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    • 3. 发明申请
    • Susceptor and vapor growth device
    • 受体和蒸气生长装置
    • US20060180086A1
    • 2006-08-17
    • US10552438
    • 2004-03-12
    • Koichi KanayaToru OtsukaIgroki Ose
    • Koichi KanayaToru OtsukaIgroki Ose
    • H01L21/306C23C16/00
    • H01L21/68735C23C16/4584C30B25/12
    • A susceptor (2) in which a semiconductor substrate (W) is supported approximately horizontally in a pocket (2c) when performing a vapor phase growth of a single crystal thin film on a front surface of the semiconductor substrate (W), and in which the pocket (2c) comprises an outer peripheral pocket portion (20) to support the semiconductor substrate (W) and a central side pocket portion (21) which is formed inside the outer peripheral side pocket portion (20) to be concave from the outer peripheral side pocket portion (20), wherein the outer peripheral side pocket portion (20) comprises a substrate supporting surface (20a) which is inclined with respect to a horizontal surface to be lowered toward a central side from an outer peripheral side of the pocket (2c), and a region of the substrate supporting surface (20a) excluding at least an inner peripheral edge supports a portion of a rear surface of the semiconductor substrate (W) which is inside an outer peripheral edge of the semiconductor substrate (W).
    • 在半导体衬底(W)的前表面上执行单晶薄膜的气相生长时,其中半导体衬底(W)大致水平地支撑在凹穴(2c)中的感受体(2) 所述袋(2c)包括用于支撑所述半导体衬底(W)的外周袋部分(20)和形成在所述外周侧袋部分(20)内的凹入的中心侧袋部分(21) 外周侧袋部(20),其中,所述外周侧袋部(20)具有基板支撑面(20a),所述基板支撑面(20a)相对于从外周侧向中心侧倾斜的水平面 (2c),并且至少不包括内周边缘的基板支撑表面(20a)的区域支撑半导体衬底(W)的位于外周的内表面的一部分 半导体衬底(W)的边缘。
    • 4. 发明申请
    • Quartz Jig and Semiconductor Manufacturing Apparatus
    • 石英夹具和半导体制造设备
    • US20080092821A1
    • 2008-04-24
    • US11660865
    • 2005-08-03
    • Toru OtsukaTakao Kanno
    • Toru OtsukaTakao Kanno
    • C23C16/00
    • H01L21/68757C23C16/4583C30B25/10C30B25/12H01L21/00H01L21/67115
    • A quartz jig of this invention is such as being provided inside a semiconductor manufacturing apparatus allowing therein growth of an epitaxial layer on a main surface of a semiconductor wafer, capable of supporting a soaking jig which keeps, during epitaxial growth, uniform temperature of a susceptor allowing thereon placement of the semiconductor wafer, and has the top surface thereof aligned almost at the same level of height with the top surface of the susceptor, and is characterized as being composed of transparent quartz at least in a portion thereof brought into contact with the soaking jig. This configuration successfully provides a quartz jig supporting the soaking jig in the semiconductor manufacturing apparatus while suppressing generation of particles, and a semiconductor manufacturing apparatus provided with this sort of quartz jig.
    • 本发明的石英夹具例如设置在半导体制造装置的内部,允许其在半导体晶片的主表面上生长外延层,能够支撑浸泡夹具,其在外延生长期间保持基座的均匀温度 允许其上放置半导体晶片,并且其顶表面几乎与基座的顶表面几乎处于相同的高度水平,并且其特征在于由透明石英组成,其至少在与其接触的部分中 浸泡夹具 这种结构成功地提供了一种支持半导体制造装置中的均热夹具的石英夹具,同时抑制颗粒的产生,以及设置有这种石英夹具的半导体制造装置。
    • 5. 发明授权
    • Sheets processing apparatus and sheets processing method
    • 片材加工设备和片材加工方法
    • US08944254B2
    • 2015-02-03
    • US13158907
    • 2011-06-13
    • Toru Otsuka
    • Toru Otsuka
    • B07C5/00G07D11/00
    • G07D11/0066B07C5/34B65H43/04G07D11/0018G07D11/0024G07D11/0051G07D11/0075G07D11/0084
    • A sheet processing apparatus including a table to be loaded a first and a second banknote group partitioned by a header card recording the bar code number in the piling direction of the banknotes, a take-in portion to take in the banknotes of the first and second banknote groups loaded on the table and the header card, a discrimination portion to count the banknotes taken in by the take-in portion and discriminate the kind thereof, a plurality of stackers to sort and stack the banknotes discriminated by the discrimination portion on the basis of the kink thereof, and a sensor to detect the header card taken in by the take-in portion. The sheet processing apparatus additionally includes a controller to control so as to stop the taking-in of the second banknote group on the basis of detection of the header card by the sensor and after a lapse of a predetermined time, to start the taking-in of the second banknote group.
    • 一种片材处理设备,包括:装载由在纸币的打桩方向上记录条形码号的头卡片分隔的第一纸币组和第二纸币组的纸张,收取第一和第二纸币的纸币的收取部分 装载在桌子上的纸币组和头部卡片,识别部分,用于对通过取入部分拍摄的纸币进行计数,并辨别其种类;多个堆垛机,以基于的方式对由该鉴别部分区分的纸币进行分类和堆叠 的传感器,以及用于检测由引入部分吸收的头卡的传感器。 片材处理装置还包括控制器,用于根据传感器的头部卡的检测和经过预定时间之后,停止第二纸币组的接收,以开始接收 的第二纸币组。
    • 6. 发明授权
    • Sheets processing apparatus and sheets processing method
    • 片材加工设备和片材加工方法
    • US07980394B2
    • 2011-07-19
    • US11207718
    • 2005-08-22
    • Toru Otsuka
    • Toru Otsuka
    • B07C5/00
    • G07D11/0066B07C5/34B65H43/04G07D11/0018G07D11/0024G07D11/0051G07D11/0075G07D11/0084
    • A sheet processing apparatus including a table to be loaded a first and a second banknote group partitioned by a header card recording the bar code number in the piling direction of the banknotes, a take-in portion to take in the banknotes of the first and second banknote groups loaded on the table and the header card, a discrimination portion to count the banknotes taken in by the take-in portion and discriminate the kind thereof, a plurality of stackers to sort and stack the banknotes discriminated by the discrimination portion on the basis of the kink thereof, and a sensor to detect the header card taken in by the take-in portion. The sheet processing apparatus additionally includes a controller to control so as to stop the taking-in of the second banknote group on the basis of detection of the header card by the sensor and after a lapse of a predetermined time, to start the taking-in of the second banknote group.
    • 一种片材处理设备,包括:装载由在纸币的打桩方向上记录条形码号的头卡片分隔的第一纸币组和第二纸币组的纸张,收取第一和第二纸币的纸币的收取部分 装载在桌子上的纸币组和头部卡片,识别部分,用于对通过取入部分拍摄的纸币进行计数,并辨别其种类;多个堆垛机,以基于的方式对由该鉴别部分区分的纸币进行分类和堆叠 的传感器,以及用于检测由引入部分吸收的头卡的传感器。 片材处理装置还包括控制器,用于根据传感器的头部卡的检测和经过预定时间之后,停止第二纸币组的接收,以开始接收 的第二纸币组。
    • 7. 发明授权
    • Paper object processing device and paper object processing method
    • 纸张对象处理装置和纸张对象处理方法
    • US07218334B2
    • 2007-05-15
    • US11082249
    • 2005-03-17
    • Toru Otsuka
    • Toru Otsuka
    • B41J2/315
    • B65B27/08
    • The paper object processing device comprises a take-out roller which feeds tickets where one surface side is a heat-sensitive surface and the other surface side is a non heat-sensitive surface, a conveying path which conveys the fed ticket, a bar-code reader which reads the bar-code recorded on the heat-sensitive surface of the ticket conveyed, stacking sections which stack the tickets whose bar-codes have been read, a sealing device which seals a band on the stacked tickets which have been stacked, and a thermal head which heat-prints control information on the heat-sensitive surface of the stacked tickets which have been sealed.
    • 纸对象处理装置包括:取出辊,其馈送票据,其中一个表面侧是热敏表面,另一个表面侧是非热敏表面;输送路径,用于传送馈送票据;条形码 读取器,其读取记录在所传送的票的热敏表面上的条形码,堆叠已经读取条形码的票据的堆叠部分,密封堆叠的堆叠票据上的乐队的密封装置,以及 在已经被密封的堆叠的机票的热敏表面上热控制信息的热敏头。
    • 8. 发明授权
    • Monitor and control for media manipulation
    • 监控和控制媒体操纵
    • US06611889B1
    • 2003-08-26
    • US09651317
    • 2000-08-31
    • Toru Otsuka
    • Toru Otsuka
    • G06F1338
    • G06F3/14G08C19/00
    • The present invention relates to a monitor device for a control system having a serial-parallel converter for receiving inputs of serial signals transmitted from a unit control section via serial lines and converting them into parallel signals, a synchronization signal-receiving section for receiving inputs of predetermined signals transmitted from the unit control section via the serial lines and specifying addresses at which the parallel signals are stored, based on states of the predetermined signals, a data buffer for storing at least the parallel signals at the addresses specified by the synchronization signal-receiving section, and a CPU for providing control such that predetermined displays are provided on a CRT based on the stored signals.
    • 本发明涉及一种用于控制系统的监视装置,该控制系统具有一串行并行转换器,用于经由串行线路接收从单元控制部分发送的串行信号的输入并将其转换为并行信号;同步信号接收部分,用于接收 基于预定信号的状态从单元控制部分经由串行线路发送的预定信号和指定存储并行信号的地址,数据缓冲器,用于至少存储由同步信号 - 接收部分和用于提供控制的CPU,使得基于所存储的信号在CRT上提供预定的显示。
    • 9. 发明授权
    • Control system
    • 控制系统
    • US06344802B1
    • 2002-02-05
    • US09514361
    • 2000-02-28
    • Toru OtsukaTakeo HashimotoHiroshi Watanabe
    • Toru OtsukaTakeo HashimotoHiroshi Watanabe
    • H04Q300
    • G05B19/0421
    • A control system is disclosed which permits information captured by each sensor to be sent exactly to a main controller and a fall in the level of sensor signals with time to be automatically compensated for with no need to make sensor signal lines long and without reducing the sensor monitoring accuracy and limiting the number of sensors used. The levels of signals from sensors connected to each of unit controllers are compared with slice levels. The results of comparisons are converted into a serial signal and then transmitted to the main controller. Each time the sensor signal level is monitored, the optimum slice level therefor is set.
    • 公开了一种控制系统,其允许每个传感器捕获的信息精确地发送到主控制器,并且随时间自动补偿传感器信号的电平的下降,而不需要使传感器信号线长而不减少传感器 监控精度和限制使用的传感器数量。 将连接到每个单元控制器的传感器的信号电平与切片电平进行比较。 将比较结果转换为串行信号,然后传输到主控制器。 每次监测传感器信号电平时,设置最佳切片电平。