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    • 3. 发明授权
    • Plasma processing apparatus
    • 等离子体处理装置
    • US06270618B1
    • 2001-08-07
    • US09205800
    • 1998-12-04
    • Akira NakanoSung Chul KimKoichi FukudaYasuhiko KasamaTadahiro OhmiShoichi Ono
    • Akira NakanoSung Chul KimKoichi FukudaYasuhiko KasamaTadahiro OhmiShoichi Ono
    • C23F102
    • H01J37/32174C23C16/4405H01J37/32082
    • A plasma processing apparatus is provided which does not require replacement of a band eliminator according to a frequency used, which is capable of performing chamber cleaning without replacing a resonance circuit, and which is capable of performing plasma cleaning of the inside of the chamber without using a bellows. The plasma processing apparatus includes a resonance circuit (band eliminator) for causing series resonance with a microwave circuit formed of at least a susceptor electrode and a processing chamber in order to trap plasma between a plasma excitation electrode and the susceptor electrode when the surface of a workpiece placed on the susceptor electrode is processed by plasma generated between the plasma excitation electrode and the susceptor electrode, which are provided inside the processing chamber; and for causing parallel resonance with the microwave circuit in order to diffuse plasma inside the processing chamber when performing plasma cleaning.
    • 提供一种等离子体处理装置,其不需要根据所使用的频率来更换带除器,其能够执行腔室清洁而不更换谐振电路,并且能够在不使用腔室内进行等离子体清洁室内 一个波纹管。 等离子体处理装置包括用于与由至少一个基座电极和一个处理室形成的微波电路进行串联谐振的谐振电路(去波器),以便在等离子体激发电极和基座电极之间捕获等离子体时 放置在基座电极上的工件通过设置在处理室内部的等离子体激发电极和基座电极之间产生的等离子体进行处理; 并且用于与微波电路并联谐振,以便在进行等离子体清洗时在等离子体清洗中扩散处理室内的等离子体。
    • 8. 发明授权
    • Group communication service method, mobile terminal using the same, and group communication service system thereof
    • 群组通信服务方式,使用该移动终端的移动终端及其群组通信服务系统
    • US07945272B2
    • 2011-05-17
    • US11221462
    • 2005-09-07
    • Sung Chul Kim
    • Sung Chul Kim
    • H04W24/00H04B7/00H04B1/38
    • H04W4/08H04L65/4061H04L67/18H04W4/02H04W4/023H04W8/186H04W64/00
    • A method of performing a group communication service with respect to a plurality of pushto service subscribers using mobile terminal location information is provided. The method includes acquiring location information of each of the plurality of pushto service subscribers, the location information indicating a current location of at least one of the plurality of pushto service subscribers with respect to a specific area; generating group member list information corresponding to the plurality of pushto service subscribers and including a member list in which the current location of the at least one of the plurality of pushto service subscribers is classified with respect to the specific area; and displaying the group member list information including a list of the group members within the specific area.
    • 提供了使用移动终端位置信息对多个推送服务订户执行组通信服务的方法。 所述方法包括获取所述多个推送服务订户中的每一个的位置信息,所述位置信息指示所述多个推送服务订户中的至少一个相对于特定区域的当前位置; 生成与所述多个推送服务用户对应的组成员列表信息,并且包括成员列表,其中所述多个推送服务用户中的至少一个的所述当前位置相对于所述特定区域被分类; 以及显示包括特定区域内的组成员的列表的组成员列表信息。