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    • 4. 发明授权
    • Vacuum evaporation device
    • 真空蒸发装置
    • US4607152A
    • 1986-08-19
    • US634434
    • 1984-07-26
    • Michel AllovonLeon Goldstein
    • Michel AllovonLeon Goldstein
    • C23C14/24C23C14/56C23C14/26H01L21/203H05B3/06
    • C23C14/56C23C14/24
    • A vacuum evaporation device incorporates a main treatment enclosure connected to an auxiliary chamber containing a material evaporation cell. The cell is fixed to a tight bellows displacement member able to displace the cell between a first advanced position towards a main enclosure and a second retracted position. A sealing valve provided with a slide is provided for the main enclosure from the auxiliary chamber, whereby the material of the evaporation cell can thus be changed without placing the main enclosure under atmosphere again. A fixed heating tube, connecting the main enclosure to the auxiliary chamber, has a first end engaged in the main enclosure and a second end issuing into the auxiliary chamber. The second end is provided with an end piece made from a thermally insulating material ensuring mechanical continuity and thermal insulation with the support part and able to bearingly receive the evaporation cell when the latter is in the advanced position. The slide of the sealing valve is inserted between the end piece and the evaporation cell when the latter is in the retracted position, the travel of the cell between these end positions and consequently travel of the bellows being limited to the space necessary for closing the valve.
    • 真空蒸发装置包括连接到包含材料蒸发单元的辅助室的主处理外壳。 电池被固定到能够在朝向主外壳的第一前进位置和第二缩回位置之间移动电池的紧密波纹管移位构件。 从辅助室为主壳体提供了设有滑动件的密封阀,由此可以改变蒸发单元的材料,而不会再将主机壳放置在大气层下。 将主外壳连接到辅助室的固定加热管具有接合在主外壳中的第一端和发送到辅助室中的第二端。 第二端设置有由绝热材料制成的端部件,其确保与支撑部件的机械连续性和热绝缘性,并且能够在后者位于前进位置时轴承地接纳蒸发单元。 密封阀的滑动件在后端处于缩回位置时插入在端件和蒸发单元之间,因此在这些端部位置之间的单元行程和波纹管的行程被限制到关闭阀门所需的空间 。