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    • 1. 发明授权
    • Flow control device
    • 流量控制装置
    • US06170512B2
    • 2001-01-09
    • US09431938
    • 1999-11-01
    • Kuei-Hsi LaiKuo-Feng HuangMing-Che YangHung-Lung Mar
    • Kuei-Hsi LaiKuo-Feng HuangMing-Che YangHung-Lung Mar
    • G05D706
    • G05D7/0676Y10T137/3127Y10T137/7759
    • A supply apparatus comprises a storage tank, a chemical flow pipe to route a chemical solution into a semiconductor processing room, a pressurizing apparatus to supply gas to the storage tank to make the chemical solution flow into the processing room, and an electro-Pneumatic regulator valve to adjust the pressure of the input gas. The flow control device comprises a flow sensor, a set-up apparatus, and a processor for generating a control signal to the pressurizing apparatus depending on a difference between a target value and a measurement value to adjust the flow of the chemical solution in the chemical flow pipe. The flow sensor comprises a hollow cylinder, a choking magnetic core movably positioned inside the hollow cylinder, and a first and second conductive coil wrapped around the outer wall of the hollow cylinder which uses alternating current to generate a magnetic flux and sense a change in the magnetic flux to measure the flow of chemical solution.
    • 供给装置包括储存箱,将化学溶液输送到半导体处理室的化学流动管,将储存罐供给气体以使化学溶液流入处理室的加压装置,以及电动气动调节器 阀门调节输入气体的压力。 流量控制装置包括流量传感器,设置装置和处理器,用于根据目标值和测量值之间的差异向加压装置产生控制信号,以调整化学溶液在化学品中的流动 流量管。 流量传感器包括中空圆筒,可移动地定位在中空圆柱体内的阻塞磁芯,以及缠绕在中空圆柱体的外壁上的第一和第二导电线圈,其使用交流电产生磁通量并感测中空圆柱体的变化 磁通量测量化学溶液的流量。
    • 2. 发明授权
    • Dispensing system of a coater
    • 涂布机分配系统
    • US6099646A
    • 2000-08-08
    • US185404
    • 1998-11-03
    • Ming-Che YangKuo-Feng HuangEn-Tien TanKuei-Hsi Lai
    • Ming-Che YangKuo-Feng HuangEn-Tien TanKuei-Hsi Lai
    • B05C11/08B05C11/10B05C11/00
    • B05C11/08B05C11/1002
    • A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.
    • 提供用于旋转涂布机中的分配系统以将溶剂输送到晶片。 分配系统包括开关阀,回吸阀,电磁阀,回吸阀的速度控制单元和开关阀的速度控制单元。 开关阀控制溶剂分配状态。 吸回阀从开关阀接收溶剂并将溶剂输出到晶片。 电磁阀控制开关阀和回吸阀。 开关阀的速度控制单元连接在开关阀和电磁阀之间,用于控制开关阀上的动作速度。 回抽阀的速度控制单元联接在开关阀和回吸阀之间,用于通过足够的延迟动作来控制回抽阀的动作速度。
    • 5. 发明授权
    • Dispense system of a photoresist coating machine
    • 光刻胶涂布机分配系统
    • US6062442A
    • 2000-05-16
    • US185778
    • 1998-11-03
    • Ming-Che YangKuo-Feng HuangEric LiuEn-Tien Tan
    • Ming-Che YangKuo-Feng HuangEric LiuEn-Tien Tan
    • B65D5/72
    • H01L21/67017H01L21/6715
    • A photoresist dispensing system used in a photoresist coating machine includes a pump, a sucking-back valve, a solenoid valve, a first pump speed controller, a second pump speed controller and a sucking-back speed controller. The pump is used to transport photoresist and spray a substrate. The sucking-back valve is used to suck back liquid photoresist from a transporting duct end. The solenoid is used to activate or inactivate the pump and the sucking-back valve. The first and the second pump speed controllers are separately coupled between the pump and the solenoid valve, and the sucking-back speed controller is coupled between the sucking-back valve and the sucking-back speed controller is coupled between the sucking-back valve and the route, where is between the pump and the second pump speed controller. Hence, the sucking-back valve produces a sucking force after the pump is inactivated and releases a sucking force after pump is activated.
    • 在光致抗蚀剂涂布机中使用的光致抗蚀剂分配系统包括泵,回吸阀,电磁阀,第一泵速控制器,第二泵速控制器和回吸速度控制器。 泵用于输送光致抗蚀剂并喷涂基材。 吸回阀用于从输送管道端部吸回液态光致抗蚀剂。 螺线管用于启动或停用泵和吸回阀。 第一和第二泵速控制器分别耦合在泵和电磁阀之间,并且吸回速度控制器耦合在吸回阀和吸回速度控制器之间,该回吸速度控制器耦合在吸回阀和 该路径在泵和第二泵速度控制器之间。 因此,在泵被激活之后,吸回阀产生吸力并在泵被激活之后释放吸力。
    • 7. 发明授权
    • Device and control structure of multi-level pulse width modulation
    • 多级脉宽调制的器件与控制结构
    • US06927715B2
    • 2005-08-09
    • US09750819
    • 2000-12-28
    • Sheng-Tsai ChangMing-Che YangYou-Jan LinKun-Ying Lo
    • Sheng-Tsai ChangMing-Che YangYou-Jan LinKun-Ying Lo
    • H03M1/82H03M3/00
    • H03M1/822
    • A multi-level pulse width modulation (MPWM) digital-to-analog converter for receiving a n-bit pulse code modulation (PCM) signal and then outputting a m-level analog signal is provided. The MPWM DAC comprises a converter circuit, 2m first output drivers, 2m second output drivers and a control circuit. The converter circuit is used for converting (n-m) most significant bits (MSB) of the n-bit PWM signal into a PWM waveform, and then generating a first input signal and a second input signal. Each of the 2m first output drivers is used for receiving the first input signal, and then generating a first output current, wherein the first output currents of the 2m first output drivers can be equal or not. Each of the 2m second output drivers is used for receiving the second input signal, and then generating a second output current, wherein the second output currents of the 2m first output drivers can be equal or not. The control circuit is coupled to the converter circuit, 2m first output drivers, and 2m second output drivers, for controlling the on-off status of each of the first and the second output drivers.
    • 提供了用于接收n位脉码调制(PCM)信号,然后输出m电平模拟信号的多电平脉宽调制(MPWM)数/模变换器。 MPWM DAC包括转换器电路,第二输出驱动器,第二输出驱动器和控制电路。 转换器电路用于将n位PWM信号的(n-m)最高有效位(MSB)转换为PWM波形,然后产生第一输入信号和第二输入信号。 两个第一输出驱动器中的每一个用于接收第一输入信号,然后产生第一输出电流,其中第二输出驱动器的第一输出电流 司机可以平等与否。 两个第二输出驱动器中的每一个用于接收第二输入信号,然后产生第二输出电流,其中第二输出电流的第二输出电流 司机可以平等与否。 控制电路耦合到转换器电路,第二输出驱动器和第二输出驱动器,用于控制第一和第二输出驱动器的开/关状态, 第二个输出驱动。
    • 8. 发明授权
    • Method for building a timbre sample databank for a waveform table
    • 为波形表构建音色样本数据库的方法
    • US6020550A
    • 2000-02-01
    • US313234
    • 1999-05-17
    • Ming-Che Yang
    • Ming-Che Yang
    • G10H7/02G10H7/00
    • G10H7/02G10H2250/035G10H2250/235
    • An improved method for forming a timbre sample (Q sample) is described. A first Q sample is extracted. A fixed length of the first Q sample is extracted to form a first QL. A portion of the first Q sample other than the first QL is treated as a first pre-waveform. A last portion of the first pre-waveform is extracted and is processed with the second Q sample by a first COS modulation so as to obtain a second QL, which is connected to the first pre-waveform to form a second Q sample. A first period waveform of the second QL and a last portion of the first pre-waveform are processed by a second COS modulation to form a single period QL. Repeating the single period QL forms a third QL. Connecting the third QL to the first pre-waveform forms a third Q sample. The second QL is transformed by a digital Fourier transformation, and its high frequency modes are removed. The transformed second QL is inversely transformed back by an inverse digital Fourier transformation to form a fourth QL. Adding the third QL and the fourth QL forms a fifth WL sample, which power is properly normalized. A second pre-waveform is obtained by repeating the sixth QL. The first and second of pre-waveforms are processed by a linear cross fading algorithm to form a third pre-waveform. The third pre-waveform and the sixth QL are connected together to obtain an improved Q sample.
    • 描述了用于形成音色样本(Q样本)的改进方法。 提取第一个Q样本。 提取第一Q样本的固定长度以形成第一QL。 除了第一QL之外的第一Q样本的一部分被视为第一预波形。 提取第一预波形的最后部分,并通过第一COS调制与第二Q采样进行处理,以获得连接到第一预波形以形成第二Q采样的第二QL。 通过第二COS调制来处理第二QL的第一周期波形和第一预波形的最后部分以形成单周期QL。 重复单期QL形成第三个QL。 将第三个QL连接到第一个预波形成第三个Q样本。 通过数字傅里叶变换来转换第二个QL,并且去除其高频模式。 变换的第二QL通过逆数字傅里叶变换逆向变换形成第四个QL。 添加第三个QL和第四个QL形成第五个WL样本,其功率被适当地归一化。 通过重复第六个QL获得第二个预先波形。 第一和第二预波形由线性交叉衰落算法处理以形成第三预波形。 第三预波形和第六QL连接在一起以获得改进的Q样本。