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    • 10. 发明授权
    • Heat treatment furnace and heat treatment apparatus
    • 热处理炉和热处理设备
    • US08957352B2
    • 2015-02-17
    • US13533291
    • 2012-06-26
    • Makoto Kobayashi
    • Makoto Kobayashi
    • H05B3/06H01L21/67F27D5/00
    • H01L21/67103H01L21/67109
    • Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member. The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered.
    • 本发明提供一种热处理炉,其包括配置成容纳至少一个待处理物体的处理容器,构造成覆盖处理容器周围的绝热构件和构造成沿着内周面 的绝热构件。 绝热构件包括内绝热构件和独立于内绝热构件形成的外绝热构件。 外绝热构件包含细粉状压缩二氧化硅材料,并且至少其外表面覆盖有防止粉碎的压缩二氧化硅材料分散的抗散射构件。