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    • 1. 发明授权
    • Inter-region thermal complementary system by distributed cryogenic and thermal devices
    • 分布式低温和热装置的区域间互补系统
    • US06889520B2
    • 2005-05-10
    • US10416487
    • 2001-12-12
    • Makoto SanoKuniaki KawamuraJunji MatsudaKatsumi FujimaTakanori KudoYouichi KawazuChoiku YoshikawaSyuji Fukano
    • Makoto SanoKuniaki KawamuraJunji MatsudaKatsumi FujimaTakanori KudoYouichi KawazuChoiku YoshikawaSyuji Fukano
    • F25D17/02F25B27/00F25D11/00
    • F25D17/02F24F2005/0039
    • The object of the invention is to provide a thermal complementary (combination of heat supply and heat discharge) system which can complement heat without the restriction of area of a region to be supplied with heat. An endless multiplex helical loop is formed to complement the heat produced in a region such as plants and regional facilities on a reciprocal basis, and the water is not circulated forcibly but achieves heat transfer in the helical loop.Liquid or slurry-like water is sealed in the annular endless channel (endless loop) without forcibly circulated. Therefore, loop diameter of the annular endless channel, that means the area of the region, is not limited. The water forms temperature zones in the endless helical loop, the temperature being different per each component loop. Distributed cryogenic sources and thermal sources are thermally connected to said multiplex helical loop so that heat (i.e. water) can be taken in or discharged to or from said cryogenic or thermal sources. As the water needs not be forcibly circulated, the power for forcibly circulating the water is eliminated resulting in reduced running cost. Refrigerating apparatuses, heat source apparatuses, etc. distributed in the region are effectively utilized and also central control of energy supply through the multiplex helical loops is made possible.
    • 本发明的目的是提供一种热互补(组合的热供应和放热)系统,其可以补充热量,而不受限于供热区域的面积。 形成一个无休止的多路复用螺旋回路,以互补的方式补充在诸如工厂和区域设施之类的区域产生的热量,水不会被强制循环,而是在螺旋回路中实现热传递。 液体或浆状水被密封在环形环形通道(无限循环)中,而不会被强制循环。 因此,环形环形通道的环径,即区域的面积不受限制。 水在环形螺旋环中形成温度区,每个组分环的温度不同。 分布式低温源和热源热连接到所述多路螺旋回路,使得热(即水)可以被吸入或从所述低温或热源排出。 由于水不需要强制循环,所以强制循环水的功率被消除,导致运行成本降低。 有效利用分布在该区域的制冷装置,热源装置等,并且也可以通过多路复用螺旋回路进行能量供给的集中控制。
    • 2. 发明授权
    • Soda drink selling machine
    • 苏打饮料卖机
    • US06250084B1
    • 2001-06-26
    • US09429348
    • 1999-10-28
    • Hiroshi SatoHisataka AsamiMakoto SanoChoiku Yoshikawa
    • Hiroshi SatoHisataka AsamiMakoto SanoChoiku Yoshikawa
    • F25B2102
    • F25B21/04B67D1/00
    • A soda drink selling machine having a compact purified-water generating unit can be installed at places where purified water suiting for producing soda drinks is not available, comprises a purified-water generating unit, a carbonated water generating unit, a soda drink producing-dispensing unit, and a control system controlling each device in the soda drink selling machine so as to be operated in order or simultaneously at need, wherein the purified-water generating unit comprises a control system for controlling operations in ice maker including a heat transfer surface on heat absorbing side or releasing side of a coolant compression-evaporation type or an electronic heat pump, and in constant temperature purified-water tank, and operations of ice-crystal formation and melting processes in the ice maker.
    • 具有小型净化水生成单元的苏打饮料出售机可以安装在不能用于生产苏打饮料的净化水的地方,包括纯化水产生单元,碳酸水生成单元,苏打饮料生产分配 单元和控制系统,其控制所述苏打饮料出售机器中的每个装置,以便在需要时顺序或同时操作,其中所述净水产生单元包括用于控制制冰机中的操作的控制系统,所述制冰机包括传热表面 冷却剂压缩蒸发型或电子热泵的吸热侧或释放侧,以及恒温净化水箱,以及制冰机中的冰晶形成和熔融工序。
    • 8. 发明授权
    • Ion implanter and method for controlling the same
    • 离子注入机及其控制方法
    • US06984833B2
    • 2006-01-10
    • US10864343
    • 2004-06-10
    • Makoto SanoMichiro SugitaniMitsuaki KabasawaMitsukuni Tsukihara
    • Makoto SanoMichiro SugitaniMitsuaki KabasawaMitsukuni Tsukihara
    • H01J37/304H01J37/317
    • H01J37/304H01J37/3171H01J2237/31703
    • The present invention is applied to an ion implanter provided with a vacuum pressure compensation mechanism. The pressure compensation mechanism samples measured beam currents and vacuum pressures in the vicinity of wafers in preliminary implantation and stores function parameters in a memory unit which are obtained by calculating parameters of a predetermined function by fitting the relationship between the measured beam currents and the vacuum pressures. In actual implantation, the pressure compensation mechanism corrects the measured beam current using the function parameters stored as a function of the vacuum pressure, and based on the corrected beam current, the dosage control is performed. In the present invention, an actual beam loss is compensated for based on the estimation from a pressure in the vicinity of the wafers in a region downstream of a mass analysis slit.
    • 本发明适用于设置有真空压力补偿机构的离子注入机。 压力补偿机构对初步注入中的晶片附近的测量束电流和真空压力进行采样,并将功能参数存储在存储器单元中,该功能参数通过计算测量的光束电流和真空压力之间的关系来计算预定功能的参数而获得 。 在实际植入中,压力补偿机构使用作为真空压力的函数存储的功能参数来校正测量的束电流,并且基于校正的束电流,执行剂量控制。 在本发明中,基于从质量分析狭缝下游的区域中的晶片附近的压力的估计来补偿实际的光束损失。