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    • 3. 发明授权
    • Crystal pulling methods and apparatus
    • 水晶拉法及仪器
    • US5879448A
    • 1999-03-09
    • US883046
    • 1997-06-26
    • Masahiko UranoYasushi NakamuraSeiichiro OtsukaEiichi Iino
    • Masahiko UranoYasushi NakamuraSeiichiro OtsukaEiichi Iino
    • C30B15/00C30B15/20C30B15/22C30B15/30C30B15/32
    • C30B15/30C30B15/22Y10T117/1032Y10T117/1072
    • A method and an apparatus for pulling a single crystal are disclosed. A first neck portion, a convex portion, and a second neck portion are formed in this order under a seed crystal held by a seed chuck, and subsequent to the second neck portion, a single crystal having a diameter-expanding portion and a straight cylindrical portion is formed. Lifting holders are brought around and in proximity to the second neck portion when the second neck portion rises to a predetermined position during the pulling by the seed chuck. The single crystal and the lifting holders are moved relative to each other in the vertical direction to thereby bring the convex portion into contact with the lifting holders in a resting manner, so that part of a load borne by the seed chuck is shifted to the lifting holders. Subsequently, the pulling operation is performed by the lifting holders. Accordingly, a single crystal having a larger weight can be pulled safely while maintaining high quality.
    • 公开了一种拉制单晶的方法和装置。 第一颈部,凸部和第二颈部依次由种子卡盘保持的晶种形成,在第二颈部之后,形成具有直径扩大部和直圆筒状的单晶 形成部分。 当通过种子卡盘拉动时,当第二颈部部分上升到预定位置时,提升架被带到第二颈部的附近并且靠近第二颈部部分。 单晶和提升架在垂直方向上彼此相对移动,从而使凸部以静止的方式与升降保持器接触,使得由种子卡盘承载的负载的一部分转移到提升 持有人 随后,拉升操作由提升保持器进行。 因此,可以在保持高质量的同时安全地拉出重量更大的单晶。