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    • 6. 发明授权
    • Fuse box reducing damage caused by laser blowing and cross talk
    • 保险丝盒减少了激光吹扫和串扰造成的损坏
    • US07605444B2
    • 2009-10-20
    • US11637996
    • 2006-12-13
    • Kwang-kyu BangKun-gu LeeJeong-kyu Kim
    • Kwang-kyu BangKun-gu LeeJeong-kyu Kim
    • H01L29/00
    • H01L23/5258H01L2924/0002H01L2924/00
    • Provided are a fuse box that simultaneously prevents damage caused by laser blowing and cross talk between the fuses and a method of manufacturing the same. In a fuse box having an open region in which fuses are opened by laser blowing and a bundle region in which fuse opens do not occur, a capping layer, adjacent to the open region, having a metal layer and an insulation layer covers the outermost fuses in the bundle region, thereby reducing the influence of laser blowing of fuses in the bundle region, and preventing capacitive coupling caused by the formation of a parasitic capacitor between fuse lines and an insulation layer therebetween. Accordingly, cross talk due to the capacitive coupling can be prevented, thereby enhancing the reliability of a fuse circuit. Lower fuses can be disposed in a lower layer in the bundle region, thereby forming a two-layered fuse box.
    • 提供了一种保险丝盒,其同时防止由熔断器之间的激光吹扫和串扰造成的损坏及其制造方法。 在具有开放区域的保险丝盒中,通过激光吹制保险丝打开,并且不会发生保险丝打开的束区域,具有金属层和绝缘层的与敞开区域相邻的封盖层覆盖最外侧保险丝 在束区域中,由此减少了束区域中的熔丝的激光吹送的影响,并且防止了熔丝线之间的寄生电容器之间形成的电容耦合以及它们之间的绝缘层。 因此,可以防止由于电容耦合引起的串扰,从而提高了熔丝电路的可靠性。 下部保险丝可以设置在束区域的下层中,从而形成双层保险丝盒。
    • 8. 发明授权
    • Fuse box for semiconductor device and method of forming same
    • 用于半导体器件的保险丝盒及其形成方法
    • US07888770B2
    • 2011-02-15
    • US11764385
    • 2007-06-18
    • Kwang-kyu BangJong-hyun Choi
    • Kwang-kyu BangJong-hyun Choi
    • H01L29/00
    • H01L23/5258G11C17/18H01L2924/0002H01L2924/00
    • A fuse box for a semiconductor device is disclosed and includes a first fuse group comprising a plurality of first fuses, arranged in a first direction and having a first cutting axis, each first fuse comprising a first portion having a first fuse pitch, a second portion having a second fuse pitch smaller than the first fuse pitch, and a third portion connecting the first and second portions, a second fuse group comprising a plurality of second fuses, arranged in the first direction and having a second cutting axis, each second fuse comprising a first portion having a first fuse pitch, a second portion having a second fuse pitch smaller than the first fuse pitch, and a third portion connecting the first portion and the second portion, and a third fuse group comprising a plurality of third fuses, wherein each third fuse has either the first cutting axis or the second cutting axis, comprises a first pattern arranged in the first direction and having a first fuse pitch, and a second pattern arranged in a second direction and having a second fuse pitch smaller than the first fuse pitch, and is arranged to bypass the first fuse or the second fuse.
    • 公开了一种用于半导体器件的保险丝盒,并且包括:第一熔丝组,包括沿第一方向布置并具有第一切割轴的多个第一熔丝,每个第一熔丝包括具有第一熔丝间距的第一部分,第二部分 具有小于所述第一熔丝间距的第二熔丝节距和连接所述第一部分和所述第二部分的第三部分,包括沿所述第一方向布置并具有第二切割轴的多个第二熔丝的第二熔丝组,每个第二熔丝包括 具有第一熔丝间距的第一部分,具有小于第一熔丝间距的第二熔丝间距的第二部分和连接第一部分和第二部分的第三部分,以及包括多个第三熔丝的第三熔丝组,其中 每个第三保险丝具有第一切割轴或第二切割轴,包括沿第一方向布置并具有第一保险丝间距的第一图案,以及第二图案 rn布置在第二方向上并且具有小于第一熔丝间距的第二熔丝间距,并且被布置成绕过第一熔丝或第二熔丝。