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    • 1. 发明授权
    • Scanning electron microscope
    • 扫描电子显微镜
    • US06894277B2
    • 2005-05-17
    • US10615531
    • 2003-07-08
    • Hirotami KoikeKouji Kimura
    • Hirotami KoikeKouji Kimura
    • G01B15/00G01Q30/02H01J37/141H01J37/153H01J37/20H01J37/28H01L21/66
    • H01J37/28H01J2237/0492H01J2237/04922
    • A scanning electron microscope in the present invention includes an electron source 1 to radiate an electron beam, an objective lens system 9 to focus the radiated electron beam on a sample 10, scanning systems 5, 8 to scan the focused electron beam on the sample, secondary electron detection systems 3,4 to detect secondary electrons emitted from the sample 10, and a secondary electron image displaying system 13 to display a secondary electron image of the sample 10 with a secondary electron detection signal from the secondary electron detection system.The objective lens 9 is composed of first and second objective lenses 11, 12. The first objective lens 11 is mainly excited when using in a wide visual field mode and the second objective lens 12 is mainly excited when using in a high resolution mode.
    • 本发明的扫描电子显微镜包括:放射电子束的电子源1,将辐射电子束聚焦在样品10上的物镜系统9,扫描系统5,8扫描样品上的聚焦电子束, 用于检测从样品10发射的二次电子的二次电子检测系统3,4;以及二次电子图像显示系统13,用二次电子检测系统的二次电子检测信号显示样品10的二次电子图像。 物镜9由第一和第二物镜11,12组成。 当在宽视场模式下使用时,第一物镜11主要被激发,并且当以高分辨率模式使用时主要激发第二物镜12。
    • 3. 发明授权
    • Scanning electron microscope
    • US06642520B2
    • 2003-11-04
    • US10209718
    • 2002-08-01
    • Kouji KimuraHirotami Koike
    • Kouji KimuraHirotami Koike
    • H01J3726
    • H01J37/244H01J37/28
    • A scanning electron microscope comprises: an electron beam source, an electron beam acceleration device for accelerating primary electrons generated by the electron beam source, a deflector 5 for scanning and deflecting the accelerated primary electrons, a magnetic-electrostatic compound objective lens 2, 3 for focusing the scanned and deflected primary electrons onto a specimen 4 mounted on a specimen support, a reflection electron detector 10 for detecting reflection electrons generated from the specimen due to focusing and irradiating the primary electrons onto the specimen 4, a secondary electron detector 20 for detecting secondary electrons generated from the specimen due to focusing and irradiating the primary electrons onto the specimen 4, and an image display device for displaying a specimen image from detection signals from each detector 10, 20. Moreover, there is provided an aperture 17 around an axis for passing an electron beam and secondary electrons around the axis through the reflection electron detector 10. This gives a: scanning electron microscope device which can separate and detect on an electron beam axis, reflection electrons and secondary electrons from a specimen, with a device of a simple construction.
    • 5. 发明授权
    • System, apparatus, and method for executing a query including boolean and conditional expressions
    • 用于执行包括布尔和条件表达式的查询的系统,设备和方法
    • US09213759B2
    • 2015-12-15
    • US14006233
    • 2011-06-03
    • Shinsuke HamadaYasuhiro TaharaKouji Kimura
    • Shinsuke HamadaYasuhiro TaharaKouji Kimura
    • G06F17/30
    • G06F17/30678G06F17/30483G06F17/30542G06F17/30595
    • A DBMS is configured to identify a Boolean expression and conditional expressions from a search query, and to extract for each of the identified conditional expressions the value of a record ID conforming to a conditional expression. The DBMS is configured to change a conformity result value corresponding to the extracted record ID and conditional expression to a first value signifying conformity, in Boolean expression determination information, which is information that includes a determination set having a record ID value and a plurality of conformity result values respectively corresponding to a plurality of conditional expressions, and, on the basis of the Boolean expression, to perform logical operations on the plurality of conformity result values of a determination set, for each determination set in the Boolean expression determination information.
    • DBMS配置为从搜索查询中识别布尔表达式和条件表达式,并为每个识别的条件表达式提取符合条件表达式的记录ID的值。 DBMS被配置为在布尔表达式确定信息中将与提取的记录ID和条件表达式相对应的一致性结果值更改为表示一致性的第一值,该布尔表达式确定信息是包括具有记录ID值和多个符合性的确定集合的信息 分别对应于多个条件表达式的结果值,并且基于布尔表达式,针对布尔表达式确定信息中设置的每个确定,对确定集合的多个一致性结果值执行逻辑运算。