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    • 7. 发明授权
    • Method of forming a pressure switch thin film device
    • 形成压力开关薄膜装置的方法
    • US07795062B2
    • 2010-09-14
    • US11696079
    • 2007-04-03
    • Carl P. TaussigPing MeiHao LuoWarren Jackson
    • Carl P. TaussigPing MeiHao LuoWarren Jackson
    • H01L21/00
    • H01L27/14683G06K9/0002H01L27/14678H01L29/84
    • This invention provides a method of forming at least one pressure switch thin film device. The method includes providing a substrate and depositing a plurality of thin film device layers as a stack upon the substrate. An imprinted 3D template structure is provided upon the plurality of thin film device layers. The plurality of thin film device layers and the 3D template structure are then etched and at least one thin film device layer is undercut to provide a plurality of aligned electrical contact pairs and adjacent spacer posts. A flexible membrane providing a plurality of separate electrical contacts is deposited upon the spacer posts, the separate electrical contacts overlapping the contact pairs. The spacer posts provide a gap between the electrical contacts and the contact pairs.
    • 本发明提供一种形成至少一个压力开关薄膜器件的方法。 该方法包括提供衬底并将多个薄膜器件层作为堆叠沉积在衬底上。 在多个薄膜器件层上提供印模的3D模板结构。 然后蚀刻多个薄膜器件层和3D模板结构,并且至少一个薄膜器件层被切削以提供多个对准的电接触对和相邻的间隔柱。 提供多个单独的电触点的柔性膜沉积在间隔柱上,分开的电触点与触点对重叠。 间隔柱在电触点和触点对之间提供间隙。