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1. 发明授权

US08613141B2 Manufacturing method of liquid ejection head 有权
标题翻译：液体喷头的制造方法
公开(公告)号：US08613141B2
公开(公告)日：2013-12-24
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B41J2/16 , B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

2. 发明授权

US08191260B2 Liquid ejection head and manufacturing method thereof 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08191260B2
公开(公告)日：2012-06-05
申请号：US12400440
申请日：2009-03-09
申请人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76 , B23P17/00 , B41J2/135
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head includes forming on a substrate a first flow passage wall forming member contacting a solid layer of equal height, exposing a first layer of a negative photosensitive resin material to form an ejection outlet forming member; exposing a second layer, on the first layer, of a negative photosensitive resin material to form a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first and second layers on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming parts of the flow passage and the ejection outlet by removing non-exposed portions of the first and second layers above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：液体喷射头的制造方法包括在基板上形成与等高的固体层接触的第一流路壁形成部件，暴露第一层的负型感光性树脂材料，形成喷出口形成部件; 在第一层上暴露第二层为负的感光性树脂材料，以形成用于形成流路的壁的另一部分的第二流路壁形成部件; 将暴露的第一和第二层放置在固体层和第一流动通道壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一和第二层的未暴露部分来形成流动通道和喷射出口的部分; 并通过去除固体层形成流动通道。

3. 发明申请

US20090136875A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 审中-公开
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090136875A1
公开(公告)日：2009-05-28
申请号：US12268740
申请日：2008-11-11
申请人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
发明人： Masahiko Kubota , Tamaki Sato , Akihiko Okano , Maki Kato , Kazuhiro Asai , Masaki Ohsumi , Yoshinori Tagawa
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and a flow passage communicating with the ejection outlet is constituted by the steps of: preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer, on the solid layer and the flow passage wall forming member, formed of a negative photosensitive resin material for forming another part of the wall of the flow passage; exposing to light a portion of the first layer correspondingly to the another part of the wall of the flow passage; providing a second layer, on the exposed first layer, formed of a negative photosensitive resin material to constitute the ejection outlet forming member; exposing to light a portion of the second layer correspondingly to the ejection outlet forming member; and forming the ejection outlet and another part of the flow passage by removing unexposed portions of the first layer and the second layer.
摘要翻译：一种液体喷射头的制造方法，包括：喷射出口形成部件，其设置有用于喷射液体的喷射出口和与喷射口连通的流动通道的步骤包括：准备基板，在该基板上形成流路壁形成部件，形成流路的壁的一部分，并且具有所述流路的一部分形状的固体层彼此接触，其中所述流路壁形成构件具有与所述基板的表面基本相等的高度的固体层; 在固体层和流路壁形成构件上形成由用于形成流路的壁的另一部分的负型感光性树脂材料形成的第一层; 相对于流动通道的壁的另一部分暴露于第一层的一部分; 在暴露的第一层上形成第二层，由负性感光树脂材料形成以构成喷射出口形成部件; 对应于喷射出口形成构件暴露第二层的一部分; 以及通过去除第一层和第二层的未曝光部分而形成喷射出口和流动通道的另一部分。

4. 发明申请

US20090229125A1 LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20090229125A1
公开(公告)日：2009-09-17
申请号：US12400440
申请日：2009-03-09
申请人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
发明人： Maki KATO , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.
摘要翻译：提供了一种液体喷射头的制造方法，该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。该制造方法包括：准备基板，在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触，其中，第一流路壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层，由负的感光性树脂材料形成; 暴露于第二层的一部分，用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上，使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。

5. 发明申请

US20090133256A1 MANUFACTURING METHOD OF LIQUID EJECTION HEAD 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US20090133256A1
公开(公告)日：2009-05-28
申请号：US12268760
申请日：2008-11-11
申请人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
发明人： Akihiko Okano , Maki Kato , Masaki Ohsumi , Yoshinori Tagawa , Kazuhiro Asai , Masahiko Kubota , Tamaki Sato
IPC分类号： B21D53/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/164 , B41J2002/14475
摘要： A manufacturing method of a liquid ejection head provided with a flow passage communicating with an ejection outlet for ejecting liquid includes steps of preparing a substrate on which a flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing on the solid layer a pattern having a shape of another part of the flow passage; providing a coating layer, for forming another part of the wall of the flow passage, so as to coat the pattern; providing the ejection outlet to the coating layer; and forming the flow passage by removing the solid layer and the pattern.
摘要翻译：具有与用于喷射液体的喷射口连通的流路的液体喷射头的制造方法包括准备基板的步骤，在基板上形成用于形成流路的壁的一部分的流路壁形成部件和固体层具有所述流路的一部分的形状彼此接触，其中，所述流路壁形成部件具有与所述基板的表面大致相等的所述固体层的高度; 在所述固体层上提供具有所述流路的另一部分的形状的图案; 提供用于形成流路的壁的另一部分以涂覆图案的涂层; 向喷涂层提供喷射出口; 并通过去除固体层和图案形成流动通道。

6. 发明申请

US20080252689A1 LIQUID DISCHARGE HEAD AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：液体放电头及其制造方法
公开(公告)号：US20080252689A1
公开(公告)日：2008-10-16
申请号：US11941431
申请日：2007-11-16
申请人： Shoji Shiba , Akihiko Okano , Yoshikazu Saito , Kazuhiro Asai , Tamaki Sato , Takumi Suzuki , Masahiko Kubota , Maki Kato , Hiroe Ishikura , Shinsuke Tsuji
发明人： Shoji Shiba , Akihiko Okano , Yoshikazu Saito , Kazuhiro Asai , Tamaki Sato , Takumi Suzuki , Masahiko Kubota , Maki Kato , Hiroe Ishikura , Shinsuke Tsuji
IPC分类号： B41J2/135 , G03F7/20
CPC分类号： B41J2/162 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2002/14475 , B41J2202/11 , G03F1/00 , G03F1/50 , G03F1/70
摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.
摘要翻译：本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到排出口，其中该层对于曝光用的光，每1μm厚度的吸光度为约0.02至约0.07。

7. 发明授权

US07971964B2 Liquid discharge head and method for manufacturing the same 有权
标题翻译：液体排出头及其制造方法
公开(公告)号：US07971964B2
公开(公告)日：2011-07-05
申请号：US11941431
申请日：2007-11-16
申请人： Shoji Shiba , Akihiko Okano , Yoshikazu Saito , Kazuhiro Asai , Tamaki Sato , Takumi Suzuki , Masahiko Kubota , Maki Kato , Hiroe Ishikura , Shinsuke Tsuji
发明人： Shoji Shiba , Akihiko Okano , Yoshikazu Saito , Kazuhiro Asai , Tamaki Sato , Takumi Suzuki , Masahiko Kubota , Maki Kato , Hiroe Ishikura , Shinsuke Tsuji
IPC分类号： B41J2/14
CPC分类号： B41J2/162 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2002/14475 , B41J2202/11 , G03F1/00 , G03F1/50 , G03F1/70
摘要： A method for manufacturing a liquid discharge head including an energy generating element, which generates energy utilized for discharging a liquid, and a discharge portion provided at a position facing the energy generating element and having a discharge port for discharging the liquid is provided. This method includes the steps of forming a negative photosensitive resin layer used for a member that forms the discharge port on the substrate, and exposing the layer to an i-line to form the discharge portion that is tapered in a direction from the substrate to the discharge port, wherein the layer has an absorbance per 1 μm thickness of about 0.02 to about 0.07 for light used for the exposure.
摘要翻译：本发明提供一种液体排出头的制造方法，该液体排出头包括产生用于排出液体的能量的能量产生元件，以及设置在面向能量产生元件的位置并具有用于排出液体的排出口的排出部分。该方法包括以下步骤：形成用于在基板上形成排出口的部件的负型感光性树脂层，并且将该层暴露于i线以形成沿着从基板到排出口，其中该层对于曝光用的光具有每1μm厚度的约0.02至约0.07的吸光度。

8. 发明申请

US20060277755A1 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US20060277755A1
公开(公告)日：2006-12-14
申请号：US10565658
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： G03F7/038 , B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2002/14475 , Y10T29/49401
摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer are formed contains a copolymer of methacrylic acid and methacrylate ester.
摘要翻译：根据本发明，液体排出头的制造方法包括以下步骤：在其上布置能量产生元件以产生用于排出液体的能量的基板上形成用于形成流路的固体层; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且除去固体层以形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，与形成涂层的排出口的部分形成边界的固体层包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

9. 发明授权

US07629111B2 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US07629111B2
公开(公告)日：2009-12-08
申请号：US10576249
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B41J2/16
CPC分类号： B41J2/1639 , B41J2/1603 , B41J2/1631 , B41J2002/14475 , G03F7/038
摘要： A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.
摘要翻译：一种制造液体排出头的方法包括以下步骤：在其上布置能量产生元件的衬底上沉积用于形成流路的固体层，以产生用于排出液体的能量，在衬底上形成固体层，用于涂覆固体层的涂层，在固体层上形成的涂层中，通过光刻工艺形成用于排出液体的排出口，并除去固体层，形成连通的流路能量元件和排出口，由此用于涂层的材料含有可阳离子聚合的化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成与部分的边界的固体层的材料其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。

10. 发明授权

US08017307B2 Method for manufacturing minute structure, method for manufacturing liquid discharge head, and liquid discharge head 有权
标题翻译：微细结构的制造方法，液体排出头的制造方法和排液头
公开(公告)号：US08017307B2
公开(公告)日：2011-09-13
申请号：US10568341
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1404 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1639 , B41J2/1645 , B41J2202/11 , G03F7/095 , Y10T29/49401
摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.
摘要翻译：微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

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