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    • 4. 发明授权
    • Laser processing method
    • 激光加工方法
    • US08945416B2
    • 2015-02-03
    • US13389048
    • 2011-07-19
    • Hideki ShimoiKeisuke Araki
    • Hideki ShimoiKeisuke Araki
    • H01L21/02B23K26/38B23K26/40H01L21/306H01L21/48B23K26/00
    • H05K3/002B23K26/382B23K26/384B23K26/40B23K26/55B23K2101/35B23K2103/50H01L21/30604H01L21/30625H01L21/486H05K2203/107
    • A laser processing method of converging laser light into an object to be processed made of silicon so as to form a modified region and etching the object along the modified region so as to form the object with a through hole comprises an etch resist film producing step of producing an etch resist film resistant to etching on an outer surface of the object; a laser light converging step of converging the laser light at the object after the etch resist film producing step so as to form the modified region along a part corresponding to the through hole in the object and converging the laser light at the etch resist film so as to form a defect region along a part corresponding to the through hole in the etch resist film; and an etching step of etching the object after the laser light converging step so as to advance the etching selectively along the modified region and form the through hole.
    • 一种激光加工方法,其将激光会聚到由硅制成的待加工物体中以形成改质区域,并沿着改质区域蚀刻物体以形成具有通孔的物体,其包括:抗蚀剂膜制造步骤 产生耐蚀刻物体的外表面上的蚀刻抗蚀剂膜; 在该抗蚀剂膜制造工序之后,将激光会聚在被处理物体上的激光聚光步骤,沿着与物体的贯通孔对应的部分形成改质区域,并将激光会聚在抗蚀剂膜上,以便 沿着与蚀刻抗蚀剂膜中的通孔对应的部分形成缺陷区域; 以及在激光聚光步骤之后蚀刻所述物体以便沿着所述改质区域选择性地进行蚀刻并形成所述通孔的蚀刻步骤。
    • 6. 发明申请
    • LASER PROCESSING METHOD
    • 激光加工方法
    • US20120135606A1
    • 2012-05-31
    • US13389048
    • 2011-07-19
    • Hideki ShimoiKeisuke Araki
    • Hideki ShimoiKeisuke Araki
    • H01L21/02
    • H05K3/002B23K26/382B23K26/384B23K26/40B23K26/55B23K2101/35B23K2103/50H01L21/30604H01L21/30625H01L21/486H05K2203/107
    • A laser processing method of converging laser light into an object to be processed made of silicon so as to form a modified region and etching the object along the modified region so as to form the object with a through hole comprises an etch resist film producing step of producing an etch resist film resistant to etching on an outer surface of the object; a laser light converging step of converging the laser light at the object after the etch resist film producing step so as to form the modified region along a part corresponding to the through hole in the object and converging the laser light at the etch resist film so as to form a defect region along a part corresponding to the through hole in the etch resist film; and an etching step of etching the object after the laser light converging step so as to advance the etching selectively along the modified region and form the through hole.
    • 一种激光加工方法,其将激光会聚到由硅制成的待加工物体中以形成改质区域,并沿着改质区域蚀刻物体以形成具有通孔的物体,其包括:抗蚀剂膜制造步骤 产生耐蚀刻物体的外表面上的蚀刻抗蚀剂膜; 在该抗蚀剂膜制造工序之后,将激光会聚在被处理物体上的激光聚光步骤,沿着与物体的贯通孔对应的部分形成改质区域,并将激光会聚在抗蚀剂膜上,以便 沿着与蚀刻抗蚀剂膜中的通孔对应的部分形成缺陷区域; 以及在激光聚光步骤之后蚀刻所述物体以便沿着所述改质区域选择性地进行蚀刻并形成所述通孔的蚀刻步骤。
    • 7. 发明授权
    • Small-sized variable magnification optical system
    • 小型可变放大光学系统
    • US5999311A
    • 1999-12-07
    • US828835
    • 1997-03-24
    • Norihiro NanbaKeisuke Araki
    • Norihiro NanbaKeisuke Araki
    • G02B15/16G02B27/00G02B23/06
    • G02B15/16
    • A variable magnification optical system comprises at least three optical units which are a first moving optical unit, a fixed optical unit and a second moving optical unit. The three optical units are arranged in that order in a propagation direction of light, and a variation of magnification is effected by a relative movement between the first moving optical unit and the second moving optical unit. If a ray which exits from an object and enters the variable magnification optical system, and passes through a center of a stop of the variable magnification optical system and reaches a center of a final image plane is represented as a reference axis ray, the second moving optical unit has a cross-sectional shape which is asymmetrical in a plane which contains the reference axis, and a curved reflecting surface which is inclined with respect to the reference axis, and the direction of the entering reference axis and the direction of the exiting reference axis of the second moving optical unit are parallel to each other and differ from each other by 180.degree., the variable magnification optical system being arranged in such a manner that a final image is formed after an intermediate image is formed at least twice.
    • 可变放大率光学系统包括至少三个光学单元,它们是第一移动光学单元,固定光学单元和第二移动光学单元。 三个光学单元按照光的传播方向依次布置,并且通过第一移动光学单元和第二移动光学单元之间的相对移动来实现放大变化。 如果从物体出来并进入可变放大光学系统并且通过可变放大光学系统的停止的中心并到达最终图像平面的中心的光线被表示为参考轴线,则第二移动 光学单元具有在包含参考轴的平面中不对称的横截面形状,以及相对于参考轴倾斜的弯曲反射表面,以及输入参考轴的方向和出射基准的方向 第二移动光学单元的轴线彼此平行并且彼此相差180°,可变倍率光学系统被布置成使得在中间图像形成至少两次之后形成最终图像。
    • 10. 发明授权
    • Laser processing method
    • 激光加工方法
    • US08961806B2
    • 2015-02-24
    • US13388597
    • 2011-07-19
    • Hideki ShimoiHiroyuki KyushimaKeisuke Araki
    • Hideki ShimoiHiroyuki KyushimaKeisuke Araki
    • B44C1/22H01L21/306B23K26/00B23K26/06B23K26/08
    • H01L23/147B23K26/0006B23K26/0622B23K26/0853B23K26/53B23K2101/40B23K2103/56H01L21/30608H01L21/486H01L21/76898H01L23/49827
    • In a method comprising a modified region forming step of converging a laser light at a sheet-like object to be processed made of silicon so as to form a plurality of modified spots within the object along a modified region forming line tilted in a first lateral direction with respect to a thickness direction of the object and the plurality of modified spots construct a modified region, and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the object with a space extending obliquely with respect to the thickness direction, the modified region forming step forms the plurality of modified spots such that the modified spots adjacent to each other at least partly overlap each other when seen in the first lateral direction.
    • 在包括修改区域形成步骤的方法中,所述修改区域形成步骤将激光会聚在由硅制成的待加工的片状物体上,以沿着沿第一横向方向倾斜的改质区域形成线在物体内形成多个改质点 相对于物体的厚度方向,并且所述多个改质点构成改质区域,以及在所述改质区域形成工序之后对所述物体进行各向异性蚀刻的蚀刻工序,以沿着所述改质区域选择性地进行蚀刻,并形成所述物体 具有相对于厚度方向倾斜延伸的空间,所述改质区域形成步骤形成所述多个改质点,使得当在所述第一横向方向上观察时,彼此相邻的所述改性斑点彼此至少部分重叠。