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1. 发明授权

US6031198A Plasma processing method and apparatus 失效
标题翻译：等离子体处理方法和装置
公开(公告)号：US6031198A
公开(公告)日：2000-02-29
申请号：US80922
申请日：1998-05-19
申请人： Koichiro Moriyama , Yukito Aota , Masahiro Kanai , Hirokazu Otoshi
发明人： Koichiro Moriyama , Yukito Aota , Masahiro Kanai , Hirokazu Otoshi
IPC分类号： H05H1/46 , C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , B23K9/00
CPC分类号： H01J37/32165 , H01J37/32935 , H01J37/3299
摘要： A plasma processing method for processing a substrate includes a discharge beginning step of supplying a second high-frequency power into a processing chamber through an impedance matching circuit and then supplying a first high-frequency power larger than a power used in processing into the processing chamber to generate a plasma. An adjustment step of reducing the first high-frequency power to be close to the value used in processing, increasing the second high-frequency power to be close to the value in processing, and then adjusting the first high-frequency power to obtain a plasma strength of a predetermined value is part of the method. The plasma processing step of causing the impedance matching circuit to perform a matching operation and simultaneously adjusting the first high-frequency power to obtain a plasma strength of a desired value in processing is also part of the method. Plasma discharge can be automatically, smoothly begun with high reproducibility, and stable plasma discharge can be maintained. Even in the case of disappearance of discharge, plasma discharge can be quickly restarted.
摘要翻译：用于处理衬底的等离子体处理方法包括：放电开始步骤，通过阻抗匹配电路将第二高频电力提供到处理室，然后将大于处理中使用的功率的第一高频功率提供给处理室以产生等离子体。将第一高频功率降低到接近于处理中使用的值的调整步骤，将第二高频功率提高到接近处理值，然后调整第一高频功率以获得等离子体预定值的强度是该方法的一部分。等离子体处理步骤是使阻抗匹配电路执行匹配操作并且同时调节第一高频功率以获得处理中期望值的等离子体强度。等离子体放电可以以高再现性自动平稳地开始，并且可以保持稳定的等离子体放电。即使在放电消失的情况下，可以快速重新开始等离子体放电。

2. 发明授权

US06273955B1 Film forming apparatus 失效
标题翻译：成膜装置
公开(公告)号：US06273955B1
公开(公告)日：2001-08-14
申请号：US08704138
申请日：1996-08-28
申请人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
发明人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/545 , C23C16/24 , C23C16/4401 , C23C16/511 , H01L31/202 , H01L31/204 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A film forming apparatus for forming a plurality of films on a substrate through a continuous process, comprising a plurality of vacuum chambers in communication to each other via connection, at least vacuum chamber having internally a treatment detachable from the vacuum chamber for fulfilling a predetermined treatment on the substrate.
摘要翻译：一种用于通过连续工艺在基板上形成多个膜的成膜装置，包括通过连接彼此连通的多个真空室，至少具有可从真空室中分离的处理的真空室，用于实现预定处理在基板上。

3. 发明授权

US06338872B1 Film forming method 有权
标题翻译：成膜方法
公开(公告)号：US06338872B1
公开(公告)日：2002-01-15
申请号：US09337557
申请日：1999-06-22
申请人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
发明人： Takehito Yoshino , Hiroshi Echizen , Masahiro Kanai , Hirokazu Otoshi , Atsushi Yasuno , Kohei Yoshida , Koichiro Moriyama , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/545 , C23C16/24 , C23C16/4401 , C23C16/511 , H01L31/202 , H01L31/204 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A film forming method is described using an apparatus with a plurality of vacuum chambers which communicate with each other via a connection, where the apparatus has one or more detachable treatment rooms and where the method includes continuously forming a plurality of films on a band-shaped substrate within the treatment rooms, while continuously moving the substrate through the treatment rooms. The treatment rooms within said desired vacuum chambers are replaced after forming the film for a predetermined period as a part of the film forming method.
摘要翻译：使用具有多个真空室的设备来描述成膜方法，所述多个真空室经由连接彼此连通，其中所述设备具有一个或多个可拆卸的处理室，并且其中所述方法包括在带状上连续形成多个膜处理室内的基材，同时将基材连续移动通过治疗室。作为成膜方法的一部分，在形成膜预定时间之后，在所述真空室内的处理室被更换。

4. 发明授权

US5030476A Process and apparatus for the formation of a functional deposited film on a cylindrical substrate by means of microwave plasma chemical vapor deposition 失效
标题翻译：通过微波等离子体化学气相沉积在圆柱形基底上形成功能沉积膜的方法和装置
公开(公告)号：US5030476A
公开(公告)日：1991-07-09
申请号：US526536
申请日：1990-05-21
申请人： Ryuji Okamura , Hirokazu Otoshi , Tetsuya Takei
发明人： Ryuji Okamura , Hirokazu Otoshi , Tetsuya Takei
IPC分类号： C23C16/50 , C23C16/46 , C23C16/511
CPC分类号： C23C16/511 , C23C16/46
摘要： A process for forming a functional deposited film which is adapted for use in an apparatus which comprises a substantially enclosed reaction chamber, a plurality of cylindrical substrates arranged to surround a discharge space and a microwave introduction means provided at least at one end of each cylindrical substrate and wherein microwave energy is introduced so that a glow discharge plasma containing reactant gases derived from starting gases is formed in the discharge space thereby forming a deposited film on each cylindrical substrate is described. The process is characterized in that a temperature control means is provided in the inside of each of said plurality of cylindrical substrates and simultaneous with the introduction of a thermally conductive gas, the thermally conductive gas is exhausted from the one end of each cylindrical substrate in the vicinity of the microwave introduction means. The process enables the deposited film of good quality to be formed stably at high speed and the deposited film is useful as an element member for semiconductive devices, photosensitive devices for electrophotography, photovoltaic devices, other electronic elements and optical elements.
摘要翻译：一种用于形成功能性沉积膜的方法，其适用于包括基本封闭的反应室的设备，布置成围绕放电空间的多个圆柱形基板和设置在每个圆柱形基板的至少一端的微波引入装置并且其中引入微波能量，使得在放电空间中形成含有源自起始气体的反应气体的辉光放电等离子体，从而在每个圆柱形基板上形成沉积膜。该方法的特征在于，在所述多个圆柱形基板的每一个的内部设置有温度控制装置，并且与引入导热气体同时，导热气体从每个圆柱形基板的一端排出微波引入装置附近。该方法能够以高速稳定地形成高质量的沉积膜，并且沉积膜可用作半导体器件的元件部件，电子照相用光敏器件，光电器件，其它电子元件和光学元件。

5. 发明授权

US5358811A Electrophotographic method using an amorphous silicon light receiving member with a latent image support layer and a developed image support layer and insulating toner having a volume average particle size of 4.5 to 9.0 micron 失效
标题翻译：使用具有潜像载体层和显影图像载体层的非晶硅光接收元件和体积平均粒度为4.5至9.0微米的绝缘调色剂的电子照相方法
公开(公告)号：US5358811A
公开(公告)日：1994-10-25
申请号：US53822
申请日：1993-04-29
申请人： Koji Yamazaki , Toshimitsu Kariya , Tatsuyuki Aoike , Toshiyuki Ehara , Takehito Yoshino , Hirokazu Otoshi
发明人： Koji Yamazaki , Toshimitsu Kariya , Tatsuyuki Aoike , Toshiyuki Ehara , Takehito Yoshino , Hirokazu Otoshi
IPC分类号： G03G5/082 , G03G9/08 , G03G13/08 , G03G13/01
CPC分类号： G03G13/08 , G03G5/08235 , G03G9/0819 , G03G9/0821
摘要： An electrophotographic image-forming and developing method using as light receiving member an amorphous silicon light receiving member which comprises a substrate and a light receiving layer disposed on said substrate, said light receiving layer comprising a first layer capable of exhibiting a photoconductivity, a second layer capable of supporting a latent image and a third layer capable of supporting a developed image being laminated in this order on said substrate, said first layer being formed of an amorphous material containing silicon atoms as a matrix, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, said second layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms, atoms of an element belonging to Group III of the Periodic Table, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, and said third layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms; and using as said toner a fine particle insulating toner having a volume average particle size in the range of 4.5 to 9 um and an apparent viscosity at 100.degree. C. in the range of 1.times.10.sup.4 to 2.times.10.sup.5 poise.
摘要翻译：一种电子照相图像形成和显影方法，其使用非晶硅光接收元件作为光接收元件，所述非晶硅光接收元件包括基板和设置在所述基板上的光接收层，所述光接收层包括能够呈现光电导性的第一层，第二层能够支撑潜像和能够支持在所述基板上依次层叠的显影图像的第三层，所述第一层由含有硅原子作为基体的非晶质材料形成，以及至少一种选自由氢原子和卤素原子组成的组，所述第二层由含有硅原子作为基体的非晶态材料形成，碳原子，属于周期表第III族的元素的原子，以及选出的至少一种原子由氢原子和卤素原子组成的组，所述第三层由无定形配体形成含有硅原子作为基体的碳原子和选自氢原子和卤素原子的至少一种原子; 并且使用体积平均粒度在4.5至9μm的细颗粒绝缘调色剂和在100℃下的表观粘度在1×10 4至2×105泊的范围内作为所述调色剂。

6. 发明授权

US06660094B2 Apparatus and method for forming deposited film 失效
标题翻译：用于形成沉积膜的装置和方法
公开(公告)号：US06660094B2
公开(公告)日：2003-12-09
申请号：US09867493
申请日：2001-05-31
申请人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
发明人： Hirokazu Otoshi , Hiroshi Izawa , Masatoshi Tanaka
IPC分类号： C23C1600
CPC分类号： C23C16/45561 , C23C16/455 , C23C16/545 , G03B9/02
摘要： A deposited film forming apparatus comprises: a chamber capable of maintaining an interior thereof under vacuum; a source gas supply piping for supplying a source gas into the chamber; an evacuation system piping for evacuating the interior of the chamber; a gas supply piping for use in opening to atmosphere, for supplying a gas for returning a pressure within the chamber to atmospheric pressure, wherein a plurality of shut-off valves are provided in series between a gas source of the gas for returning the pressure within the chamber to atmospheric pressure and the chamber, and a pressure gauge and/or evacuating means are provided between the plurality of shut-off valves.
摘要翻译：沉积膜形成装置包括：能够将其内部保持在真空下的室; 用于将源气体供应到所述室中的源气体供应管道; 用于排空室内部的抽空系统管道; 用于向大气开放的气体供应管道，用于供应用于将所述室内的压力返回到大气压力的气体，其中多个截止阀串联设置在所述气体的气体源之间，用于使所述气体中的压力返回所述室与大气压力和所述室，以及在所述多个截止阀之间设置压力计和/或排气装置。

7. 发明授权

US5360484A Microwave plasma CVD apparatus provided with a microwave transmissive window made of specific ceramics for the formation of a functional deposited film 失效
标题翻译：微波等离子体CVD装置设置有由特定陶瓷制成的微波透射窗，用于形成功能沉积膜
公开(公告)号：US5360484A
公开(公告)日：1994-11-01
申请号：US63048
申请日：1993-05-19
申请人： Yasuyoshi Takai , Tetsuya Takei , Hirokazu Otoshi , Ryuji Okamura
发明人： Yasuyoshi Takai , Tetsuya Takei , Hirokazu Otoshi , Ryuji Okamura
IPC分类号： C23C16/50 , C23C16/511 , G03G5/08 , H01J37/32 , H01L21/205
CPC分类号： C23C16/511 , H01J37/32238 , H01J37/32467
摘要： An improved microwave plasma CVD apparatus for forming a functional deposited film which is provided with a microwave transmissive window composed of a sintered alpha-alumina ceramics body containing alpha-alumina as a matrix comprised of fine particles with a mean particle size d satisfying the equation 0.5 .mu.m.ltoreq.d.ltoreq.50 .mu.m and with a ratio of .rho..sub.2 /.rho..sub.1 between the theoretical density .rho..sub.1 and the bulk density .rho..sub.2 satisfying the equation 0.800.ltoreq..rho..sub.2 /.rho..sub.1 .ltoreq.0.995.
摘要翻译：一种用于形成功能性沉积膜的改进的微波等离子体CVD装置，其具有由α-氧化铝烧结体构成的微波透射窗，所述烧结体包含α-氧化铝作为基质，其平均粒径d满足式在理论密度rho 1和体积密度rho 2之间的rho 2 / rho 1的比值满足方程式0.800

8. 发明授权

US5597623A Process for using microwave plasma CVD 失效
标题翻译：使用微波等离子体CVD的方法
公开(公告)号：US5597623A
公开(公告)日：1997-01-28
申请号：US307099
申请日：1994-09-16
申请人： Yasuyoshi Takai , Tetsuya Takei , Hirokazu Otoshi , Ryuji Okamura
发明人： Yasuyoshi Takai , Tetsuya Takei , Hirokazu Otoshi , Ryuji Okamura
IPC分类号： C23C16/50 , C23C16/511 , G03G5/08 , H01J37/32 , H01L21/205 , H05H1/30
CPC分类号： C23C16/511 , H01J37/32238 , H01J37/32467
摘要： An improved microwave plasma CVD process for forming a functional deposited film using a microwave transmissive window composed of a sintered alpha-alumina ceramics body containing alpha-alumina as a matrix comprised of fine particles with a mean particle size d satisfying the equation 0.5 .mu.m.ltoreq.d.ltoreq.50 .mu.m and with a ratio of .rho..sub.2 /.rho..sub.1 between the theoretical density .rho..sub.1 and the bulk density .rho..sub.2 satisfying the equation 0.800.ltoreq..rho..sub.2 /.rho..sub.1 .ltoreq.0.995.
摘要翻译：一种改进的微波等离子体CVD法，用于使用由包含α-氧化铝的烧结α-氧化铝陶瓷体构成的微波透射窗形成功能性沉积膜，该α-氧化铝作为基质，其平均粒径d满足0.5μm / = d

9. 发明授权

US5439715A Process and apparatus for microwave plasma chemical vapor deposition 失效
标题翻译：微波等离子体化学气相沉积的工艺和装置
公开(公告)号：US5439715A
公开(公告)日：1995-08-08
申请号：US165868
申请日：1993-12-14
申请人： Ryuji Okamura , Hirokazu Otoshi , Tetsuya Takei
发明人： Ryuji Okamura , Hirokazu Otoshi , Tetsuya Takei
IPC分类号： C23C16/50 , C23C16/46 , C23C16/511 , B05D3/06
CPC分类号： C23C16/511 , C23C16/46
摘要： A process for forming a functional deposited film which is adapted for use in an apparatus which comprises a substantially enclosed reaction chamber, a plurality of cylindrical substrates arranged to surround a discharge space and a microwave introduction means provided at least at one end of each cylindrical substrate and wherein microwave energy is introduced so that a glow discharge plasma containing reactant gases derived from starting gases is formed in the discharge space thereby forming a deposited film on each cylindrical substrate is described. The process is characterized in that a temperature control means is provided in the inside of each of said plurality of cylindrical substrates and simultaneous with the introduction of a thermally conductive gas, the thermally conductive gas is exhausted from the one end of each cylindrical substrate in the vicinity of the microwave introduction means. The process enables the deposited film of good quality to be formed stably at high speed and the deposited film is useful as an element member for semiconductive devices, photosensitive devices for electrophotography, photovoltaic devices, other electronic elements and optical elements.
摘要翻译：一种用于形成功能性沉积膜的方法，其适用于包括基本封闭的反应室的设备，布置成围绕放电空间的多个圆柱形基板和设置在每个圆柱形基板的至少一端的微波引入装置并且其中引入微波能量，使得在放电空间中形成含有源自起始气体的反应气体的辉光放电等离子体，从而在每个圆柱形基板上形成沉积膜。该方法的特征在于，在所述多个圆柱形基板的每一个的内部设置有温度控制装置，并且与引入导热气体同时，导热气体从每个圆柱形基板的一端排出微波引入装置附近。该方法能够以高速稳定地形成高质量的沉积膜，并且沉积膜可用作半导体器件的元件部件，电子照相用光敏器件，光电器件，其它电子元件和光学元件。

10. 发明授权

US5087542A Electrophotographic image-forming method wherein an amorphous silicon light receiving member with a latent image support layer and a developed image support layer and fine particle insulating toner are used 失效
标题翻译：使用具有最小影像支持层和发展中的图像支持层和细颗粒绝缘墨粉的非晶硅光接收器的电子成像方法
公开(公告)号：US5087542A
公开(公告)日：1992-02-11
申请号：US455227
申请日：1989-12-21
申请人： Koji Yamazaki , Toshimitsu Kariya , Tatsuyuki Aoike , Toshiyuki Ehara , Takehito Yoshino , Hirokazu Otoshi
发明人： Koji Yamazaki , Toshimitsu Kariya , Tatsuyuki Aoike , Toshiyuki Ehara , Takehito Yoshino , Hirokazu Otoshi
IPC分类号： G03G5/082 , G03G9/08 , G03G21/20
CPC分类号： G03G5/08235 , G03G21/206 , G03G9/0819
摘要： In an electrophotographic image-forming method to be practiced in an electrophotographic image-forming system including a halogen lamp light source, an optical system, a cylindrical photosensitive member, a main corona charger, an electrostatic latent image-forming mechanism, a development mechanism containing magnetic toner, a transfer sheet feeding mechanism, a transfer charger, a separating charger, a transfer sheet conveying mechanism, a cleaning mechanism and a charge-removing light source which is capable of adjusting an image-forming process speed, the improvement comprises: using an amorphous silicon light receiving member which comprises a substrate and a light receiving layer disposed on said substrate, said light receiving layer comprising a first layer capable of exhibiting a photoconductivity, a second layer capable of supporting a latent image and a third layer capable of supporting a developed image being laminated in this order on said substrate, said first layer being formed of an amorphous material containing silicon atoms as a matrix, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, said second layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms, atoms of an element belonging to Group III of the Periodic Table, and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms, and said third layer being formed of an amorphous material containing silicon atoms as a matrix, carbon atoms and at least one kind of atoms selected from the group consisting of hydrogen atoms and halogen atoms; and using a fine particle insulating toner having a volume average particle size in the range of 4.5 to 9 .mu.m.
摘要翻译：在包括卤素灯光源，光学系统，圆柱形感光部件，主电晕充电器，静电潜像形成机构的电子照相图像形成系统中实施的电子照相成像方法中，包含磁性调色剂，转印纸供给机构，转印充电器，分离充电器，转印纸传送机构，清洁机构和能够调整图像形成处理速度的电荷去除光源，其改进包括：使用一种非晶硅光接收元件，包括基片和设置在所述基底上的光接收层，所述光接收层包括能够呈现光电导性的第一层，能够支持潜像的第二层和能够支撑潜像的第三层显影图像依次层叠在所述基板上，所述第一层为由含有硅原子作为基质的非晶质材料和选自氢原子和卤素原子的至少一种原子形成，所述第二层由含有硅原子作为基体的无定形材料形成，碳原子，属于周期表第III族元素的原子和选自氢原子和卤素原子的至少一种原子，所述第三层由含有硅原子作为基体的无定形材料形成，碳原子和选自氢原子和卤素原子的至少一种原子; 并使用体积平均粒径在4.5〜9μm的微粒绝缘调色剂。

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