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1. 发明授权

US06553042B2 Laser apparatus for generating vacuum ultraviolet narrow-band laser beams 有权
标题翻译：用于产生真空紫外窄带激光束的激光装置
公开(公告)号：US06553042B2
公开(公告)日：2003-04-22
申请号：US09727510
申请日：2000-12-04
申请人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
发明人： Koji Shio , Toru Suzuki , Osamu Wakabayashi
IPC分类号： H01S310
CPC分类号： H01S3/13 , H01S3/1305 , H01S3/131 , H01S3/137 , H01S3/139 , H01S3/2258
摘要： In a laser apparatus, a central wavelength of vacuum ultraviolet laser beams whose bandwidth is narrowed can be maintained at a target wavelength in high precision. This laser apparatus includes a laser oscillator for generating a vacuum ultraviolet laser beam whose bandwidth is narrowed and a reference beam having a spectral distribution of a vacuum ultraviolet band to output both the vacuum ultraviolet laser beam and the reference beam; a wavelength meter for measuring a central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed by using at least one emission light contained in the reference beam as a reference; and a controller for controlling the laser oscillator based upon the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed, which is measured by the wavelength meter, so as to thereby adjust the central wavelength of the vacuum ultraviolet laser beam whose bandwidth is narrowed to a target wavelength. As a result, this laser apparatus can output the vacuum ultraviolet laser beams whose bandwidth is narrowed and whose central wavelength is maintained at the target wavelength in high precision.
摘要翻译：在激光装置中，能够将带宽变窄的真空紫外线激光束的中心波长高精度地维持在目标波长。该激光装置包括用于产生带宽变窄的真空紫外激光束的激光振荡器和具有真空紫外线带的光谱分布的参考光束，以输出真空紫外激光束和参考光束; 用于通过使用包含在参考光束中的至少一个发射光作为参考来测量其带宽变窄的真空紫外激光束的中心波长的波长计; 以及控制器，用于基于由波长计测量的带宽变窄的真空紫外激光束的中心波长来控制激光振荡器，从而调节带宽变窄的真空紫外激光束的中心波长到目标波长。结果，该激光装置可以高精度地输出带宽变窄，中心波长保持在目标波长的真空紫外激光束。

2. 发明授权

US06539037B1 Laser apparatus 有权
标题翻译：激光设备
公开(公告)号：US06539037B1
公开(公告)日：2003-03-25
申请号：US09630366
申请日：2000-08-01
申请人： Koji Shio , Osamu Wakabayashi , Toru Suzuki
发明人： Koji Shio , Osamu Wakabayashi , Toru Suzuki
IPC分类号： H01S313
CPC分类号： H01S3/1304
摘要： A laser apparatus has a function to easily select a component having a wavelength near to an oscillated wavelength of a laser beam from among components of a reference beam having a spectral distribution, which is already known, as a reference in measurement of the oscillated wavelength of the laser beam. The laser apparatus has a laser oscillator for outputting a laser beam, a reference light source for outputting a reference beam having a spectral distribution which is already known, two spectrum separation units having different resolving power, a detecting device for detecting a part of the laser beam and a part of the reference beam separated by the two spectrum separation units, and a control unit for measuring an oscillated wavelength of the detected laser beam by using as a reference a component selected from among components of the detected reference beam and having a wavelength near to the oscillated wavelength of the detected laser beam. According to the laser apparatus, the component having the wavelength near to the oscillated wavelength of the laser beam can be easily selected from among the components of the reference beam as a reference in measurement of the wavelength of the laser beam.
摘要翻译：激光装置具有以下功能：从具有频谱分布的参考光束的分量中可以容易地选择波长接近于激光束的振荡波长的分量，已知的光谱分布作为测量波长的振荡波长的参考激光束。激光装置具有用于输出激光束的激光振荡器，用于输出具有已知的光谱分布的参考光的参考光源，具有不同分辨能力的两个光谱分离单元，用于检测激光的一部分的检测装置光束和由两个光谱分离单元分离的参考光束的一部分，以及控制单元，用于通过使用从检测到的参考光束的分量中选择的具有波长的分量作为参考来测量检测到的激光束的振荡波长接近检测到的激光束的振荡波长。根据激光装置，在激光束的波长的测量中，可以从参考光束的分量中容易地选择具有接近激光束的振荡波长的波长的分量作为参考。

3. 发明授权

US08804780B2 Method for adjusting spectral line width of narrow-band laser 有权
标题翻译：调整窄带激光光谱线宽度的方法
公开(公告)号：US08804780B2
公开(公告)日：2014-08-12
申请号：US11822126
申请日：2007-07-02
申请人： Osamu Wakabayashi , Takahito Kumazaki , Toru Suzuki , Masashi Shinbori , Masaya Yoshino
发明人： Osamu Wakabayashi , Takahito Kumazaki , Toru Suzuki , Masashi Shinbori , Masaya Yoshino
IPC分类号： H01S3/13 , H01S3/137
CPC分类号： G03F7/2006 , H01S3/08036 , H01S3/106 , H01S3/137 , H01S3/139 , H01S3/225
摘要： An upper limit and a lower limit are preliminarily set for a spectral line width common to a plurality of narrow-band laser devices. When delivered or subjected to maintenance, the narrow-band laser device is caused to laser oscillate to detect its spectral line width before it is used as a light source for semiconductor exposure. A spectral line width adjustment unit provided in the narrow-band laser device is adjusted so that the spectral line width assumes a value between the upper limit and the lower limit. The present invention is able to suppress the variation in spectral line width such as E95 bandwidth caused by machine differences during the manufacture of the laser device, or by replacement or maintenance of the laser device, whereby the quality of integrated circuit patterns formed by the semiconductor exposure tool can be stabilized.
摘要翻译：对于多个窄带激光装置共有的谱线宽度，预先设定上限和下限。当交付或进行维护时，使窄带激光装置激光振荡，以便在用作半导体曝光的光源之前检测其光谱线宽度。调整设置在窄带激光装置中的谱线宽度调节单元，使得谱线宽度呈现上限和下限之间的值。本发明能够抑制激光装置的制造时的机器差异引起的E95带宽等的频谱线宽度的变化，或者通过更换或维护激光装置，能够抑制由半导体形成的集成电路图案的质量曝光工具可以稳定。

4. 发明授权

US06583874B1 Spectrometer with holographic and echelle gratings 有权
标题翻译：光谱仪具有全息和梯形光栅
公开(公告)号：US06583874B1
公开(公告)日：2003-06-24
申请号：US09680932
申请日：2000-10-10
申请人： Toru Suzuki , Osamu Wakabayashi
发明人： Toru Suzuki , Osamu Wakabayashi
IPC分类号： G01J328
CPC分类号： G01J3/1809 , G01J3/14 , G01J3/1838
摘要： A spectrometer has higher resolving power without enlarging a size of the apparatus. This spectrometer has a slit board, a mirror, a collimator lens, a holographic grating, an Echelle grating, a magnifier lens and a line sensor. The holographic grating is arranged to diffract parallel light incident from the collimator lens toward the Echelle grating. The Echelle grating is arranged to reflect the parallel light incident from the holographic grating toward the holographic grating.
摘要翻译：光谱仪具有更高的分辨能力，而不增加设备的尺寸。该光谱仪具有狭缝板，反射镜，准直透镜，全息光栅，Echelle光栅，放大镜和行传感器。全息光栅布置成将从准直透镜入射的平行光衍射到Echelle光栅。 Echelle光栅布置成将从全息光栅入射的平行光反射到全息光栅。

5. 发明授权

US06243163B1 Wavelength detector 有权
标题翻译：波长检测器
公开(公告)号：US06243163B1
公开(公告)日：2001-06-05
申请号：US09398191
申请日：1999-09-17
申请人： Osamu Wakabayashi , Tatsuo Enami , Shinji Nagai , Toru Suzuki , Takeshi Ohta , Hirokazu Kubo
发明人： Osamu Wakabayashi , Tatsuo Enami , Shinji Nagai , Toru Suzuki , Takeshi Ohta , Hirokazu Kubo
IPC分类号： G01J328
CPC分类号： G01J9/00 , G01J3/28
摘要： The present invention can accurately detect a wavelength of a light to be detected, which is output from a source of light to be detected, without an error even if there is a change in the characteristic of a spectroscope due to an individual difference among the spectroscopes or a change in the measuring environment. The device according to the invention emits at least two reference lights (Ln, La) having different wavelengths (&lgr;n, &lgr;a) as the reference lights by reference light source. And, actual characteristic value (D) of spectroscope is calculated on the basis of detection positions (Sn, Sa) of the at least two reference lights (Ln, La) on a sensor and the known wavelengths (&lgr;n, &lgr;a) of the at least two reference lights (Ln, La) (D=(&lgr;a−&lgr;n)/(Sa−Sn)). And, on the basis of the detection positions (Sn, SO) of the reference light (Ln) and the light to be detected (LO) on the sensor (10), the calculated actual characteristic value (D) of the spectroscope and the known wavelength (&lgr;n) of the reference light (Ln), wavelength (&lgr;O) of the light to be detected (LO) is calculated (&lgr;O=&lgr;n+(SO−Sn)·D).
摘要翻译：即使由于各分光器之间的个体差异而导致的分光器的特性发生变化，本发明也能够准确地检测从被检测光源输出的被检测光的波长或测量环境的变化。根据本发明的装置通过参考光源发射具有不同波长（lambdn，λ））的至少两个参考光（Ln，La）作为参考光。并且，基于传感器上的至少两个参考光（Ln，La）的检测位置（Sn，Sa）以及在传感器上的已知波长（lambdn，λ）来计算分光计的实际特征值（D）至少两个参考光（Ln，La）（D =（λ-lambdn）/（Sa-Sn）））。并且，基于传感器（10）上的基准光（Ln）和被检测光（LO）的检测位置（Sn，SO），计算出的分光器的实际特性值（D）和计算参考光（Ln）的已知波长（lambdn），待检测光（LO）的波长（lambd0）（lambdO = lambdn +（SO-Sn）.D）。

6. 发明授权

US06456361B1 Method and instrument for measuring vacuum ultraviolet light beam, method of producing device and optical exposure apparatus 失效
标题翻译：真空紫外光束测量方法和仪器，制造方法和光学曝光设备
公开(公告)号：US06456361B1
公开(公告)日：2002-09-24
申请号：US09808049
申请日：2001-03-15
申请人： Toru Suzuki , Osamu Wakabayashi
发明人： Toru Suzuki , Osamu Wakabayashi
IPC分类号： G03B2742
CPC分类号： G03F7/70025 , G03F7/70558 , G03F7/70575 , G03F7/70933
摘要： A method and instrument for measuring a vacuum ultraviolet light beam in which a position of an optical unit used for measuring a vacuum ultraviolet light beam can be adjusted easily and measurement of the vacuum ultraviolet light beam is carried out quickly. This method includes a first step of passing a ArSHG laser beam through an achromatic lens system; a second step of adjusting a position of the achromatic lens system such that the ArSHG laser beam which passed through the achromatic lens system is focused on a CCD sensor; a third step of purging the inside of a purge box by using nitrogen gas; and a fourth step of focusing an F2 laser beam which passed through the achromatic lens system on the CCD sensor so as to measure the F2 laser beam.
摘要翻译：一种用于测量真空紫外光束的方法和仪器，其中可以容易地调节用于测量真空紫外光束的光学单元的位置，并且快速地进行真空紫外光束的测量。该方法包括使ArSHG激光束通过消色差透镜系统的第一步骤; 调整无彩色透镜系统的位置的第二步骤，使得穿过无彩色透镜系统的ArSHG激光束聚焦在CCD传感器上; 通过使用氮气吹扫净化箱内部的第三步骤; 以及将通过无彩色透镜系统的F2激光束聚焦在CCD传感器上以测量F2激光束的第四步骤。

7. 发明授权

US08611393B2 Laser apparatus 有权
标题翻译：激光设备
公开(公告)号：US08611393B2
公开(公告)日：2013-12-17
申请号：US13421116
申请日：2012-03-15
申请人： Junichi Fujimoto , Takahito Kumazaki , Toru Suzuki , Satoshi Tanaka , Osamu Wakabayashi
发明人： Junichi Fujimoto , Takahito Kumazaki , Toru Suzuki , Satoshi Tanaka , Osamu Wakabayashi
IPC分类号： H01S3/08
CPC分类号： H01S3/106 , H01S3/005 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0971 , H01S3/2316 , H01S3/2333
摘要： This disclosure is directed to widen an adjustable range of the spectral linewidth of laser light output from a laser apparatus. This laser apparatus may include: (1) an excitation source configured to excite a laser medium in a laser gain space, (2) an optical resonator including an output coupler arranged on one side of an optical path through the laser gain space and a wavelength dispersion element arranged on the other side of the optical path through the laser gain space, and (3) a switching mechanism configured to switch a beam-width magnification or reduction factor by placing or removing at least one beam-width change optical system for expanding or reducing a beam width in or from an optical path between the laser gain space and the wavelength dispersion element or by inverting orientation of the at least one beam-width change optical system in the optical path.
摘要翻译：本公开旨在扩大从激光设备输出的激光的谱线宽度的可调范围。该激光装置可以包括：（1）激励源，被配置为在激光增益空间中激发激光介质，（2）光学谐振器，包括布置在通过激光增益空间的光路的一侧上的输出耦合器，以及波长通过激光增益空间布置在光路的另一侧的色散元件，以及（3）配置为通过放置或去除至少一个用于扩展的光束宽度改变光学系统来切换光束宽度放大率或缩小因子的切换机构或者减小激光增益空间和波长色散元件之间的光路中的光束宽度，或者通过使光路中的至少一个光束宽度改变光学系统的取向反转。

8. 发明申请

US20080181262A1 Method for adjusting spectral line width of narrow-band laser 有权
标题翻译：调整窄带激光光谱线宽度的方法
公开(公告)号：US20080181262A1
公开(公告)日：2008-07-31
申请号：US11822126
申请日：2007-07-02
申请人： Osamu Wakabayashi , Takahito Kumazaki , Toru Suzuki , Masashi Shinbori , Masaya Yoshino
发明人： Osamu Wakabayashi , Takahito Kumazaki , Toru Suzuki , Masashi Shinbori , Masaya Yoshino
IPC分类号： H01S3/10
CPC分类号： G03F7/2006 , H01S3/08036 , H01S3/106 , H01S3/137 , H01S3/139 , H01S3/225
摘要： An upper limit and a lower limit are preliminarily set for a spectral line width common to a plurality of narrow-band laser devices. When delivered or subjected to maintenance, the narrow-band laser device is caused to laser oscillate to detect its spectral line width before it is used as a light source for semiconductor exposure. A spectral line width adjustment unit provided in the narrow-band laser device is adjusted so that the spectral line width assumes a value between the upper limit and the lower limit. The present invention is able to suppress the variation in spectral line width such as E95 bandwidth caused by machine differences during the manufacture of the laser device, or by replacement or maintenance of the laser device, whereby the quality of integrated circuit patterns formed by the semiconductor exposure tool can be stabilized.
摘要翻译：对于多个窄带激光装置共有的谱线宽度，预先设定上限和下限。当交付或进行维护时，使窄带激光装置激光振荡，以便在用作半导体曝光的光源之前检测其光谱线宽度。调整设置在窄带激光装置中的谱线宽度调节单元，使得谱线宽度呈现上限和下限之间的值。本发明能够抑制激光装置的制造时的机器差异引起的E95带宽等的频谱线宽度的变化，或者通过更换或维护激光装置，能够抑制由半导体形成的集成电路图案的质量曝光工具可以稳定。

9. 发明授权

US06573989B2 Spectrometer 有权
标题翻译：光谱仪
公开(公告)号：US06573989B2
公开(公告)日：2003-06-03
申请号：US09801001
申请日：2001-03-08
申请人： Toru Suzuki , Osamu Wakabayashi
发明人： Toru Suzuki , Osamu Wakabayashi
IPC分类号： G01J328
CPC分类号： G01J3/1809 , G01J3/1838 , G01J3/22
摘要： A spectrometer measures a spectrum of a light beam supplied from a light source so as to obtain fine information and coarse information of the spectrum easily. This spectrometer has a holographic grating, an Echelle grating, a rotation stage and a line sensor. In the case where a single pass beam is to be detected, a control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;1. On the other hand, in the case where a double pass beam is to be detected, the control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;2.
摘要翻译：光谱仪测量从光源提供的光束的光谱，以便容易地获得光谱的精细信息和粗略信息。该光谱仪具有全息光栅，Echelle光栅，旋转台和线传感器。在要检测单程光束的情况下，控制处理单元控制旋转阶段，以使Echelle光栅从Littrow布置旋转预定角度δ1。另一方面，在要检测双通光束的情况下，控制处理单元控制旋转台，以便将梯形光栅从Littrow布置旋转预定角度δ2。

10. 发明授权

US09647415B2 Laser apparatus and method of controlling laser apparatus 有权
公开(公告)号：US09647415B2
公开(公告)日：2017-05-09
申请号：US14602208
申请日：2015-01-21
申请人： Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
发明人： Hiroaki Tsushima , Osamu Wakabayashi , Takashi Matsunaga
IPC分类号： H01S3/10 , H01S3/00 , H01S3/097 , H01S3/08 , H01S3/0971 , H01S3/23
CPC分类号： H01S3/09702 , H01S3/0014 , H01S3/08009 , H01S3/09705 , H01S3/0971 , H01S3/2366
摘要： A laser apparatus according to embodiment may include: a laser chamber filled with a laser gain medium; a pair of electrodes disposed in the laser chamber; a charger configured to apply a charge voltage for causing a discharge to occur between the pair of the electrodes; a pulse power module configured to covert the charge voltage applied by the charger into a short pulsed voltage, and apply the short pulsed voltage between the pair of the electrodes; and a controller configured to calculate input energies Ein applied to the pair of the electrodes based on the charge voltage, calculate an integration value Einsum of the input energies Ein by integrating the calculated input energies Ein, and determine whether the integration value Einsum exceeds an integration lifetime value Einsumlife of input energy or not.

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