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    • 10. 发明申请
    • METHOD AND APPARATUS FOR FORMING PATTERNS IN COATINGS ON OPPOSITE SIDES OF A TRANSPARENT SUBSTRATE
    • 在透明基板的相对面上形成涂层的方法和装置
    • US20150370374A1
    • 2015-12-24
    • US14762586
    • 2014-01-09
    • M-SOLV LIMITED
    • Yuk Kwan CHAN
    • G06F3/044B23K26/402H05K3/02B23K26/70H05K1/02B23K26/362B23K26/40
    • G06F3/044B23K26/0619B23K26/18B23K26/36B23K26/361B23K26/362B23K26/40B23K26/402B23K26/57B23K26/702B23K2101/35B41M5/24B41M5/26H05K1/0274H05K1/0296H05K3/027H05K2201/0108
    • A method of forming patterns in coatings on opposite sides of a transparent substrate by direct write laser patterning comprising the steps: a) providing a first transparent coating on a first side of the substrate, the first coating being formed of a material having a relatively high laser ablation threshold energy density; b) mounting the substrate on a stage or locating the substrate on a chuck, c) using a first laser beam to form a first pattern in the first transparent coating by laser ablation; d) providing a second transparent coating on the second side of the substrate after formation of said first pattern, the second coating being formed of a material having a relatively low laser ablation or modification threshold energy density; using a second laser beam to form a second pattern in the second transparent coating by laser ablation or modification, the energy density of the second laser beam being lower than that of the first laser beam such that ablation of the second transparent coating is carried out without causing appreciable damage to the first transparent coating. Apparatus arranged to carry out this method and a product formed by the method are also described.
    • 一种通过直接写入激光图案形成在透明基板的相对侧上的涂层中的图案的方法,包括以下步骤:a)在所述基板的第一侧上提供第一透明涂层,所述第一涂层由具有相对高的材料形成 激光烧蚀阈值能量密度; b)将基板安装在平台上或将基板定位在卡盘上,c)使用第一激光束通过激光烧蚀在第一透明涂层中形成第一图案; d)在形成所述第一图案之后,在所述基板的第二侧上提供第二透明涂层,所述第二涂层由具有相对低的激​​光烧蚀或修改阈值能量密度的材料形成; 使用第二激光束通过激光烧蚀或修改在第二透明涂层中形成第二图案,第二激光束的能量密度低于第一激光束的能量密度,使得第二透明涂层的消融在没有 对第一透明涂层造成明显的损害。 还描述了用于实施该方法的装置和由该方法形成的产品。