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    • 9. 发明授权
    • Fluid control device
    • 流体控制装置
    • US6116283A
    • 2000-09-12
    • US349246
    • 1999-07-08
    • Michio YamajiToshiro NariaiHiroshi Morokoshi
    • Michio YamajiToshiro NariaiHiroshi Morokoshi
    • G05D7/00F15B1/00G05D7/06F16K11/10
    • G05D7/0635
    • A fluid control device comprises a massflow controller having an inlet channel and an outlet channel, an inlet-side lower block coupling having a channel upwardly opened and communicating with the inlet channel of the massflow controller, an inlet-side connecting member adjacent to the inlet-side lower block coupling and having a channel opened upward, an inlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the inlet-side lower block coupling in communication with the channel of the inlet-side connecting member, an outlet-side lower block coupling having a channel upwardly opened and communicating with the outlet channel of the massflow controller, an outlet-side connecting member adjacent to the outlet-side lower block coupling and having a channel opened upward, and an outlet-side upper block coupling having an inverted V-shaped channel for holding the channel of the outlet-side lower block coupling in communication with the channel of the outlet-side connecting member.
    • 流体控制装置包括具有入口通道和出口通道的质量流量控制器,具有向上打开并与质量流量控制器的入口通道连通的通道的入口侧下部块联接件,与入口相邻的入口侧连接构件 下方的下部联接器,并且具有向上敞开的通道,具有倒V形通道的入口侧上部块联接件,用于保持入口侧下部块联接件的通道与入口侧连接构件的通道连通 具有向上开口并与质量流量控制器的出口通道连通的出口侧下块联接器,与出口侧下块联接件相邻并且具有向上敞开的通道的出口侧连接构件, 侧上部块联接器具有倒置的V形通道,用于保持出口侧下部块联接器的通道与ou的通道连通 小口侧连接件。