the source electrodes to prevent shorting due to tin coating the insulator surface.
摘要翻译：钝化涂层和吸气剂可以用于使用锡（Sn）蒸气作为等离子体“燃料”的极紫外（EUV）源，以防止污染和相应的锡污染引起的反射率的损失。钝化涂层可以是锡不粘附的材料，并且可以放置在源室中的反射表面上。吸气剂可以是与锡强烈反应的材料，并且可以放置在集电镜和/或非反射表面之外。也可以在源电极的阳极和阴极之间的绝缘体上提供钝化涂层，以防止由于涂覆绝缘体表面的锡而导致短路。

5. 发明授权

US08718642B2 Method and apparatus for establishing cell reselection list 有权
标题翻译：用于建立小区重选列表的方法和装置
公开(公告)号：US08718642B2
公开(公告)日：2014-05-06
申请号：US13447924
申请日：2012-04-16
申请人： Jiyong Wang , Yongjun Yu , Yang Zhao , Ming Fang
发明人： Jiyong Wang , Yongjun Yu , Yang Zhao , Ming Fang
IPC分类号： H04B7/00 , H04B17/00 , H04W4/00 , H04W48/14 , H04W16/16 , H04W36/00
CPC分类号： H04W36/0083 , H04W16/16 , H04W36/00 , H04W36/0061 , H04W36/0088 , H04W48/14 , H04W48/16
摘要： The embodiments of the present invention disclose a method for establishing a cell reselection list is provided. A network and a terminal establish frequency indexes for the cell reselection list, so that when a network side delivers an RAT and frequency priority information, the priority information may be delivered according to frequency indexes in a frequency list, thus implementing cell reselection that is based on the priority for the terminal.
摘要翻译：本发明的实施例公开了一种建立小区重选列表的方法。网络和终端建立小区重选列表的频率索引，使得当网络侧提供RAT和频率优先级信息时，可以根据频率列表中的频率索引来传送优先级信息，从而实现基于小区重选的小区重选对终端的优先。

6. 发明申请

US20120161573A1 SURFACE ALLOY PROCESS FOR MEMS AND NEMS 有权
标题翻译：用于MEMS和NEMS的表面合金工艺
公开(公告)号：US20120161573A1
公开(公告)日：2012-06-28
申请号：US12979160
申请日：2010-12-27
申请人： Ming Fang
发明人： Ming Fang
IPC分类号： H02N1/00 , B05D5/12
CPC分类号： B81C1/00666 , B81B7/0029 , B81B2203/0181 , B81C1/0019 , B81C2201/0169 , B81C2201/112
摘要： A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on one or more surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning.
摘要翻译：一种制造微结构的方法，例如MEMS或NEMS器件，包括在微结构的可移动部件的表面上形成保护层。例如，可以在可相对于微结构的基板移动的多晶硅块的一个或多个表面上形成硅化物层。该过程可以是自对准的。

7. 发明申请

US20090169190A1 Heating system and method for microfluidic and micromechanical applications 有权
标题翻译：微流控和微机械应用的加热系统和方法
公开(公告)号：US20090169190A1
公开(公告)日：2009-07-02
申请号：US12005862
申请日：2007-12-27
申请人： Ming Fang , Fuchao Wang
发明人： Ming Fang , Fuchao Wang
IPC分类号： F24H1/10 , H01L21/02
CPC分类号： B81C1/00119 , B41J2/14056 , B41J2/14072 , B41J2/14137 , B41J2/16 , B41J2/1601 , B41J2/1628 , B41J2/1629 , B41J2/1639 , B81B1/006 , B81B2201/052 , B81B2201/058 , B81C2201/013 , B81C2203/075 , H01L28/20 , Y10T29/41 , Y10T29/49401 , Y10T29/49826
摘要： An integrated semiconductor heating assembly includes a semiconductor substrate, a chamber formed therein, and an exit port in fluid communication with the chamber, allowing fluid to exit the chamber in response to heating the chamber. The integrated heating assembly includes a first heating element adjacent the chamber, which can generate heat above a selected threshold and bias fluid in the chamber toward the exit port. A second heating element is positioned adjacent the exit port to generate heat above a selected threshold, facilitating movement of the fluid through the exit port away from the chamber. Addition of the second heating element reduces the amount of heat emitted per heating element and minimizes thickness of a heat absorption material toward an open end of the exit port. Since such material is expensive, this reduces the manufacturing cost and retail price of the assembly while improving efficiency and longevity thereof.
摘要翻译：集成半导体加热组件包括半导体衬底，形成在其中的腔室以及与腔室流体连通的出口，允许流体响应于加热室而离开腔室。集成加热组件包括邻近腔室的第一加热元件，该第一加热元件可以产生高于选定阈值的热量，并将腔室中的流体朝向出口偏压。第二加热元件邻近出口定位以产生高于所选阈值的热量，便于流体通过出口远离腔室的运动。添加第二加热元件减少了每个加热元件发出的热量，并使吸热材料的厚度最小化到出口的开口端。由于这样的材料是昂贵的，所以这降低了组件的制造成本和零售价格，同时提高了其效率和使用寿命。

8. 发明授权

US07298923B2 Method and system for focus-adaptive reconstruction of spine images 有权
标题翻译：脊柱图像聚焦自适应重建的方法和系统
公开(公告)号：US07298923B2
公开(公告)日：2007-11-20
申请号：US10974503
申请日：2004-10-27
申请人： Bohong Zhang , Li Zhang , Ming Fang
发明人： Bohong Zhang , Li Zhang , Ming Fang
IPC分类号： G09K9/32 , G09G5/00 , G06K9/36
CPC分类号： G06K9/6203
摘要： A method for aligning a pair of digital images includes providing a pair of digital images, wherein each said image comprises a plurality of intensities corresponding to a domain of points in a D-dimensional space, and the pair of images present adjacent views of a same object of interest. A weighting function is applied to each image of the pair of images, wherein the weighting function is centered on the object of interest, the weighting function has a maximum value on the object of interest, and the value of the weighting function decreases with increasing distance from the object of interest. The pair of images is aligned by correlated the weighted intensities on one image with those in the other image.
摘要翻译：用于对准一对数字图像的方法包括提供一对数字图像，其中每个所述图像包括对应于D维空间中的点的域的多个强度，并且所述一对图像呈现相邻视图感兴趣的对象对一对图像的每个图像应用加权函数，其中加权函数以感兴趣对象为中心，加权函数对感兴趣对象具有最大值，加权函数的值随着距离的增加而减小从感兴趣的对象。通过将一个图像上的加权强度与另一个图像中的加权强度相关联来对齐该对图像。

9. 发明授权

US07289653B2 Method and system for ground glass nodule (GGN) segmentation using a Markov random field and shape analysis 有权
标题翻译：使用马尔科夫随机场和形状分析的磨玻璃结节（GGN）分割方法和系统
公开(公告)号：US07289653B2
公开(公告)日：2007-10-30
申请号：US11010813
申请日：2004-12-13
申请人： Li Zhang , Ming Fang
发明人： Li Zhang , Ming Fang
IPC分类号： G06K9/00
CPC分类号： G06T7/143 , G06T7/11 , G06T2207/10081 , G06T2207/20132 , G06T2207/30064
摘要： A system and method for ground glass nodule (GGN) segmentation is provided. The method comprises: selecting a point in a medical image, wherein the point is located in a GGN; defining a volume of interest (VOI) around the point, wherein the VOI comprises the GGN; removing a chest wall from the VOI; obtaining an initial state for a Markov random field; segmenting the VOI, wherein the VOI is segmented using the Markov random field; identifying vessels in the volume of interest; segmenting the vessels; and removing segmented vessels from the segmented ground glass nodule.
摘要翻译：提供了研磨玻璃结节（GGN）分割的系统和方法。该方法包括：选择医学图像中的点，其中该点位于GGN中; 定义围绕点的感兴趣体积（VOI），其中VOI包括GGN; 从VOI中取出胸壁; 获得马尔科夫随机场的初始状态; 分割VOI，其中使用马尔可夫随机场分割VOI; 识别感兴趣的船只; 分割血管; 并从分段磨玻璃结节去除分段血管。

10. 发明授权

US07158663B2 Method for measuring confidence of ball grid array model in surface mounted devices 有权
标题翻译：用于测量表面安装装置中球栅阵列模型的置信度的方法
公开(公告)号：US07158663B2
公开(公告)日：2007-01-02
申请号：US10420286
申请日：2003-04-22
申请人： Tong Fang , Ming Fang
发明人： Tong Fang , Ming Fang
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/951 , G01N21/95684 , G01N2021/8874 , G01N2021/8877 , G01N2021/8887 , G01N2021/95661 , G06T7/0006 , G06T2207/30148 , Y10T29/49131
摘要： A method for obtaining confidence measure of a ball grid array (BGA) model having a plurality of balls in semiconductor surface mounted devices is provided. The method comprises the steps of extracting BGA images from a real surface mounted device, generating a BGA ball model and a BGA body model, generating a first confidence measure of the BGA ball model wherein the first confidence measure includes a first standard deviation of the BGA ball model and a first local image contrast of each BGA ball, and generating a second confidence measure of the BGA body model wherein the second confidence measure includes a second standard deviation of the BGA body model and a second local image contrast of the BGA body.
摘要翻译：提供了一种用于获得半导体表面安装器件中具有多个球的球栅阵列（BGA）模型的置信度测量的方法。该方法包括以下步骤：从真实表面安装的装置提取BGA图像，产生BGA球模型和BGA体模型，产生BGA球模型的第一置信度，其中第一置信度测量包括BGA的第一标准偏差球模型和每个BGA球的第一局部图像对比度，并且生成BGA体模型的第二置信度测量，其中第二置信度测量包括BGA体模型的第二标准偏差和BGA体的第二局部图像对比度。

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