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    • 2. 发明授权
    • Chemically amplified positive resist composition
    • 化学放大正光刻胶组合物
    • US07893293B2
    • 2011-02-22
    • US12143268
    • 2008-06-20
    • Makoto AkitaIsao YoshidaKazuhiko Hashimoto
    • Makoto AkitaIsao YoshidaKazuhiko Hashimoto
    • C07C69/753C07C43/21C07C43/215C08F12/32G03F7/039
    • G03F7/0397C07C69/00C07C2603/24C08F212/14C08F212/34C08F220/18G03F7/0045G03F7/0046Y10S430/106
    • A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I): wherein R7 represents a hydrogen atom etc., R8 represents a C1-C4 alkyl group, p represents an integer of 1 to 3, and q represents an integer of 0 to 2, (ii) at least one polymerization unit selected from a group consisting of a polymerization unit represented by the formula (II): wherein R1 represents a hydrogen atom etc., R2 represents a C1-C8 alkyl group and ring X represents an alicyclic hydrocarbon group, and a polymerization unit represented by the formula (IV): wherein R3 represents a hydrogen atom etc., R4 and R5 independently represents a hydrogen atom etc., R10 represents a C1-C6 alkyl group etc., and (iii) a polymerization unit represented by the formula (III): wherein R3, R4 and R5 are the same as defined above, E represents a divalent hydrocarbon group, G represents a single bond etc., Z represents a carbonyl group etc. and L represents an anthryl group etc., and (B) at least one acid generator.
    • 一种化学放大正型抗蚀剂组合物,其包含(A)树脂,其包含(i)由式(I)表示的聚合单元:其中R7表示氢原子等,R8表示C1-C4烷基,p表示整数 为1〜3,q为0〜2的整数,(ii)至少一种选自由式(II)表示的聚合单元的聚合单元:其中,R1表示氢原子等,R2 代表C1-C8烷基,X代表脂环族烃基,和由式(Ⅳ)表示的聚合单元:其中R3表示氢原子等,R4和R5独立地表示氢原子等,R10表示 C 1 -C 6烷基等,和(iii)由式(III)表示的聚合单元:其中R3,R4和R5与上述定义相同,E表示二价烃基,G表示单键等 Z表示羰基等,L r 表示蒽基等,和(B)至少一种酸发生剂。
    • 4. 发明申请
    • CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION
    • 化学放大正电阻组合物
    • US20090004600A1
    • 2009-01-01
    • US12143268
    • 2008-06-20
    • Makoto AkitaIsao YoshidaKazuhiko Hashimoto
    • Makoto AkitaIsao YoshidaKazuhiko Hashimoto
    • G03C1/053
    • G03F7/0397C07C69/00C07C2603/24C08F212/14C08F212/34C08F220/18G03F7/0045G03F7/0046Y10S430/106
    • A chemically amplified positive resist composition comprising (A) a resin which comprises (i) a polymerization unit represented by the formula (I): wherein R7 represents a hydrogen atom etc., R8 represents a C1-C4 alkyl group, p represents an integer of 1 to 3, and q represents an integer of 0 to 2, (ii) at least one polymerization unit selected from a group consisting of a polymerization unit represented by the formula (II): wherein R1 represents a hydrogen atom etc., R2 represents a C1-C8 alkyl group and ring X represents an alicyclic hydrocarbon group, and a polymerization unit represented by the formula (IV): wherein R3 represents a hydrogen atom etc., R4 and R5 independently represents a hydrogen atom etc., R10 represents a C1-C6 alkyl group etc., and (iii) a polymerization unit represented by the formula (III): wherein R3, R4 and R5 are the same as defined above, E represents a divalent hydrocarbon group, G represents a single bond etc., Z represents a carbonyl group etc. and L represents an anthryl group etc., and (B) at least one acid generator.
    • 一种化学放大正型抗蚀剂组合物,其包含(A)树脂,其包含(i)由式(I)表示的聚合单元:其中R7表示氢原子等,R8表示C1-C4烷基,p表示整数 为1〜3,q为0〜2的整数,(ii)至少一种选自由式(II)表示的聚合单元的聚合单元:其中,R1表示氢原子等,R2 代表C1-C8烷基,X代表脂环族烃基,和由式(Ⅳ)表示的聚合单元:其中R3表示氢原子等,R4和R5独立地表示氢原子等,R10表示 C 1 -C 6烷基等,和(iii)由式(III)表示的聚合单元:其中R3,R4和R5与上述定义相同,E表示二价烃基,G表示单键等 Z表示羰基等,L r 表示蒽基等,和(B)至少一种酸发生剂。