会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Dispensing system of a coater
    • 涂布机分配系统
    • US6099646A
    • 2000-08-08
    • US185404
    • 1998-11-03
    • Ming-Che YangKuo-Feng HuangEn-Tien TanKuei-Hsi Lai
    • Ming-Che YangKuo-Feng HuangEn-Tien TanKuei-Hsi Lai
    • B05C11/08B05C11/10B05C11/00
    • B05C11/08B05C11/1002
    • A dispensing system used in a spin coater is provided to transport a solvent to a wafer. The dispensing, system includes a switch valve, a sucking-back valve, a solenoid valve, a speed control unit of the sucking-back valve, and a speed control unit of the switch valve. The switch valve controls a solvent dispensing status. The sucking-back valve receives the solvent from the switch valve and exports the solvent to a wafer. The solenoid valve controls the switch valve and the sucking-back valve. The speed control unit of the switch valve is coupled between the switch valve and the solenoid valve and is used for a control of action speed on the switch valve. The speed control unit of the sucking-back valve is coupled between the switch valve and the sucking-back valve, and is used for a control of action speed of the sucking-back valve by a sufficient delay time of action.
    • 提供用于旋转涂布机中的分配系统以将溶剂输送到晶片。 分配系统包括开关阀,回吸阀,电磁阀,回吸阀的速度控制单元和开关阀的速度控制单元。 开关阀控制溶剂分配状态。 吸回阀从开关阀接收溶剂并将溶剂输出到晶片。 电磁阀控制开关阀和回吸阀。 开关阀的速度控制单元连接在开关阀和电磁阀之间,用于控制开关阀上的动作速度。 回抽阀的速度控制单元联接在开关阀和回吸阀之间,用于通过足够的延迟动作来控制回抽阀的动作速度。
    • 3. 发明授权
    • Dispense system of a photoresist coating machine
    • 光刻胶涂布机分配系统
    • US6062442A
    • 2000-05-16
    • US185778
    • 1998-11-03
    • Ming-Che YangKuo-Feng HuangEric LiuEn-Tien Tan
    • Ming-Che YangKuo-Feng HuangEric LiuEn-Tien Tan
    • B65D5/72
    • H01L21/67017H01L21/6715
    • A photoresist dispensing system used in a photoresist coating machine includes a pump, a sucking-back valve, a solenoid valve, a first pump speed controller, a second pump speed controller and a sucking-back speed controller. The pump is used to transport photoresist and spray a substrate. The sucking-back valve is used to suck back liquid photoresist from a transporting duct end. The solenoid is used to activate or inactivate the pump and the sucking-back valve. The first and the second pump speed controllers are separately coupled between the pump and the solenoid valve, and the sucking-back speed controller is coupled between the sucking-back valve and the sucking-back speed controller is coupled between the sucking-back valve and the route, where is between the pump and the second pump speed controller. Hence, the sucking-back valve produces a sucking force after the pump is inactivated and releases a sucking force after pump is activated.
    • 在光致抗蚀剂涂布机中使用的光致抗蚀剂分配系统包括泵,回吸阀,电磁阀,第一泵速控制器,第二泵速控制器和回吸速度控制器。 泵用于输送光致抗蚀剂并喷涂基材。 吸回阀用于从输送管道端部吸回液态光致抗蚀剂。 螺线管用于启动或停用泵和吸回阀。 第一和第二泵速控制器分别耦合在泵和电磁阀之间,并且吸回速度控制器耦合在吸回阀和吸回速度控制器之间,该回吸速度控制器耦合在吸回阀和 该路径在泵和第二泵速度控制器之间。 因此,在泵被激活之后,吸回阀产生吸力并在泵被激活之后释放吸力。
    • 4. 发明授权
    • Stepper vacuum chuck wiper
    • 步进真空吸盘刮水器
    • US5740580A
    • 1998-04-21
    • US757679
    • 1996-11-29
    • Chung-Chien LeuHsi-Huang LeeEn-Tien Tan
    • Chung-Chien LeuHsi-Huang LeeEn-Tien Tan
    • B08B1/00G03F7/20H01L21/027H01L21/683A47L25/00
    • G03F7/707B08B1/00G03F7/70866H01L21/6833
    • The present invention discloses a stepper vacuum chuck wiper for cleaning a stepper vacuum chuck, which includes a rod frame, a bearing device, a flare type soft shield, a wiping stick and an illuminating device. The rod frame has a through hole at one end and the bearing device is sleeved inside of the through hole. The flare type soft shield with a flare opening on its lower end is sleeved inside the bearing device, and the diameter of the flare opening is larger than the outside diameter of the bearing device. The wiping stick is sleeved inside the flare type soft shield. The illuminating device for illuminating the stepper vacuum chuck includes a light source, a battery set and a switch. The battery set is coupled to the other end of the rod frame to provide electricity to the light source, and the switch is coupled between the battery set and the light source to control the illumination of the light source, wherein the light source and the switch are disposed on the rod frame.
    • 本发明公开了一种用于清洁步进真空吸盘的步进真空吸盘刮水器,其包括杆架,轴承装置,火炬式软护罩,擦拭棒和照明装置。 杆架在一端具有通孔,轴承装置套在通孔的内部。 在其下端具有喇叭口的喇叭型软护罩套在轴承装置的内部,喇叭口的直径大于轴承装置的外径。 擦拭棒套在Flare型软屏内。 用于照射步进真空吸盘的照明装置包括光源,电池组和开关。 电池组联接到杆框架的另一端以向光源提供电力,并且开关耦合在电池组和光源之间以控制光源的照明,其中光源和开关 设置在杆框架上。